CMP at Tufts

Dan Apone

Issue #1

Cameras had had enough

Random dots on images

So old that to fix them would require all new internals

New cameras researched

Firewire Cameras

Evolution VF digital camera

12 bit Firewire connection to

PC Prewritten Labview

VI’s to control camera

Camera Mounting

New cams didn’t fit on old camera rig Picture taken from severe angle; only part of

image would be in focus Solution:

New mounting pointAttached to 80/20 beam, not rickety drum stand

Actual Images

Newest camera location

Wafer mount updates

Allows placement of mirror for new camera location

Good temp solution, could be more rugged

Laser info

Laser wouldn’t fire, called Big Sky Laser for help

Our thermal sensor was busted

Ordered new piece Thanks to Scott’s

technical skills, it was installed within a few hours

Even more laser fun…

Laser still wouldn’t fire Laser wanted pulses sent at 10 Hz Pulses sent at 10 Hz, still nothing Big Sky Laser said “use serial connection” Serial worked well but we would now have to

listen for output pulse from laser

Solution: circuits

Calibrations

Leftover slides seemed sloppily assembled

Severe curvature of slides would be nice to avoid

Newest calibration?

1mm thick microscope slide props up edge of wafer

Allows for typical downforce

Slurry interacts with asperities as during polishing run

Software Updates

Labview controls it all now: laser + cameras

Programs now calculate image ratio, standard deviation, friction value, and time of laser pulses

All functions updated to Labview 7

Most recent questions… What effect is the pad having on our measurements?

Setup Concerns

Drill press getting a bit sticky Force table instead of separate downforce

and friction measurements Camera views only a dime sized portion of

the wafer…(460 pixels per cm on wafer/platen)

To Infinity…and Beyond!

Future work: Solder circuit together Change wafer mount…? Leave out Calcein…?

Questions?