C100!06!895 Laboratory Brochure

BOC Edwards is a world leader in vacuum technology, coating systems,components and instrumentation - for applications in research anddevelopment through to full scale production - particularly in the fields ofcompound semiconductor, LED, LC/MS, optical components and ophthalmics.

BOC Edwards and the stripe symbol are trade marks of The BOC Group plc.

BOC Limited 2006. All rights reserved.

Publication No: C10006895

[email protected]

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Laboratory Equipmentvacuum products, measurement and accessories

BOC Edwards is a world leader in the design, technology and manufacture

of vacuum products for laboratory applications.

From the smallest school laboratory, to international R&D projects, our

products and services are facilitating education, development and scientific

evolution across the globe.

Products you can rely on, from a company you can trust.

Laboratory Equipmentvacuum products, measurement and accessories

Application GuideAll our products at a glance for common laboratory applications

Vacuum ProductsVacuum products and accessories designed for laboratory applications

MeasurementPressure measurement and display options

HardwareVacuum components and accessories for configuring your vacuum system

Service and SupportCost-effective support and service from the experts

Reference GuidesQuick reference guides to Common Conversion Factors,

Outgassing Rates and more

Application Guide

4

ApplicationPump Type

Wet DryPage

Number

General LaboratoryGel dryers XDS D-LAB 20 / 16Rotary evaporation XDS 20Centrifugal concentration XDS RV 20 / 12Vacuum ovens XDS RV 20 / 12Vacuum filtration XDS RV 20 / 12

D-LAB 16Distillation/extraction apparatus XDS D-LAB 20 / 16

XDS 20Freeze dryers RV/EM 12 / 8Ultra high-speed centrifuges RV/EM 12 / 8Pumping oxygen/oxidants XDS RV/EM* 20 / 12 / 8Leak DetectionLeak detection XDS RV/EM 20 / 12 / 8Scientific InstrumentsElectron microscopes XDS RV/EM 20 / 12 / 8Mass spectrometers XDS RV/EM 20 / 12 / 8Inlet systems (eg., electrospray) XDS RV/EM 20 / 12 / 8Molecular beam epitaxy XDS RV/EM 20 / 12 / 8Lasers XDS RV/EM 20 / 12 / 8Surface science electron spectrophotometers XDS RV/EM 20 / 12 / 8Sulphur chemiluminescence detectors XDS RV/EM 20 / 12 / 8Particle size analysers XDS RV/EM 20 / 12 / 8High-energy physics XDS RV/EM 20 / 12 / 8Load locks XDS RV/EM 20 / 12 / 8Coating technology XDS RV/EM 20 / 12 / 8Fume hoods and glove boxes XDS RV/EM 20 / 12 / 8Backing turbomolecular pumps XDS RV/EM 20 / 12 / 8Backing diffusion pumps XDS RV/EM 20 / 12 / 8Refrigeration and air conditioning XDS RV/EM 20 / 12 / 8Display technology XDS RV/EM 20 / 12 / 8

* PFPE pump option required.

5Accessories

Optional: condenser and separatorOptional: condenser and separatorAll supplied with the pump. RV - gas ballast oil returnOptional: condenser and separator. RV - gas ballast oil returnOptional: condenser and separator

Optional: condenser and separatorAll supplied with the pumpRecommended: mist filter and gas ballast oil returnRecommended: mist filter and gas ballast oil return. Optional: FLK20K

Recommended: mist filter and FL20K. Gas ballast oil return.

Recommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter. Optional: FLK20K. XDS - None requiredRecommended: mist filter. XDS - None requiredRecommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter. Optional: FLK20K. XDS - None requiredRecommended: mist filter. XDS - None requiredRecommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter. XDS - None requiredRecommended: mist filter and FL20K. XDS - None requiredRecommended: mist filter. XDS - None requiredRecommended: mist filter. Optional: FLK20K. XDS - None requiredRecommended: mist filter. XDS - None required

BOC Edwards is a technology leader in the manufacture of vacuum pumps and systems, with products

specifically designed to meet the evolving challenges of laboratory markets. With more than thirty

years of experience in scientific applications, we have a deep understanding of the research process

and the role that vacuum plays at every step. This experience, coupled with innovative technologies

and collaborative engineering enables us to offer a broad range of pumping solutions that reduce cost

while enhancing performance.

Small Rotary Pump Range EM Range RV Range

BOC Edwards offers the RV and EM Series of small, rotary vane

pumps. Available in a range of pumping speeds and offering ultra-

low noise levels, the RV and EM Series of pumps are ideal for a

wide range of laboratory applications and environments. The RV

Series are unique in their ability to deliver high or low throughputs

with high ultimate vacuum.

Through collaboration with the major analytical instrument

manufacturers, we develop and support innovative vacuum

products that underpin the customer's entire research process.

This collaboration is what has made RV pumps, from

BOC Edwards, the industry standard for scientific primary

pumping applications for over ten years.

Dry Pump Range XDS Range D-Lab

For the scientific and R&D applications that require clean vacuum

environment, BOC Edwards offers a wide variety of general and

application-specific, completely dry vacuum pumps for the

emerging applications requiring dry pumping systems.

The XDS Series of completely dry scroll pumps provide clean

pumping with superior vacuum performance. The XDS also

overcomes the challenges often associated with other scroll pumps

such as cleanliness, high pumping at low pressures, ability to resist

contamination by condensibles, servicing and vapor handling.

Turbomolecular Pump Range EXT and pumping stations STP

BOC Edwards offers the EXT and STP Series of turbomolecular

pumps. The EXT Series offers state-of-the-art technology to

provide reliable, clean, high and ultra high vacuum. The EXT

range are also components in our convenient, configurable EXPT

cart systems that offer plug and play operation.

STP turbo pumps offer optimal performance and reliability with

over 400 cumulative man-years of technical and design experience

and a worldwide install base of more than 70,000 pumps.

Vacuum Coating Systems Auto 306 Auto 500 TF600 Scancoat Six

BOC Edwards offers a broad capability in coating technology -

from small, pre-production R&D systems to large, full-scale

production systems as well as innovative control instrumentation.

This enables us to provide you with proven solutions for the

most demanding thin film applications. Our modular approach

provides an easy upgrade route, allowing the researcher to keep

pace with new process technologies and applications as they develop.

6

Vacuum Products

7visit our website at www.bocedwards.com

EM Series Rotary Vane Pumps

Typical ApplicationsInstrumentation

Analytical instruments - GCMS

Analytical instruments - LCMS

Automotive

Beam lines and high-energy physics

Centrifuges, ultra high-speed

Coating

Cryogenics

Degassing/curing - oil, epoxy resin

Distillation/extraction/filtration

Freeze drying

Furnaces

Gas bottle filling/emptying

Glove boxes, ovens

Laboratory bench top vacuum

General

Lasers, gas recovery and recirculation

Leak detectors, Helium

Load locks and transfer chambers

Refrigeration manufacture

Research and development

Rotary, centrifugal evaporators

Scanning electron microscopes - SEM

SEM/FIB (lon beam repair)

Solvent recovery

Surface science instruments

Turbomolecular backing pumps

TV manufacturing/light bulb manufacture

The EM range of oil-sealed rotary pumps -

renowned for their high ultimate volume, rapid

pumping speed, quiet operation and ability to

handle vapor - have become the industry standard

for laboratory applications. All pumps in the EM

range are independently approved to UL and CSA

standards and backed by BOC Edwards worldwide

service and support.

Reliable operation

Compact and quiet

Easy to operate

All pumps externally approved to EN61010 and UL61010 standards

Integral IEC 60320 connector

Gas ballast valve for large water vapour handling capacity

Full range of accessories available including a great value Mist Filter option

E2M1

8

E2M1

.5/E2

M0.7

E1M1

8

E2M2

8

8

Ordering DetailsDescription Order Number*

E2M0.7 E2M0.7 Pump 1ph, 200 to 230V 50/60Hz A37141919

E2M0.7 Pump 1ph, 100/200V 50/60Hz A37141902

E2M1.5 E2M1.5 Pump 1ph, 200 to 230V 50/60Hz A37132919

E2M1.5 Pump 1ph, 100 to 115V 50/60Hz A37132902

fitted with N.A. cable A37122902P

E1M18 E1M18 Pump 1ph, 115V, 200to 230V 50/60Hz A34317984

E1M18 Pump 1ph, 100/200V 50/60Hz A34315094

E1M18 Pump 3ph, 200-220/380-415V 50Hz

200-230/460V 60Hz A34310940

E2M18 E2M18 Pump 1ph, 115V, 200 to 230V 50/60Hz A36317984

E2M18 Pump 1ph, 100/200V 50/60Hz A36315904

E2M18 3ph, 200-220/380-415V 50Hz

200-230/460V 60Hz A36310940

E2M28 E2M28 Pump 1ph, 115V, 200 to 230V 50/60Hz A37317984

E2M28 Pump 1ph, 100/200V 50/60Hz A37315904

E2M28 3ph, 200-220/380-415V 50Hz

200-230/460V 60Hz A37310940

Small Rotary Pumps

9

*PFPE versions also available - contact us for more information.This part number includes the line cord if ordered in the US.

visit our website at www.bocedwards.com

EM Series Rotary Vane Pumps

Specifications

Vacuum Data Hz Units E2M0.7 E2M1.5 E1M18 E2M18 E2M28Peak pumping speed 1 50 m3h-1/cfm 0.75 / 0.4 1.6 / 0.8 17.0 / 10 17.0 / 10 27.5 / 16.2

60 m3h-1/cfm 0.95 / 0.5 2.0 / 1.2 20.4 /12 20.4 / 12 33.0 / 19.5

Ultimate vacuum (total pressure)

without gas ballast mbar 3.0x10-3 2.5x10-3 3.0x10-2 1.0x10-3 1.0x10-3

Torr 2.3x10-3 1.9x10-3 2.2x10-2 7.5x10-4 7.5x10-4

with gas ballast mbar 2.0x10-1 2.5x10-2 6.5x10-1 1.5x10-2 1.5x10-2

Torr 1.5x10-1 1.9x10-2 4.8x10-1 1.1x10-2 1.1x10-2

Water vapor tolerance mbar 15 15 50 20 30

Torr 11 11 38 15 23

Maximum water vapor pumping rate g h-1 8 16 650 300 700

Motor rating 1 phase (normal) 60 W 750 750 900

50 W 90 160 550 550 750

Nominal rotation speed 60 rpm 1800 3600 1800 1800 1800

50 rpm 1500 3000 1500 1500 1500

Weight lb 22 22 70 79 88

kg 10 10 32 36 40

Length inch 12.6 12.6 19.7 21.6 22.9

mm 320 320 501 549 582

Width inch 4.9 4.9 6.4 6.4 7.1

mm 124 124 162 162 180

Height 2 inch 7.4 7.4 10.5 10.5 10.9

mm 189 189 266 266 276

Oil capacity liters 0.28 0.28 1.4 1.05 1.5

Oil type (Ultragrade) 15 15 19 19 19

Inlet flange NW10 NW10 NW25 NW25 NW25

Exhaust flange see note 3 see note 3 see note 4 see note 4 see note 4

Noise level 50 dBA 43 54 57 57 57

Operating temperature range C 12 to 40 12 to 40 12 to 40 12 to 40 12 to 40

Motor Data

Physical Data

Notes:1. Pumping speed measured to PNEUROP 6602. 3. Nozzle 11mm diameter, removable from 3/8 inch BSP tapped hole.2. Height varies with motor supply frequency. 60Hz shown, 50Hz is 29mm less. 4. Nozzle 15mm diameter, removable from 3/4 inch BSP tapped hole

10

Small Rotary Pumps

Dimensions in mmA B C D E F

E2M0.7 A371 31 919 320 124 171 123 81 24

A371 31 902 320 124 200 123 81 24

E2M1.5 A371 22 919 320 124 171 123 81 24

A371 31 902 320 124 200 123 81 24

E1M18 A343 17 984 501 180 253 184 120 25

A343 15 904 515 162 253 184 120 25

A343 10 940 471 162 266 184 120 25

E2M18 A363 17 984 549 180 253 232 120 25

A363 15 904 608 162 253 232 120 25

A363 17 940 519 162 266 232 120 25

E2M28 A373 17 984 582 180 242 266 129 25

A373 15 904 608 180 276 266 129 25

A373 10 940 553 180 276 266 129 25

Foreline trap

Vibration isolator

Oil return

Mist filter

Cables

AccessoriesCables (Required) UK, three pin plug A50505003

North European plug A50506003

North American plug A50507003

Suitable for 100/200V variants

North American plug U30003459

Oil Ultragrade 15, 1 liter bottle H11026015

Ultragrade 19, 1 liter bottle H11025015

Oil return Clean application (no gas ballast) A50419000

Inlet accessories FL20K - oil vapor (foreline) trap A13305000

Outlet mist filters For E2M0.7/E2M1.5 use EMF3 mist filter A46220000

For E1M18/E2M18 use EMF20 mist filter A46229000

For E2M28 use MF30 mist filter A46233000

Vibration isolator E2M0.7 and E2M1.5 A24801407

E1M18 and E2M18 A24801404

E2M28 A24801412


RVSeries Rotary Vane Pumps

Typical Applications



Centrifuges, ultra-high speed

Coating



Freeze drying

Furnaces


Glove boxes, ovens







Scanning electron microscopes - SEM


Solvent recovery


Turbomolecuar backing pumps

For 10 years, BOC Edwards RV pumps have

become the industry standard vacuum pump for

laboratory and scientific instrument primary

pumping applications. RV pumps are unique in

their capability to deliver reliable pumping

performance at high or low throughput with high

ultimate vacuum. This combined with ultra-low

noise levels, makes them ideal for a wide range of

applications and environments.

All pumps are approved to UL and CSA standards

by an external test house. BOC Edwards has a

global network, providing world-wide support for

product applications and service.

RV 8

/12

RV 3

/5

Unique throughput selector allows pump to be optimised for high and low pressure applications

Hardened shaft sleeve for reliability & durability

Gas Ballast - highest vapour pumping rate in class! Use of Gas Ballast Oil Return strongly recommended

Gas Ballast Oil Return (GBOR) - unique accessory allows: Return of oil and gas ballast simultaneously 3 different settings Easy addition to existing mist filters

12

Ordering DetailsDescription Order Number

Ultragrade Oil*

RV3 115/230V, 50/60Hz set to 230V A65201903

100/200V, 50/60Hz A65201904

200-220V/380-415V, 50Hz

200-230/460V, 60Hz, 3 phase A65201905

115/230V, 50/60Hz set to 115V A65201906

RV5 115/230V, 50/60Hz set to 230V A65301903

100/200V, 50/60Hz A65301904

200-220V/380-415V, 50Hz

200-230/460V, 60Hz, 3 phase A65301905

115/230V 50/60Hz set to 115V A65301906

RV8 115/230V, 50/60Hz set to 230V A65401903

100/200V, 50/60Hz A65401904

200-220V/380-415V, 50Hz

200-230/460V, 60Hz, 3 phase A65401905

115/230V, 50/60Hz set to 115V A65401906

RV12 115/230V, 50/60Hz set to 230V A65501903

100/200V, 50/60Hz A65501904

200-220V/380-415V, 50Hz

200-230/460V, 60Hz, 3 phase A65501905

115/230V, 50/60Hz set to 115V A65501906

Small Rotary Pumps

13

*PFPE versions also available - contact us for more information.


This part number includes the line cord if ordered in the US.

RV Series Rotary Vane Pumps

Specifications

Peak pumping speed 50 m3/h-1/cfm 3.3 / 2.0 5.1 / 3.0 8.5 / 5.0 12.0 / 7.1

60 m3/h-1/cfm 3.9 / 2.3 6.2 / 3.6 10.0 / 5.9 14.2 / 8.4

Ultimate vacuum (total pressure)

without gas ballast mbar 2.0 x 10-3 2.0 x 10-3 2.0 x 10-3 2.0 x 10-3

Torr 1.5 x 10-3 1.5 x 10-3 1.5 x 10-3 1.5 x 10-3

with gas ballast - low flow, I mbar 3.0 x 10-2 3.0 x 10-2 3.0 x 10-2 3.0 x 10-2

Torr 2.3 x 10-2 2.3 x 10-2 2.3 x 10-2 2.3 x 10-2

with gas ballast - high flow, mbar 1.2 x 10-1 1.0 x 10-1 6.0 x 10-2 6.0 x 10-2

II in high throughput mode Torr 9.1 x 10-2 9.1 x 10-2 4.6 x 10-2 4.6 x 10-2

Water vapor tolerance mbar 80 50 50 32

Torr 60 38 38 24

Maximum water vapor pumping rate

Gas ballast - low flow, I g/h-1 60 60 60 60

Gas ballast - low flow, II g/h-1 220 220 220 290

Motor rating 1 phase (nominal) 60 W 300 300 550 55050 W 250 250 450 450

Nominal rotation speed 60 rpm 1800 1800 1800 1800

50 rpm 1500 1500 1500 1500

Weight lb 47.5 47.5 57 58kg 21.5 21.5 26 26.3

Length inch 16.9 16.9 18.5 19.3

mm 430 430 470 490

Width inch 6.2 6.2 6.2 6.2

mm 158 158 158 158

Height inch 8.9 8.9 8.9 8.9

mm 225 225 225 225

Oil capacity liters 0.7 0.7 0.75 1

Oil type (Ultragrade) 19 19 19 19

Inlet flange NW25 NW25 NW25 NW25

Exhaust flange NW25 NW25 NW25 NW25

Noise level 50 dBA 48 48 48 48

Operating temperature range C 12 to 40 12 to 40 12 to 40 12 to 40

Vacuum Data Hz Units RV 3 RV 5 RV 8 RV 12

Motor Data

Physical Data

14

Small Rotary Pumps

Dimensions in mm

A B C D

RV3 430 158 225 156

RV5 430 158 225 156

RV8 470 158 225 196

RV12 490 158 225 216

AccessoriesCables (Required) UK, three pin plug A50505000


North American plug A50507000

Oil Ultragrade 19, 1 liter bottle H11025015

Fomblin YVAC 06/6 1kg (532ml) H11301019

Oil Return Clean application (no gas ballast) A50420000

Adjustable gas ballast A50523000

Inlet accessories Foreline trap - FL20K A13305000

Outlet mist filters For RV3, 5, 8 use EMF10 mist filter A46226000

For RV12 use EMF20 mist filter A46229000

Spare kits Clean and overhaul kit A65201131

Note: All pumps supplied with initial charge of oil

Foreline trap

Gas BallastOil Return

Mist filter

Cables

Vibration isolator

15

1 Oil mist filter

2 Hose dip

3 Flexible oil return tube

4 Nozzle

5 Oil return assembly

6 RV pump

7 Restrictor

8 Drain adaptor

Side view (pump inlet-flange omitted for clarity) Gas Ballast Oil ReturnWhen fitted the Gas Ballast Oil Return continuously returns oil trapped in

the oil mist filter to the pump whilst maintaining gas ballast flow.


D-LAB Diaphragm Pump

D-LAB membrane pumps with their chemically resistant

Teflon heads, diaphragms and Kalrez valves, offer the

chemical or pharmaceutical laboratory user a wide range of

choices, either used as stand-alone pumps or as part of a

sophisticated system.

The one head, 100 mbar / 75 Torr ultimate vacuum pumps

are suitable for use with drying equipment or for replacing

water-jet pumps. The two head, 8 mbar / 6 Torr ultimate

vacuum pumps are suitable for rotary evaporation, gas

transfer and a wide range of medium vacuum applications.

System options

The pumps are designed so they can be upgraded by adding

a range of accessories. The accessories are supplied with all

required connections; no special tools are needed to fit them.

Baseplate Vacuum controller

Separator Gas-ballast control valve

Condenser

Baseplate

The baseplate allows the pump and accessories to be

mounted on to a common frame.

Separator

When used on the exhaust side, solvent droplets are

separated from the process gas and collected. When used

on the inlet side, the separator may be used to collect

particles in the process gas, thus assisting pump reliability.

Condenser

The condenser separates and collects condensable materials

from the exhaust side of the pump. These condensed

materials are collected in an easily removed glass flask.

Connections available to allow cooling fluid from a chiller or

circulator (not supplied) can be used to control the

condenser temperature.

Vacuum controller

The vacuum controller controls the system pressure and

stops the pump when a pre-set pressure is reached. This

saves power and extends the service life of the diaphragm.

Typically, the controller is used on a system that

incorporates the baseplate, condenser and separator.

Gas-ballast control valve

The use of gas-ballast helps prevent the condensation of

vapors inside the pump. The valve control is on/off, at a

fixed flowrate.

16

Teflon heads and diaphragms

Compact, space-saving design

Low noise

Simple to use

Low maintenance

Applications

Gel dryers Vacuum filtration Distillation/extraction apparatus

Dry Pumps


D-LAB 10-100 110 V 1-phase 60 Hz A48015941

220-240 V 1-phase 50 Hz A48015960

D-LAB 20-100 110 V 1-phase 60 Hz A48017941

220-240 V 1-phase 50 Hz A48017960

D-LAB 34-100 110 V 1-phase 60 Hz A48021941

220-240 V 1-phase 50 Hz A48021960

D-LAB 10-8 110 V 1-phase 60 Hz A48016941

220-240 V 1-phase 50 Hz A48016960

D-LAB 20-8 110 V 1-phase 60 Hz A48018941

220-240 V 1-phase 50 Hz A48018960

D-LAB 34-8 110 V 1-phase 60 Hz A48022941

220-240 V 1-phase 50 Hz A48022960

Baseplate D-LAB 10-100, 20-100, 10-8 and 20-8 A48015134

D-LAB 34-100 and 34-8 A48021134

Separator* A48015136

Condenser* A48015137

Description Order NumberGas-ballast control valve

D-LAB 10-100, 10-8 A48015135

D-LAB 20-100, 34-100, 20-8 and 34-8 A48017135

Vacuum controller*

220-240V 50Hz A48015138

100-110V 50/60 Hz A48015139

Service kit, one head pumps (1 diaphragm, 2 sealing rings, 2 valve plates)

D-LAB 10-100 A48015815

D-LAB 20-100 A48017815

D-LAB 34-100 A48021815

Service kit, two head pumps (2 diaphragms, 4 sealing rings, 4 valve plates)

D-LAB 10-8 A48016815

D-LAB 20-8 A48018815

D-LAB 34-8 A48022815

Electrical supply cable, with IEC socket

(order one of these cables for 220-240 V supply)

UK three pin plug A50505000


No plug A50508000

* Supplied with fittings for attachment to the baseplate. 110 V pumps are supplied

with USA plug; 220-240 V pumps are supplied with IEC plug. Other voltage pumps

and controllers are available on request.


D-LAB Diaphragm Pump

Pumping speed (air)

10-100, 10-8 0.6 m3h-1, 10 l min-1

20-100, 20-8 1.2 m3h-1, 20 l min-1

34-100, 34-8 2 m3h-1, 34 l min-1

Ultimate vacuum

10-100, 20-100, 34-100 50 Hz 100 mbar

10-100, 20-100, 34-100 60 Hz 75 mbar

10-8, 20-8, 34-8 50 Hz 8 mbar

10-8, 20-8, 34-8 60 Hz 6 mbar

Inlet and outlet connection Riffled nozzle,

suitable for 9 mm i.d. hose

Maximum inlet pressure 1 bar

Motor power and current

10-100, 110 V 60 Hz 110 W, 1.3 A

10-100, 220-240 V 50 Hz 100 W, 0.6 A

20-100, 110 V 60 Hz 145 W, 1.9 A

20-100, 220-240 V 50 Hz 130 W, 0.9 A

34-100, 110 V 60 Hz 220 W, 3.2 A

34-100, 220-240 V 50 Hz 180 W, 1.4 A

10-8, 110 V 60 Hz 110 W, 1.3 A

10-8, 220-240 V 50 Hz 90 W, 0.6 A

20-8, 110 V 60 Hz 130 W, 1.2 A

20-8, 220-240 V 50 Hz 120 W, 0.9 A

34-8, 110 V 60 Hz 250 W, 3.2 A

34-8, 220-240 V 50 Hz 200 W, 1.5 A

Enclosure rating IP44

Operating temperature 5 - 40 C

Weight

10-100 5.8 kg / 12.8 lbs

20-100 7.1 kg / 15.6 lbs

34-100 10.3 kg / 22.7 lbs

10-8 6.9 kg / 15.2 lbs

20-8 9.3 kg / 20.5 lbs

34-8 12.6 kg / 27.7 lbs

Technical Data

18

D-LAB Dimensions in mmD-LAB A B C D E F

10-100 255 50 182 144 98 -

20-100 268 60 204 157 110 -

34-100 296 60 222 172 122 -

10-8 288 53 184 - 98 140

20-8 312 59 204 - 110 153

34-8 341 62 222 - 122 169

Dry Pumps


XDS Dry Scroll Pumps

Typical ApplicationsInstrumentation



Automotive

Beam lines and high-energy physics

Centrifuges, ultra-high speed

Coating

Cryogenics



Freeze drying

Furnaces


Gel drying

Glove boxes, ovens


General

Lasers, gas recov and re-circulation



Pumping Oxygen/Oxidants

Rare gas re-circulation

Rare gas recovery




Scanning electron microscopes-SEM


Solvent recovery


Turbomolecuar backing pumps

The XDS range of pumps reflects a unique award

winning dry pumping technology. It is designed to

provide a robust and clean dry pumping solution for

all applications.

All pumps in the range are approved to UL and CSA

standards and backed by BOC Edwards' worldwide

service and support.

XDS pumps use an innovative patented bearing

shield to isolate the vacuum environment from all

forms of lubricant, not only making it totally dry but

also hermetically sealed.

Totally dry

Ultra low maintenance - Service the XDS yourself in less than 10 minutes!

Variable gas-ballast feature

Oxygen pumping compatible

Hermetically sealed

XDS5

XDS1

0

XDS3

5i

20


XDS5 XDS5 1ph, 115V/230V 50/60Hz set to 230V A72401903

XDS5 1ph, 100/200V set to 200V A72401904

XDS5 3ph, 200-220/380-415V 50Hz

200-230/460V 60Hz Contact BOC Edwards

XDS5 1ph, 115V/230V 50/60Hz set to 115V A72401906

XDS10 XDS10 1ph, 115V/230V 50/60Hz set to 230V A72601903

XDS10 1ph, 100/200V set to 200V A72601904

XDS10 3ph, 200-220/380-415V 50Hz

200-230/460V 60Hz Contact BOC Edwards

XDS10 1ph, 115V/230V 50/60Hz set to 115V A72601906

XDS35i XDS35i 1ph, 100-120/200-230V 50/60Hz

with IEC60320 connector fitted A73001983

A B C D E F

XDS5 427 249 288 210 180 297

XDS10 427 249 288 210 180 315

XDS35i 476 290 397 212 195 353

Dimensions in mm

Dry Pumps


This part number includes the line cord if ordered in the US.

XDS Dry Scroll Pumps

Peak pumping speed 50 m3h-1/cfm 4.8 / 2.8 9.3 / 5.5 35 / 21

60 m3h-1/cfm 6.0 / 3.5 11.1 / 6.5 35 / 21

Ultimate vacuum (total pressure) mbar 6.0 x 10-2 6.0 x 10-2 1.0 x 10-2

Torr 4.5 x 10-3 4.5 x 10-3 8.0 x 10-3

Water vapor tolerance mbar 50 35 50

Torr 38 23 38

Maximum water vapor pumping rate

Gas ballast - low flow, I g/h-1 70 70 70

Gas ballast - high flow, II g/h-1 >200 >200 240

Vacuum Data Hz Units XDS 5 XDS 10 XDS 35i

Motor Data

Specifications

22

Motor rating 1 phase (nominal) 60 W 300 300 520

50 W 300 300 520

Motor rating 3 phase W Note 3 Note 3 -

Nominal rotation speed 60 rpm 1800 1800 1800

50 rpm 1500 1500 1800

Dry Pumps

Weight lb 51 54 106

kg 23 24.5 48

Length inch 16.8 16.8 18.7

mm 427 427 476

Width inch 9.8 9.8 13.1

mm 249 249 333

Height inch 11.3 11.3 15.6

mm 288 288 396

Inlet flange NW25 NW25 NW40

Exhaust flange NW25 NW25 NW25

Noise level 50 dBA 55 55 57

Leak tightness mbar.l/s

EXT Turbomolecular Pumps

24

EXT turbomolecular pumps use state-of-the-art

technology to provide reliable, clean, high and

ultra high vacuum. The EXT pumps also become

components in our convenient EXPT pumping

stations which allow you to configure the optimum

system to meet your specific needs.

EXT75DXInlet Flange ISO63 DN63CF DN40NW ISO100

Pumping speed (l s-1)

N2 61 61 42 66

He 57 57 49 59

H2 53 53 48 54

Ultimate pressure (mbar)

With rotary vane backing pump

25

Turbomolecular Pumps

Key to example EXT configuration

A TIC turbo & instrument controller 100 W RS232 D39721000

B 2m UK Mains Cable D40013025

C TIC relay box - for small backing pump D39711805

D APGX-M Stainless Steel - NW25 flange D02372000

F WRG Stainless Steel - NW25 flange D14701000

G RV3 pump (1-phase) A65201903

H EXT75DX ISO63 flange B72241000

J BX70 heater band 240V 60W* B58052060

K TAV5 vent valve B58066010

L ACX75 air-cooler B58053075

M TIC logic interface cable 2m D39700833

N TIC mains cable IEC320 M/F 2m D39700831

P TIC logic interface cable 2m D39700833

Q XDD/DX/EXDC extension cable 2m (optional) D39700836

S Active gauge cable 2m D40001020

Example EXT configuration

*For use with water cooled pumps only


EXT Turbomolecular Pumps

26

Technical Data Units EXT75DX EXT255DXInlet Flange DN63ISO-K DN100ISO-K

DN63CF DN100CF

DN40NW

Compression Ratio

N2 >1 x 1011 >1 x 108

He 1 x 106 4 x 105

H2 5 x 104 1.6 x 104

Outlet Flange DN16NW DN25NW

Interstage port (iDX versions) DN25NW DN25NW

Recommended backing pump E2M0.7 RV3

Vent port 1/8 inch BSP 1/8 inch BSP

Purge port 1/8 inch BSP 1/8 inch BSP

Maximum continuous inlet pressure

(light gas pumping)*1

water cooling (water at 15oC ambient at 40C) mbar 2 x 10-2 5 x 10-3

forced air cooling, 35C ambient mbar 1 x 10-2 5 x 10-3

Notional rotational speed rpm 90000 60000

Standby rotational speed rpm 49500 to 90000 33000 to 60000

(variable - 63000 as default) (variable - 42000 as default)

Start time 90% speed*2 s 110 80

Cooling method - Forced air / water Forced air / water

Ambient air temperature for forced air cooling C 5-35 5-35

Minimum cooling water flow rate (water 15 C) l h-1 15 15

Water temperature range C 10-20 10-20

Maximum inlet flange temperature C 100 100

Operating attitude - Vertical and upright, Vertical and upright,

through to horizontal through to horizontal

Noise level at 1 metre dB(A)

27

Turbomolecular Carts

Ordering Details EXT75DXPump Inlet Flange Order Number

EXT75DX ISO63 DN63ISO B72241000

EXT75DX CF63 DN63CF B72242000

EXT75DX NW40 DN40NW B72243000

EXT75DX ISO100 DN100ISO B72245000

EXT75iDX ISO63 (main) B72237000

(Interstage version) DN16NW (interstage)

EXT75iDX ISO63 DN63ISO (main) B72238000


Accessories

ACX75 Air cooling accessory B58053075

WCX500 Water cooling accessory B73600121

Ordering Details EXT255DXPump Inlet Flange Order Number

EXT255DX ISO100 DN100ISO-K B75311000

EXT255DX CF100 DN100CF B75312000

EXT255iDX ISO100 DN100ISO-K (main) B75313000


Accessories

ACX250H Air cooling accessory B58053160

WCX500 Water cooling accessory B73600121

For a full list of extended accessories please contact your nearest BOC Edwards sales office

or email: [email protected]

The TIC Turbo and Instrument Controller offers a large clear graphical

display, intuitive user interface and serial communications providing full

remote control and data logging functions via a new WindowsTM based

PC program.

The controller automatically recognizes and supports up to three gauges

from the BOC Edwards range and one 24V turbomolecular pump from

the EXT range.

TIC Turbo and Instrument Controller OptionsController Description Order Number

TIC 100W TIC turbo and instrument controller 100W RS232 D39721000

TIC 200W TIC turbo and instrument controller 200W RS232 D39722000

For more information and advice on the optimum controller and configuration

for your application please call your nearest BOC Edwards sales office or email:

[email protected]

DimensionsEXT75DX EXT255DX


Pumping Stations

28

EXPT 1 and 2 Pumping StationsOur new range of EXPT pumping outfits brings added flexibility with

our successful TIC Turbo and Instrument Controllers. A large selection

of backing and turbo pumps is available in combination with TICs and

accessories to suit a wide range of applications such as:

UHV systems

Beam lines

Load locks

Surface science

High-energy physics

Ordering DetailsThe EXPT systems can be configured to meet

your exact requirements with a choice of:

Turbomolecular Pump + Turbo Controller

75DX NW40 100W Turbo control only (75DX)

75DX ISO63 100W Turbo & Instrument control (75DX)

75DX CF63

255DX ISO100 200W Turbo control only (255DX)

CF100 200W Turbo & Instrument control (255DX

AccessoriesPossible backing pump accessories include:

EMF Filter

FL20K foreline trap

Castors

Silencer

+

Fully assembled and ready to use

Systems start/stop from control panel

Control of both the turbo pump and gauges from the integrated TIC

Serial communication control available with RS232 and RS485

Dry pumping options with XDDI, XDS5 and XDS10

Please contact us to discuss the optimum configuration

for your application.

1

255DX

29

Example of EXPT2 - Base plate with EXT255DX turbo pump

+ XDS10 scroll pump + Turbo & Instrument Controller.

Example of EXPT1 - Base plate with EXT75DX turbo pump

+ XDD1 scroll pump + Turbo & Instrument Controller.

+ Turbo Accessories + Backing pump + Backing pump Accessories + Voltage

TAV5 Vent Value E2M0.7 EMF Filters*2 220-240 V 50/60 Hz (Europe)

LCPVEK Backing Line Valve*1 E2M1.5 EXPT1 Foreline Trap*2 110-120 V 50/60 Hz (USA)

XDD1 Castors*3 110 V 50/60 Hz (Japan)

Silencer*4 220-240 V 50/60 Hz (UK)

RV3

X) RV5

RV8 EXPT2

RV12

XDS5

XDS10

+ + + +

Turbomolecular Carts

1

2

2

Notes

*1 Mandatory when using XDS as backing pump*2 EM & RV pumps only*3 Mandatory on EXPT2 carts*4 XDS only


STP MAGLEV Range

30

Perfect for wide range of high vacuum applications

and available in a range of pumping speeds from 300

to 3500 ls-1 the STP range of magnetically levitated

(MAGLEV) turbomolecular pumps are the best in

their class.

Unlike conventional mechanical ceramic bearing

turbo-pumps, the Maglev systems provide full 5 axis

active magnetic levitation, 3 axis on 300ls-1 - 450ls-1,

requiring no costly bearing re-lubrication or

replacement. Regenerative technology eliminates

the requirement for battery back up in the event

of power failure.

Maglev system products offer superior uptime and

reduced cost of ownership in comparison with

ceramic turbo pumps. This, combined with the cost

reduction in active magnetic bearing control afforded

through constant technical development, make Maglev

system turbo pumps the ideal turbo-pump technology

for all but the smallest pumping speed requirements.

Maglev system turbo pumps combined with the XDS

Scroll pumps, provide a world beating combination

of product features for Clean, Dry pumping.

Full range of pumping speeds from 300 to 4500 l/s-1

Affordable Highly reliable Virtually maintenance free Completely dry Cost Effective Low vibration levels


31

Medium Size Pumps Order Number

STP603 ISO160F P039 B72102010

DN160CF PT390Z005

STP1003 ISO200F P039 PT390Z001

DN200CF B72101040

STP603C ISO160F P039 B72102060

DN160CF PT39AZ002

STP1003C ISO200F P039 B72101030

DN200CF PT39AZ003

STPA803C ISO160F P036 B71801000

DN160CF B71805010

STPA1303C ISO200F P036 B71802020

DN200CF B71803000

STPA1603C ISO200F P046 B75100040

DN200CF B75100100

Required accessories for the Medium Size Pumps

SCU750 Universal Controller - Medium Pumps

100-240v P056 PT56Z0Z00

Connection cable 3m B75130050

5m B75130020

10m B75130060

Power cable 5m P056 PT46Y0A01

10m PT46Y0A10

Ordering DetailsSmall Size Pumps Order Number

STP301

STP301 ISO100 Kit* (100-120v) PT2101091

STP301 ISO100 Kit* (200-240v) PT2101131

STP301 CF100 Kit* (100-120v) PT2101141

STP301 CF100 Kit* (200-240v) PT2101151

STP451

STP451 ISO160 Kit* (100-120v) PT2101950

STP451 ISO160 Kit* (200-240v) PT2101171

STP451 CF160 Kit* (100-120v) PT2101360

STP451 CF160 Kit* (200-240v) PT2101161

*Kit includes controller, power cable and connection cable.

Large Size Pumps Order Number

STPA2203C ISO250F P041 PT4V0Z002

DN250CF PT4V0Z003

STPF2203C ISO250F P050 PT500Z000

DN250CF CALL

STPA2503C ISO250F P043 PT43GZ001

DN250CF PT43GZ040

STP XA 2703C ISO250F PO66 PT660Z000

DN250CF PT6610010

STPA3003C ISO320F P043 B75201020

DN320CF PT43GZ030

STP XA 3203C ISO320F PO66 PT660Z050

DN320CF CALL

STPA3503C ISO320F P048 PT480Z003

DN320CF PT480Z010

Required accessories for the Large Sized Pumps

SCU 1500 Universal Controller - Large Pumps

200-240V 50/60 Hz RS232 PO59 PT59Z0Z00

Connection cable 3m P035 B75030030

5m B75030010

10m B75030040

Power cable 5m P035 B75030020

10m PT35Y0A00


STP Featured Product

32

The BOC Edwards STP-iX455 turbomolecular pump

integrates the controller with the pump body and

employs an innovative magnetic bearing system, all in

a compact package featuring low vibration.

The new magnetic bearing system reduces vibration

by 50% compared to existing products.

This pump is well suited for use with electron

microscopes, metrology systems, and for lithography

systems where low vibration is critical to the

application. STP-iX455 operates on 48VDC, thus

eliminating the need for a conventional rack-

mounted control unit and connection cable. With

numerous optional accessories available, an optimum

configuration can be found for each application.

The patented self-sensing magnetic system

and optimised motor drive system suppress

noise across the frequency spectrum and

achieve a reduction in vibration of 50% from

current products.

Complete digital 5-axis magnetic bearing

control provides stability in case of external

vibration or impact.

ABS (Automatic Balancing System) jand AVR (Automatic Vibration Reduction)

together intelligently and automatically compensate for rotor imbalance to

provide low vibration during both acceleration and operation at high speed.

Innovative Magnetic Bearing System- Self-Sensing MB Technology- Digital 5 Axis Control

Compact Design- Integrated Controller

Low Vibration- ABS (Auto Balancing System) as Standard- AVR (Auto Vibration Reduction) as Standard

Conforms to International Safety Standards

Innovative Magnetic Bearing System

STP-iX455

Technical Data Units ISO100K ISO160K

Pumping speed, N2 / H2 Litres/Second 300/300 450/460

Compression ratio, N2 / H2 >108 / 1x104 >108 / 1x104

Ultimate pressure Pa 10-8 order 10-8 order

Maximum allowable backing pressure Pa 67 67

Rated speed rpm 55000 55000

Starting time / Stop time minutes 6 / 8 6 / 8

Mounting position Any orientation Any orientation

Input voltage DCV 48 48

Vibration


33

Dimensions in mm

Inlet Flange A B

ISO100 130 12

DN100CF 152 21

ISO160 180 12

DN160CF 203 22

Ordering DetailsDescription Inlet Flange Order Number

STP-iX455 Pump ISO100K PT640Z010

ISO160K PT640Z020

VG100 PT640Z030

VG150 PT640Z040

DN100CF PT640Z050

DN160CF PT640Z060

iPS-240 Power supply PT64W0Z00

Pump Length (metres) Order Number

Power cable 3M PT64Y0A10

5M PT64Y0A20

10M PT64Y0A30

15M PT64Y0A40

iPS-240 Connection Cable 5M PT64Y0B20

10M PT64Y0B30

15M PT64Y0B40

20M PT64Y0B50

iDT-001 Display Terminal kit w/communication cable 3M PT64W1Z00

Power Supply Unit iPS-240 Operation from 100-200 VAC

power source

STP-link communication port on front panel

Dock with the iDT-001 display unit to become an integrated power supply with an LCD display

Display/Control Unit iDT-001 Provides visual feedback of

performance and direct control of the pump

Plug-and-play unit connecting with the STP-iX455 or iPS-240

Docking connection available with the iPS-240

Displays operational status on the LCD panel

Software Control STP-Link Displays status of the operational

STP-iX455 pump including:

Rotational speed

Motor status

Temperature

Rotor balance status

Magnet bearing current

AccessoriesSeveral accessories are available to meet optimum configuration in each application.


Vacuum Coating Systems

Optimum performance

As a pioneer in cutting-edge science and technology, BOC Edwards delivers improved capability and increased

productivity in standard and custom made systems. Our vacuum coating solutions are proven to meet all the

requirements across the widest spectrum of processes and applications:

High vacuum - fast pumpdown

Repeatable predictable performance

Clean vacuum

Reliability and maximum process uptime

Low maintenance and operating costs

Safe and simple operation

SOLUTIONS EXPERTISE

Imaginative applications for thin film deposition are only limited by your equipments

process capability.

BOC Edwards provides the knowledge and expertise to create custom made

equipment with the flexibility to help you realise the full potential of vacuum coating.

By supplying complete solutions from advice on design, to manufacture and global

support, BOC Edwards meets all the performance criteria you expect of a world leader

in the supply of vacuum coating technology.

34

Vacuum Coating Systems

The Auto 360 is designed to offer high-performance coating for

Research and Development applications.

Compact Unit

Easy-to-use touch screen operation

Choice of deposition options for resistance evaporation

No compressed air requirements on installation

Fully interlocked for operator safety

The Auto 500 offers greater flexibility and higher throughput for

pre-production or more demanding research and development

environments.

Large box chamber

Front loading for easy access

Automatic PLC operated vacuum control system with

touch screen display

Full range of accessories for thermal resistance, electron beam and

RF/DC sputtering

High-temperature substrate heating options

The TF600 is a fully flexible high throughput coater designed for

demanding production environments.

Fully configurable design to match your requirements exactly

Rapid pump down to maximise throughput

Automatic PLC touch screen operated vacuum control system with

full recipe & diagnostic control

Resistance and electron beam evaporation

Upward and downward sputtering

Ion beam processing

For more detailed technical information on any of these coating products pleaserequest a datasheet by calling your nearest BOC Edwards sales office.

COATING SYSTEMS TO SUIT ALL APPLICATIONS AND BUDGETS

AU

TO

306

AU

TO

500

TF6

00

Res

earc

h an

d D

evel

opm

ent

Pre-

Prod

uctio

nFu

ll Pr

oduc

tion

!

36

Entry Level Research & Development

Low throughput TEM/SEM sample preparation

Pre-production environments

Anti-reflective coatings

Semiconductors

Mirrors

Organics, polymers and OLEDs

Photonics research

Solar Cells

Nanotechnology

High throughput production environments

Semiconductors

Mirrors

Organics, polymers and OLEDs

TARGET APPLICATIONS


Scancoat Six Bench-top Sputter Coater

The Scancoat Six is a compact and inexpensive bench-top sputter designed to prepare

specimens for conventional scanning electron microscopy (SEM). The ready-to-use

system will sputter coat a wide variety of specimens with a high-quality, conductive

metal film. The films are deposited uniformly, even over reentrant surfaces.

An optional carbon fibre accessory allows specimens to be carbon coated before

X-ray microanalysis.

38

Work Chamber Borosilicate glass, I50 mm 0 x I I5 mm high.

Clear acrylic implosion guard, as standard

Worktable 100 mm 0 water-cooled copper worktable

Removable workholder 100 mm 0 water-cooled copper worktable

holes and six IS mm 0 holes for standard

SEM stubs

Vacuum system Edwards RV3 (direct drive rotary pump)

with Pirani gauge

Process gas Normally argon. Push-fit connectors

provided for 6 mm od tubing for

connection to gas cylinder fitted with

pressure regulator. Multi-turn needle valve

incorporated to provide fine control of

process gas

Cycle time Work chamber evacuated to operating

pressure within one minute.

Sputtering rates of up to 60 min

High tension supply l5OOV dc at 50 mA

HT meters 0 - IO0 mA with overload protection 0 - 2.5 kV

Digital timer Programmable 0 seconds to

999 seconds with automatic reset

Dimensions mm 470 W x 390 D x 445 H

Weight 22kg

Technical DataFEATURES Automatic sputtering with digital process timer for easy

and repeatable operation

Cool sputtering prevents heat damage of delicate specimens

Water-cooled specimen table

Wide range of easily interchangeable targets

Target to worktable separation easily adjusted from outside

the chamber

Built-in sputter etch/cleaning facility

Universal specimen holder accommodates specimen stubs

from most EM manufacturers

Supplied with rotary pump, 0. I mm thick gold target and

built-in feedthrough for film thickness monitor

COOL SPUTTER COATING

The Scancoat Six is designed to prevent overheating of delicate

specimens during sputter deposition.

The unique sputtering electrode design incorporates an electron

deflection system that reduces specimen

bombardment by secondary electrons, minimising

specimen heating. The water-cooled copper specimen

table acts as an effective heat sink and provides an extra level

of protection against specimen heating.

REMOVABLE SPECIMEN HOLDER

Specimens can be conveniently loaded onto the specimen holder

away from the vacuum chamber. Once loaded onto the

workholder, specimens can be safely transported to the

Scancoat Six.

The workholder is pre-drilled to accept up to six of the

standard SEM stub types used by most SEM manufacturers.

SPECIMEN HOLDER SEM COMPATIBILITY

workholder capacity SEM suitability6 x 3.2 mm diameter pin Amray, Gresham Camscan, type stubs LEO, Philips

6 x 10 mm diameter JEOLcylindrical stubs

6 x 15 mm diameter Hitachi, Topconcylindrical stubs

39

Ordering DetailsDescription Order NumberScancoat Six SEM Sputter Coater. complete with RV3 rotary vacuum pump,

0. I mm gold target, specimen stub holder, pump oil and instruction manual

23OV, l-phase, 50 Hz E096-0 I-000

I I5 V, I -phase, 60 Hz E096-02-000

The Scancoat Six can be supplied without rotary pump on request.

Accessories

Carbon Fibre Evaporation Accessory complete with 3 m carbon string

23OV, l-phase, 50 Hz E096-0 I-200

I I5 V, I -phase, 60 Hz E096-02-200

Quartz crystal sensor head

(for use with 086-64-000 FTM6 film thickness monitor

and E086-66-000 oscillator) E096-0 I-400

Gold target (0. I mm thick) E096-0 I-042

Platinum target E087-32-000

Gold/palladium target E087-33-000

Copper target E087- 12-072

FLZOK Foreline trap for RV3 pump A 133-05-000

EMF oil mist filter for RV3 pump A462-26-000

Carbon fibre, 3 m length E096-0 I-250

Accessories for metallurgical optical interference microscopy

Iron target E087-34-000

Shutter E087-4 I-000

Metallurgical sample holder E087-42-000

Request publication P 700-20-7 IO for details about this technique.


10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 103 mbar

Vacuum Measurement

40

Choosing the right vacuum gauge

Determine the range of pressures.

Use the chart below to guide you to pressure range.

Check the product summary.

Choose the cable length required (page 43).

Choose display option (page 43).

Unsure or need help?

Call your nearest BOC Edwards sales office or email: [email protected] with your

question and we will discuss your application in more detail with you.

APGX L - Active Pirani Gauge

APGX M - Active Pirani Gauge

APGX H - Active Pirani Gauge

Wide Range Gauge

Ultra High Vacuum High Vacuum Medium Vacuum Low Vacuum

Operating Range

Step

1

Step

2

Step

3

Step

4

Step

5

The dark blue lines indicate the primary accuracy range for the specified gauge. The light blue 'operating range' indicates the pressure range where the gauge can be usedbut will not provide accurate readings.

41

Operating Range

Operating Range

10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 103 mbar


10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 103 mbar


APGX M - Active Pirani Gauge

APGX L - Active Pirani Gauge

Technical DataPressure Range 100 to 10-3 mbar/Torr

Accuracy Typically +/-15% at

Vacuum Measurement

42

10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 103 mbar


10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 103 mbar


Wide Range Gauge

Technical DataPressure Range 100 to 10-9 mbar/Torr

Accuracy Typically +/-15% at

43

Connection Cable Options0.5 m D40001005

1 m D40001010

3 m D40001030

5 m D40001050

10 m D40001100

Cables include FCC68/RJ45 compatible connections

at both ends.

TIC ControllerThe TIC instrument controller offers

comprehensive control and display of up to

6 compatible BOC Edwards gauges. Intuitive

user interface, 6 set points and full Windows

Software for control and data logging

functionality.

Features and Benefits

Universal controller for up to 6 active gauges

Compact design

Clear, easy-to-use graphical user interface

Serial communication WindowsTM PC program

including data logger, plus analogue outputs

RS232 interface and analog output

Active Digital ControllerThe Active Digital Controller (ADC) is a

compact single gauge controller and display. It

features a bright LED display and simple push

button controls. The ADC automatically

recognises compatible BOC Edwards gauges,

loads the appropriate look-up table and displays

the pressure in commonly used vacuum units.


Plug and measure operation

Bright LED display for clear visibility

Choice of display units - mbar, Torr, Pascal

Enhanced ActiveDigital ControllerThe Enhanced Active Digital Controller (ADC)

is a compact dual gauge controller and display.

It features a bright LED display and simple

push button controls for two compatible

BOC Edwards gauges.

The Enhanced ADC automatically loads the

appropriate look-up table and displays the

pressure in commonly used vacuum units.


Controls two active gauges of the same type

2 set-point relays

Simple push button control

RS232 interface and analog output

TIC Controller D39701000 6 6 Yes Yes

Active Digital Controller (ADC) D39590000 1 0 No No

Enhanced Digital Controller (eADC) D39591000 2 2 No No

PartNumber

Max no.of gauges

No. ofset points

Windowssoftware?

DataLogging?Controller

Step

4 Choose the cable length required

Step

5 Choose display option


Hardware

44

Chemical resistance

This information is provided as a general guide only. Further guidance should be sought with respect to specific

chemicals and their applications

The BOC Edwards range of flange componentsconform to British and International standards. We supply a full range of NW (ISO-KF), ISO (ISO-K and ISO-F), CF fittings and valves.

This brochure details our most popular flangecomponents and valves. Please refer to our fullProduct Catalog for a complete list if there are any components that you require that are not listed here.

Background InformationGENERALLY RESISTANT TO GENERALLY ATTACKED BY

NITRILE

Butadiene Many hydrocarbons, Ozone, ketones, esters, aldehydes,

Acrylonitrile copolymer fats, oils greases, hydraulic fluids chlorinated and nitro hydrocarbons

NEOPRENE

Chloroprene polymer Moderate chemicals and acids, ozone, Strong oxidizing acids and esters, ketones,

oily fats, greases, many oils and solvents chlorinated aromatic and nitro hydrocarbons

FLUOROELASTOMER

Fluorocarbon polymer Ketones, low molecular weight esters

and nitro containing compounds

ALUMINUM

Organic acids, fatty acids, freons, Strong acids, alkalis, chlorinated solvents,

nitric acid mercury

STAINLESS STEEL

Organic acids, alkalis, nitric acid. Oxidizing chlorines, some organic acids,

Sulphuric acid (10%) hydrochloric acid, hydrofluoric acid

POLYMER

Liquid crystal polymer Organic acids, glycols, chlorinated solvents, Sodium hydroxide, sulphuric acid (70%)

ketones, mineral and oxidising acids,

caustic solutions, freons

45

Physical data

Operating pressure range (absolute)

Stainless steel clamping ring and Co-Seal 10-7 mbar - 10 bar / 247 psi

Stainless steel clamp and Co-Seal (all sizes) 10-7 mbar - 10 bar / 247 psi

Polymer and aluminum clamps and Co-Seal

NW10 to NW25 10-7 mbar - 10 bar / 145 psi

NW trapped O ring 10-7 mbar - 10 bar / 145 psi

O ring and centering ring (vacuum use only) 10-7 mbar - 1 bar / 14.5 psi

Bellows 10-7 mbar - 1 bar / 14.5 psi

Flexible pipelines 10-7 mbar - 1.5 bar / 21 psi

Operating temperature

The maximum temperature for continuous operation with fluoroelastomer

is 150 C. It may be intermittently baked to 200 C.

Polymer Co-Seal -10 to 80 C

Aluminum Co-Seal and nitrile seal -10 to 100 C

Aluminum Co-Seal and fluoroelastomer seal -10 to 200 C

Polymer centering ring and nitrile O ring -10 to 100 C

Polymer centering ring and fluoroelastomer seal -10 to 125 C

Nitrile O ring -10 to 100 C

Fluoroelastomer O ring -10 to 200 C

Polymer clamp

Constant vacuum use -10 to 100 C

Intermittent vacuum use -10 to 125 C

Stainless steel clamping ring -10 to 125 C

Aluminum clamping ring -10 to 200 C

Stainless steel clamp -10 to 200 C

Standards compliance

NW and ISO fittings Pneurop 6606 (1981), ISO1609 (1986),

DIN28403, DIN28404

Dimensions

Flange size A B C D

NW10 30 12.2 2 14

NW16 30 17.2 2 20

NW20 40 22.2 2 25

NW25 40 26.2 2 28


Common Lab Components

46

Hinged Clamp

Flange Size Order Number

Aluminium Polymer

NW10/16 C10512402 C10512303

NW20/25 C10514402 C10514303

Swing Clamp


Aluminium Polymer

NW10/16 C10512403 C10512304

NW20/25 C10514403 C10514304

Stainless Steel Clamping Ring


NW10/16 C10512401

NW20/25 C10514401

PVC Hose Clamp

Tube to fit Clip ID Order Number

NW10/16 25mm C10512408

NW20/25 36mm C10514408

PVC Hose Adaptor

Flange Size Hose ID in (mm) Order Number

NW10 1/2 in (12.7) C10504081

NW16 1/2 in (12.7) C10504104

NW16 3/4 in (19.1) C10504105

NW25 1 in (25.4) C10504225

Clamps shown include our standard stainless steelclamping ring and our premium products - swingclamps and hinge clamps - both of which areavailable in polymer and aluminium and are easier touse than the clamping ring.

The speedivalve is our best-selling manuallyoperated valve and is simple to use. It incorporatesindication of status and is available with either nitrileor fluoroelastomer diaphragm.

continued overleaf

Clamps, Tubes, Valves and Hose Adaptors

47

Blanking Flange


Aluminium Stainless Steel

NW10 C10511368 C10511366

NW16 C10512368 C10512366

NW25 C10514368 C10514366

Flexible Pipelines


250mm long 500mm long

NW10 C10511285 C10511286

NW16 C10512285 C10512286

NW25 C10514285 C10514286

Reinforced PVC tube 1m lengths

D Order Number

Rest of world N. America

1/2 in N.A A63012220

3/4 in H02100016 U3002173

1 in H02100017 A63012343

SP Speedivalve diaphragm isolation valve


Nitrile Diaphragm Fluoroelastomer Diaphragm

NW10 C33105000 C33155000

NW16 C33205000 C33255000

NW25 C33305000 C33355000

Reinforced PVC tube with NW flanges and hose clamps

Flange Order Number

500mm 1000mm

NW16 C10512055 C10512155

NW25 C10514055 C10514155

NW40 C10516055 C10516155


Common Lab Components

48

Centering Ring (Nitrile O-ring)


Polymer carrier Aluminium carrier Stainless Steel carrier

NW10 C10511393 C10511398 C10511396

NW16 C10512393 C10512398 C10512396

NW25 C10514393 C10514398 C10514396

Centering Ring (Fluoroelastomer O-ring)


Polymer carrier Aluminium carrier Stainless Steel carrier

NW10 C10511394 C10511397 C10511395

NW16 C10512394 C10512397 C10512395

NW25 C10514394 C10514397 C10514395

Co-Seal (Nitrile O-ring)


Polymer carrier Aluminium carrier

NW10/16 B27158426 B27158480

NW20/25 B27158447 B27158490

Co-Seal (Fluoroelastomer O-ring)


Polymer carrier Aluminium carrier

NW10/16 B27158427 B27158481

NW20/25 B27158448 B27858491

Trapped O-ring (Fluoroelastomer)


NW10/16 C10512490

NW20/25 C10514490

This page shows some of our other commonhardware components and, in particular, our range of NW o-ring based seals. These include ourstandard o-ring with centering ring available in eithernitrile or viton and with polymer, aluminium andstainless steel carriers.

Material selection depends on application and out-gassing, operating temperature and leak tightnessrequirements. Co-Seals keep the carrier out of thevacuum and thus have the added benefit ofeliminating crevices and trapped volumes that canlead to instability and gas bursts. The centering ringsare only designed for vacuum applications. Wheresome positive pressure may be seen (such asexhaust lines), Co-Seals and trapped o-rings shouldbe used. They have carriers which support the o-ring on both sides, making them ideal for bothvacuum and positive pressure use.

O-rings, Elbows, Cross pieces, T-pieces & Reducers

49

Cross Piece

Flange Size Length Order Number


NW10 60 mm C10511412 C10511422

NW16 80 mm C10512412 C10512422

NW25 100 mm C10514412 C10514422

T-Piece

Flange Size Length Order Number


NW10 60 mm C10511412 C10511421

NW16 80 mm C10512412 C10512421

NW25 100 mm C10514412 C10514421

90 Elbow



NW10 C10511410 C10511420

NW16 C10512410 C10512420

NW25 C10514410 C10514420

Reducing Piece



NW25/10 C10514436 C10514446

NW25/16 C10514437 C10514447

NW40/16 C10516438 C10516448

NW40/25 C10516439 C10516449


Service and Support

SAVE MONEY ON YOUR NEXT PURCHASE

Refurbished Products

Genuine BOC Edwards refurbished products

provide a cost-effective route to expand, upgrade

or replace your installations without sacrificing

quality, reliability or performance.

Like our Service Exchange product, refurbished

products are tested as new and are supported by a

12-month warranty.

RAPID AND CONVENIENT

Product Repair, Overhaul and Exchange

When products require more than just routine

maintenance and you need the confidence afforded

by an OEM guarantee, then choose from our range

of product repair and overhaul services.

BOC Edwards offers fixed price servicing for

swift response and simple budgeting, or a flexible

pricing structure for maximum cost control.

If uptime is critical choose a Service Exchange

product dispatched to you from local stock

within hours.

WELL-MAINTAINED PRODUCTS RUN LONGER

Service Spares, Kits, Tooling and Training

Maximise the lifetime of your product by servicing

your products regularly using original parts and

tooling. Combine BOC Edwards spare parts and

service tooling with our technician training courses

to deliver years of trouble-free operation.

FLEXIBLE SERVICE PACKAGES

Onsite Support, Service Contracts and Agreements

With any of our tailored contracts, you can

combine any of our services into one package,

whether for one off plant relocations or longer

term equipment maintenance and management.

For smaller installations, BOC Edwards provides

standard fixed price contracts for simple budgeting

and cost management.

50

LOCAL SUPPORT FROM A GLOBAL COMPANY

You can expect that BOC Edwards will provide a local, rapid response and great value

service, delivered by experts. With more than 70 service facilities worldwide, a team of

over 1000 service engineers and technicians, and a growing network of service agents,

we are never far away.

GLOBAL EXPERTISE

We develop or manufacture the training, processes, tooling and partsused throughout our expanding service network at the factorieswhere we develop and manufacture our products. As you would expect from a responsible, global company, we operate under ISO9001 and ISO14001 accreditation.


Reference Guides

52

The following information is intended to be used as a reference source only. If you need detailed advice on any aspects of vacuum technology, feel free toemail us at [email protected].

Contents:

Unit Conversion TablesPressure Conversion Table, Leak Rate Conversion Table, Pumping Speed Units

Common Vacuum FormulasConductance, Gas Load, Pumping Speed

Pressure Conversion Table

1 mbar = 1 1x10-3 0.75 1x102 9.87x10-4 2.95x10-2 0.75 0.40 10.20

1 bar = 1x103 1 7.5x102 1x103 0.987 29.53 7.5x102 4.02x102 1.02x104

1 torr = 1.33 1.33x103 1 1.33 x102 1.32x10-3 1.36x10-2 1 0.54 13.59

1 Pa = 0.01 1 x10-5 7.5 x10-3 1.01 x105 1 2.95 x10-4 7.6 x10-3 4.02 x10-3 0.102

1 atm = 1.01 x103 1.013 7.6 x102 1.013 x105 1 29.92 7.6 x102 4.07 x102 1.03 x104

1 in Hg = 33.86 3.39 x10-2 25.4 3.39 x103 3.34 x10-2 1 25.4 13.6 3.45 x102

1mm Hg = 1.33 1.33 x10-3 1 1.33 x103 1.32 x10-3 3.94 x10-2 1 0.535 13.59

1 in H20 = 2.49 2.49 x10-3 1.868 2.49 x102 2.46 x10-3 7.36 x10-2 1.87 1 25.4

1 mm H20 = 9.81 x10-2 9.81 x10-5 7.35 x10-2 9.81 9.68 x10-5 2.90 x10-3 7.35x10-2 3.39x10-2 1

mbar bar torr Pa atm in Hg mm Hg in H20 mm H20

Pumping Speed Units

1 l/s-1 = 1 60 2.12 3.60

1 l/min-1 = 0.0167 1 0.0353 0.06

1 ft3 min-1 = 0.472 28.32 1 1.70

1 m3/h-1 = 0.278 16.67 0.5890 1

l/s-1 l/min-1 ft3 min-1 1m3/h-1

Leak Rate Conversion Table

1 mbar l/s-1 = 1 0.75 0.987 2.097 x10-3 4.3 x10-3

1 torr l/s-1 = 1.333 1 1.316 2.795 x10-3 5.7 x10-3

1 atm cm3 s-1 = 1.013 0.76 1 2.12 x10-3 4.3 x10-3

1 atm ft3 min-1 = 4.78 x102 3.58 x102 4.72 x102 1 -

1 kg/h air (20 C) = 230 175 230 - 1

mbar l/s-1 torr l/s-1 atm cm3 s-1 atm ft3 min-1 kg/h air (20C)

Unit Conversion Tables

53

Conductance

Common Vacuum Formulas

Conductance - Series

Conductance- Parallel


Reference Guides

54

Common Vacuum Formulas

Gas Load

55

Pumping Speed


Reference Guides

56

Periodic Table


Notes

58 visit our website at www.bocedwards.com

C100!06!895 Laboratory Brochure

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