BSE acquisition - point electronic...BSE acquisition Digital image scanning system n Integrated scan...

Quantitative BackScattered Electron (BSE) acquisition systems

BSE acquisition

Record Electron Channelling Contrast and Orientation Contrast datan Image crystallographic orientation of microscopic

grains n Identify dislocations, stacking faults and grain

boundaries – in the SEMn Map distortions in crystal lattice from local stray

fields

Simplify your BSE workflow and increase the quality and yield of your datan Navigate large samples with the highest speed BSE

imaging available n Align the SEM without switching to SE imagingn Minimise specimen charging with high-speed line

and frame averaging

Measure material density with highest spatial resolutionn Image distribution, shape and texture of grains in

steels and alloysn Measure microscopic variations in mineral concentra-

tions in bonen Identify phases and measure area fractions in metal

matrix composites

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Reveal atomic number/Z-contrast invisible in SE signalsn Reveal soil structure and identify mineral constituentsn Determine variations of content in biological structures n Image shape, size and distribution of nanoparticles

Reconstruct 3D information from BSE data n Measure deposition and milling rates in FIB with live

SEM topographyn Analyse volume of biological or porous materials with

3D SEMn Model 3D surfaces of microscopic objects with 3D

scanning

Automate acquisition of colour images and animations n Colourise SEM images with on- and off-axis BSE

detectorsn Produce high quality micrographs for publication n Acquire time or rotation based series for animated

presentations

Characterise samples at high temperatures, over 1,000ºC n Observe surface crystallisation, thermal recovery

and sintering n Record growth dynamics with in situ ESEMn Quantify creep and fracture at elevated

temperatures

www.pointelectronic.de

BSE acquisition

Advance your microscopy with additional signals and live processing

Complete BSE detectors and imaging systems for any SEM or FIB-SEM

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The system includes all parts necessary for BSE acquisitionn Choice of premium, custom, budget

and high-temperature detectorsn Calibrated amplifier (MICS) and

imaging (DISS6) electronicsn A range of BSE calibration samplesn Optional manual insertion/retraction

mechanism

BSE acquisition


Digital image scanning systemn Integrated scan generator and image acquisitionn Up to 65k × 65k pixels resolution, down to 20 ns dwell timen Simultaneous 4Q BSE signal acquisitionn Optional lock-in operation mode

Multi-channel signal amplifiern Calibrated 4x signal channels for quantitative BSE acquisitionn Channel independent brightness and contrast controlsn USB controlled and fully integrated with the acquisition software

Manual insertion/retraction mechanicsn Manual XYZ alignment under vacuum conditionsn Fully retractable when not in usen Compatible with a wide range of SEMs and FIB-SEMs

Custom detectorsn Detector-grade high speed diodes, in 5 × 5 mm or

10 × 10 mm sizes n Flexible hybrid assembly of multiple sensor chips

on a ceramic board n Custom, optimized board shapes are possible, e.g.

EDS compatible n Fixed pole-piece, or retractable arm mount

Basic detectorsn Optics-grade diodes mounted on a ceramic boardn Suitable for speeds of 8 µs/pixel dwell time n Operation range from minimum 5 kV acceleration

voltage n Fixed pole-piece, or retractable arm mount

Premium detectors (PNDetector)n Highest speed in BSE sensors, down to 10 ns/pixel

dwell timessn Detector-grade monolithic 4Q Si for optimum

collection geometry n Range of inner hole diameters for high-efficiency or

wide field-of-viewn Operation range down to 1 kV acceleration voltage

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High Temperature detectors n Insensitive to IR from heated samples, tested to over

1,000ºC n Operation range is down to tens of eV acceleration

voltage n Unique Electron Absorbed Detection (EAD) technologyn Suitable for speeds up to 16 µs/pixel dwell time

Calibration samples n Atomic number contrast reference standardsn Pairs or set of materials for widest density range

calibration n Al/Si, Ni/Cu, Pd/Ar, Pt/Au with Faraday cup

BSE acquisition

Complete BSE detectors and imaging systems for any SEM or FIB-SEM


Simultaneous four-quadrants BSE acquisition n All signals are acquired from the same location on the samplen Data is kept together in standard multi-page TIFF file

formatn Calibration information is stored in standard XMP metadata

Completely integrated imaging and control software

n Calibrated control and image acquisition of BSE and SE signals

n Independent and global control of brightness and controlsn Live display of measured BSE intensities and beam current

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BSE acquisition

Offline software for quantitative analysis n Automatic scale and intensity display from metadatan Manual colour, display brightness and contrast adjustmentsn Line and point data extraction for advanced analysis and visualisation

Live quantitative acquisition software n Calibrated amplifier and image acquisition provide

live BSE current valuesn Sensor geometry and gain are used for live BSE

yield calculationn Working distance and acceleration voltage are

taken into consideration

Automatic colour and grayscale image mixing tooln Software mixed imaging for grayscale “TOPO” and

“COPMO” modesn Software mixed RGB or CMYK for a colour view of

topographyn Hardware mixed BSE average signal

Offline surface topography visualisation and measurements n 3D views of height data from automated SEM topographyn Additional texture from SE, EDS, EBSD or CL images n Line and point data extraction for 3D measurements

nPremium Si Detector – PNDetector (standard)

Sensor Detector-grade monolithic 4Q Si diode

5, 2 or 1 mm inner hole diameter

12 or 9 mm outer diameter

10nm minimum dwell time

1kV minimum acceleration voltage

Pre-amplifier In situ mount

4x independent channels

105 or 106 V/A gain

Mount Insertion/retraction mechanism

X, Y and Z manual alignment

nCustom Si Detector (optional)

Sensor Detector-grade Si diodes

1…8x diodes on ceramic board

5 × 5 or 10 × 10 mm diode size

10nm minimum dwell time



8x max independent channels

105, 106 or 107 V/A gain

Mount Pole-piece or insertion/retraction mechanism

nBasic Si Detector (optional)

Sensor 4x optics-grade diodes on ceramic board

5 × 5 or 10 × 10 mm diode size

8µs minimum dwell time




106, 107 or 108 V/A gain


Detailed technical specifications

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BSE acquisition

nHigh-Temperature EAD Detector (optional)

Sensor Electron Absorbed Detection (EAD) technology

Insensitive to IR from heated samples

5, 2 or 1 mm inner hole diameter

12 mm outer diameter

16µs minimum dwell time

10 eV minimum acceleration voltage



106, 107 or 108 V/A


nMultiple Channel Signal MICS-4 Amplifier (standard)

Control interface USB2

Signal inputs BSE 1…4

SE 1…2

Signal mixing BSE SUM of BSE1…4,

BSE MIX of BSE1…4, with signal inversion

Signal outputs BSE SUM

BSE MIX

BSE 1…4

SE 1…2

Contrast controls 0.1x … 3,600x for BSE 1…4

0.2x … 10x for SE 1…2

0.1x … 10x for BSE MIX

Brightness controls -1…1 V for BSE 1…4

-1…1 V for SE 1…2

-1…1 V for BSE MIX

Low-pass filter controls 3.4 MHz … 34 Hz

8-levels

Automated functions Global 4Q brightness & contrast controls

BSE 1…4 automatic input offset correction

BSE 1…4 automatic gain variation correction

BSE 1…4 automatic brightness and contrast

Beam blanker output Optional


nScan Generator and Image Acquisition – DISS6 (standard)

Hardware interface USB2

Simultaneous inputs (e.g. SE, BSE) 4x, 12-bit

Mapping signals (e.g. EDS) 12x, 16-bit

Scanning interfacePre-configured for SEM and analytical equipment (e.g. EDS, WDS, EBSD)

Synchronization interface Pixel, line, frame

Scan size 64k × 64k pixels max.

Pixel dwell time 20ns … 6 milliseconds

Pixel oversampling 32,000x max.

Line averaging 50x max.

Frame averaging 256x max.

Line synchronization Mains power

nPC/Laptop, Display (optional)

PC/Laptop Intel Core i3 minimum

2 × USB 2.0 minimum

Displays 1,280 × 1,024 resolution minimum

1 × display recommended

Operating systems Windows 10 … Windows XP

Network connection recommended

nAcquisition Software – DISS5 (standard)

BSE detector control Complete software integration

SEM mag., kV informationAutomated SEM communication (where supported by SEM)

Live signal monitor Yes

Live image caption overlay Yes

Live colour mixing Yes

Live grayscale mixing Yes

Live quantification Yes

Default image file formats 8 and 16-bit multi-page TIF

Export BSE file formats Text image

Context sensitive help English, German

Detailed technical specifications

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BSE acquisition

nAnalysis software – DIPS5 (standard)

BSE signal calibration Automated data quantification

Magnification/scale information Automated SEM data management

Image caption overlay Display and image save overlays

Configurable SEM parameters, e.g. kV, WD, Mag, date…

False colour (LUT) CGR file format

Distance and area measurements Live display

Line profile extraction Line selection, synchronised SE, BSE data extraction

Operating system Windows 10 … Windows XP

Help PDF document English

nParts and Cables

Premium 4Q Si detector Standard 1 ×

Custom Si detector Optional 1 ×

Basic 4Q Si detector Optional 1 ×

High Temperature 4Q EAD detector Optional 5 ×

In situ cable with connector Standard 1 ×

Electrical vacuum feedthrough Standard 1 ×

Ex situ cable with connector Standard 1 ×

Insertion/retraction mechanism Optional 1 ×

Amplifier (MICS-4) module Standard 1 ×

Power supply (PSU) module Standard 1 ×

Scan and image acquisition cable Standard 1 ×

Coax signal cable with BNC connectors Standard 2 ×

Scan generator and image acquisition (DISS5) module

Standard 1 ×

Mains cables Standard 1 ×

USB cables Standard 2 ×

Ground strap Standard 1 ×

USB memory stick with software Standard 1 ×

PC/Laptop, keyboard, mouse Optional 1 ×

Display Optional 1 ×

nSoftware packages

MICS-4 amplifier USB driver MICS Device

Scan generator/image acquisition USB driver

DISS6API

Acquisition software DISS5

Analysis software DIPS5


nWeight and Dimensions

BSE detector module 12.5 × 12.5 × 5 cm

0.1 kg

MICS-4 amplifier module 19 × 10.5 × 5 cm

0.5 kg

MICS-4 PSU module 16 × 7.5 × 7 cm

0.5 kg

DISS6 module 23.5 × 8.7 × 29.5 cm

4.1 kg

Shipping typ. 36 × 32 × 56 cm

typ. 7.0 kg

nSite Requirements

Power2 × mains 110/220 VAC single phase 50-60 Hz

on the same earth as the microscope

Microscope 1 × BSE port

1 × SEM ground

1 × external microscope interface

SpaceSEM chamber must provide sufficient space for the BSE detector

MICS-4 and DISS5 boxes may be placed on the SEM bench

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BSE acquisition

BSE acquisition - point electronic...BSE acquisition Digital image scanning system n Integrated scan...

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