An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK .
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Transcript of An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK .
An Introduction
to SIMS and
the MiniSIMS ToF
© Millbrook Instruments Limited Blackburn, UK
www.millbrook-instruments.com
www.minisims.com
Secondary Ion Mass Spectrometry (SIMS)
&
The Millbrook MiniSIMS
The SIMS Process
simulation courtesy of Dr Postawa Zbigniew
at the Jagiellonian University in Poland
A Conventional SIMS System
The MiniSIMS Instrument
Design Objectives
• Increase routine use of Surface Analysis
– more affordable– more accessible
• Not a replacement for conventional SIMS
– not state-of-the-art performance– restricted analysis conditions
Transform one of these …..
….. into one of these.
Operational Strengths
• Low Capital & Running Costs
• Fast, On-Site Analysis
• Compact Design, Single Electrical Supply
• Full Automation & Control for Ease of Use
• High Reliability
• Rapid Sample Throughput
• Simplified Data Interpretation
• Remote Control via Internet
Typical Application Areas
• Surface Coatings
• Surface Treatments
• Electronic Components
• Semiconductors
• Electrodes & Sensors
• Catalysts
• Adhesives
• Lubricants
• Packaging Materials
• Corrosion Studies
Alternatives to a MiniSIMS ?
• No Other Benchtop SIMS Instrument
• Conventional SIMS Systems
– much more complex and expensive
• Contract Analysis Laboratories
– not convenient, contamination during transport
• Other Surface Analysis Techniques
– generally less sensitive
Comparison of
SEM / EDS and SIMS
Advantages of SEM / EDS
• High magnification physical image
• Quantitative elemental information
Advantages of SIMS
• Surface specific analysis
• Organic structure identification
• Profiling for depth distribution
• Light element detection
EDX sampling depth is typically 1 micron
For many applications surface sensitivity is needed…
Not 10 xNot 100 xBut 1000 x – SIMS can offer true surface analysis
509 m
Conclusions
• SIMS & EDS give complementary information
• SIMS has advantages for
– Organic surface contamination– 3 dimensional analysis of multi-layer structures
• SEM / EDS has advantages for
– High magnification physical imaging– Quantitative analysis
MiniSIMS ToF
Typical Applications for the MiniSIMS ToF
• Analysis of unknown samples (failure analysis)
• Analysis of unique samples
• Improved analysis of organic materials
• Smaller area static SIMS analysis
• Retrospective experiments
MiniSIMS ToF
• Advantages over Quadrupole Instrument
– Smaller area static SIMS analysis
– Extended mass range
– Higher mass resolution (organic v inorganic)
– Retrospective experiments
MiniSIMS ToF
• Use of Continuous Primary Beam
– Fast analysis (= low cost per sample)
– No loss of image resolution in pulsing
– Simplified depth profiling (single beam)
• Fast & simple static / imaging / dynamic
SIMS in one instrument
Static SIMS (Surface Analysis)
Polycarbonate (Bisphenol–A)
Characterisation of Layer
Structurally significant peaks
Characterisation of Layer
Structurally significant peaks
Effect of Decreasing Area
Analysis Area
Dimension
Mass Scale
Quadrupole Data
Effect of Decreasing Area
Analysis Area
Dimension
Mass Scale
Time of Flight Data
Higher Mass Resolution
Higher Mass Resolution
High Mass Peaks (KI)
0
100
200
300
400
350 550 750 950 1150 1350
Mass
Inte
nsi
ty
Extended Mass Range
K9I8
Extended Mass Range
ToF –ve ion mode: Irganox molecular ion at m/z = 1175 Da
Imaging SIMS (Spatial Analysis)
Surface Organic Contaminant Analysis
Retrospective Analysis
Retrospective Analysis
Retrospective Analysis
Dynamic SIMS (Depth Analysis)
Multi-Layer Coating
(Three Dimensional Analysis)
Retrospective Profiling
Conventional Profile
Sodium high at surface
Retrospective Cross-Section
Sodium inclusion in layer
Sodium high at surface
Retrospective Profiling
Retrospective Analysis
Horizontal Image of inclusion
Summary
MiniSIMS Summary
• SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films
• Information easily available by SIMS may be difficult or impossible by any other technique
• SIMS is especially valuable for the detection of:-– organic species (e.g. silicones, fluorocarbons)
– light elements (lithium, beryllium, boron …)
– group IA & IIA metals, group VII halides
MiniSIMS Summary
• SIMS is a fast analysis technique, especially for imaging applications
• MiniSIMS ToF is most effective for a comparative analysis of samples
• Desktop MiniSIMS means SIMS is now affordable and accessible to all
ToF MiniSIMS( v conventional ToFSIMS )
• Use of Continuous Primary Beam– Fast analysis (= low cost per sample)
– No loss of image resolution in pulsing
– Simplified depth profiling (single beam)
• Fast & simple static / imaging / dynamic
SIMS in one instrument
• Upgrade path from Quadrupole to TOF
ToF MiniSIMS( v quadrupole MiniSIMS )
• Improved Static SIMS from smaller areas• Retrospective Experiment
– 2D Imaging– 3D Imaging / Depth Profiling
• Extended Mass Range• Higher Mass Resolution