An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK .

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An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK www.millbrook-instruments.com www.minisims.com

Transcript of An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK .

Page 1: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

An Introduction

to SIMS and

the MiniSIMS ToF

© Millbrook Instruments Limited Blackburn, UK

www.millbrook-instruments.com

www.minisims.com

Page 2: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

Secondary Ion Mass Spectrometry (SIMS)

&

The Millbrook MiniSIMS

Page 3: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

The SIMS Process

simulation courtesy of Dr Postawa Zbigniew

at the Jagiellonian University in Poland

Page 4: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

A Conventional SIMS System

Page 5: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

The MiniSIMS Instrument

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Design Objectives

• Increase routine use of Surface Analysis

– more affordable– more accessible

• Not a replacement for conventional SIMS

– not state-of-the-art performance– restricted analysis conditions

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Transform one of these …..

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….. into one of these.

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Operational Strengths

• Low Capital & Running Costs

• Fast, On-Site Analysis

• Compact Design, Single Electrical Supply

• Full Automation & Control for Ease of Use

• High Reliability

• Rapid Sample Throughput

• Simplified Data Interpretation

• Remote Control via Internet

Page 10: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

Typical Application Areas

• Surface Coatings

• Surface Treatments

• Electronic Components

• Semiconductors

• Electrodes & Sensors

• Catalysts

• Adhesives

• Lubricants

• Packaging Materials

• Corrosion Studies

Page 11: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

Alternatives to a MiniSIMS ?

• No Other Benchtop SIMS Instrument

• Conventional SIMS Systems

– much more complex and expensive

• Contract Analysis Laboratories

– not convenient, contamination during transport

• Other Surface Analysis Techniques

– generally less sensitive

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Comparison of

SEM / EDS and SIMS

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Advantages of SEM / EDS

• High magnification physical image

• Quantitative elemental information

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Advantages of SIMS

• Surface specific analysis

• Organic structure identification

• Profiling for depth distribution

• Light element detection

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EDX sampling depth is typically 1 micron

For many applications surface sensitivity is needed…

Not 10 xNot 100 xBut 1000 x – SIMS can offer true surface analysis

509 m

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Conclusions

• SIMS & EDS give complementary information

• SIMS has advantages for

– Organic surface contamination– 3 dimensional analysis of multi-layer structures

• SEM / EDS has advantages for

– High magnification physical imaging– Quantitative analysis

Page 17: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

MiniSIMS ToF

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Typical Applications for the MiniSIMS ToF

• Analysis of unknown samples (failure analysis)

• Analysis of unique samples

• Improved analysis of organic materials

• Smaller area static SIMS analysis

• Retrospective experiments

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MiniSIMS ToF

• Advantages over Quadrupole Instrument

– Smaller area static SIMS analysis

– Extended mass range

– Higher mass resolution (organic v inorganic)

– Retrospective experiments

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MiniSIMS ToF

• Use of Continuous Primary Beam

– Fast analysis (= low cost per sample)

– No loss of image resolution in pulsing

– Simplified depth profiling (single beam)

• Fast & simple static / imaging / dynamic

SIMS in one instrument

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Static SIMS (Surface Analysis)

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Polycarbonate (Bisphenol–A)

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Characterisation of Layer

Structurally significant peaks

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Characterisation of Layer

Structurally significant peaks

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Effect of Decreasing Area

Analysis Area

Dimension

Mass Scale

Quadrupole Data

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Effect of Decreasing Area

Analysis Area

Dimension

Mass Scale

Time of Flight Data

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Higher Mass Resolution

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Higher Mass Resolution

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High Mass Peaks (KI)

0

100

200

300

400

350 550 750 950 1150 1350

Mass

Inte

nsi

ty

Extended Mass Range

K9I8

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Extended Mass Range

ToF –ve ion mode: Irganox molecular ion at m/z = 1175 Da

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Imaging SIMS (Spatial Analysis)

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Surface Organic Contaminant Analysis

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Retrospective Analysis

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Retrospective Analysis

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Retrospective Analysis

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Dynamic SIMS (Depth Analysis)

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Multi-Layer Coating

(Three Dimensional Analysis)

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Retrospective Profiling

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Conventional Profile

Sodium high at surface

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Retrospective Cross-Section

Sodium inclusion in layer

Sodium high at surface

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Retrospective Profiling

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Retrospective Analysis

Horizontal Image of inclusion

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Summary

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MiniSIMS Summary

• SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films

• Information easily available by SIMS may be difficult or impossible by any other technique

• SIMS is especially valuable for the detection of:-– organic species (e.g. silicones, fluorocarbons)

– light elements (lithium, beryllium, boron …)

– group IA & IIA metals, group VII halides

Page 45: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

MiniSIMS Summary

• SIMS is a fast analysis technique, especially for imaging applications

• MiniSIMS ToF is most effective for a comparative analysis of samples

• Desktop MiniSIMS means SIMS is now affordable and accessible to all

Page 46: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

ToF MiniSIMS( v conventional ToFSIMS )

• Use of Continuous Primary Beam– Fast analysis (= low cost per sample)

– No loss of image resolution in pulsing

– Simplified depth profiling (single beam)

• Fast & simple static / imaging / dynamic

SIMS in one instrument

• Upgrade path from Quadrupole to TOF

Page 47: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .

ToF MiniSIMS( v quadrupole MiniSIMS )

• Improved Static SIMS from smaller areas• Retrospective Experiment

– 2D Imaging– 3D Imaging / Depth Profiling

• Extended Mass Range• Higher Mass Resolution

Page 48: An Introduction to SIMS and the MiniSIMS ToF © Millbrook Instruments Limited Blackburn, UK  .