div class=trans-pagebutton class=gotoPage data-page=1Page 1button div class=trans-imageimg data-url=document981-in-order-to-characterize-each-selective-etch-recipe-step-etch-rate-of-all-materialshtmlpage=1 data-page=1 class=trans-thumb lazyload alt=Page 1: 981In order to characterize each selective etch recipe step etch rate of all materials at play and Co residues quantification full sheet wafers have been prepared The Co … loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mM8Uw8AAh0BTZud3BwAAAAASUVORK5CYII= data-src=https:reader033fdocumentsnetreader033viewer2022060715607bfa38a7bf574dbf6e88d3html5thumbnails1jpg width=140 height=200 divdiv