Post on 25-May-2022
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Applications of Optical MEMS for Space Missions
Mathilde Gobet, Peter Herbst, Paolo Baroni, Cornel Marxer
Sercalo Microtechnology Ltd.Rue des Draizes 5
CH-2000 Neuchâtel, Switzerland
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Outline
• Application overview
• Low port count switch
• 50x50 optical MEMS switch matrix
• 3D MEMS mirror
• Conclusions
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Application overview (1)1) Low port count fiber optical switches
• Reconfiguration in experimental satellites
•
Redundancy switching in telecommunication satellites
• Optical sensors in satellites
• Delta Space Qualification
2) Large port count (50x50) optical switch matrix• Large scale optical cross connects
• Switching in telecommunication satellites
•
On board signal routing and reconfiguration in telecommunication satellites
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Application overview (2)3) MEMS mirror
• Pointing and tracking applications:
- fixed position
- telecommunications
• Scanning applications:
- LIDAR
-
3D vision system with time of flight measurement
- In satellite structural measurement
- Mars rover
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Low port count fiber optical switches
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Low port count fiber optical switches2x2 optical switchON/OFF switch
inherently no feedback required
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Applications: Redundancy switching• Line protection
• By-pass switching
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Applications: Optical sensors• Measurement ressource sharing
• Remote Network Monitoring
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Large port count (50x50) MEMS switch matrix
Optical fibrearray
MEMS micro-mirror arra
y
Macro mirror
ESA project ITT AO/1-4783/05/NL/PM
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
50x50 Optical MEMS Switch MatricesESA project ITT AO/1-4783/05/NL/PM
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde GobetCompetence in fiberoptic MEMSCompetence in fiberoptic MEMS
50x50 Optical MEMS Switch MatricesMicro-mirror array
No feedback
“easy”
calibration
“simple”
look-up table
No feedback required
Max. tilt angle α
/ actuation voltage ±3.1 °
/ 130V
Max. tilt angle +β
/ actuation voltage (Beta Electrode) +2.0 °
/ 88V
Max. tilt angle -β
/ actuation voltage (Two Alpha Electrodes) -2.0°
/ 69V
Resonance frequency > 490 Hz (13µm)
LE2
WE2
LE1
WE1
WTB
1
LTB1
WTB2
LTB2
Shielding
Mirror
BetaElectrode
AlphaElectrode
LA
LC2
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
50x50 Optical MEMS Switch MatricesESA project ITT AO/1-4783/05/NL/PM
Courtesy of A. Le Kernec and M. Sotom, Thales Alenia Space
Insertion losses
•
Average IL : ~ 5 dB
•
Maximum IL : 6 dB
Polarization dependent
insertion losses
•
Max. ∆IL : 0.17 dB
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde GobetCompetence in fiberoptic MEMSCompetence in fiberoptic MEMS
•
Satellite telecom payload with flexible beam-to-beam connectivity
–
optical generation & distribution of high-frequency LO’s (> 10 GHz)
–
optical frequency mixing and down-conversion, e.g. from Ka (30GHz) to C (4GHz)
–
optical cross-connection of µ-wave signals through MOEMS switches
LNA EOM
O/EO/EO/E
Optical X-Connect
O/EO/EO/E
HPA
Rx section Tx section
Rx antennas Tx antennas
Optical LO ’s
LNA : low-noise amplifierEOM : electro-optical mixerHPA : high-power amplifierLO:
Local Oscillator
Application: Large-Scale Optical Cross Connect
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Vertical comb drive MEMS mirror
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
3D MEMS mirror
-6
-4
-2
0
2
4
6
-120 -80 -40 0 40 80 120
Applied voltage [V]
Tilt
angl
e [°
]
x directiony direction
1 mm x 1 mm
fresx = 320 Hz fresy = 380 Hz
2000 g shock
test
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
3D MEMS mirror
-6
-4
-2
0
2
4
6
-120 -80 -40 0 40 80 120
Applied voltage [V]
Tilt
angl
e [°
]
x directiony direction
1.4 mm x 1.6 mm
fresx = 400 Hz fresy = 500 Hz
2000 g shock
test
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
Sercalo MEMS μMirror
Applications: Scanning, tracking and pointing
• No feedback loop• 2 independent axis• Continuous tilting• Single mirror or array
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde Gobet
• Switching time < 50 ms• Durability: no wear
Applications: Tunable filter, miniature spectrometer
Optics+
Sercalo MEMS μMirror
λ1 λ2 λ3 λ4 λi
λi selectionwith software
Optics+
Sercalo MEMS μMirror
Optics+
Sercalo MEMS μMirror
λ1 λ2 λ3 λ4 λi
λi selectionwith software
7th ESA Round Table on Micro/Nano Technologies for Space 13-17 Sept. 2010Optical MEMS for space applications
Competence in fiberoptic MEMS
Mathilde GobetCompetence in fiberoptic MEMSCompetence in fiberoptic MEMS
Conclusions
•
Large number of spatial applications for commercialized low port count switch, large optical switch matrix and tilt mirror• Less weight and size -> important for satellite integration•
No light through the switch necessary for maintaining the
mirror position•
Mirror tilt angle and resonant frequency can be adapted
to customer’s needs