Post on 30-Jan-2021
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Gimbal-Less Two-Axis Scanning MEMS Micromirrors
Device Datasheet S40206
Device Parameters SummaryDevice ID : S40206
Actuator Type: A5L2.1
Actuator Mode : Gimbal-less Dual-Axis Quasistatic
Mirror Type and Size : Bonded mirror of 7.5mm diameter
Mirror Coating : Aluminum
Maximum Mech. Angle - X Axis [degrees] : 1.0222
Maximum Mech. Angle - Y Axis [degrees] : 1.0500
Maximum Vdifference - X Axis [V] : 158
Maximum Vdifference - Y Axis [V] : 158
Driver Bias Voltage (Vbias) [V] : 80
Maximum Mech. Angle - Coupled Axes [degrees] : 1.2250
Resonant Frequency - X Axis [Hz] : 515
Resonant Frequency - Y Axis [Hz] : 518
Quality Factor - X Axis : 28
Quality Factor - Y Axis : 25
Recommended LPF Cutoff Frequency (6th Order Bessel) [Hz] : 240
Date and Time Report was Created: 07-Sep-2017 at 10:50:35
1
Static ResponseVoltage vs. Mech. Angle - Individual Axes
Voltage vs. Mech. Angle - Coupled Axes
2
Frequency ResponseSmall Signal Frequency Response - Magnitude
Small Signal Frequency Response - Phase
3
Step ResponseX-Axis Step Response
Y-Axis Step Response
4
2D Lookup TablesVoltage vs. X Mech. Angle - Lookup Table
Voltage vs. Y Mech. Angle - Lookup Table
5
Y vs. X Tilt - Addressable Mech. Angles
2D Lookup Tables
6
reportcover-2018-02S40206Device Parameters Summary
Static ResponseVoltage vs. Mech. Angle - Individual AxesVoltage vs. Mech. Angle - Coupled Axes
Frequency ResponseSmall Signal Frequency Response - MagnitudeSmall Signal Frequency Response - Phase
Step ResponseX-Axis Step ResponseY-Axis Step Response
2D Lookup TablesVoltage vs. X Mech. Angle - Lookup TableVoltage vs. Y Mech. Angle - Lookup TableY vs. X Tilt - Addressable Mech. Angles