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Gimbal-Less Two-Axis Scanning MEMS Micromirrors

Device Datasheet S40206

Device Parameters SummaryDevice ID : S40206

Actuator Type: A5L2.1

Actuator Mode : Gimbal-less Dual-Axis Quasistatic

Mirror Type and Size : Bonded mirror of 7.5mm diameter

Mirror Coating : Aluminum

Maximum Mech. Angle - X Axis [degrees] : 1.0222

Maximum Mech. Angle - Y Axis [degrees] : 1.0500

Maximum Vdifference - X Axis [V] : 158

Maximum Vdifference - Y Axis [V] : 158

Driver Bias Voltage (Vbias) [V] : 80

Maximum Mech. Angle - Coupled Axes [degrees] : 1.2250

Resonant Frequency - X Axis [Hz] : 515

Resonant Frequency - Y Axis [Hz] : 518

Quality Factor - X Axis : 28

Quality Factor - Y Axis : 25

Recommended LPF Cutoff Frequency (6th Order Bessel) [Hz] : 240

Date and Time Report was Created: 07-Sep-2017 at 10:50:35

1

Static ResponseVoltage vs. Mech. Angle - Individual Axes

Voltage vs. Mech. Angle - Coupled Axes

2

Frequency ResponseSmall Signal Frequency Response - Magnitude

Small Signal Frequency Response - Phase

3

Step ResponseX-Axis Step Response

Y-Axis Step Response

4

2D Lookup TablesVoltage vs. X Mech. Angle - Lookup Table

Voltage vs. Y Mech. Angle - Lookup Table

5

Y vs. X Tilt - Addressable Mech. Angles

2D Lookup Tables

6

reportcover-2018-02S40206Device Parameters Summary

Static ResponseVoltage vs. Mech. Angle - Individual AxesVoltage vs. Mech. Angle - Coupled Axes

Frequency ResponseSmall Signal Frequency Response - MagnitudeSmall Signal Frequency Response - Phase

Step ResponseX-Axis Step ResponseY-Axis Step Response

2D Lookup TablesVoltage vs. X Mech. Angle - Lookup TableVoltage vs. Y Mech. Angle - Lookup TableY vs. X Tilt - Addressable Mech. Angles