1 Resist Heating Dependence on Subfield Scheduling in 50kV Electron-beam Maskmaking S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts., University.
1 Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts.,
Mask-writing Strategies for Increased CD Accuracy and Throughput Calibrating Achievable Design Annual Review September 2003 Swamy V. Muddu, Andrew B. Kahng.
A.B. Kahng, I. Mandoiu and S. Muddu -- UCSD
Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication
