PLASMA DYNAMICS OF MICROWAVE EXCITED MICROPLASMAS IN A SUB-MILLIMETER CAVITY* Peng Tian a), Mark Denning b), Mehrnoosh Vahidpour, Randall Urdhal b) and.
* Work supported by SRC 2071.025, National Science Foundation and Lam Research.
VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*
AGENDA
COMPUTATIONAL INVESTIGATION OF DUAL-FREQUENCY POWER TRANSFER IN CAPACITIVELY COUPLED PLASMAS* Yiting Zhang and Mark J. Kushner
PROPERTIES OF NONTHERMAL CAPACITIVELY COUPLED PLASMAS GENERATED IN NARROW QUARTZ TUBES FOR SYNTHESIS OF SILICON NANOPARTICLES *
