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Trieste, 8-10 November 1999 CMOS technology1 Outline Introduction CMOS devices CMOS technology CMOS logic structures CMOS sequential circuits CMOS regular.
Making nanostructures: Top down Approach Photolithography Electron beam lithography Micromechanical structures Thin films, including MBE Self-assembled.
Paulo MoreiraTechnology1 Outline Introduction – “Is there a limit ?” Transistors – “CMOS building blocks” Parasitics I – “The [un]desirables” Parasitics.
Outline
MetalMUMPs Process Flow Stafford Johnson Advanced Development Engineering Manager.
CNST SURF students outside and with others inside the new NIST NanoFab.
MetalMUMPs Process Flow