Divergent Illumination Optical Testing Device M. Fried 1, Z. Horváth 2, G. Juhász 1, O. Polgár 1, T. Mosoni 1, P. Petrik 1 1 Research Institute for Technical.
Thickness map [nm] of the poly-Si layer of a poly-Si/SiO 2 /Si multi-layer structure
![Thickness map [nm] of the poly-Si layer of a poly-Si/SiO 2 /Si multi-layer structure](https://static.fdocuments.net/doc/330x215/568137b4550346895d9f5613/thickness-map-nm-of-the-poly-si-layer-of-a-poly-sisio-2-si-multi-layer.jpg)
![Thickness map [nm] of the poly-Si layer of a poly-Si/SiO 2 /Si multi-layer structure](https://static.fdocuments.net/doc/330x215/56815d8c550346895dcb9925/thickness-map-nm-of-the-poly-si-layer-of-a-poly-sisio-2-si-multi-layer-56bc9d2e361a2.jpg)
