1 Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts.,
Toward a Methodology for Manufacturability-Driven Design Rule Exploration Luigi Capodieci, Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, and Jie Yang.
Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication
Toward a Methodology for Manufacturability-Driven Design Rule Exploration
