SRF Materials Workshop; MSU, October 29-31, 2008 Recent Progress with Atomic Layer Deposition T.Proslier 1,2, J.Norem 1 J.Elam 3, M.Pellin 4, J.Zasadzinski.
ALD Thin Film Materials LDRD review 2009NuFact09.
Recent Progress with Atomic Layer Deposition
ALD Thin Film Materials
Promising Directions for Developing Nano-structured Photocathodes