QNX BASED SOFTWARE FOR PARTICLE ACCELERATOR CONTROL SYSTEM OF FLNR
IBM Foundry Oxide Thickness LithographyProcessOperatingOxide NameVoltageThickness nm 0.25 µm6SF2.55 3.37 0.13 µm8RF1.2 & 1.52.2 2.2 & 3.35.2 Satish Dhawan,
Modern Test and Measure: February 2015
