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1.Introduction and application. 2.Light source and photomask, alignment. 3.Photolithography systems. 4.Resolution, depth of focus, modulation transfer.
Announcements 11/4/11 Prayer Slinkies! HW 28-4 part (d) is canceled Exam update Progress Report due a week from Saturday The three demos from last time.
Announcements 3/14/11 Prayer Exam is being picked up from Testing Center even as we speak, hopefully graded within a couple of days.
Announcements 11/5/10 Prayer Exam being graded, hopefully done by Monday Survey about Waves HW problems. Only 7 responses so far. (Thanks!) If you are.
Introduction and application. Light source and photomask, alignment. Photolithography systems. Resolution, depth of focus, modulation transfer function.
