Chapter 5
2012 tus lecture 5
1.Introduction and application. 2.Dopant solid solubility and sheet resistance. 3.Microscopic view point: diffusion equations. 4.Physical basis for diffusion.
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5 Materials Science Diffusion (1)
Ultrathin Gate Dielectrics on SiGe/SiGeC Heterolayers By Siddheswar Maikap
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Diffusionddd
Introduction and application. Dopant solid solubility and sheet resistance. Microscopic view point: diffusion equations. Physical basis for diffusion.