The top documents tagged [high density ar plasma]

Y. Miyagawa (AIST)CCP2006 Gyengju Plasma analysis for PIII processing by a PIC-MCC simulation Y. Miyagawa, M. Ikeyama, S. Miyagawa National Institute.

Y. Miyagawa (AIST)CCP2006 Gyengju Plasma analysis for PIII processing by a PIC-MCC simulation Y. Miyagawa, M. Ikeyama, S. Miyagawa National Institute.

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