PROPERTIES OF NONTHERMAL CAPACITIVELY COUPLED PLASMAS GENERATED IN NARROW QUARTZ TUBES FOR SYNTHESIS OF SILICON NANOPARTICLES* Sang-Heon Song a), Romain.
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark J. Kushner b) a) Department of Nuclear Engineering.
AGENDA
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS *
M. Dorf (LLNL) In collaboration with I. Kaganovich , E. Startsev , and R. C. Davidson (PPPL)
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS THROUGH INTERACTION OF ELECTRON BEAMS AND THE BULK IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark.
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS AND FLUX RATIOS IN PULSED CAPACITIVELY COUPLED PLASMAS *
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS * Sang-Heon Song a) and Mark J. Kushner b)
PROPERTIES OF NONTHERMAL CAPACITIVELY COUPLED PLASMAS GENERATED IN NARROW QUARTZ TUBES FOR SYNTHESIS OF SILICON NANOPARTICLES *
