MEMS-ELECTRO STATICALLY ACTUATED CANTILEVER BEAM
Models.mems.Electrostatically Actuated Cantilever
Nanoelectromechanical Switches (NEM Relays & NEMFETs) Dimitrios Tsamados Adrian Ionescu EPFL Kerem Akarvardar H.-S. Philip Wong Stanford Elad Alon Tsu-Jae.
Reduced-Order Models for MEMS Applications
