Report - Oil Diffusion Pump ULK/PFL/PBL series PBL series Oil ... · PBL-20 PBL-14 PBL-10 PBL-06 PBL-04 PBL-02 10,000 1,000 100 10 1 Pressure Pumping speed L/s 10 -2 10 -1 10 0 Pa 10-4 -3

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