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Performance of Laser Annealed Junctions in Advanced CMOS ......NMOS 1.4 A 1.5 A • 1.4-1.5Å ... 200 1,000 1,100 1,200 1,300 1,400 1,400 1,200 1,000 800 600 Spike 1050°C 990°C 1010°C
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