Report - EUV Endurance Testing of Ruthenium- Capped Multilayer …euvlsymposium.lbl.gov/pdf/2005/pres/43 3-CC-13 Hill.pdf2005 EUVL Symposium 12-2.0-1.5-1.0-0.5 0.0 0.5 0 1 01-8 2 10-8 3 10-8

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