inlinetest.eu
inlinetest.eu
Erfahrungsbericht eines erfolgreichen Antragstellers
29.04.2019
Corinna Grosse
inlinetest.eu
Project Identity
29.04.2019
NANOTEST;
48; 29%
TRT;
52; 32%
TUC; 40; 25%APC;
12; 7%
BTE;
12; 7%
PM PER PARTNER
NANOTEST;
316,8; 24%TRT;
475,9; 35%
TUC;
330,3; 25%
APC;
105,0; 8%
BTE;
105,0; 8%
FUNDING PER PARTNER
5 partners
3 countries
164 PMs
1.76 M€ budget
1.33 M€ funding (76%)
Work programme: Horizon 2020
Topic: ICT-31-2017 (Inf. Communic. Techn.)
Type of action: IA (Innovation Action)
Start: 01.01.2018
Duration: 36 Months
Corinna Grosse
inlinetest.eu
Project Target
▪ INLINETEST targets the design, realization, devlopment and
test of two novel in-line inspection systems for
micro/nano-electronic components. Thereby, the fast,
contactless and non-destructive full-field thermometric
methods of Pulse-Infrared Thermography (PIRT) and
Thermoreflectance (TR) are exploited for the first time to
enable 100% in-line production monitoring.
29.04.2019 Corinna Grosse
inlinetest.eu 29.04.2019 Corinna Grosse
inlinetest.eu
Typical die attach failure
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inlinetest.eu
SoA for non-destructive testing
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Stress measurement
chip
(in situ)
e.g. Schindler-Saefkow, et al, 2014
Encapsulated ok
Cross-sensitivity to
moisture swelling & T
Expensive dies
s
TransducerCrack
Scanning Acoustic
Microscopy
(ex situ)
e.g. Deplanque et al, 2008
R
Access from top
required
Moisture exposure
Problems w pores &
slopes
Pulse IR
Thermography
(ex situ)
e.g. May et al, 2012
T
Full field
Fast method, in-line
Access from top
required
Stress Die
Thermal structure
function method
(in situ)
e.g. Schweizer et al. 2009
SC
SR
Encapsulated ok
Not local
T (t)
Corinna Grosse
inlinetest.eu
Project Objectives
29.04.2019
Pick & Place Sinter processIn-line quality
control of die attach ✓ |
F [N] / T [°C]
t ~ 100 s t < 200 s t ~ 60 s t ~ 100 s t ~ 60 s
Excitation
source
okChip
Sinter paste
Feedback loop
Stamps
VacuumTR
Data managementExcitation
sourceIR
EncapsulationIn-line quality control
pf Encapsulation
Feedback loop
flash
flash
IR-camera
sample holder
(XY)
sample
IR-lens
TR @ TRL 5IR @ TRL 6
Corinna Grosse
inlinetest.eu
Consortium
▪ NANOTEST (SME) is a well-established test equipment
manufacturer and builds the in-line inspection system,
▪ TRT is a leading European microelectronic components and
systems manufacturer and global player and is to test the in-line
inspection system on their research production line for RF HEMT
components.
▪ BTE (SME) comes in as a tool manufacturer to incorporate the
envisaged equipment,
▪ APC (SME) owns a production line for micro/nano-electronic
components and will test the novel equipment under real life
conditions.
▪ TUC with longstanding expertise in thermal and reliability
engineering for test systems in cooperation with industry.
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Industrial advisory board (IAB)
Roles:
▪ Monitoring the general scientific and technological community in those research areas tackled by the
project to determine the state-of-the-art and industry evolution.
▪ Keeping abreast of industry technological trends.
▪ Feedback in terms of specific application requirements during the whole project (specification,
development, testing phases)
▪ Monitoring of the progress of scientific research and technological developments carried out in the
project.
▪ Connection between this project and related projects, networks of excellence, standardization bodies
and in general, with adjacent research communities.
29.04.2019
Dr. André Cardoso
AMKOR, Portugal
Dr. Reinhard Pufall
Infineon, GermanyJohn Janssen
NXP, Netherlands
Corinna Grosse
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INLINETEST Interactions
29.04.2019
Technology
demonstrators
Intellectual
propertyMethodology
and design
flash
flash
IR-camera
sample holder
(XY)
sample
IR-lens
In-line Inspe-
ction systems
Heat PathTO270
Heat Path
QFN
Heat Path
TO 247 Power MCM Package
In-line controlling
in Thales assembly
and packaging line
In-line analysis tool
as add-on module
for Boschman
equipment
In-line defects
detecting in
Production
lines
End-usersIndustrial Advisory Board
Po
ten
tial
en
d-u
sers
Ind
ust
rial
req
uir
em
en
t
Consortium
Technology development
Sample development
Design & adaption
Sample development
Equipment manufacturing
Corinna Grosse
inlinetest.eu
Exploitation roadmap
29.04.2019 Corinna Grosse
Commercialization
IP Protection Technology Licensing
Methodology development and Proof of concept
Development of advanced packaging
technologies
Development of advanced packaging
equipment
2018 2019 2020 2021 2022
Technology proof-of-concept and
validation in lab
Demonstration & qualification of in-line
inspection systems
Two test systems for inline failure analysis
commercially available
Process optimization by 100% in-line mapping of assembled
and packaged components
Implementation of failure analysis systems into the
production lines
Production of proved high-end component for avionic and Aerospace application
20172016
Industrial equipment with failure analysis modules as
add-on option
Proved packaging technologies for mass and
costumer specific production
TRL 6 - 8
INLINETEST
Integration of inspection systems into packaging and
assembly equipment
inlinetest.eu
Work packages
29.04.2019
WP1; 16; 10%
WP2; 65; 39%
WP3; 61; 37%WP4; 11; 7%
WP5; 11; 7%
PM PER WP
# Partner Topic WP Leader Start End
WP1 APC Specification and end-user requirement Eef Boschman M1 M6
WP2 TUCDesign and realization of in-line
inspection systemsDaniel May M1 M24
WP3 NANOTESTIntegration and demonstration of in-line
inspectionsDan Wargulski M13 M36
WP4 TRT Dissemination and Exploitation Afshin Ziaei M1 M36
WP5 NANOTEST Project Management Mohamad Abo Ras M1 M36
WP1: Specification and End-User Requirement
WP2: Design and
Realization of in-
line Inspection
Systems
WP3: Integration
and Demonstration
of In-line
Inspections
WP4: Dissemination and Exploitation
WP
5: M
an
ag
em
en
t
Corinna Grosse
inlinetest.eu
Gantt chart
29.04.2019
INLINETEST Gantt ChartActivity Duration 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36
WP1: Specification and End-User Requirement 1 6
Task 1.1: Specification of end-user requirements 1 3
Task 1.2: Specification of failure analysis methods and IR
& TR system components1 4
Task 1.3: Specification of samples for system verification 1 6
Task 1.4: Definition of data management and
specification of the measurement software1 6
WP2: Design and Realization of in-line Inspection
Systems1 24
Task 2.1: Adaption, Design and Conception of the IR and
TR Failure Analysis Systems1 6
Task 2.2: Design and Construction of Excitation Sources 4 23
Task 2.3: Development of Software Modules 4 23
Task 2.4: Development of industrial Samples 4 18
Task 2.5: Performance, Verification and Demonstration
under Laboratory Conditions12 24
WP3: Integration and Demonstration of In-line
Inspections13 36
Task 3.1: Preparation of Demonstration of in-line
inspection on Production Lines 13 24
Task 3.2: Adaption of the Measurement Systems for the
Integration13 31
Task 3.3: Final Integration and Interconnection with the
Production Lines25 36
Task 3.4: Final Demonstration of in-line Inspection on
industrial Scales and Conditions32 36
WP4: Dissemination and Exploitation 1 36
Task 4.1: Setup of Dissemination & Exploitation Team 1 6
Task 4.2: Create Business Model and Exploitation
activities1 12
Task 4.3: Dissemination 12 36
WP5: Project Management 1 36
Task 5.1: Overall legal and contractual management 1 36
Task 5.2: Financial and administrative management 1 36
Task 5.3: Monitoring of project activities and technical
work progress 1 36
Task 5.4: Quality assurance and risk management 1 36
Task 5.5: Coordination of knowledge management and
other IP-related activities1 36
Completed
On going
Just started
On going
On going
Corinna Grosse
inlinetest.eu
Workplan
29.04.2019
Specification
End-user
requirementsFailures Samples
Software/
Interfaces
Develop/adapt
IR-FA system
Develop/adapt
TR-FA system
Demonstration on industrial samples (in lab, SME site)
IR-FA system integration
into production
TR-FA system integration
into production
Rese
arc
hD
evelo
pm
en
t
Start
M36
Dem
on
stra
tio
n
Demo on industrial samples (in-line, end-user site)
MS1
MS3
MS5
Mark
et
rep
lica
tio
n
M30
MS2
MS4
In-line FA systems completely verified in industrial production
lines
Marketing to project partners and new end-users
M6
M18
M24
Corinna Grosse
inlinetest.eu 15
Arbeit EU Projekt
▪ Gründe: Unterschiedliche Ansätze, Arbeitsweisen, Ideen
Experten in Spezialgebieten, die man ggf in Deutschland nicht findet
Direkte Zusammenarbeit mit End-Nutzer der entwickeltenGeräte
…
▪ Wichtig im Projekt: Ständige Kommunikation, nicht nur alle 6 Monate in
Meetings
Klare Aufgaben und Ziele für Partner
Kritische Pfade bewusst machen
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inlinetest.eu 16
Tipps zur Antragstellung
▪ Antragsteller selbst überzeugt von Idee
▪ 1 Person Hauptverantwortlicher für Schreiben des Antrags, der die zu schreibenden Abschnitte verteilt und sammelt. Gleichzeitiges Arbeiten an einem Dokument, oder Schreiben in Gruppen funktioniert meist nicht gut.
▪ Klare Aufgaben und Ziele im Projekt für alle Partner
▪ Fokussierung auf 1 Thema/1 Produkt (z.B. kompletterDemonstrator)
▪ Ab TRL 3-4 klarer Businessplan
▪ Industrie-Advisory Board
▪ Kritische Pfade bewusst machen (klare Zeitpläne, z.B. Probenvorbereitung gleich starten)
29.04.2019 Corinna Grosse
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