Complementi di Fisica - Lecture 27 26-11-2012
L.Lanceri - Complementi di Fisica 1
“Complementi di Fisica”Lecture 27
Livio LanceriUniversità di Trieste
Trieste, 01-12-2010
26-11-2012 L.Lanceri - Complementi di Fisica - Lecture 27 2
In this lecture• Contents
– Doped (“extrinsic”) semiconductors at equilibrium• Concentrations of charge carriers (electrons and
holes)• Fermi level
• Reference textbooks– D.A. Neamen, Semiconductor Physics and Devices, McGraw-
Hill, 3rd ed., 2003, p.83-96 (Density of states, Fermi-Dirac), p.115-145 (4.2 Dopant atoms and energy levels, 4.3 extrinsicsemiconductor, 4.4 Statistics of donors and acceptors, 4.5Charge neutrality, 4.6 Position of the Fermi level)
– R.F.Pierret, Advanced Semiconductor Fundamentals, PrenticeHall, 2003, 2nd ed., p. 96-128.
– S.M.Sze, Semiconductor Devices - Physics and Technology,J.Wiley & Sons, 2nd ed., 1985, p. 21-28.
Complementi di Fisica - Lecture 27 26-11-2012
L.Lanceri - Complementi di Fisica 2
“extrinsic” (doped)semiconductors
26-11-2012 L.Lanceri - Complementi di Fisica - Lecture 27 4
Donors and acceptors• Bond model:
n-type Si with “donor” impurities(As: 5 valence electrons)The fifth electron is “donated”to the conduction band; the remaining positive ion is fixed
p-type Si with “acceptor” impurities(B: 3 valence electrons)An additional electron is “accepted”from the valence band, creating a holeThe resulting negative ion is fixed
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Donors and acceptors• Energy band model
n-type Si with “donor ” energy levelsvery close to the conduction band;ionization energy is very small,most donor atoms are ionizedalready at room temperature !
p-type Si with “acceptor ” energy levelsvery close to the valence band;most acceptor atoms capture an electron, leaving a free holealready at room temperature !
26-11-2012 L.Lanceri - Complementi di Fisica - Lecture 27 6
Impurities and ionization energies - 1• Measured ionization energies (eV)
Sienergy gapEg = 1.12eV
GaAsenergy gapEg =1.42eV
EC EC - E (eV)
EC EC - E (eV)
E - EV (eV)EV
E - EV (eV)EV
A = Acceptor D = Donor
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Impurities and ionization energies - 2• Doping with donors (n-type)
– For instance: P or As in Si– Level close to EC
• Doping with acceptors (p-type)– For instance: B in Si– Level close to EV
• Unwanted impurities– Many impurities (unavoidable, to some extent) contribute
levels close to the center of the gap– Also these levels are important, as “traps” or “recombination-
generation centers” (more on this later)
26-11-2012 L.Lanceri - Complementi di Fisica - Lecture 27 8
Impurities and ionization energies - 3• Donor ionization energies (eV): can we understand or at
least guess the order of magnitude in simple terms? Bohrmodel…
isolated H atom, lowest level:Bohr model, n=1
−q, m0+q
vacuum: ε0
eV6.13
eV16.1318
1
22220
40
!=
!=!=
Ennh
qmEn "ionization energy
−q, mn*
+q
Si: ε/ε0 = 12
Donor atom in Si crystal:Lowest level for the external electron
eV085.09.0121eV6.13
18
21,
,0
20
222
4
,
!""!
##$
%&&'
(#$%&
'(=)=
**
D
nHnn
nD
E
Emm
nhqmE
++
+
ionization energy
Complementi di Fisica - Lecture 27 26-11-2012
L.Lanceri - Complementi di Fisica 5
26-11-2012 L.Lanceri - Complementi di Fisica - Lecture 27 9
Impurities and ionization energies - 4• Acceptor ionization energies (eV): similar reasoning
isolated H atom, lowest level:Bohr model, n=1
eV6.13
eV16.1318
1
22220
40
!=
!=!=
Ennh
qmEn "
−q, m0+q
vacuum: ε0
ionization energy
+q, mp*
−q
Si: ε/ε0 = 12
Acceptor atom in Si crystal:Lowest level for the hole
eV018.019.0121eV6.13
18
21,
,0
20
222
4
,
!""!
##$
%&&'
(#$%&
'(=)=
**
D
nHpp
nD
E
Emm
nhqm
E++
+
ionization energy
26-11-2012 L.Lanceri - Complementi di Fisica - Lecture 27 10
Impurities and ionization energies - 5• The simple Bohr model for donor and acceptor
ionization energies:– Describes the impurities in an oversimplified way (pseudo-
hydrogen atoms with outer electron or hole orbiting throughthe semiconductor material):
• Effective mass mn*, mp*• Dielectric constant ε
– Gives the correct orders of magnitude for ionization energies(EI < 0.1eV): OK because many semiconductor atoms areincluded in the Bohr orbit corresponding to the lowest level(Exercise: easily checked by computing the Bohr radius)
– Is not supposed to be able to reproduce the details !• Small ionization energy ⇒ most donor/acceptor atoms
are ionized at room temperature
Complementi di Fisica - Lecture 27 26-11-2012
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n-type in more detailExpect:
n > ni mobile electronsND
+
fixed positive ions(out of ND donors)
p < ni mobile holes
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Intrinsic carrier concentration
gC E( ) =mn
! 2mn! E " Ec( )
# 2!3
F E( ) ! e" E"EF( ) kT
gV E( ) =mp
! 2mp! EV " E( )
# 2!3
1! F E( ) " e! EF !E( ) kT
n ! NCe" EC "EF( ) kT
p ! NVe" EF "EV( ) kT
NC ! 2 2"mn#kT
h2$
% &
'
( ) 3 2
NV ! 22"mp
#kTh2
$
% &
'
( ) 3 2
Complementi di Fisica - Lecture 27 26-11-2012
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Extrinsic carrier concentration
gC E( ) =mn
! 2mn! E " Ec( )
# 2!3
F E( ) ! e" E"EF( ) kT
gV E( ) =mp
! 2mp! EV " E( )
# 2!3
1! F E( ) " e! EF !E( ) kT
n ! NCe" EC "EF( ) kT
p ! NVe" EF "EV( ) kT
NC ! 2 2"mn#kT
h2$
% &
'
( ) 3 2
NV ! 22"mp
#kTh2
$
% &
'
( ) 3 2
The same ingredients…
…the same (formal) results ! But now n ≠ p : why ??
26-11-2012 L.Lanceri - Complementi di Fisica - Lecture 27 14
Carrier concentrations: intrinsic• (approximate) equations valid for both intrinsic and extrinsic:
• Intrinsic case (EF ≡ Ei)
n ! NCe" EC "EF( ) kT
NC ! 2 2"mn#kT
h2$
% &
'
( ) 3 2
NV ! 22"mp
#kTh2
$
% &
'
( ) 3 2
p ! NVe" EF "EV( ) kT
( ) ( )
( ) kTEVCi
kTEEVCi
VCiF
kTEEV
kTEECi
gVC
ViiC
eNNneNNnnp
EEEE
eNeNnpn
22
2...
!!!
!!!!
="==
+#==
====
NC = nieEC !Ei( ) kT
NV = nieEi !EV( ) kT
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Carrier concentrations: extrinsic• (approximate) equations valid for both intrinsic and extrinsic:
• Extrinsic case: n ≠ p ⇔ EF ≠ Ei
( ) kTEEC
FCeNn !!"23
2
22 !!"
#$$%
&'
(
hkTmN n
C)
23
2
22 !
!"
#$$%
&'
(
hkTm
N pV
)( ) kTEEV
VFeNp !!"
( ) ( ) ( )
( ) ( ) ( )
AiA
DiDi
kTEEi
kTEEkTEEi
kTEEi
kTEEkTEEi
NnnNppNnpNnnnnp
eneenp
eneennFiVFVi
iFFCiC
2
22
:type-
:type-
!!
!!=
==
==""""
""""
( ) kTEEiC
iCenN !=
( ) kTEEiV
VienN !=
approximatefor
completeionization
EF moves away from Ei
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Fermi level EF for complete ionization• Complete ionization of donors (n-type):
• Complete ionization of acceptors (p-type):
( ) ( )
!!"
#$$%
&='(
=()= '''
D
CFC
kTEE
D
CD
kTEEC
NNkTEE
eNNNeNn FCFC
ln
( ) ( )
!!"
#$$%
&='(
=()= '''
A
VVF
kTEE
A
VA
kTEEV
NNkTEE
eNNNeNp FCVF
ln
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EF : dependence on n, p at fixed T
n-type
p-type
n ! ND " EC # EF $ kT lnNC
ND
%
& '
(
) *
p ! NA " EF # EV = kT ln NV
NA
$
% &
'
( )
NA cm-3[ ]
ND cm-3[ ]
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Concentrations and EF : an example• A silicon ingot is doped with As (ND≈1016 atoms/cm3). Find the carrier
concentration and the Fermi level at room temperature (T=300K)Assuming complete ionization of donors:
n ! ND =1016cm"3
ni = NCe" EC "Ei( ) kT !
! 2.8 #1019( ) # 5.2 #10"10( ) !!1.45 #1010cm"3
p ! ni2 ND =
1.45 #1010( )21016
=
= 2.1#104cm"3
EC ! EF = kT ln NC
ND
"
# $
%
& ' = 0.0259ln 2.8 (10
19
1016"
# $
%
& ' =
= 0.206 eV
n = nieEF !Ei( ) kT " EF ! Ei = kT ln n
ni
#
$ %
&
' (
EF ! Ei = 0.0259ln 1016
1.45 )1010#
$ %
&
' ( = 0.354 eV
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Carrier concentrations: general case• Both donor and acceptor impurities present
simultaneously– Concentrations: ND and NA respectively– ND
+ and NA− : concentrations of ionized donors and acceptors
• Starting point: overall charge neutrality(only “unbalanced” charges appear explicitely),and mass action law
n + NA! = p + ND
+ np = ni2
ND+ = ND ! nD
NA! = NA ! pA
nD electrons in donor states (non-ionized donors)
pA holes in acceptor states (non-ionized acceptors)
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Carrier concentrations: general case
ND+ = ND ! nD
NA! = NA ! pA
nDpA
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Carrier concentrations
• Assuming complete ionization of donors and acceptors
NA! " NA ND
+ " ND
n + NA = p + ND np = ni2
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Carrier concentrations• Solving for n, p:
2iDA nnpNpNn =+=+
n-type: ND > NA p-type: NA > ND
nn = 12ND ! NA + ND ! NA( )2 + 4ni
2" # $
% & '
pn = ni2 nn
if ND ! NA >> ninn ( ND ! NA
pp = 12NA ! ND + NA ! ND( )2 + 4ni
2" # $
% & '
np = ni2 pp
if ND ! NA >> nipp ( NA ! ND
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Extrinsic Fermi level vs temperature• Fermi level computation in
the general case, taking Tinto account:– from ND and NA compute n, p– from n, p extract EF
• ni increases with T !– Low T: extrinsic behaviour– High T: intrinsic behaviour
n = nieEF !Ei( ) kT " EF ! Ei = kT ln n
ni
#
$ %
&
' (
p = nieEi !EF( ) kT " Ei ! EF = kT ln p
ni
#
$ %
&
' (
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Electron density vs temperature• Another point of view:
electron concentrationin n-type semiconductor– Very low T:
• “freeze-out” region• donors not ionized
– Medium T:• “extrinsic” region• n ≈ ND
– High T:• “intrinsic” region• n ≈ ni
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Non-degenerate and degenerate s.c.• All the results in this lecture assumed the Boltzmann
approximation, that is EC - EF > 3kT, EF - EV > 3kT(“non-degenerate” semiconductors)– Relatively small doping concentrations: donor and acceptor atoms
can be considered as “isolated” (energy levels)
• For very large doping concentrations (ND ≈ NC , NA ≈ NV)(“degenerate” semiconductors)– Donor (acceptor) energy levels become bands, overlapping with the
conduction (valence) band– The effective forbidden gap becomes smaller– The Fermi level is inside the enlarged conduction (valence) band,
with a very large concentration of electrons (holes) available forconduction
– The Boltzmann approximation is no longer valid in this case
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Lecture 27 - summary• The “mass action law” (np = ni
2) is valid also for extrinsic s.c.
• The intrinsic concentration ni increases with T
• We found relations between n, p, ni and EF
• In the intrinsic case n = p = ni
• We have learned how to compute n, p, and EF in the generalextrinsic case (depending on ND, NA)
• Specifying EF is a very convenient way of parameterizing n, p
• Intrinsic/extrinsic behaviour depends on T !
Complementi di Fisica - Lecture 27 26-11-2012
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Lecture 27 - exercises• Exercise 1: A silicon sample at T=300K contains an acceptor impurity
concentration of NA=1016 cm-3. Determine the concentration of donorimpurity atoms that must be added so that the silicon is n-type and theFermi energy is 0.20 eV below the conduction band edge.
• Exercise 2: Find the electron and hole concentrations and Fermi levelin silicon at 300K (a) for 1x1015 boron atoms/cm3 and (b) for 3x1016 boronatoms /cm3 together with 2.9x1016 arsenic atoms/cm3.
• Exercise 3: Calculate the Fermi level of silicon doped with 1015, 1017
and 1019 phosphorus atoms/cm3, assuming complete ionization. From thecalculated Fermi level, check if the assumption of complete ionization isjustified for each doping. Assume that the ionized donors density isgiven by ND
+ = ND(1-F(ED)).
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