wiki.nanotech.ucsb.edu · ALIGNMENT Column Adjustment Procedures Adjustments 110 Gun Tin and Shift...

ALIGNMENT Column Adjustment Procedures

Adjustments

110 Gun Tin and Shift Ii] Step: 2 Use Crossover (X-Over) mode on ly as a check on where the

Step: 2 ~ , illumination centre is if gross mi sali gnmelll is suspected.

I cante!:] " . -=...., ~ TABLE 6-24 GUN TILT AND SHIFT, STEP 2

GTX, V: 0.00 0.00 .

GSX, V: 0.90 ·6.42 High Tension: 30000.0

Probe Current: 1 tTune All

OX-Over 0 Lens Mod

Contrast 23.7

-- I 11.1 I

Gun Tin Gun Shift

iEEat

W fo Z

[il ..... I----

For spotsizes >4, adjust both Gun Tilt and Gun Shift. For spotsizes <4, adjust only Gun Shift.

Order I Act jon

2

3

4

5

Select TV Rate from the Scan pulldown menu and Average 4 from the Filler pulldown menu .

Use the contrast adjuster to see the image on the screen.

Do not change aperture position during the aligl1me1lt.

At 30kV. spOIl move the stage to align the feature of interest fro m the sample under the cross on the screen at a magni fication of 20.000X. To assist alignment, you can make two videoprints, one at 5000X and one at 20,OOOX to record the original positi on.

C li ck on + to move to the next spotsize (probe current). The image may shift sli ghtly. If necessary use the contrast control to see the image.

501 0 1

Adjustments

110 Gun Tilt and Shift

Step: 9

Cancel I I Save

Last Step. ~Cancel or Save.

50 1 01

I:)

o -


Steps: 3 through 9

TABLE 6-25 GUN TILT AND SHIFT, STEPS 3 THROUGH 9

I Use Gun Shift to bring the image feat ure back under the reference point. Gun Tilt usuall y will only need to be use from spot 4 to spot 7. Use Gun Tilt to change the beam illumination if necessary. Do not use Gun Tilt in preference to Gun Shirt to correct image feature position.

2 Cli ck on + to move to the next spotsize . Repeat the previous step.

3

4

5

When a ll seven spotsizes are a ligned, click on the SAVE

but ton. The system is a li gned for 30 kY.

Repeat the procedure for all kYs in the lis t. Be sure that you do not move the stage. and keep Beam Shift at zero. Use the same feat ure to align each kY and spot.

When alignment is completed any smail change in rotati on centre over the finallcll s aperture, during daily use, can be adjusted out by fine correction with the X and Y adj usters on the Final Lens Aperture rod.

Ii


Adjustments

10 Gun Tilt and Shift L! 10 Gun Tilt and Shift

-... 13 Stigmator 16 Display 17 Stage Rot. Center

Adjustments

113 stigmator I!I step: 3 c:J[[l + ~ - ! .. ,

I Cancel i CorrstgYlnn: -0.092

CorrstgYOut: -0.205 Modulator Stigmator V ~Tune CorrStigV. for min. image movement.

CorrstigY

-- x-v CONTROL

Stigmator Adjustment This adjustment allows you to mini mize the image shift during stigmati on. When you click on Stigmator and the + button , the magnificati on is set to 60.000X. Make sure an image with sufficient detail is visible.

If necessary. move the stage to find an area of interest. (You can change the magnification, but once a proper area has been found. set the magnificati on back to 60,OOOX).

Foll ow the four-step procedure to min imi ze the image movement in both the X and Y directi on using the X-Y contro ls avai lable in the control area. Save the values at the end of the procedure by pressing the SAVE button in step 4.

Adjustm e nts

step:4 0 Cancel I I Save J 1 ...... 1--

lost step. ~Cancel or Save.

The correc tion values for the sti gmator, as obtained with this procedure, are stored in the computer.

5010 1

Adjustments

10 Gun TiH and Shift 1. 10 Gun TiH and Shift 13 Stigm8ltor

_ 16Display _ 17 Stage Rot. Cemer

Adjustments

116 Display

Step: 1

Cancel

'"Tune Oisplay. 15 x 10 em grid Only for main monitor.

Ad j u stm e nts

Iii

117 Stage Rot. Cemer Iii Step: 1 ffij] 0 I Cancel

Optimise image at Euc. pos. ~ Optimise Image.

S0 101


Display Adjustment When you se lect Display. a white grid appears on the monitor. overlayi ng the image. Use thi s grid as a reference to set the correct image size verticall y and horizontall y. using the monilOr controls. Tune the grid to lO x 15 cm to obtain the correct di splay magnification and aspect ratio. Display can al so be used to minimi ze the pirwarrel distortion of the monilOr.

Thi s adjustmen t a llows you to set up the di splay monitor so the images are linear in both X and Y wi th the correct di splay magnifi cati on. A cl ick on the + bUllon produces a white g rid onscreen. Use the monitor contro ls 10 define the proper dimensions and linearity of the grid.

Stage Rot. Centre This adjustment sets up the compensation faclOrs fo r the stage X= 0 and Y = 0 positi ons, as well as the stage rotati on centre.

The procedure should be performed at zero tilt unless you are working at a specified tilt angle. Load the appropriate stage mapping file before using thi s procedure.

TABLE 6-26 STAGE ROTATION CENTER ADJUSTMENT

Order I Action

1

2

3

4

5

Stage moves to eucentric positi on (0.0) . Opt imize image.

Select the Get fu nction and double-cl ick on the feature to move it to the screen centre.

Stage rotates to 180°.

Select the Get function and double cl ick on the fe ature to move it 10 the screen center.

Cancel or save valid result.

To make use of thi s feature during normal operation go to the 'Stage' menu and select 'Eucentric Rotation' on.

While 'Eucentric Rotation' is ticked 'Align X, Align Y and A lign Feature' can be used 10 orientate the viewing directi on of the field in vtew.

Final Alignment Check Perform a final check on the quality of the new adjustments by choosing 2000X (Display Mag) and changing spotsize from 6 10 I and kYs from 20 kY to 2 kY. The alignment is good if there is onl y a sli ght difference in the position of objects on the screen. If their positions differ significantly. further adjustment is necessary.


50 1 01

Chapter 7 STAGES

--------------------~I

50 1 01

Overview ..................... . . 7-1 FEG and SFEG Stages ...•...... .. 7-1

XL30 Stages (Early) . . .. . .......... 7-2 XL30 Stage 50 x 50 mm . . . . . . . . . . .. 7-2

Stage movement ............. .. 7-2 Tilting the specimen ........... . . 7-3 Specimen height adjustment . . . . . . 7-4 X. Y and R manual stage control. .. 7-4 The Rotation sub-stage . . . . . . . . .. 7-5 Using the rotation sub-stage . . . . .. 7-6 Removing the rotation sub-stage . .. 7-6 Installing the rotation sub-stage . . .. 7-6

XL30 Stages (Later) .. ... .. ... ..... 7-7 XL30 Stage 50 x 50 mm . .. . . . ... ... 7-7

Stage movement ........ .. .. . .. 7-7

XL30-50 X 50 mm (Manual) ... . . .... 7-8 Using Tilt. . . . . . . . . . . . . . . . . . . .. 7-8 Using Z (Height) adjustment . . . . . . 7-9 Using X. Y and Rotation . . . . . . . . 7-10 Shift . ........ . .. . ......... . . 7-10

XL30-50 X 50 mm (4 axis Motor) ... 7-11 Stage movement. ..... . . ... . . . 7-11

Get ............... ... . .... .. . . 7-12 Shift .... . . ... .. .. . ......... . .. 7-12 Track .. ......... . .............. 7-12

XL30-50 X 50 mm (5 axis Motor) ... 7-13 XL30 Stage 50 x 50 mm .... . ... ... 7-13

Stage movement . . . . . . . . . . . . .. 7-13 XL30 (5 axis) Stage Controls. . . .. 7-14 Total software control . . . . . . . . . . 7-14 Stage movement ...... . ....... 7-14

Get . . ..... .. .. . . ... . ... . ... .. . 7-15 Shift ..... . ........ .. ... . • .. . .. 7-15 Track ....... . . • . . . .. .. .. . . .. . .. 7-15 Clamp ...... . . . .... . ........ . .. 7-16

XL30-100 X 100 mm Stage ....•... 7-17 XL30 Stage 100 x 100 mm ... .. . .. . 7-17

Stage movement .............. 7-17

XL30-100 x 100 mm (Manual) . .... . 7-18 Using Tilt .. .. ...... . ........ . 7-18

I~---------------------Using Z (height) adjustment . . . . . 7-18 Using X, Y and Rotation .. . . . ... 7-19 Shift ...... . . ... .... .... .. . .. 7-19 Stage Lock ...... . ....... . .. . 7-19

XL30-100x100 mm(5 axis Motor) ... 7-20 Stage movement. ............ . 7-20

Get . . ....................... . 7-21 Shift . . .............. .. ........ 7-21 Track . . . . . . . . . . . . . . . . . . . . • . . .. 7-21 Clamp ....... . ... . ... . . . .. ... . . 7-22

XL40 Stages (Early) . . . . . .. . . • .. .. 7-23 XL40 Stage 150 x 150 mm . . . . . . . .. 7-23

Stage movement. . . . . . . . . . . . . . 7-23 Using Tilt . . . . . . . . . . . . . . . . . . . . 7-24 Using Z (height) adjustment . . . .. 7-25 Using X, Y and Rotation . . . . . . .. 7-25 Stage movement. . . . . . . ....... 7-26

Get . . ....... . ........ ..... .. . 7-26 Shift . ....... . .. .. ... .... . . . ... 7-26 Track . ..... . .... .... . . . . .. . . . . 7-27

XL40 Stages (Later) . ............. 7-28 XL40 Stage 150 x 150 mm . . . . . . . .. 7-28

Stage movements .. ... .... .... 7-28

XL40-150x150 mm(5 axis Motor) ... 7-29 XL40 (5 axis) Stage Controls .... 7-29

Get . . ............... .. ....... 7-30 Shift . . .......... ....... . ...... 7-30 Track .. ........ ......... ...• .. 7-30 Clamp . ......... . .......• ... ... 7-31

Stage Control Group ............. 7-32 Scanrotation . . . . . . . . . . . . . . . . . 7-32 Z, Rotation and Tilt . . . . . . . . . . . . 7-32 Stage Map .. .. ... .. . .. ....... 7-33 Stored Stage Positions . . . . . . . .. 7-33 Add ........ ....... .. . . .. . .. 7-33 Del . .. . .. .. . ... . . .. .. ... . ... 7-33 Clear ........ . ... _ ... . ...... 7-33 X, Y ......... . . . . .... ....... 7-34 Z (edit box) . . . . . .. . .. . .... . .. 7-34 Z <-> FWD ...... . . ... .. . . . .. . 7-34 Z (adjuster) . . . . . . . . . . . . . . . . .. 7-34 R ..... . . .. .. . . ... . .... . . . . . 7-34 T . ..•...•.. . ... . .. . . ....... 7-35

Abs/Rel . . . . . . . . . . . . . . . . . . . .. 7-35 Go To .. . ... . . ... . . . .... . . . . . 7-35 Contrast. . . . . . . . . . . . . . . . . . . .. 7-35 Brightness . . . . . . . . . . . . . . . . . . . 7-35 Z<->FWD Dialogue Box .... .... 7-35

Use of Stage Functions .. .. ... .... 7-36 Using Tilt . . . . . . . . . . . . . . . . . . . . 7-36 Using Z (height) adjustment . . . .. 7-36 Using Rotation ................ 7-37 Using Scanrotation . . . . . . . . . . .. 7-37 Using Stage Position Controls .... 7-38 Using Stored Stage Positions . . .. 7-38 The Stage Map . . . . . . . . . . . . . .. 7-38

Stage Menu ... ..... .. .... ... ... 7-39 Home .......... . .. .. . . .. . ... 7-39 Clamp . . ........ . ... ...... . . 7-39 Align X/Align Y .. . . ... .... . . ... 7-39 Align Feature . . . . . . . . . . . . . . . .. 7-39 Specimen Alignment ........... 7-40 Use Specimen Alignment . . . . . .. 7-40 Eucentric Rotation . . . . . . . . . . . . . 7-40 Zero Beam Shift. . . . . . . . . . . . . . . 7-40 Auto Beam Shift Zero . . . . . . . . .. 7-41 Beam Shift Reset Procedure . . . . . 7-41 Read Mapping File (Option) . .... 7-41 Change ........ . ... . .... .. .. 7-42

Position Setup Functions ....... .. 7-43

Using Stage Alignments .......... 7-44 Using Align X or Align Y ... . .. . . 7-44 Using Align Feature .. ..... _ . . .. 7-45 Using Eucentric Rotation . . . . . . .. 7-45

About Specimen Alignment ....... 7-46 Using 1-, 2- or 3-Point Alignments. 7-46 Using Specimen Alignment .. . .. . 7-47 Using Get versus Arrow Tool. . ... 7-47 Using Offset Alignment . . . . . . . .. 7-49

In/Out Menu ..... . ..... . ...... .. 7-50 Stage Table . . . . . . . . . . . . . . . . .. 7-50 Configuration ........... . ..... 7-51

5010 1

7 STAGES

Overview

50 1 0 1

FEG and SFEG Stages The Stages covered in this Chapter are the fo ll owing:

• XL30 (early version) 50 x 50 mm Manua l. (FEG)

XL30 (early version) 50 x 50 mm Motor dri ven. (FEG)

• XL30 50 x 50 mm Manual. (some FEG mai nly SFEG)

• XL30 50 x 50 mm Motor 4 axes. (main ly SFEG)

XL30 50 x 50 mm Motor 5 axes. (only SFEG)

• XL30 100 x 100 mm Motor 5 axes. (some FEG main ly SFEG)

• XL40 150 x 150 mm MOlar 3 axes. (only FEG)

• XL40 150 x 150 mm Motor 5 axes. (only SFEG)

The soft ware control for each stage diffe rs mainly due to the amount of integration via motorisat ion. The Stage page layout remains the same so that it is easily recognised by users of other XL systems.The significant differences are with such controls as Z, Ti lt, and Rotation.

The ciampi ng mechanism and has also changed due to progress made with stage design, and although the early stages were with manual locking the latest are via pneumatic clamping and software control.

STAGES XL30 Stages (Early)

XL30 Stages (Early)

XL30 Stage 50 x 50 mm The basic stage of the XL30 is cOlllrolled manually by micrometers and screw-type adjusters on the stage door. Motori sation of the stage is optional; if fitted. The mOlors are located on the outside and control x. y and Rotati on axes. Thi s movement is integrated in the software. For fUlther reference to motori sati on see the section on the later version XL30 (50 x 50 mm stages), in this chapter, to see axes moveme nt similarities with the earli er X L30 stage.

Stage movement The specimen stage allows movement of the specimen along fi ve axes as indicated in Fig. 7- 1.

F1CURE 7-1 STACE MOVEMENTS FOR XLJO

R O~ Q. ;on ( a.r ......... n!at> •• ) In I t... li tl.d plan_

--""".,.1~ ... r. 50 ...... ",_ tI", t, l! .... ~ .

The stage can be tilted over 90°. The til t axis always intersects the electron optica l ax is of the column at the same height ( 10 mm FWD). When the specimen is positi oned at this height, it can be tilted in the eucentric plane. This means that almost no image di splacement occurs during till. The tilting mechanism can be locked for more stabi lity at high magnifications us ing the 'LOCK' lever on the stage door.

The height of the specimen can be regulated by two di ffe relll mechani sms:

• the internal height adjustment, by screwing the specimen holder hi gher or lower along the rotation axis.

• the external height adjustmelll using the 'z' knob on the stage door.

50 1 0 1

5 0 10 1

STAGES XL30 Stages (Earty)

x, Y and rotati on movements can be adj usted using mic rometer screws on the stage door. If the srage is mOlorised. Ihese cOlllrols are operaled by software ollly (GET. TRACK j llllCliollS. see Seclioll XL30 50 x 50 111111 mOlorised srage).

Tilting the specimen The specimen can be tilled using the lever (2) as fo ll ows (see Fig. 7-2) .

Check that the ' LOCK' lever ( I ) is in the 'UNLOCK' positi on (coumer-c1ockwise moveme l1l ).

• Set the tilt 10 the desired angle by moving the tilt lever (2) up and down.

• The till angle can be read f rom the scale (3) on the s tage door.

• When desired (at hi gh magnifi catio ns), the till mechanism can be locked lIs ing the 'LOCK' lever ( I ).

FIGURE 7-2 M ECHANICA L CONTROLS ON THE STAGE DOOR

6

Note:The 'LOC K' lever is adjustable w ith a ratche t mechani sm. The position of the lever can be adjusted by pulling it gently until the ratchet mechanism freewheel s, then adjusting it to the desired position.

In orde r to prevent damage to the spec imen or deteclOrs (e.g. the Solid state back scatter detector), the maximum tilt has to be restri cted unde r some conditi ons. For thi s reason several mechanical tilt SlOpS are provided (see A - F, Fi g. 7 -3).


The foll owing tilt stops are recom mended:

FIG URE 7-3 STAGE TILT STOPS

Working distance

10 mm FWD

Backscatter det. mounted

other

Tilt range

-7 to +45

-7 to +27

-15 to +75

Specimen height adjustment

Po.sitions

E - B

E-C

F -A

Depending on the specimen holder used. it is possible to change the specimen height inside the chamber in various ways. The following holders are supported:

• The standard ho lders on the rotation sub-stage;

• Clamp holder. pre-tilt holder in specimen holder kit PW6820;

• Multiple analytical specimen sub-stage PW6830.

Fine hei ght adj ustment (over 8 mm) is possible using the 'Z' knob on the stage door (6), Fig 7-2. Turning this knob clockwise results in an upward movement of the specimen.

x, Y and R manual stage control These movements are dri ven by rotation of controls (7), (8) and (9), shown in Fig. 7-2. For X and Y a range of 50 mm is avai lable . A readout with an accuracy of 25 J.lm is provided. The rotation movement is supplied by the rotation sub-stage and operates continuously over 360°. A read-out wi th an accuracy of I ° is provided.

II~-------------50 101

50 1 01


FlCURE 7-4 THE ROTATION SUB-STACE

" 1 2

The Rotation sub-stage The demountable rotation sub-stage provides externall y controlled rotati on of the speci men over a range of 3600 (continuous) with indication to 10 (9). Fig. 7-2). It is designed for use with stub-mounted specimens and incorporates a facility for pre-adj usting specimen height. A bayonet fitting on the base of the sub-stage positi ons it in the goniometer stage. The dri ve assembl y for the rotati on movement is built into the goniometer mounting plate and is connected by a demountable shaft linkage.

Caution!Every precaution should be taken to ensure that grease and other contaminants are not introduced into the vacuum system.

a.When manipulating a specimen stub always use a clean pair of tweezers . When handling the specimen holders use g loves.

b.Use a freshl y cleaned stub for each specimen.

c.Ensure that the sub-stage is clean.

Check for deposit s and di sco loration. C leaning procedures are described in Chapter 8.


Using the rotation sub-stage The sequence given below describes pre-adjustment of the specimen height to a level which will allow eucentric mot ion to be subsequently attained. using the extemal gonjometer cont rols. For some specimens this wi ll not be possible. and in some applicati ons. not requi red. Insert the pin. 2 of the specimen stub, I into the head of the stub holder. 3 and press it down. A spring catch holds the stu b in positi on.

1.[nseI1the pin of the specimen stub, I into the head of the stub holder, 2 and press it down. A spring catch holds the stub in positi on. For more stability, the stub can be ti ghtly secured using the seculi ng screw (3).

2. [f necessary, sli ght ly loosen the clamping screw, 4 in the base of the holder so that the head of the holder is free to rotate.

3.Place the metal adjuster. 5 on the stage, next to the stu b holder.

4.Tum the stub holder cloc kwise or counter-clockwise to lower or raise the height of the specimen unt il its surface just fit s under the adjuster.

5.Remove the height adjuster.

6.Tighten the clamping screw, 4.

7.To di smount the stub, reverse the procedure given in step I.

Removing the rotation sub-stage I .Remove the three securing screws, 7 .

2. Loosen the screw in the bush connecting the rotation dri ve at the rear upper right-hand side of the goni ometer mounting plate and carefully disconnect the shaft . 9.

3.Withdraw the rotati on sub-stage fro m the goni ometer.

Installing the rotat ion sub-stage I.Supportthe sub-stage just above the goni ometer with the drive

linkage. 8 on the near side.

2.Locate the position of the built-in rotati on dri ve on the rear upper right-hand side of the goniometer mounting plate.

4.Slide the shaft, 9 at the end of the dri ve linkage into the bush on the built-in drive assembl y.

5.Tighten the screw in the bush connecting the dri ve. Check that the movement operates positively and free ly.

6.Insen three securing screws into the holes. 7 in the base of the substage and screw them down.

5 0 1 01

STAGES XL30 Stages (Later)

XL30 Stages (Later)

5010 1

XL30 Stage 50 x 50 mm There are two types of XL30 50 x 50 mm stage for thi s se ries, a manual stage, and 4 axes motori sed version.

The basic stage is controlled manua ll y by mi cro mete rs and sc rew-type adjusters on the stage door. The mOlOri sed stage has motors dri ving the X, Y, Z and Rotation controls, a ll with manual override, Tilt is manua l for both stages but for the motori sed type the tilt is read out on sc reen, under soft ware contro l. a long with the other movements . For the manua l stage Tilt , X,Y and Z are read out on the s tage door. Rotati on is continuous and there fore does not need read-out.

Stage movement The specimen stage allows movement of the specimen a long 5 axes .

The stage can be tilted ove r 9 00. The tilt axis a lways inte rsects the electron optical axi s of the column at the same height ( 10 mm FWD). When the specimen is positio ned at this he ight, the specimen can be tilted in the eucentric plane. Thi s means that during tilt , almost no image di splacement occurs. The tilting mechani sm can be locked for more stability at hi gh magnificati ons using the ' LOCK ' lever.

FICURE 7-5 XLJO SOx 50111111 STACE MOVEMENT

Rotatio n in th(' tihl'd pl:lII1;'

"'~::~~~~~r- 10 tilt" lill lu:is

X +/- 2~ 111111 along the tilt ll xis

z '" 2~ 111m intel'n:rl

• lHut

\

' ~ - 2:" 111111 c \tcl"Illil

,/ --- +-< ... '

Tilt l'lU' ~(" - I ~ 10 + 7:" tl'-·J!.

The height of the specimen can be regulated by a combination of two di ffe rent methods, the interna l 25 mm screw and the externa l 25 mm Z control.

X ,Y, Z and Rotat ion movements on the motorised stage can be ope rated under soft ware control for more advanced movement combination and fl exibility.

•

STAGES XL30-50 X 50 mm (Manual)

XL30-50 X 50 mm (Manual)

A = Negative end stop

B = 30 deg. stop

C' = 45 deg. stop

D = 75 deg. stop

E = Tilt Scale

F = Stage Lock c: = Stage gl"OIll\d

1 = Tilt level" 2 = Digital readout

3 = X axis 4 = Rotation 5 = Zheight 6 = Y axis

Using Tilt The specimen can be tilted using the lever ( I) as follows:

• Check that the ' LOCK' lever (F) is in the unlocked position (counter-clockwise movement ).

• Set the tilt to the desire angle by moving the tilt lever ( I) up or down.

• The tilt angle can be read from the scale (E) on the door.

• If desired (at high magnifications), the tilt mechani sm can be locked using the 'LOCK' lever (F) (clockwise movement ).

The 'LOCK' lever position is adjustable using a ratchet mechanism. The lever can be adjusted by pulling it out gentl y until the ratchet mechanism freewheels. then moving it to the desired position.

In order to prevent damage to the specimen or the detector (e .g. the Backscatter detector). the tilt has to be restri cted under certain conditions. In order to facilitate this, several tilt stops are provided.

FlCURE 7-6 MANUA L CONTROLS ON THE STACE DOOR

TABLE 7-1 RECOMMENDED TILT STOPS

FWD Tilt range Positions

IOmm - ISOto +45° A -C

With BSD -7°to +27° A-B

Other - ISOto +75° A-D

50 1 01

50101

STAGES XL30·50 X 50 mm (Manual)

Using Z (Height) adjustment With the standard specimen holder it is possible to change the specimen height inside the chamber. to bring the sample to a eucentric position and have fle xibi lity to then move Z from outside the chamber to another positi on if required. The intemal di stance Z is 25 mm of movement, and the external distance Z (5) is a lso 25 mm . Th is all ows a flexibi lity to load large or different height specimens onto the stage by reducing the internal Z bu t still be able to manipulate the difference in height from outside.

A digital read-ollt (2) can be seen nex t to the Z control knob (5). I di git is 16 micron. and I turn of the knob is 0.23 mm di splacement. The smallest step is I micron.

FIGURE 7-7 EUCENTRIC ADJUSTERS FOR XL-3~ 50 X 50 STAGES

r'-S= Ll~"'" I 5nun Llnml~

l Onull

T ungsten (W) XL- SFEG LaB6 FEG

f----1 .--- ----.

To set the specimen height to the eucentric position and at the same time prevent any possibility that the specimen should touch the lens pole if the Z is increased can be done as fo ll ows:

• Load a specimen onto the specimen holder.

• With the stage still open adjust the external Z (5) to the highest position.

• Set the Eucentric Height Adjuster on the stage base.

• Bring the highest speci men or point on the specimen to the 2 mm ( I mm SFEG) position on the Height Adjuster by turning the intemal screw of the speci men holder. Lock the position with the locking cone.

• Reduce the Z so that the specimen now coincides to the Eucentric position on the Height Adj uster by use of the external Z control (5) .

• Close the chamber, and pump down.

Now the Z can be changed from the extemal Z control(5) around the eucentric positi on and funher, but for safety, not less than 2 mm ( I mm SFEG) from the lens .

II

STAGES XL30-50 X 50 mm (Manual)

Using X, Y and Rotation These movements are dri ven by the turning of controls X(3), Y(4 ) and

Rotation (6).

For X and Y a range of 50 mm is available. A digital readout(2) can be found nex t to the respecti ve control knobs. I digit is 36 micron, and [tum of e ither knob is 0 .5 mm di splace ment. The sma llest step is approximately I mi c ron.

To rotate the specimen mecha ni cally tu m the Rotation control knob (6) in e ither direction, this cont rol ope rates continuously through 3600 There is no read-out but I tum of the knob is 27° rotati on, and the smallest step is 0.04°.

Shift For very high magnification this functi on performs an onscreen image shift, using beam shift coupled to magni fication. Thi s is not stage movement, but beam movement. When you click on the shi ft icon and hold down the le ft mouse button, the cursor changes into a sma ll hand, allowing you to positi on the image where you want it by dragging it.

The range of beam shift is ±1 5flln in X and Y. The compute r beeps when the beam shi ft limit is reached .

Thi s mode is independent of the se lected scan mode and can be operated at slow scan.

-~-------------.. 50 1 0 1

STAGES XL30·50 X 50 mm (4 axes Motor)

XL30-50 X 50 mm (4 axes Motor)

W Io Z

A = Negative end stop B = 30 deg. stop C' = 45 deg. stop D = 75 deg. stop E = Tilt Scale F = Stage Lock G = Stage ground 1 = Tilt lever 2 = Tilt monitor 3 = X axis 4 = Rotation 5 = Zheight 6 = Yaus

When you move the stage or tilt the specimen , you may need to lower the magnification so you do not lose the featu re of interest on the screen.

5010 1

FIGURE 7·8 MOTOR DRIVE CONTROLS WITH MANUAL OVERRIDE

A

2 ----.J10-"~[

Stage movement A li ve image can be positioned with either stage move ment (manual or soft ware) or beam shi fl.

TABLE 7·2 MOVEMENT TYPES

Get (icon) X and Y Get (above 6200X only) I

Track (icon) X and Y Shift (icon) X and Y

Tilt ( I) and Z height (5) Scanrotation

Rotati on (4)

Manual X (3). Y (6), Z, T, R

Stage Position Controls / Map

I. This number is set in the Stage Setup dialogue box

Five axes of stage movement are available: X, Y, Z, T and R. Software controls for movement include the Get, Shift and Track icons and the Stage control area. You can access thi s control area by max imizing the Stage contro l group, or clicking on the Stage icon.

fiiDiI.Cl l!S.I

STAGES XL30-50 X 50 mm (4 axes Motor)

Get When you select an image detail with the green cross and double-click the left mouse bullon, Get brings that detail to the centre of the screen . At low magnificati on (as you defined it in the Stage Change dialogue box-usuall y less than 6200X) the stage will be dli ven; at higher magnificati on. the result is obtained by beam shi ft.

If Auto Beam Shift Zero is checked on the Stage pulldown menu . Get moves stage move ment only: beam shift is inde pendent of magnificati on.

The maximum range for sliccessive Get operati ons equals the range of the stage. At high magni fica tions. the range is limited by the maximum beam shi ft.

Shift This function perform s an onscreen image shi ft. using beam shift coupled to magni ficati on.The stage does not move during beam shi ft. When you click on the shift icon and hold down the left mouse bullon. the cursor changes into a small hand. allowing you to position the image where you want it by dragging it.

The range of beam shi ft is ± 15 ~t m in X and Y. The computer beeps when the beam shi ft limit is reached . Thi s mode is independent of the selected scan mode and can be operated at slow scan.

Track The track functi on allows continuous directi onal movement of the stage with vari able speed. The speed range is coupled to the magnification and selectable within certain limits.

Select the track functi on by clicking on the T rack icon. A green overlay appears onscreen. Positi on the cursor somewhere in the image and hold down the left mouse button. The cursor can move between the inner and outer green c ircles. Moving toward the outer circle increases the stage speed; moving toward the inner c ircle decreases stage speed.

The direction of movement is always toward the centre along the green straight line. You can move the cursor around on the fi eld of view; directi on and speed change accordingly. When you are done, click on the arrow tool.

For a given magnification, the minimum speed is obtained when the cursor is on the inner circle. The max imum speed (for that magnifi cati on) is a mUltiple of the minimum speed. The maximum speed can be customized and is given by a ratio value establi shed in the positi on setup dialogue box. The default value is 4 (slow); the maximum value is 10 (fast).

-~-------------IIiI 5010 1

STAGES XL30·50 X 50 mm (5 axes Motor)

XL30-50 X 50 mm (5 axes Motor)

50 1 0 1

XL30 Stage 50 x 50 mm This XL30 50x50 mm stage is a 5 axes motori sed version based on the previous design.

The stage has motors dri ving the X, Y. Z. Rotation and Tilt controls. all with manual oven'ide except Tilt . All movements are read out on screen , under software control.

Stage movement The specimen stage allows movement of the specimen along 5 axes .

The stage can be tilted over 75°. The tilt ing mechanism can be locked for more stabilit y at hi gh magnifications using the 'Clamp' feature.

FlCURE 7·9 XLJO SOx 50 111111 STACE MOVEMENT

It otnlioll in Ihl' Iilled ,"1111('

y +1· 2~ mm in the plane

I .. ~::~~~::~ ... Offill. IJCI'p(' ndicull'll 10 .ltt' tilt axi s

X +/- 2:" 111m lliong .Iu' li l l luis

z - 2:" 11\111 intcl' liat

• :nul

\

- - 250 IIIIll external

---- +0 ... ----/ Tilt ,'an ge - I ::; to + 75 llcl!..

The Z height of the specimen can be reg ulated by the external 25 mm Z control and or the 25 mm internal Z movement. The Z is eucentric at WD = 5 mm for SFEG

X, Y, Z, Rotation and Tilt movements on the motorised stage can be operated under software control for more advanced movement combinations.


Legend:

1 = Z height 2 = Tilt 3=Yaxis 4 = Rotation 5 = X axis 6 = Interface control connectors

XL30 (5 axes) Stage Controls

FIGURE 7-10 CONTROLS ON THE STAGE DOOR

Total software control On the 5 axes motori sed stage the X, Y. Z. Rotati on and Tilt move ments can be operated under total soft ware control.

Stage movement A li ve image can be positioned with e ither stage movement (manual or soft ware) or beam shi ft.

TABLE 7-3 MOVEMENT TYPES

Stage Movement Beam Shift

Get (icon) X and Y

Track (icon) X and Y

Tilt (2) and Z height ( I)

Rotati on (4)

Manual X (5), Y (3), Z ( I ), T (2), R (4)


Get (above 6200X 1only)

Shift (icon) X and Y

Scanrotation

I. This number is set in the Stage Setup di alog box and can be changed.

III~-------------50 1 0 1

W Io Z

50 101

When you move the stage or tilt the specimen, you may need to lower the magnification so you do not lose the feature of interest on the screen.


Five axes of stage movement are available: X, Y, Z. T and R. Software controls for movement include the Get, Shift and Track icons and the Stage control area. You can access this control area by maximizing the Stage control group. or clicking on the Stage icon.

Ixol YO

Get !±] When you select an image detail with the green cross and double-cl ick the left mouse button, Get brings that detail to the centre of the screen. At low magnifi cation (as you defined it in the Stage Change dialogue box- usually less than 6200X) the stage will be driven; at higher magnifi cati on, the result is obtained by beam shift.

If Auto Beam Shift Zero is checked on the Stage pulldown menu. Get moves stage movement onl y; beam shift is independent of magnificati on.

The maximum range for successive Get operati ons equals the range of the stage. At high magnifications, the range is limited by the maximum beam shift.

Shift I~J This function performs an onscreen image shift. usi ng beam shift coupled to magnification .The stage does not move during beam shi ft. When you cli ck on the shift icon and hold down the left mouse button , the cursor changes into a small hand, all owi ng you to position the image where you want it by dragging it.

The range of beam shift is ±IS I-'m in X and Y. The computer beeps when the beam shift limit is reached.

Thi s mode is independent of the selected scan mode and can be operated at slow scan .

Track I@] The track functi on allows continuous directional movement of the stage with variable speed. The speed range is coupled to the magnification and selectable within certain limits.

Select the track functi on by clicking on the Track icon. A green overlay appears onscreen. Position the cursor somewhere in the image and hold down the left mouse button. The cursor can move between the inner and outer green circles. Moving toward the outer circle increases the stage speed; moving toward the inner circle decreases stage speed.


The direc tion of move melll is always IOward the celllre along the green straight line . You can move the cursor around on the field of view; d irecti on and speed change accordingly. When you are done, click on the arrow tool.

For a give n magnificati on. the minimum speed is obtained when the cursor is on the inner circle . The maxi mum speed (for that magnification) is a multiple of the minimum speed. The maximum speed can be cuslOmi zed and is given by a ratio value establi shed in the position setup dialogue box. The defauh value is 4 (slow); the maximum value is 10 (fast).

50 1 0 1

STAGES XL30- 100 X 100 mm Stage

XL30-100 X 100 mm Stage

50 1 0 1

XL30 Stage 100 x 100 mm There are two types of XL 30 lOOx I 00 mm stage, a manual and a motori sed version.

The basic stage is control led manuall y by micrometers and screw-type adjusters on the stage door. The motori sed stage has motors driving the X, Y, Z, Rotation and Ti lt controls, all with manual override_ For the motari sed type the tilt is read out on screen, under soft ware control, along with the other movements. For the manual stage Ti lt, Rotat ion, X, Y, and Z are read out on the stage door.

Stage movement The specimen stage allows movement of the specimen along 5 axes.

The stage can be tilted over 75°. The ti lting mechanism can be locked for more stabi lity at high magnifications using the ' LOCK' knob.

FIG URE 7-11 XLJO l OOxlOO /1//1/ STAGE M OVEM ENT lLLUSTRATiON

z- prim e m U'"CIn elll Z = 11 .6 111 111 (optim um )

Z ~ 6U 111 m 1 E:\: I CI"nal m O' "ClUent •

Rota tion in th{' lil ted Il lant'

Y +1-511 m m IlInn: m Cfl t a lnn :.:

T ilt plane

\ \ X - + / _ :;'0 mill fIIU\ CIllCnl

\ ulon!! T ilt pl :anc

-----1-<.-.-.-/ Til t rll ll ge - .5 10 + 7 0 (h'g.

The hei ght of the specimen can be regulated by the ex temal 60 mm Z control.

X, Y, Z, Rotation and Tilt movements on the motarised stage can be operated under soft ware control for more advanced movement combination and flexibi lity.

STAGES XL30· 100 x 100 mm (Manual)

XL30-100 X 100 mm (Manual)

Legend:

1 = Z height 2 = Tilt 3=Yaxis 4 = Rotation 5 = Stage lock 6 = X axis

A = Digital readout B = Stage ground C = Interface connector

Using Tilt The specimen can be tilted using the turning control (2) as fo llows:

• Check that the LOCK' turning control (5) is in the unlocked positi on (counter·clockwise movement ).

• Set the tilt to the desired angle by turning the contro l (2) clockwise or counter-clockwise

• The tilt angle can be read from the dig ital read-oU! below the control knob. One digit is 0.2x. and one turn of the knob is 2x d ispl acement.

• If desired (at high magnifi cations), the tilt mechani sm can be locked using the LOC K" turning control (5) (clockwise movement)

In order to prevent damage to the specimen or the detector (e.g . the Backscatter detector), tilting has to be done carefully.

FIGURE 7· ]2 MA NUAL CONTROLS ON THE S TA GE DOOR

I --------'l~'I A------__

3--7-----1

5------1

Using Z (height) adjustment

~--2

,-----"'::':-%--4 r-::-=='+-- B

'-------,,:+-- 6

With the standard specimen holder it is possible to move Z to another position if required from outside the chamber. The external movement (Z) is 60 mm for W, LaB 6, XLFEG and 55 mm for SFEG This a ll ows a nexibility to load large height specimens onto the stage.

A digital read-out (A) can be seen be low the Z contro l knob ( I ) . One digit is 0.1 mm, and one turn of the knob is I mm di splacement. The smallest step is 2 !-lm.

-~-------------.. 50 101

STAGES XL30-100 x 100 mm (Manual)

To set the specimen height and at the same time prevent any possibility that the specimen should touch the lens pole if the Z is increased can be done as fo llows:


• Adjust the Z. so that the specimen is approx imatel y 10 mm below the lens.

• Close the chamber, and pump down.

• When the beam is switched on the Z<->FWD Dialogue box appears, follow the instruc tions and foc us the sample. Press OK.

Now the Z can be changed by the soft ware interface or the manual ex ternal Z control to other positions, but for safety, not less than 2 mm or I mm (SFEG) from the lens.

Using X, Y and Rotation These movements are driven by the turning of controls X(6), Y(3) and Rotation (4).

For X and Y a range of 100 mm is available. A di gital read-out can be fo und next to the respecti ve control knobs. One digit is 0. 1 mm, and one turn of either knob is I mm displace ment. The smallest step is approxi mately 2 ~m .

To rotate the specimen mechanically turn the Rotati on control knob (4) in either direction, this control operates continuously through 360°. One Turn of the knob is 10° rotation, and the smallest step is 0.1°.

Shift For very high magnification this function performs an on screen image shift, using beam shift coupled to magnificati on. This is not stage movement, but beam movement . When you click on the shift icon and hold down the left mouse bullon, the cursor changes into a small hand , allowing you to position the image where you want by dragging it.

The range of beam shi ft is ± 1 5~m in X and Y. The computer beeps when the beam shi ft limit is reached.

This mode is independent of the selected scan mode and can be operated at slow scan .

Stage Lock If desired (at hi gh mag nifications), the tilt mechani sm can be locked using the L OCK' turning control (5) (clockwise movement). Thi s function can onl y be used for the manual stage .

--------------~~ 50 1 0 1 _

STAGES XL30-100xl00mm(5 axes Motor)

XL30-100x100 mm(5 axes Motor)

Legend:

1 = Z height 2 = Tilt 3 =Yaxis 4 = Rotation 5=Xaxis

On the motorised stage the X. Y. Z. Rotation and Tilt movements can be operated under software control, with manual override.

FIG URE 7-13 XLJO 100xl00 1/1111 MOTOR STAGE CONTROLS

6 = Stage ground and Interface connector

Stage movement A live image can be positioned with either stage movement (manual or software) or beam shift.


Get (icon) X and Y Get (above 6200X only) 1


Tilt (2) and Z height ( I )

Rotation (4)

Manual X (6), Y (3), Z ( I ), T (2) , R (4)



Scanrotation

I. This number is set in the Stage Setup dialog box and can be changed.

50 1 0 1

UJ fa z

50 1 01

When you move the stage or tilt the specimen, you may need to lower the magnification so you do not lose the feature of interest on the screen.

STAGES XL30-IOOxIOO mm(5 axes Molor)

Fi ve axes of stage movement are avai lable: X, Y, Z. T and R. Software controls for movement include the Get, Shift and Track icons and the Stage control area. You can access this control area by maximi zing the Stage control group, or clicking on the Stage icon.

r:o Get rnI

I ,~~ vo

When you select an image detail wi th the green cross and double-click the left mouse bunon. Get brings that detail 10 the centre of the screen. At low magnification (as you defined it in the Stage Change dialogue box-usua ll y less than 6200X) the stage wi ll be dri ven: at hi gher magnification. the result is obtained by beam shi fl.

If Auto Beam Shift Zero is checked on the Stage pulldown menu , Get moves stage movement on ly; beam shift is independe nt of magnification.

The maximum range for successive Get operations equals the range of the stage. At high magnifications, the range is limited by the maximum beam shifl.

Shift I~I This functi on performs an onscreen image shi ft, using beam shift coupled 10 magnification.The stage does not move during beam shifl. When you click on the shift icon and hold down the left mouse bunon, the cursor changes into a small hand, allowing you 10 position the image where you want it by dragging it.

The range of beam shift is ±lS ~tm in X and Y. The computer beeps when the beam shift limit is reached.

Thi s mode is independent of the selected scan mode and can be operated at slow scan.

Track 1.w:1 The track function allows continuous directional movement of the stage with variable speed. The speed range is coupled to the magnification and selectable within certain limits.

Select the track function by clicking on the Track icon. A green overlay appears onscrecn. Position the cursor somewhere in the image

and hold down the left mouse bunon. The cursor can move between the inner and outer green circles. Moving toward the outer circle increases the stage speed; moving toward the inner ci rcle decreases stage speed.

STAGES XL30-100x 100 mm(5 axes Motor)

The direclion of movement is al ways lOward the cenlre along lhe green strai ght line. You can move the cursor around on the fi e ld of view; direcli on and speed change accordingly. When you are done, cli ck on the an'ow tool.

For a given magnification. the minimum speed is obtained when the cursor is on the inner circle . The maximum speed (for lhal magnificali on) is a multiple of the minimum speed. The max imum speed can be cuslomi zed and is given by a rali o value eSlabli shed in the position setup dialogue box. The default value is 4 (slow) ; the max imum value is 10 (fasl).

Clamp Select the Clamp fun cti on by cli cking on the Clamp icon to clamp lhe stage. While the stage is clamped. no rmal operati on of x.y movement and rolalion is possible, bUllhe heighl and lilt cannOl be changed.

When selected, the clamp button in the bUlton bar will change colour (yell ow). indicaling lhallhe slage clamp has been aCli valed. Thi s se lecti on is a toggle.

50 1 0 1


XL40 Stages (Early)

50 1 01

XL40 Stage 150 x 150 mm The XL40 150 x 150 mm stage is a ded icated motori sed version.

The basic stage has motors driving the X,Y, and Rotation control s wi th read-out on screen. Tilt and Z are manual and read-out is found on the door of the stage .

Stage movement The specimen stage allows movement of the specimen along 5 axes.

The stage can be tilted from _30° to +60°. The tilt ax is always intersects the electron optical axis of the column at the same height ( 10 mm FWD). When the specimen is positi oned at thi s height , the specimen can be tilted in the eucentri c plane, Thi s means that during tilt , almost no image displacement occurs. The lilting mechanism can be locked for more stability at high magnifications using the 'LOCK' lever.

FlCURE 7-14 XLAO 150 x 150111111 STACE MO VEMENT

Rot a tion in the tilted pl ane

Y !75mm in the pl ane of t ilt , perpe ndicular to

the tilt axis .

• ~~ll!l:~~ii;~~ .. X !:75~m along the tilt aXIs .

\~/ .-~--+<.- Tilt range -300

to .600

The height o f the specimen can be regulated by a the extem al Z control and is a manual method. X, Y, and Rotation movements can be operated under software control for more advanced movement combi nati on and Oexibi li ty.


A ~ 60 deg. stol' B ~ 45 deg. stol' C ~ 30 deg. stol' D ~ 15 deg stol' E ~ 0 deg. stol' F ~ .30 deg . stol' 1 ~ Tilt Lock lever 2 ~ Tilt lever 3 ~ Tilt angle scale 4 ~ Z height control 5 ~ Z read -out

Using Tilt The specimen can be tilted using the lever (2) as fo llows:

• Check that the ' LOCK' lever ( I) is in the unl ocked position (counter-clockwise movement).

• Set the tilt to the desire angle by moving the tilt lever (2) up 0 1'

down.

• The tilt angle can be read from the scale (3) on the door.

• If desired (at hi gh magnifi cations) . the tilt mechani sm can be locked using the 'LOCK' lever ( I) (clockwise movement).

The 'LOCK' lever positi on is adjustable using a ratchet mechani sm. The lever can be adjusted by pulling it out gentl y until the ratchet mechani sm freewheels, then moving it to the desired positi on.

In order to prevent damage to the specimen 0 1' the detector (e.g . the Backscatter detector), the tilt has to be restri cted under ceJ1ain conditi ons. In order to facilitate thi s. several tilt stops are provided.

FIGURE 7- /5 MANUA L CONTROLS ON THE STAGE DOOR

i /

( \

TABLE 7-5 RECOMMENDED TILT STOPS

FWD Tilt range Positions

10mm -300 to +45° B - F

With BSD -15Oto +15° D - E -(15°)

Other lower -300 to +60° A- F

50 1 0 1

5010 1


Using Z (height) adjustment It is possible to change the specimen height from outside the chamber with the Z Height Control (4) over 37 mOl of movement.

A Z readout (5) can be seen on top of the Z Height Contro l knob (4) and is scaled in mm. I tum of the knob is 0.75 mm displacement.

Height is measure from the Eucentric point which is 10 mOl. It is possible to move the stage 5 mm above and 32 mm under thi s point.

To set the specimen height to the eucentric positi on and at the same time prevent any possibi lity that the specimen shou ld touch the lens pole can be done as follows :


• with the stage door still open adjust the ex ternal Z (4) to the lowest positi on.

• C lose the stage door and pump down the system.

• When the vacuum is OK switch on the beam and make an image. Bring the WD read-out on screen to 10 mm (the image will be out of focu s).

• Turn the Z Height Control (4) so that the speci men comes into focus on screen. Select a suitable area on the sample.

• Pivot the stage Tilt lever (2) bet ween _5° and +5° while fine tuning the Z Height Control (4) to create 11 0 shift in the image at the centre horizontal axis of the screen.

Using X, Y and Rotation These movements are motor dri ven and controlled by software .

For X and Y a range of 150 rnm is available.

II


W Io Z

When you move the stage or ti lt the specimen, you may need to lower the magnification so you do not lose the feature of interest on the screen.

Stage movement A li ve image can be pos itioned with stage movement or beam shift (soft ware dri ven).


Stage Movement Beam Shift

Get (icon) X and Y (software) Get (above 6200X only) l

Track (icon) X and Y (soft ware) Shift (icon) X and Y

Tilt (2) and Z height (4) (manual) Scanrotation

Rotati on (soft ware)

Stage Position Contro ls I Map

I. ThIS number IS set In the Stage Setup dialog box and can be changed.

Five axes of stage movement are available: X, Y, Z. T and R. Soft ware controls for movemenl include the Get, Shift and Track icons and the Stage control area. You can access this contro l area by maximi zing the Stage control group, or clicking on the Stage icon.

Get

IIiCiI ~

When you select an image detail with the green cross and double-click the left mouse button, Get brings that detai l to the centre of the screen. At low magnification (as you defined it in the Stage Change di alogue box-usually less than 6200X) the stage will be dl; ven; at higher magnificati on, the result is obtained by beam shift.

If Auto Beam Shift Zero is checked on the Stage pulldown menu , Get moves stage movement only; beam shift is independent of magnification.

The max imum range for successive Get operations equals the range of the stage . At high magnifications. the range is limited by the maximum beam shi ft.

Shift This function performs an on screen image shift, using beam shift coupled to magnification. The stage does not move during beam shi ft. When you click on the shift icon and hold down the left mouse button,

50 1 0 1

50 101

STAGES XL4Q Stages (Early)

the cursor changes into a small hand, allowing you to position the image where you want it by dragging it.

The range of beam shift is ±IS 11m in X and Y. The computer beeps when the beam shift limit is reached .

This mode is independent of the selected scan mode and can be operated at slow scan.

Track The track function allows continuous directional movement of the stage wi th variable speed. The speed range is coupled to the magnification and selectable within certain limits.

Select the track function by clicking on the Track icon. A green overlay appears onscreen. Positi on the cursor somewhere in the image and hold down the left mouse button. The cursor can move between the inner and outer green circles. M oving toward the outer ci rcle increases the stage speed; moving toward the inner circle decreases stage speed.

The direction of movement is always toward the centre along the green strai ght line. You can move the cursor around on the field of view; directi on and speed change accordingly. When you are done, click on the arrow tool.

For a given magnification, the minimum speed is obtained when the cursor is on the inner circle . The maximum speed (for that magnification) is a multiple of the minimum speed. The maximum speed can be customized and is given by a rati o value establi shed in the position setup dialogue box. The default value is 4 (s low); the maximum value is 10 (fast).

Clamp Select the C lamp function by clicking on the C lamp icon to clamp the stage. While the stage is clamped, normal operation of x,y movement and rotation is possible, but the height and tilt cannot be changed.

When selected, the clamp button in the button bar will change colour (ye llow), indicating that the stage clamp has been acti vated . Thi s selection is a toggle.

STAGES XL40 Stages (Later)

XL40 Stages (Later)

XL40 Stage 150 x 150 mm The XL40 150x 150 mm stage is a 5 axes motori sed version.

The stage has motors dri ving the X, Y, Z, Rotation and Tilt controls. all with manual ovelTidc. All movements are read out on screen, under soft ware control.

Stage movements The specimen stage allows movement of the specimen along 5 axes.

The stage can be tilted over 75°. The tilting mechani sm can be locked for more stability at high magnificat ions using the 'Clamp' feature .

FIGURE 7-16 XL40 150 xl50 nlm STAGE MOVEMENT

z- llrilll~ 1II0Y~ IllC IlI Z = 2~) . 2 mm (nlll i IllIlFII )

Z = (,Umlll 1 E ,lcrnal nW\CI1lCIII •

Ha tfllio n in fh{"

tilt t'd Illau {"

\' +/- 73 nun llI!1 n~mc nl alt/ Il l!

Tihll lM h.'

\ \ X .. +/- 75 IIUli IlHn-Cl1Ic nt

\ al.,1I 1,: T ilt I l ianc

~--I"""joI--.-/

T ill ."ange - 5 to + 70 deg.

The Z height of the specimen can be regulated by the external 60 mm Z control and by the Z prime internal movement. The Z prime is eucentric at 29.2 mm from the stage base to sample top surface otherwise is foeocentric.

X, Y, Z, Ro tati on and Tilt movements on the motori sed stage can be operated under software cont rol for more advanced movement combinati ons.

-~-------------IIiI 50 1 0 1

STAGES XL40-1S0x1S0 mm(S axes Motor)

XL40-150x150 mm(5 axes Motor)

50 101

Legend:

1= Z height 2 = Tilt 3= Yaxis 4 = Rotation 5 = X axis 6 = Interface control connectors

XL40 (5 axes) Stage Controls

FlCURE 7-/ 7 CONTROLS ON THE STACE DOOR

Stage movement

On the 5 axes motori sed stage the X, Y. Z. Rotation and Tilt movements can be operated under software control, with manual override. A li ve image can be positioned with either stage movement (manual or software) or beam shift.


Get (icon) X and Y


Tilt (2) and Z height ( I )

Rotation (4)

Manual X (5), Y (3), Z ( I ), T (2),

R (4)

Stage Position Controls I Map

Get (above 6200X only) I


Scanrotation

1. Thi s number is set in the Stage Setup dialog box and can be changed.

STAGES XL40-150x150 mm(5 axes Motor)

UJ Ia z

When you move the stage or tilt the specimen , you may need to lower the magnification so you do not lose the feature of interest on the screen.

Fi ve axes of stage movement are available: X, Y, Z, T and R. Software controls for movement incl ude the Get, Shift and Track icons and the Stage control area. You can access this control area by maxi mi zing the Stage control group, or cl icking on the Stage icon.

I:~. ~ 'I'D .

Get 1-:-1 When you se lect an image detail with the green cross and double-click the le ft mouse button, Get brings that detail to the centre of the screen. At low magnificati on (as you defined it in the Stage Change di alogue box- usually less than 6200X) the stage will be dri ven; at higher magnifi cati on, the result is obtained by beam shift.

If Auto Beam Shi ft Zero is checked on the Stage pulldown menu, Get moves stage movement only; beam shift is independent of magnificati on.

The max imum range for successive Get operati ons equals the range of the stage . At high magnificati ons, the range is limited by the maximum beam shi ft.

This func ti on performs an onscreen image shi ft, using beam shi ft coupled to magni fication. The stage does not move during beam shi ft. When you click on the shift icon and hold down the left mouse button, the cursor changes into a small hand, allowing you to positi on the image where you want it by dragging it.

The range of beam shi ft is ± 15 [' m in X and Y. The computer beeps when the beam shift limit is reached.

Thi s mode is independent of the selected scan mode and can be operated at slow scan.

Track I.~ The track function allows continuous directional movement of the stage with variable speed. The speed range is coupled to the magnification and selectable within certain limits.

Select the track functi on by clicking on the Track icon. A green overlay appears onscreen . Position the cursor somewhere in the image and hold down the left mouse button. The cursor can move between the inner and outer green circles. Moving toward the outer circle increases the stage speed; moving toward the inner circle decreases stage speed.

~~----------------------.. 50 1 0 1

50 1 0 1

STAGES XL40-1 50x150 mm(5 axes Motor)

The direction of move ment is always toward the centre along the green straight line. You can move the cursor around on the field of view; direction and speed change accordingly. When you are done, click on the arrow tool.

For a given magnificati on, the minimum speed is obtained when the cursor is on the inner circle. The maximum speed (for that magnifi cation) is a multiple of the minimum speed. The maximum speed can be customized and is given by a ratio value established in the positi on setup dialogue box. The default value is 4 (slow); the maxi mum value is 10 (fast).

Clamp Select the Clamp function by clicking on the Clamp icon to clamp the stage. While the stage is clamped, nom1al operati on of x/y movement and rotation is possible , but the Z height and Tilt cannot be changed.

When se lected, the clamp button in the button bar will change colour (ye llow), indicating that the stage clamp has been acti vated. Thi s selection is a toggle.

----..

----.. ----.. ----..

STAGES Stage ContrOl Group

Stage Control Group

MAXIMIZED

Stage 1.:1 Scanrotation 0

1+1 1.0 1+1 02] CO +90 I Z 1+1 11.1 j+1 Rotation

1+1 h i 1+1 Tilt 1+1 h i 1+1

i

i . .............. ....................

~ 'LAST f.!. ~ i-'

Clear ~ XI-174.0 IpmRDI!J· vi 76,0 IpmT§::::]I!J0 Z124.06S ll!Jmm 1 Z <-> fWD I '.- 0 1 'Go to! • ~ Aba Rei ;", n . " " " , ,, ' it

Contrast 23.7 1+1 I d 1+1 Brightness 46.3 1+1 I II ]+1

MINIMIZED

Stage 1·1 "I ~=====::::;I-;::![!]l Xf=17=92=.0='llp-mIRF=Ir=6:~~11!J1 vi 1460S.0 IpmTIO.O 11!J1 Z124.06Sll!Jmm I Z <-> fWD I I

@ Abs 0 Red Goto I I

The maximized Stage contro l group is the same as the Stage control area. lts fun cti ons contro l movement of the stage and the beam 10

correct the positioning of the speci men.

Scan rotation Use thi s adjuster to rotate the scan and ali gn the image onscreen. Shadowing and other Charged parti cle opti cal and geometrical effects can onl y be modifi ed by changing the OIi entation of the specimen with stage rotati on. C lockwise moves are positi ve ; counterclockwise moves are negati ve.

TABLE 7-8 ROTATING A SCAN

Result

-90 Results in an additi onal - 90° scan rotation.

o Sets the scan rotat ion to zero.

+90 Results in an additi onal + 90° scan rotati on.

Z, Rotation and Tilt The Z (specimen position), Rotati on and tilt adjusters control the amount and directi on of those functi ons. The farther from centre you drag the middle slider, the faster the movement. The longer you hold it down. the farther the amount of movement. These adjusters trap the cursor within them and can only be adjusted with the middle s lider. not by clicking within the gray bar.

50 1 0 1

Stage H Seanrototion o

1+1 Rototion

1+1 Tilt

-' 1+1

,

I ---.- .. --.--.--J----.----

I ! I !

~ ~lAST i.!

~ l----- I Clear I I-+ --

XI-174.0 IpmR 0 [ilQ vi 76.0 ipmT 0.0 [iI. z124.06Sll]mm z <-> FWD-I 'i' 0 I iGotoi • ~ Abs Rel ",;, .... _ .... .. · •

Contrallt 23.1 1 .. 1 111 1+1 Brightness 45.3 1 .. 1 I [I 1.1

50 1 0 1

STAGES Stage Control Group

Stage Map The stage map function shows an X-Y control with a crosshair. The axes represelllthe IOta I X and Y range for the stage: the position of the crosshair represellls the actua l positi on of the stage with respect to the stage limits. The multiple stub holder doesn·t di splay.

When the stage has just been homed, the crosshair is in the celllre of the grid (0 , 0 coordinates). As a reference, the detector is positioned at

the top of the grid and the stage door is located at the bOll om of the grid.

Double-clicking in the grid causes the computer to calculate stage coordinates and move 10 the new positi on. The function is used to move over long distances, for example, when going from one speci men to another mounted on the multiple stub holder. Initial you have 10 estimate the locati on of each stub.

Stage rOlation is no t affected by thi s functi on; movemelll is only in X and Y.

Stored Stage Positions You can store stage positions that you walllto use routinely. Use the list box to view the list of stage positi ons. Hi ghlight the position you walll 10 work with, and double-cli ck to select it.

Add To add the current stage position to the li st, type the label in the edit box and cl ick the ADD bUllon.

Del To delete a stage position from the list. highlight the name of the positi on and click the DEL button.

Clear Use the CLEAR bUllon 10 delete all slOred stage positions from the li st. A confirmati on dialogue box appears.


Stage 1.:.1 Scanrotation 0

1"1 III 1+1 0 W +90 I Z ---. 1+1 1±1 !+I Rotation

---. 1+1 Ii) 1+1 Ti lt 1+1 liJ w 1+1

i

~ t. lAST

~ [!!i] ...i

I Clear! +'

Contrast

1+1 I.H Brightness 46.3

1+1

x, Y Use these text boxes to view existing coordinates and to enter desired coordinates to position the stage on the X and Y axes. Values are entered in microns. After you press ENTER or GO TO. the stage will move to the value entered.

Z (edit box) Enter the position of the specimen in the Z text box or choose from the li st. accessed by clicking on the down arrow. After you press ENTER or GO TO, the stage will move to the value enlered.

After you have found the eucentric hei ght for a particu lar sample and clicked the GET button in the Position Setup dialogue box, this number appears in the Z pulldown li st.

Z <-> FWD This button can be pressed to relate the Z value to working distance, so that move ments of the stage can be made safely in a vertical direction. Once pressed a dialogue box appears to remind one to check the focus, as the readout accuracy in the data bar relies on the objective lens focus. Once the re lationship is made the Z text box can be used as FWD values, where 0 is seen as the final lens po le and positions below it such as the eucel1lic positi on are positi ve in value. The same dialogue box appears automaticall y after sample change or opening of the specimen chamber.

Z (adjuster) You can also use the Z adjuster for immediate visual feedback and continuous contro l.

R Enter degrees of rotation in this text box or choose from the list, accessed by clicking on the down arrow.

Stagc H--Scan rotation 0 I+j I j I 1+1 0 W +90 I Z

1+) I !J 1+1 Rotation 1+1 1. 1.1 j+1 Tilt -H U.I 1+1

After you press ENTER or GO TO, the stage will move to the value entered. If a rotation value is the only thing you have changed and Eucentric Rotation is checked on the Stage pulldown menu, you will be operating with eucentric rotation and X and Y will change accordingly. You can also use the Rotation adjuster for immediate visual feedback and continuous control.

50101

Stage H Scanrotation o 1+1 I.lI 1+1

+90 I 1+1 ul . 1+1 Rotation 1+1 Ii 11+1

-.. Tilt 1~+~I~---rI~' I----~I~+1 , -! ;

------1 ; i

~ "LAST i.!.

~ 1=

I,Clea~J e-+

XI-174.0 IpmR 0 0 o

vi 76.0 IproT 0.0 !

Z124.068 11lJmm Z <-> f\II.I1)

• ,

Contrast 23.7 -.. I+[ l.u. • j+1 Bri!!htne88 '1$.3 -.. 1+1 itl 1+1

50 1 0 1


T Enter degrees of tilt in this text box or choose from the li st, accessed by clicking on the down arrow.

XI-173.0 l.mRDI!!-vi 76.0 l.mT 0.01 ! 0..-.

0 r! +10 @ Abs O Re. _ +15 I-

Contrast .30

.1 Iii · 45 . 70

'+ Brightness . 7S .1 1 i I

After you press ENTER or GO TO. the stage will move to the value entered.

Abs/Rel Choose either absolute or rel at ive stage movement s. Absolu.e coordinates are measured from the absolute zero (0.0,0,0,0) of the stage. Relati ve coordinates are measured from the present locati on on the stage.

Go To Click on thi s button after setting X, Y, Z, R and T parameters to move the stage to the value entered. You can also use the ENTER key on the keyboard.

Contrast Use this adjuster to control the contrast displayed in the image .

This has the same functi onality as the contrast adj uster on the Beam and Video control groups.

Brightness Use this adjuster to control the brightness di splayed in the image.

This has the same func ti onality as the brightness adjuster on the Beam and Video control groups.

Z<->FWD Dialogue Box This dialogue box appears automatically after sample change or opening of the specimen chamber to remind the operator to link the Z positioning to Free Working Distance and prevent damage to either sample or lens.

For safety reasons it is necessary to confirm that the specimen is in focus.

Focus the image and confirm with 0 I( (Z will be linked to \tiD J.

01(

STAGES Use of Stage Functions

Use of Stage Functions

Stage I ~ J Scanrotation 0

1+1 1.0 1+1 0 CD +90 ) Z

--- 1+1 Id J+I Rotation

1+1 111 1+1 -

+1 , I i 1 j+1

Add ll'LAST ~ Del li i"'"

1~I~ar 11 ~

xl-114.0 IpmRI 0 IIII" vi 76.0 IpmTI 0.0 I~~

--- Z124.06811I1mm Z <-> fWD

@ Abs 0 Rei I ip"J9..i I Contrast 23.1

1+1 I i I .+1 Brightness 46.3 1+1 I i I 1+1

Using Tilt You can adjust Tilt using either the ''T'' edit box, or the Tilt adjuster on screen with in the Stage control area, or manual Tilt contro l (2) on the stage. The range is -5 to + 70,

The specimen can be tilted using the turning control (2) as fo ll owsi

-Check that the Clamp button is in the unlocked position (grey),

-Set the tilt to the desired angle by turn ing the control (2) clockwise or counter-clockwise

-The tilt angle can be read from the "T" edit box

-I f desired (at high magnifi cati ons), the tilt mechani sm can be locked using the Clamp button in the button bar

In order to prevent damage to the specimen or the detector (e,g, the Backscatter detector), tilting has to be done carefull y,

Using Z (height) adjustment With the vari ous sample holders it is possible to move Z height ( I) to

another position if required from outside the chambeL The external movement (Z) is 60 mm for SFEG This allows a Oexibi li ty to load large height specimens onto the stage.

To set the specimen height and at the same time prevent any possibility that the specimen should touch the lens pole if the Z is increased can be done as fo llows:

- Load a specimen onto the specimen holdeL

- Adjust the Z with the external and internal movements, so that the specimen is approximately 5 mm below the lens , For Eucentric positioning the internal Z should always be 29,2 mm,

- Close the chamber, and pump down,

- When the beam is switched on the Z<->FWD Dialogue box appears, follow the instructions and focus the sample, Press OK

Now the Z can be changed by the soft ware interface or the manual external Z control to other positions, but for safet y, not less than I mm from the lens,

50 1 0 1

Stage So.nrotation ---. 1+1 I II 0 W Z

1+1 I.! 1 Rot:iltion ---. 1+1 I.!. 1 Eilt +1 1J:l

50 1 01

l.:J 0

1+1 +90 ~

1+1

1+1 -

1+1


Using Rotation You can adjust Rotat ion using either the -R - edit box, or the Rotation adjuster on screen wi thin the Stage control area, or manual Rotation

control (4) on the stage. The range is 3600 cominuous.

Using Scanrotation Use the adjuster either on the Stage or Imaging contro l area. to rotate the scan and align the image ollscreen. Shadowing and other optical geometric effects can be modi fied onl y by changi ng the ori entati on of the specimen with stage rotation. Use the Scan rotati on adj uster to make incrementa l changes, or choose one of the fo llowing bUllons below the adjuster:

TABLE 7-9 ROTATING A SCAN

-90 Results in a n addi ti onal - 90° scan rotation.

o Sets the scan rotation to zero.

+90 Results in an additi onal + 90° scan rotati on.


MINIMIZED

MAXIMIZED

Stage Scanrot.1ion 1+1 I.D Oil [I] z 1+1 I [I Rotation

1+1 Iii Tilt 1+1 IJ]

1 --- )

,

Add ' LAST

Del

Clear

1-174•0 IpmR

1 16•0 IpmT

x V

Z 1 24.068 1[i1mm

Contrast 1+1 HI Brightness 1+1, I II

L: j 0

1·1 +90 I

1·1 1· 1 '. 1

~ .... ~

0

~ 0.0

•

• Z <·> fWD I

,

23.7 j.1

46.3

1·1

Using Stage Position Controls The Stage area shows the actual stage coordinates in microns for X and Y, and millimetres fo r Z. Rotation and tilt display in degrees. Yo u can move to new coordinates by entering the values in the X,Y text boxes or by clicking on stored stage positions on the map area.

Using Stored Stage Positions Double·clicking on a Stage Posirio n label in the stage position li st, such as "' Last, causes the stage to move to a prestored locati on. If you want to store a new locati on. type a new label in the edit box above the list (up to 32 al phanumeric characters excluding spaces) and then click on ADD. Highlight a label and then c lick on DEL to remove an un wanted locati o n. C lick on the CLE AR button to delete all stored stage positions in the li st except "'Last.

The Stage Map Thi s func ti on shows an X· Y control with a crosshair. The axes represent the total X and Y range for the stage.

Blue boxes represent stored stage positions. The se lected stage position di splays as a red box. The black c ross represents the curTent stage position.

STAGE MAP

. . .

I, .

.

POStH /

Add ' LAST ~ POStll

~ POS"2 ....

POStl3 Clear POStl4 ~

SELECTED POSITION = RED BOX STORED POSITION = BLUE BOX CURRENT POSITION = CROSS

M ove around the specimen by double-clicking in the grid. The soft ware calculates stage coordinates and moves to the new positi on. Navigating this way will not change tilt or rotation; it is a pure X· Y stage movement. If you have applied any scanrotati on, it will a lso not affect the movement. because scan rotation has nothing to do with the mechanical position o f the specimen.

50 1 01

Stage Menu

S!age Home ... Clamp

Align X Align Y Align Feature Specimen Alignment Use Spec. Alignment Setup Z correction Use Z correction

Eucentric Rotation Zero Beam Shift Auto Beam Shift Z ero Beam Shift Reset Pro

Read Mapping File Change ...

50 101

STAGES Stage Menu

The Stage menu fu ncti ons control movemenl of the stage and the beam to correct the positi on of the specimen.

Home Home the stage by pressing YES on the Stage COnlrol dialogue box.

@ Home motors tage?

:(es I I No I The Homing Stage Acti ve dialogue box nashes onscreen .

When the stage is homed correctly. all fi ve coordinates will be O.

Clamp I§'I Select Clamp to clamp the stage. Whi le the stage is clamped normal operation of xly movement and rotation is possible . but the Z height and ti lt cannot be changed.

When selected from the menu. the cl amp bUllon in the bUllon bar will change colour (yell ow), indicating that the stage clamp has been acti vated. This selection is a toggle.

Align X/Align Y Use Align X or Align Y to align rows or columns on the sample with the vertical or horizontal axes on the screen. Use Slow Scan for greater accuracy.

Align Feature This allows you to align the vertical axis of an ent ire regular feature over a long distance . You must use the a rrow tool. Although the alignment can be performed using TV rate scan speed. slow scan speed will give the best accuracy.

Align Feature Click on one end of a long linear

featur e~ moving the stage if necessary.

I ~(aii~"ii I

The di alogue box prompts you to click on one end of a long linear feature and then lOCale another feature by any means of stage navigation except double-clicking. This form of X align allows you to

align across several dies. for instance on wafer samples.

STAGES Stage Menu

Stage Home ... Clamp

Align X Align Y Align Feature -- Specimen Alignment -- Use Spec. Alignment Setup Z correction Use Z correction -- Eucentric Rotation -- Zero Beam Shift Auto Beam Shift Zero Beam Shift Reset Pro


Specimen Alignment Specimen alignment is a navigation aid . It can be used to convert al ignment points fr0111 microns to user units and to further increase stage accuracy. Use the arrow tool or Get moves to select the alignment points.

Spccim r:n AIi~nment

OK ! Cancel I

S tage X ; Y : U sc, X: V: I

~I II I~' ~L. ~~ __ ~~.~.====~==~.~ Pos ilion 8 79 0 -374 _0 I II I ,---,---,--,--. o U sc U s c, Coo.din""l c s L-""u""u_JL~uu"'---' lNewAlio_n_l

Use Specimen Alignment This se lection is a toggle for using an established Specimen A lignment.

Eucentric Rotation Select Eucenttic Rotation to make all stage moves eucentric. Computer ca lculati ons make adjustments for changes in position that would move the area of interest out of view. This shifts the centre point from the stage centre to the field-of-view centre.

Zero Beam Shift When beam shift has reached maximum limits. choose Zero Beam Shift to restore X and Y beam shifts to zero values. The computer beeps when maxi mum limits are reached.

501 0 1

Stage Home ... Clamp

Align X AlignY Align Feature Specimen Alignment Use Spec. Alignment Setup Z correction Use Z correction

Eucentric Rotation Zero Beam Shift - Auto Beam Shift Zero - Beam Shift Reset Pro - Read Mapping File Change ...

50 1 0 1

STAGES Stage Menu

Auto Beam Shift Zero Select Auto Beam Shift Zero to automatically set beam shift to zero after a stage move. This also prevents Get moves from using beam shifl.

Beam Shift Reset Procedure Use this function to begin the beam shift procedure to zero beam shift and move the feature to the celllre of the fi e ld of view with the stage.

Beam Shift Procedure

Start beam shift procedure to move item to center.

I •.... J I Cancel I O.~

A powerzoom procedure begins that combines a preset zoom rate with au tofocus and amocolllrast,brightness. You se t the parameters in ad vance in the Positi on Setup dialogue box. If you have chosen autofocus (ACB), this will extend the time the procedure takes.

Read Mapping File (Option) When se lected. the Stage Mapping dialogue box displays a li st of mapping fi les that can be used to make stage moveme nt more accurate at various tilts and hi gh tensions.

Stage Mapping

Beam Tilt HT

~ ... NL.\ .. '.f;;Inni.nIl ......

I Read II Cancel I

The asteri sk indicates which map file is currelllly being used by the software. You can a lso select no mapping, but none of the stage moves will be eucelllric.

STAGES Stage Menu



Eucentric Rotation Zero Beam Shift Auto Beam Shift Zero Beam Shift Reset Pro

Read Mapping File - Change ...

Change Use thi s dialogue box to set parameter inputs for PowerZoom image positi oning functi ons, Beumshift, Track fun cti on. Lock, Holder

Stage Setup

PowerZoom

O ACB o AutoFocus

Rate (x21 .secl[[:]

[ BeamShift Used in 'GET' from magn: 16000 I I

[ Track function:

Track speed: 10 I I , LOCk _ OZaxi. o Rotation I [ Define hofder

INone I ,~ I ~ Eucent~:~ ~oint I :: St~~ is at eucentric height II , HQi~:r;/~jii~; i? ~i~g~;;;~;;~) I I BacklashCorrection _ r X.Y back-lash COIL switched off I

I- 0k I I Cancel I ii; ~'---.-

definition, and Eucentri c point Z calibration.

50 1 01

STAGES Position Setup Functions

Position Setup Functions

TABLE 7-10 POSITION SETUP FUNCTIONS

PowerZoom ACB

(only before version 5.9)

PowerZoom Autofocus


PowerZoom Rate (x2)


Beam Shift used in GET from magn

Track speed

Lock Z axis

Lock Rotation

Lock Tilt

Deline holder

Eucentric Point

Z coupled to FWD

Backlash correction

OK

CANCEL

Performs contrast and brightness at the end of the powerzoom operation.

Performs autofocus at the end of the PowerZoom operation. Extends the time the procedure takes.

Detenn ines the time in seconds it takes to increase the PowerZoom magnificati on by a factor of 2. The larger the number, the more time you will have to find detai l.

The maxi mum magnificati on setting used wi th the Get functi on to move the stage if Auto Beam Shi ft Zero is not se lected: beyond that. image shi ft is used.

Sets the rat io between the minimum and max imum speed. The mini mum defau lt value is 4 , the maxi mum is 10. The rati o onl y influences max imum speed at a given magni fication. The minimu m speed is always coupled with the magnifi cation value.

Lock/un lock fun cti on. locking stops use of axis

Lock/unlock functi on, locking stops use of axis

Lock/un lock function, locking stops use of axis

Contains li st box to choose holder.

Defines the eucentric position for tilt and Z safety. Depending on the ti It, Z is limited to some di stance above the eucentric point.

By pressing the large button the stage moves to the Eucentric point.

If the check box is acti ve the FWD is updated to the Z value chosen, therefore retaining focal condi tion.

If the check box is non-acti ve moving Z will result in no change to the FWD value. This can be overcome by pressing Ctrl-Z.

A switch to contro l backlash correction, On or Off. Default Off.

Stores parameter changes made in dialog box before closing.

C loses dialog box wi thout saving any changes to parameters.

--------------~~ 5010 1 _

STAG ES Using Stage Alignments

Using Stage Alignments


AlignX AlignY Align Feature Specimen Alignment Use Spec. Alignment Setup Z correction Use Z correction



Depending on the type of spec imen and specimen holder you are using, you may need to use an alignment function to work more easil y with the features you want to.

Using Align X or Align Y Use Ali gn X or Align Y to align rows or columns on the sample with the vertical or horizontal axes on the screen.

TABLE 7-11 USING ALIGN X OR ALIGN Y

Order I Action

1 Select Align X (or Align V). The cursor changes to a small angle that you can reposition. (The angle shown below is larger than what you would ordinaril y need.)

PATH OF LINEAR FEATURE

MOVES TO ALIGN WITH

X OR Y AXIS CHOSEN

2 Drag the angle with the left mou se button to match the position of the feature to be a li gned to.

3 When you re lease the mouse button, the foll owing dialog box appears:

Angle = 15. 9 Degrees; Rotate?

When you click on OK, the stage rotates eucentrically so the line drawn is on the screen's hori zontal (or vertical) axis but the feature remains within the field of view.

III~-------------50101





50 1 01

STAGES Using Stage Alignments

Using Align Feature Designed specifically for wafers, Align Feature is similar to Align X and Align Y, but applies the de-skew process across the entire wafer. The larger distance involved results in greater accuracy.

TABLE 7-12 USING ALIGN FEATURE

Order I Action

1 Selcct the Arrow icon if it is not already ac ti ve.

2 Cl ick on ALIGN FEATURE from the Stage menu. Follow the directions in the dialog box that appears.

Align Feature

Click on one end of a long linear feature, moving the stage if

necessary_

Itancei' I ,tr 3"'1'& It #i 'Cst · " w

3 A second dialog box prompts you to click on the other end of the wafer. After doing so, the stage wi ll move to

that location and apply the alignment across the length of the wafer.

Using Eucentric Rotation Stage rotat ion will be performed eucentrically or noneucentrically, depending on whether or not Eucentric Rotati on is checked on the stage pulldown menu.

Eucentric Rotation should always be checked but it is less accurate when you are usi ng a working di stance other than 10 mm and the specimen is tilted. Also, its accuracy depends on selecting the appropriate mapping file. Choose Read Mapping File and se lect from the Stage Mapping dialogue box. If you have no mapping selected, none of the stage moves will be eucentric

STAGES About Specimen Alignment

About Specimen Alignment

S!age Home .. . Clamp

Align X AlignY Align Feature

Specimen alignment assoc iates stage points with user-defined points to set up a mapping between stage and user coordinate systems. After that, the computer uses these specimen coordinates rather than stage coordinates for positi oning.

_ Specimen Alignment

Use Spec. Alignment

For example. a die of an integrated circuit has its ow n coordinate system. If you choose a 0,0 positi on, you can dri ve the stage relati ve to that position using your own coordinate system. These are ex pressed in User Unit (UU) coordinates, which may be microns, multiples or frac tions of microns, etc.

Using 1- , 2- or 3-Point Alignments Table 7-24 illustrates the differences between alignment types.

TABLE 7-13 ALIGNMENT TYPE DIFFERENCES

l-Point Alignment 3-Point Alignment

Major Use Aligning to an new Aligning the stage axes Re-scaling to point directly offset with the specimen X-Y nonstandard units on from the existing orientati on to correct dies o r RAM an'ays; location for any skew correcting for any skew

Change in Scale None Scales the axes together X can be scaled differently from Y

Change in None Rotates both axes with X and Y orientations Orientation a fi xed 90° angle can be different

between axes

50 1 0 1

50 101


Using Specimen Alignment If you have a previous alignment when you select Specimen Alignment. a dialog box asks for confirmation that you want to correct alignment points for rotati on.

After choosing YES , a dialog box appears.

Specimen Alignment Stage X: Y : User X: Y : I OK

I ::: IDDI::::.I'~ c.~nce~' [}ill Il~~) to J

-0.6 LI ~-----,ILI ~-----,I uu uu

Position: 0.8

o U se User Coordinates

Using Get versus Arrow Tool During the alignment, you' II be clicking on features and setting those coordinates as alignment points. If you use the Get function, you'lI double-click on the feature to bring that detail to the center of the screen. The absolute stage position wi ll be di splayed in the lower left corner of the dialog box opposite the word Position.

Specimen Alignment Stage X: Y : U ser X: Y: I OK

~. :.:. : .. DDI::::I~' C.':;;;;"nce~,1 [}ill l.utI to J

------.. Position: -27640.0 8014.0 LI ~~-,I,l~~--,I o Use User Coordinates UU UU

If you choose the Arrow tool, you can single-cl ick anywhere onscreen to select the feature . The calculated stage positi on di splays in blue. With this method, you can choose an alignment featurc not at di splay center. Because thi s is a calculated value, use the Get function to move the detail fairly close to the display center before using the Arrow tool to select it as the ali gnment point.


After you have chosen the alignment feature with either method, type in your own coordinates in the UU fie ld without pressing ENTER. You can type in any nu mber of digits in this fie ld.

Specimen Alignment

Stage X: Y: User X: Y: I OK

i ::: IDDi:::::. I~' c~.nc~el "'! l ~ Inote l Po, ;I;on ·27640.0 8014.0 1.:11-;-;:-:--111.:1 ~!..-,,-:-c---.JI o Use User Coordinates UU

After the user poi nt has been typed in, cl ick on SET. This enters the pair of coordinates into the top box as a first. second, or third ali gnment points.

Specimen Alignment

,.".:~.5;c1 .:=gc:e,,:X,::c-::-_-::-:,,:Y-=-c, Uter X Y I OK.

·27640.0 8014.0 DO 2 0 1 Go 10 II Cancel

~ I Go tt} l ,-__ -, ~ IG,l!c ll A •• bgn I

L-____ -';:=:== I 011 •• 1 I Po,;I;on ·27640.0 8014 0 I II I . o Use User Coordinates UU UU I New Ahgn. 1

Ali gnment points can be entered in any order. To edit or correct a location, use the GO TO bunon to return to a position. Redefine the coordinates by moving the desired feature under the cross in the center of the screen with the Get function (or use the Arrow tool to click on the fea ture). Press SET again .

Choose points that are not in a straight line, for example, at the corners of a die or the edges of an area or wafer. You can align up to three points but you wi ll have the greatest accuracy with three.

When all points have been defined to your satisfacti on, press OK to store them into memory. The stage position edit boxes now display user coordinates instead of coordinates.

At any time during the alignment (until OK is se lected), pressing CANCEL wi ll stop the procedure. Choose NEW ALIGN. to clear the existing alig nment complete ly and begin again .

Choose REALIGN to leave all existing points in the dialog box as proposed but redo the alignment. If you have checked the Use User Coordinates box, the soft ware will use and display user units when you click on the GO TO bunons.

~~---------------------.. 50101

50 1 0 1


Using Offset Alignment Offset is a shortcut that allows you to move 10 new points relati ve to the existing alignment but at a new location. for example. stepping between identical points on different dies quickly.

[EJ ~ f1i]

Specimen Alignment

~~~~~~r~~~--~Y:~ 1 OK 2.0 16010 i l

Stage X: y . Use, X:

·27640.0 8014.0 0.0

·27670.0 7979.0 1.0

·27695.0 7993.0 3.0

. Cancel

2.0 I GtHO ' r-:--.....

4.0 I GO ,to II Realign

~=::::-::---==~~==::::;;:===:I 1 Off •• 1 Position -27695.0 7993_0 I . o Use Use, Coo,dinates '-""U"'U:-..JL...-",,;U"U---' INew Align. ,

explains how to use thi s function

TABLE 7-14 USING OFFSET ALIGNMENT

Order Action

1 Click on the OFFSET bUllon. The existing a li gnment points display in blue type.

2 Click on the GO TO bUllon nex t to the first alignment point. Edit the User Units if you want to change them.

3 Move the stage to the target die and click on the corresponding feature. (Or use Get to move the feature under the cross hair.

4 Click on the first SET bullon. The type wi ll change to black and the other two points wi ll change to the same position relative 10 the new first alignment point.

5 C lick on the GO TO bUllon next to the revised second alignment point. The stage wi ll drive to the vicini ty of the corresponding alignment point on the second target die.

6 Click on the feature with ei ther Get or the Arrow 100i.

7 Click on the second SET bUllon.

8 Repeat steps 5-7 for the third alignment point. if present.

9 Click on OK to save the offset alignment.

STAGES In/Out Menu

In/Out Menu

to/Out S!age Image ... Parameters ... Photo! Databar ... Grayscale ... Videopriot! Printer Configuration .. . Stage Table Load ...

Change Photo ... Save ...

Stage Table Use thi s function to retri eve or store stage files from the li st of stored stage position that include settings for stage ali gnment.

Load

Choose Load from the Stage Table submenu to open a stage positi on file. If you have a prestored stage position table, a Confirmation di alog ue box appears:

"""'I Confirmation

o Do you really want to ove rwrite the stage po sition table ?

1 :ie.

Also. if you have an ex isting Specimen Alignment defined. a di alogue box will say 'The stage table fil e incl udes Specimen Alignment information. Do you want to overwli te?

If you cl ick on YES the Load Stage Table di alogue box appears:

=1 Load Stage Table

File H.ame: Q.ilectolies: OK I 1·· .. 9 c:\xl \ rnc .. 8 c:, o!. Cancel I $temp.stg

mu"ist.stg 8 , ' stubst.stg t estst.stg

e rne

~ • List File s of lYpe: Onves: IStage Table s (M.STGJ I ~ I I""'c: I.tJ

Select a stage fi Ie and click OK.

50 1 0 1

In/Out S!age Image ... Parameters ... Photo! Oatabar. .. Grayscale ... Videoprint! Printer Configuration ... Stage Table

Change Photo ...

50 1 01

Load ... Save ...

STAGES In/Out Menu

Save

If you choose Save from the Stage Table submenu , a similar di alogue box appears.

-I S~ve Stage Table

File H a rne : llil ectOlie.: OK IStemp.slU c :\xl\mc

$I .. mp :~ I Q .!. 127 c : \ i.!. Cancel

multis t .stg e. ,' s tubst.stg ~ mc tes t s t .stg

r. r. Save File en .lvpe: DliYes:

IS lage Tables 1° .516 ) 1+1 I ... c o I-I

The saved stage file will include all preset stage locati ons at the time you saved.

Configuration This dialog box contains defa ult settings for some aspects of the user interface that can be customi zed. Changes are saved for each user.

Conflgulahon Cooom •

SAVES CUSTOMISED DEFAULTS FOR EACH USER

" r

" r r

: Showlhide edlUstOl _'ow ketl$ : F'lM/deleuk Mag ,Iep$ with • .

; Shlwtlhide looIJoI captions ! LOIffeI .. age on vent : AutoSlri <bing Freeze or

Ionp Sl!lgeWovea

L __ --.JI._~J .~~!_.~.

j I.

I MAKES CHANGES ONLY Jf 0< I .~ ...... ~... :..1 __ ~ lEAVES DIALOG BOX VALID FOR CURRENT _ W ITHOUT t.4AKING SESSION _____ CHANGES

STAGES In/Out Menu

TABLE 7-15 CONFIGURATION CONTROL

Control Option

Stage fieldshift

Stage functions enabled during Dual Magnification

Increment exposure no_ on data bar after videoprinting

UHR Advice (SFEG only)

Y size of videoprint (mm)

Y size of Tiff print (mm)

AutoNaming Image Files

Vent button, confirmation first

Scan Rotation -90 offset

Showlhide adjuster arrow keys

Fine/default mag steps with +-

Showlhide tool bar captions

Lower stage on vent

A uto Blanking during Freeze or long StageMoves

Temperature unit

How it Works

Arrow keys move the stage by a full or hal f screen width.

Full = alTOW key moves full screen; Shift anow moves half screen.

Half = arrow key moves half screen: Shi ft arrow moves full screen.

None = no stage fie ldshift

Unchecked = di sabled

Checked = enabled. lise the JITOW keys for stage field stu ft.

Unchecked = disabled Checked = automatically increments

Full ! Std ! Off: Different levels of guidance for the UHR Mode

Display only, specific to instaLled device

Changeable Y size depending on printer in use

Unchecked = disabled Checked = Consecuti ve nanling (numbering) of Image files. Used wi th the PIinting function.

Unchecked = disabled Checked = enabled

Makes scan veItical to the tilt axis instead of parallel to it. For use with stereo pairs. color option.

Unchecked = disabled Checked = enabled

Adds arrow keys to the ends of the adjusters for incremental changes. Change takes affect after choosing a different control area.

Unchecked = disabled (Hides) Checked = enabled (Shows)

Modifies the step sizes when using the + - keys on the keyboard for changing magnification.

Unchecked = disabled (Default Presets) Increases magnification by default factor of 2X.

Checked = enabled (Adds Fine Steps) Increases magnification according to the pulldown menu presets. but adds extra steps between.

ShowsAlides captions on tool bar icons.

Unchecked = disabled (Hides)Checked = enabled (Shows)

If checked. then whenever a vent is made to the specimen chamber the stage will lower to a safe position

Unchecked = disabled Checked = enabled. Beam blanks to shorten or stop exposure of samples to the beam.

Displays the unit of temperature when a heat ing stage or Peltier device is used.

50101

Chapter 8 MAINTENANCE

----------------------~I

5010 1

Operational Maintenance .......... 8-1 Overview . . . . . . . . . . . . . . . . . . . . . .. 8-1

8.1 Aperture maintenance FEG ..... 8-2 XL FEG Single Apertures . . . . . . . . . .. 8-2

8.1.1 Removing the Aperture rod .. 8-2 8.1 .2 Removing the apertures. . . .. 8-2 8.1.3 Cleaning the Aperture rod ... 8-3 8.1.4 Cleaning the apertures. . . . .. 8-3 8.1.5 Replacing the Aperture rod ... 8-4

8.2 Aperture maintenance SFEG .... 8-5 XL SFEG Strip Aperture Module1 . . .. 8-5

8.2.1 Removing the Aperture rod " 8-5 8.2.2 Replacing the Aperture Module 8-6 8.2.3 Replacing the Aperture rod . .. 8-6

8.3 Aperture maintenance SFEG ... . 8-7 XL SFEG Strip Aperture Module2 . ... 8-7

8.3.1 Removing the Aperture rod .. 8-7 8.3.2 Cleaning the Aperture Module 8-8 8.3.3 Replacing the Aperture Module 8-8 8.3.4 Replacing the Aperture rod .. . 8-8 8.3.5 Aperture availability . . . .. . .. 8-8

8.4 Stage maintenance .... . ....... 8-9 Specimen Holders . . . . . . . . . . . . . . . . 8-9

8.4.1 Cleaning specimen holders .. 8-9 Stage mechanics . . . . . . . . . . . . . . . .. 8-9

8.4.2 Cleaning Stage parts . . . . . . . 8-9

8.5 Rotary pump maintenance . .... 8-10 Oil level check . . . . . . . . . . . . . . . . .. 8-10

8.5.1 Periodic check . . . . . . . . . . . 8-10 8.5.2 Topping-Up .... .. . . . . .. . . 8-10

8.6 List of Applied Cleaners .... . .. 8-11

I~----------------------

50101

8 MAINTENANCE

Operational Maintenance

50 1 0 1

Overview This secti on descri bes the maintenance necessary for the mi croscope that can be carri ed out by the user. For the FEG and the SFEG User mai ntenance is at a minimum due to Gun and Column design and the long uptime expected fro m thi s class of instrumentation. Therefore the more complicated maintenance is normally contained in a service contract to be performed by a quali fied XL FEG service engineer.

At the user leve l items such as the fo llowing can be maintained:

• Aperture maintenance

• Stage maintenance

• Rotary Pump maintenance

Cau tion! Parts that operate in vacuum should be handled carefully using clean gloves. Parts not in use should be stored in sui table containers or packed in aluminium foil.

Note:Gas back fill (N2) should be maintained while the specimen chamber is at ambient pressure. However, to avoid gas wastage it is recommended that the chamber should be left open no longer than necessary.

MAINTENANCE 8.1 Aperture maintenance FEG

8.1 Aperture maintenance FEG

II

XL FEG Single Ape rtures The design of the original FEG aperture rod was with 4 positions for indi vidual 3 mm round apertures. This meant that the apertures could be placed in any positi on, or be all the same, or a cascade of sizes to suite many applications. Usually one position ( I st) was reserved for a Gold foil aperture for low voltage work where as the remainder were of Platinum fo r more general uses. The rod itse lf had no cable or heater installed.

FIGURE 8-1 FEG APERTURE HOLDER

8. 1.1 Removing the Aperture rod With the high voltage off, let the specimen chamber up to atmospheric pressure. The Aperture rod is held at the same vacuum as the specimen chamber so no special vacuum need be broken to remove it.

Unscrew the end of the Aperture rod and carefu lly re move it from the microscope. Preparation to clean or replace apertures should be immediately available as the specimen chamber has to stay at atmosphere fo r the durati on of maintenance.

8.1.2 Removing the apertures If the apertures are to be cleaned then care should be taken to release them from the holder. Thi s can be achieved by holding the plunger rod back against its spring and remov ing the apertures with tweezers one by one. Special care should be taken with the Gold foil aperture as thi s can be easily damaged due to it being only 500 nm thick around its centre.

50 1 01

50 1 0 1


8.1.3 Cleaning the Aperture rod The end of the rod around where the apertures sit becomes contaminated. If thi s is not removed before replacing the new or cleaned apertures contamination will mi grate over a short time to the clean apertures and may cause excessive astigmati sm.

The flat part of the rod for cleaning can be seen in Figure 8.1 with the exclusion of the spring and plunger.

Carefull y remove the small '0' ring further down the rod. Thi s is to prevent it becoming ex posed to so lvents.

I. Clean with a mild abrasive domesti c cleaner (see li st of preferred cleaners at the end of this chapter) using COllon wool wrapped on a wooden spill.

2. Rinse in tap water.

3. Clean in an ultrasonic cleaner for 5 minutes using a neutral cleaning fluid (like EXTRAN MA02*, 5% solution in water).

4. Rinse in di stilled water for 5 minutes.

5. Clean in an ultrasoni c cleaner for 5 minutes using alcohol pia.

6. Rinse in alcohol pia.

7. Dry thoroughly under an infrared lamp ( 15 min. to I hr. ) at a temperature of between 80°C and IOO°e.

8.1.4 Cleaning the apertures The Gold foil aperture cannot be cleaned by abrasive or fl aming methods, therefore it is usually replaced if very dirty as in Figure 8. I.The lifetime of the Gold foil can be approximately I year if used only for low voltage as it self-cleans under the beam to some extent.

The Platinum apertures can be cleaned by holding each one indi viduall y in Platinum ended tweezers and placing them into a clean butane gas fl ame until the contamination is seen to di sappear at red heat.They should be allowed to cool while in the tweezers, then be removed by other clean stainless steel tweezers and replaced into the clean Aperture rod holder the correct way up, fl at side up one by one (Figure 8.2). The apertures when clean should not come into contact with anything other than the tweezers and Aperture rod holder.

FIGURE 8-2 APERTURE CROSS-SECTION

Electron beam

E W2 838


8.1 .5 Replacing the Aperture rod Replace the ' 0' ring back onto the rod, check that there is no fibres or such on the ·o·ring. Do not appl y grease to the ' 0' ring as it is not necessary and can onl y add to contamination possibilities.

Replace the Aperture rod holder back into the Aperture Adjuster assembl y on the column and turn the end screw mechanism until the holder is hand tight.

Pump the microscope specimen chamber

Set the aperture on any other than the Gold foil , preferably a 30 micron Platinum so that a high kY can be used for alignment.

50 1 0 1

MAINTENANCE 8.2 Aperture maintenance SFEG

8.2 Aperture maintenance SFEG

501 01

XL SFEG Strip Aperture Module1 The design of the ori ginal SFEG apertures was as thin metal foi ls with 5 positions. one of the positi ons being a 2 mOl alignment hole. The foil came prealigned in a metal module whi ch was connected to the end of the Aperture rod by a Titanium screw, and would normall y be replaced if heav ily contaminated. Again, simi lar to the Gold fo il of the FEG these aperture strips were to some extent se lf-cleaning. They also had a heater in the rod to assist the cleaning mechani sm. All screws were of Titanium as to have no magnetic effect.The introduction of this strip aperture coi ncided with the introducti on of the 7 positi on Aperture adjuster asse mbl y for SFEG.

FlCURE 8-3 SFEC A PERTURE MODULE J

8.2 .1 Removing the Aperture rod With the hi gh voltage off, let the specimen chamber up to atmospheric pressure. The Aperture rod is held at the same vacuum as the specimen chamber so no special vacuum need be broken to remove it.

Remove the heater cable from the outer end of the rod.

Unscrew the end of the Aperture rod and carefully remove it from the microscope. Preparation to replace apertures should be immediately available as the specimen chamber has to stay at atmospheric pressure for the duration of maintenance.


8.2.2 Replacing the Aperture Module The new Aperture Module comes in a fluoroware container. has been pre-cleaned. and is ready to be filled to the rod.

Firstl y. release the Titanium screw holding the old module onto the rod. Keep the screw in the hole of the rod and let the module fall away.

Open the new module pack and let the new module sit with the connecti on end uppermost to the edge of the comainer base.

Now pick lip the new module with the Titanium sc rew end and fasten. making sure of a good fit.

8.2.3 Replacing the Aperture rod Check that there are no fibres on the rod '0' ring. Do not grease the '0 '

ring.

Replace the Aperture rod back into the Aperture Adjuster assembl y on the column and turn the end screw mechani sm uillilthe holder is hand ti ght.


Reconnect the heater cable to the outer end of the rod.

Set the aperture at a 30 micron hole so that alignmem can be performed.

5010 1


8.3 Aperture maintenance SFEG

50 1 0 1

XL SFEG Strip Aperture Module2 This is a improved design of the original SFEG aperture using more axial stable materials with a Molybdenum fini sh. The strip has 5 aperture positions now with a I mm alignment hole in the frame and not the aperture . The strip co mes prea ligned in a metal module whi ch is connected to the end of the Aperture rod by a Titanium screw. The modu le is considered a consumable and therefore would be normally replaced when heavily contaminated. If a Fi schi one plasma cleaner is available these aperture modules can be cleaned whi le still connected to the rod. Lifetime of these strips can be up to +4 times longer than the previous module I design, whi ch has stopped .There is also a heater in the rod to assist the cleaning mechani sm for high water vapour or expected high contamination levels. otherwise the heater is not necessary fo r this type of strip aperture. All screws are of Titanium as to have no magnetic effect.

This type of MotSi stri p aperture can directly replace the meta l strip apertu re module I which it supersedes.

FlCURE 8·4 SFEC APERTURE MOD ULE 2

8.3.1 Removing the Aperture rod With the hi gh voltage off, let the specimen chamber up to atmospheric pressure . The Aperture rod is held at the same vacuum as the specimen chamber so no spec ial vacuum need be broken to remove it.

If connected remove the heater cable from the outer end of the rod.

Unscrew the end of the Aperture rod and carefu lly remove it from the microscope. Preparat ion to cl ean or replace apertures should be immediately available as the specimen chamber has to stay at atmospheric pressure for the duration of maintenance .


8.3.2 Cleaning the Aperture Module This is only possible if a Fischione Plasma cleaner is available. Take the compl ete rod with module attached and place in the TEM opening on the plasma cleaner. The screw at the end of the Aperture rod screws into the TEM opening and seals against the rod '0' ring.

Give the rod 5 minutes at 4.5 volts plasma generation. Thi s should remove all hydrocarbon base cOlllam ination. If the contaminati on is stubborn longer times will be necessary, thi s should not damage the aperture as the plasma onl y removes organic bases.

8.3.3 Replacing the Aperture Module The new Aperture Module comes in a flu oroware cOlllainer. has been pre-cleaned. and is ready to be fined to the rod.

Firstly. release the Titanium screw holding the old module 0 1110 the rod. Keep the screw in the hole of the rod and let the module fall away.

Open the new module pack and let the new module sit with the connecti on end uppermost to the edge of the container base.

Now pick up the new module with the Titanium screw end and fasten . making sure of a good fit.

8.3.4 Replacing the Aperture rod Check that there are no fibre s on the rod ' 0' ring. Do not grease the '0'

ring.

Replace the Aperture rod back into the Aperture Adjuster assembly on the column and tum the end screw mechani sm until the holder is hand ti ght.


Reconnect the heater cable to the outer end of the rod if necessary.

Set the aperture at a 30 micron hole so that alignment can be performed.

8.3.5 Aperture availability These apertures are the present used and come in two size types.

FP 6174/33 Mo Strip Aperture (30,30.40,50, I 00 micron) This type can be used for general applicati ons including EDX.

FP 6174/53 Mo Strip Aperture (30,30,50,30,30 micron) This type can be used for high resolution applications such as low voltage.

NOTE: These apertures are purpose made for the 7 position Aperture Adjuster assembly, although they will fit the earlier 4 positi on design not all apertures can be accessed.

5010 1

MAINTENANCE 8.4 Stage maintenance

8.4 Stage maintenance

50 1 0 1

Specimen Holders Recommended cleaning procedures are given below for parts which operate in vacuum and that are subject to possible contamination. Frequency of cleaning is, in most cases, determined by necessity (image quality or asti gmatism level).

8.4.1 Cleaning specimen holders I . Clean these parts using cotton wool and a mild abrasive domestic cleaner (see list of preferred cleaners at the end of this chapter).

2. Rinse in tap water.

3. Clean in an ultraso ni c cleaner for 5 minutes using a neutral cleaning nuid (like EXTRAN MA02*, 5% solution in water).

4. Rinse in distilled water for 5 minutes.

5. Clean in an ultrasonic cleaner for 5 minutes using alcohol pia.

6. Rinse in alcohol pia.

7. Dry thoroughly under an infra-red lamp ( 15 min . to I hr.) at a temperature of between 80°C and 100°C.

Stage mechanics Checking the condi tion of the stage should be a weekl y exercise as many differing samples may be exchanged in this time period. Some samples may be powders or composite materials that inadvertently drop particles on or in the stage. If a Silicon wafer breaks in the chamber it can shatter into hundreds of pieces. In this case the stage should be thoroughly cleaned before attempting movement again

8.4.2 Cleaning Stage parts Abrasives and solvents must not be used on the stage moving parts. Cleaning should be made by using dry nitrogen gas bursts around the stage mechanics to blowout any fore ign materials. Make sure the final lens and detectors are protected fro m the turbulence. Do not use sharp m etal objects to scrape away debris. A fine pair of plastic tweezers can be used to pick up difficult particles. Spillages on the stage should be wiped up using a lint- free cloth, followed by blowing with N2·

MAINTENANCE 8.5 Rotary pump maintenance

8.5 Rotary pump maintenance

Oil level check The Rotary pump supplied with the FEG or SFEG has a dual roll by giving primary pumping to parts of the system such as the specimen chamber, when changing sample, and a secondary roll fo r backing the main pumping system, either Oil Diffusion (ODP) or Turbo Mechanical (TMP). Because of the frequency the pump has to process large volumes of air loss of oil level over time is inevitable. Therefore a check on the oil leve l at frequent periods is advised.

8.5 .1 Periodic check This should be planned no less than every month, although every 3 months is more realistic.

The Rotary pump becomes very hot while in use, be careful not to touch the main frame of the pump.

Rotary pumps can be switched off for short peri ods of time. although necessary when changing the total oil reserve (Service functi on) it is not absolutely necessary when only topping up the oil level. The switch for ON/OFF can be fo und on the side of the pum p.

The level indicator window is usuall y fo und on the fro nt end of the Rotary pump, and shows mini mum and max imum leve l markers.

8.5.2 Topping-Up The filling position is a plasti c hand screw stopper on the top of the same end as the level indicator.

o Switch off the pump if felt necessary.

o Unscrew the stopper.

o Clean around the stopper hole with a lint-free cloth .

o Fill with the recommended oil to the upper level.

o Clean up any spillage on the pump.

o Replace the stopper.

o Switch on the pump.

Never fill the pump through the exhaust hole by removing the ex haust pipe, as thi s will result in the oil being removed from the pump by pressure build-up. Excessive back pressure in the exhaust pipe will eventually over-heat the pump, so it is important to allow good passage for the exhaust gases, preferably via an installed factory exhaust system.

Caution! Do not allow the Rotary pump to emit gases into the work place, as this can be a health hazard.

50 1 0 1

MAINTENANCE 8.6 List of Applied Cleaners

8.6 List of Applied Cleaners

WARNING!

5 0101

- De-ioni sed or distilled water

- Ethanol - C2H50H

- Ethanol pia (Pro Analysis: 99.8% pure) - C2H50H

- EX TRAN - MA02 (neutral cleaning fluid)

- CIF" or SOFf SCRUB (household fine abrasive cleaner)

* elf is found in the following countries

Country Name

Austria · Australia · Finland · France · Germany · Italy · Japan · Netherlands · Switzerland · UK · USA SOFf SCRUB

As cleaning solvent Ethanol is highly flammable, do not use open flames and do not smoke while cleaning. Ventilate the room properly.

Chapter 9 SYSTEM OPTIONS

----------------------~I

50101

XL FEG Hard and Software Options 9-1 Overview . . . . . . . . . . . . . . . . . . . . . .. 9-1

AccountLog (Multi-User Shell) . . . ... 9-2 Introduction . . . . . . . . . . . . . . . . . . . .. 9-2 Starting Up as Supervisor. . . . . . . . . .. 9-2 Defining Users .. ....... .... . _ . .. 9-3

Add .... .. ... . . .. . . .. . ....... 9-3 Delete ...... . . . .. .. . . .. . . . . .. 9-3 Print ..... . ....... . ... . .. . .. .. 9-3 Change . . . . .. ....... . . . . . .. . . 9-4 User ....... ... . . ........... .. 9-4

Information for the Authorized User. .. 9-7 Changing Password .... . .......... 9-7 System Reset . . . . . . . . . . . . . . . . . . .. 9-8 Logging Menu . ................... 9-8

File Menu . . . . . . . . . . . . . . . . . . . . . 9-8 Logging Menu (Service only). . . . . . 9-9 Reset Menu. . . . . . . . . . . . . . . . .. 9-10

XL FEG/SFEG STEM Detector . . .. . 9-11 Introduction . . . . . . . . . . . . . . . . . . . .. 9-11

Sample Grid positions for SF/DF .. 9-12 User interface . . . . . . . . . . . . . . .. 9-12 Loading samples . . .... . ....... 9-12 Free Working Distance position ... 9-13 Obtaining a Srightfield (SF) image. 9-13 Obtaining a Darkfield (DF) image .. 9-14 EDX analysis with STEM ........ 9-14

Metrology Package .. . ........... 9-15 Introduction . . . . . . . . . . . . . . . . . . . .. 9-15 Using Metrology in Windows ....... 9-16

Acquire . . . . . . . . . . . . . . . . . . . .. 9-17 Calibrate . . . . . . . . . . . . . . . . . . .. 9-18 Measure ............... _ . . . .. 9-20 Sem ....... . . .... . . . . .. . .... 9-22 Stage .... . . . ....... . ........ 9-22 Print .... . . . . . ............ . .. 9-24 Statistics . . . . . . . . . . . . . . . . . . .. 9-25 Job ........ .. .... .. .. . . ..... 9-25 File ..... . .... ........ . .. . ... 9-26

Calibration Procedure . . . . . . . . . . . .. 9-27 What standard to use? . . . . . . . . . . .. 9-28 A step by step calibration . . . . . . . . .. 9-28

1-----------------------How to Measure . . . . . . . . . . . . . . . . . 9-29 Storage of results. . . . . . . . . . . . . . .. 9-29

EBSP Detector . ........... . ..... 9-30 EBSP Control Area . . . . . • . . . . . . .. 9-30

EBSP ... .. ....... .. . . . . . . ... 9-30 Gen. Back . . . . . . . . . . . . . . . . . .. 9-30 Sub. Back . . . . . . . . . . . . . . . . . .. 9-31 Quantif. . . . . . . . . . . . . . . . . . . . .. 9-31 Modify R.lModify L. . . . . . . . . . . .. 9-31 Contrast/Brightness .. .. ........ 9-31

Set-up for EBSP . . . . . . . . . . . . . . . .. 9-32 Practical Operation . . . . . . . . . . . . . .. 9-32

Manual User Interface (MUI) . ... ... 9-34 Overview . . . . . . . . . . . . . . . . . . . . .. 9-34

The CCD Camera . .. . ............ 9-35

Histogram Analysis . .... . ........ 9-36 Introduction .. . .. . . . . . . .. . . ..... 9-36 Start-up . . . . . . . . . . . . . . . . . . . . . . .. 9-37 Calculating Atomic Weight. . . . . . . .. 9-37 Calibrating the Histogram . . . . . . . . .. 9-38 Changing Column Conditions . . . . . . 9-39 Inspect. . . . . . . . . . . . . . . . . . . . . . . . 9-39 Color ..... . . . •........ . .... . . . 9-39 Settings . . . . . . . . . . . . . . . . . . . . . . . 9-40

The Electrostatic Beam Blanker ... 9-41 Overview . . . . . . . . . . . . . . . . . . . . . . 9-41

Installing the Beam Blanker. . . . .. 9-41 Cleaning the Blanking Plates . . . . 9-43

50101

9 SYSTEM OPTIONS

XL FEG Hard and Software Options

501 0 1

Overview This chapler covers hardware and software lhal is integraled, as an oplion, inlo the XL FEG system cOl1lrol and operaled from lhe microscope monitor.

The ilems covered here are:

• Accoul1lLog package (M ulti-User Shell) oplion

• STEM Deleclor 0Plion

• Metrology package option

• EBSP'Deleclor oplion

• Manual User Inlerface (MUl) 0Plion

• CCD Camera 0Plion

HislOgraph Analysis 0Pli on

• Eleclroslalic Beam Blanker

SYSTEM OPTIONS AccountLog (Multi·User Shell)

AccountLog (Multi-User Shell)

Introduction The AccountLog software shell lets YO ll moni tor use of the system by keeping a log of up to 50 indi vidual users, including Superv isor. You can set up leve ls of securit y to limit the kind of system access for each user and assign individual passwords.

The software recogni zes a list of lIsers. The user called Supervisor has special system access and can define the user list and give each user access to system functi ons. The supervisor can exclude users from cenain functions and print out lists of ac ti vity of all system users.

After the supervisor defines users, the software prompts users for a password each time the soft ware is acti vated. If the name and password combination is defined in the system. the user obtains access to the soft ware. If the user has limited access to some functions, the corresponding menu items are greyed and are inacti ve.

Starting Up as Supervisor When the AccountLog soft ware is installed. onl y the user called Supervisor is identified in the system. The person designated as Supervisor must log in for the fi rst time.

When you cli ck on the Microscope Control software icon, a dialogue box is di splayed.

Microscope control

P lea se ente r you r identification

U se rname :

P assw ord:

t..-....:.o;;;.k_.J11 Cancel I

Type in your user name, then your password (which shows on screen as as terisks for security) and cli ck on OK.

50 1 0 1

--- Bestore .Move 2JZf' Minimize M36imlze

Ixit AIt+F4

Sl!titch To ... Ctrl+Esc

Change £assword - User/ist

AllouL

50 1 0 1

SYSTEM OPTIONS AccountLog (Multi-User Shell)

Defining Users Select the menu item Userlist from the System pu lldown menu. A dialogue box di splays one user: Supervisor.

Account userlist

Su ervisor A d d I --Delete I --Prin t I --

Change

Ok

The di alogue offe rs the fo llowing possibilities:

Add When you cli ck on ADD a dial ogue is di splayed allowing you to de fine a new user to the system.

Microscope control

Ple ase enter new u s er name

Username :

Ok I I Cancel

Up to 50 users can be assigned passwords.

Delete This fun ction deletes the hi ghlighted user name, which results in removal from the li st of users . The AccountLog records of this user will be redefined as "unknown user." Be sure to save and archi ve the AccoullrLog.rx r file before de leting the name .

Print Use thi s functi on to print the user li st (not yet implemented).

SYSTEM OPTIONS AccountLog (Mutti-User Shell)

Change Cli ck on CHANGE to restri ct user access to the instrument. The fo ll owi ng dialogue box displays:

User: 1

Name ~ Group Everyone

Vectors ... ..

•• \U ~ ' \ • • ~ .,

Images \" ~ r\, .~ .. Matrices \" ~ r\ , .~

User can i '-:""- ' " " "rcan

Stigmator P" X-Ray system

Adjustments P" Photo camera

Filament

.:t Rang~ High

Min 10.2

Max 130.0

Ok

P" Image Database

Mag~;

IN Min 1 1

kV Max 11000000

r Reset password Cancel

P" P" P"

The following fields all ow you to give specific access privileges for several system functions.

User A user defined by the supervisor can always access system software by typing hi s name and password. If the supervisor has limited a user 's access to various functions , certain controls or numbers are grey, indicating that they cannot be se lected andbr activated.

Name

Edit the name of the user.

Group

(This feature is not yet fu lly implemented.)

11,---------------50101

~ User : 1

::~~ _ ~ ~Mv'~~~OM"~ .. '------------'

----.nlfectories

Vectors

Images

Matrices

.. \u sl'\supervsl'\

.. \u sl'\supervsr\

.. \u sr"\sup ervsl'\

--..u'~~;~;-;;~hange User can use -" I'

S1igmatof 1;7 X~Ray system p 1

Adjustments 1;7 Photo camera P" Filament Image Database P Ranges,~ ______ =.,-----+~~

High Tension

Min ~kV Max ~kV

MagnificaUon

,AI" I 1

Max} 000000

Ok r Reset

password Cance l

50 101

SYSTEM OPTIONS AccountLog (Multi·User Shelt)

Directories

The system is configured so that all software is in a subdirectory called \ r/. The system software (server, stage) is in a subdirectory ca lled \rtvnc and all user file s in a subdirectory called \rtv,sr. In the AccountLog opti on every user gets hi s own subdirectory in the \ rtv ,sr directory. However, you can change these default directories by typing a different DOS directory path .

Vectors

Vector files refer to Paramete rs in the IruOut pull down menu with the extension ::'. vel.

Images Image file s refer to Image in the InDut pull down menu with extension '~.il1lg.

Matrices Matrix files refer only if the opti on for customized convolution is installed offering the abi lity to store convolution matrices wi th extension ::'.1111.:..:.

When a new user wants to store any of the three above-mentioned types of file for the first time, the system asks the user for confirmation for the creation of hi s own subdirectory.

User Can Change Using these fields. the supervisor can define user access to the following functi ons:

Stig mator

A li gnm ents

Filament limit

The user does not have access to unchecked functions. Those items on the control areas and menus are greyed out and inaccessible to that user. If Alignments is unchecked , the Adjustments control area and its icon will be mi ssing.


r Us er : 1 =~~~'~~~""""-..• · ____ . =-= __ ~""'.,;"CC i ! Name ~bi!l;;;;;iLl&LL;;;;1 ;;;;' ~~~~~~9

.~~!.. bE_v_" ;"yo _,"-' ____ ~~~ __ ..,J

r °irectorir:s .. ~~=~ ... . ... ~'" =:'-'----

1 Vedors .. \usr\supervst\

I Imoges .. \usr\supe rvsr\ ,

User Can Use In this section the supervisor can decide whi ch of the fo ll owing functions the user can access:

X-Ray system (dot maps)

Photo camera

Image database (if option installed) ! M atriees .. \u sr\sup ervs r\

----..;Use;~~~b.;,,"-.e,,;'-.;'-,-' u"',,;'e-'-ca-'"-' .-,-e-C::;:--, """ -""f-~ The user does not have access to unchecked functions. Those items on 1 Stigmatof P X-Ray system W the control areas and menus are greyed out and inaccessible to that I. Adjustments P Photo carner" P"

L FlIllmen_I,"c.cccc_c'''·_ ",~~~_~D""·:C"'.·.c"cc:e~c," .. , ----..;: Ranges ' ·· .

1 High Tension

Min ~IcV

Max P~. · ~, .u ... 1 k~

Magnffit1:ltion

"I" 1~=I ===iI ; .. ax 1 1000000 I

Ok r Reset

password Can cel

user.

Ranges In these fi elds, the supervisor can set minimum and max imum ranges for high tension and magnification.

Reset Password The supervisor resets the password of the user by checking the Reset Password checkbox and clicking on OK. The next time the user logs in, he or she must define a new password. Thi s functi on is useful in case the user has forgotten hi s password.

OK When you click on OK user pri vileges are stored and the new user name is added to the li st of those with access to the system soft ware.

Cancel Click on CANCEL to stop the editing process.

50 1 0 1

.Move

.0iz~

Minimize Ma?<;ilnil(:

Exit

S\':/itch To ...

Change Eassword UserIist

AQouL

50 1 0 1

AIt+F4

ctrl+Esc

SYSTEM OPTIONS AccountLog (Multi· User Shell)

Information for the Authorized User The user can get information on hi s or her access pri vileges by selecting Userl ist from the Control menu . When any user other than Supervisor accesses Userli st, it results in a menu that o ffers o nl y the bunon INFO. Info is on ly available for the user's accou nt. When you click on this bunon, the screen di splays a summary of functions and hi gh tension and magnification ranges that you do not have access 10.

Changing Password If you need to change your password, c li ck on the Syste m menu box in the upper left corner of the screen. Select Change Password from the pulldown menu that displays.

The screen displays another di alogue box:

Microscope control

Please change your password

Old :

New :

Retype:

Ok II Cancel

Follow these steps:

TABLE 1 CHANGING USER PASSWORDS

Step I Action

1 Type the old password for verification.

2 Type the new password, and then re type it as a check on typing errors.

3 C lick on OK to confirm the definition.

4 Press CANCEL to stop the process and keep the o ld password.

SYSTEM OPTIONS AccountLog (Multi-User Shelt)

Ii

System Reset In the rare case of uni versal amnesia (all users including the supervisor have forgotten their passwords), the soft ware cannot be accessed. The user names and passwords are stored in the fi le accntusl: bi l1 (in the c:\d'V1/C directory). Keep a backup of this file on floppy disk.

The problem of forgotten passwords can be solved onl y by reinstalling the complete system soft ware from the di skettes deli vered with the system or with the latest soft ware version. Thi s results in a clean system on which onl y the supervisor is defined and he or she can add the user names again.

Logging Menu When you double-cli ck on the AccountLog icon, the Account Log menu di splays. If anyone else but the supervisor does so, all functi ons are greyed.

The Supervisor has the following options:

Fil e

• Logging

Reset

File Menu When you click on File, a pulldown menu di splays offering choices for saving and reselling files:

Save AccntLog.TXT Small Save AccntLog.TXT Full

Reset l'<rrn" File

Save AccntUsr.txt (Feature not yet implemented.)

Save AccntLog. txt small 19J.lJt~ I'~ C: \ )( r \ ""() This produces a text file containing on each line the following data: logging number, day, date, time, user number, user name, action number, action name (Login , Logout, Pump, Vent, HT-on, HT-off, Photo), exposure number, las t error.

50 1 0 1

501 01


Save AccntLog.txt full (Service Use)

This produces a text file similar to AccnrLog.lxl small but it also contains the following items:

• Vacuum status of the specimen chamber given by a number and a related description

Vacuum read-out of Penning Gauge (mbar) (specimen chamber pressure)

Vacuum read-out of IGP (mBar) for both columns

High Tension value of electron beam (kV)

Filament adjuster number

Filament current (A)

Filament voltage (V)

Both files have a format that makes them suitable as input for the spread sheet program Excel® from Microsoft. For imponing, columns are separated by tab SlOpS.

Reset AccntLog File This option displays a dialogue box:

Account history will be cleared. Create a new account log file?

When you se lect NO, the fil e is not deleted. If select YES, the ex isting AccnlLog.bin is deleted and an empty one is created.

Logging Menu (Service only) When you click on Logging, a pulldown menu gives two options, Logging On and Log Last 20.

SYSTEM OPTIONS AccountLog (Multi·User Shell)

W Io Z

,

Change the logging time interval or the maximum length of the logging file in the c:lxll mcl mctrl.ini file.

[ So~ware Control) Accountlogminutes=15 Accountlogmax=1000

Set the desired values for the logging interval and the maximum length of the logging file by changing the

b/2D lOr numbers.

)J At~r~,M,1~~k~= I) 4 !+u~r [1 ~ = '504CO

iJ(t0 (WV1~S : Ii

~ /L r1; (hf 9r0td!evt

Logging On

Logging is always on, but this selection generates a table o f data in which every line represents e ither a user action or status informati on.

To prevent thi s li st from taking too much disk space, you can define a max imum length (default = 1000 lines). When the maximum is reached, every time a new log is added the oldest line is deleted. The log fil e created is a binary file called AccntLog.bin.

= 1 Logging 1· 1· Edit

864 Tuesday 8/9/1992 13:38 1 Supervi sor 7 HT-OFF ~ 865 Tue s day 8/9/199 2 13:42 1 Supervi sor 6 HT-ON 866 Tue s day 8/9/1992 13:42 1 Supervi sor 0 - 0 867 Tuesday 8/9/1992 13:42 1 Supervisor 8 Photo 868 Tuesday 8/9/1992 13:44 1 Supervi sor 7 HT-OFF 869 Tuesday 8/9/1992 13:44 1 Supervisor 5 Vent . -870 Tue s day 8/9/1992 13:45 1 Supervi s or 4 Pump -

.. <:LJI L+

0)?Z7 p~ Idtt Jft#)~r; {i~. ~2olb fr,!Wf.U: ! Log Last 20

==y 21l/ bO f~ ( lO~~> . ~~~ : s2~~:;;i~lsgad~~g:J~;lJ~e;I~~~:1~~:e~u:c~~:~~'d~~~'t~~i:~t~~~ the

having to create an ex tra text file on the hard di sk.

Reset Menu

file Logging Beset

Reset last error log Clears the error list. View the error li st by double-clicking on the Server icon. Select Logging on in the Logging menu . Thjs results in a li st of the last 10 error message that have appeared onscreen.

50 1 0 1

SYSTEM OPTIONS XL FEG/SFEG STEM Detector

XL FEG/SFEG STEM Detector

50 1 0 1

Introduction The STEM detector is a two segment sol id-state device mounted undemeath a Grid holder assemb ly. Since the STEM Detector is mounted on the stage it can be used at any available working di stance preferably close to the lens for hi gh resolution or at the eucentric positi on for simultaneous use of EDX. The mounting pin below the detector locates into the standard coni cal single stub mount provided with each FEG The locking screw should be tightened to SlOp unnecessary rotation of the detector. The plug located at the end of the cable from the detector is connected to the solid state amplifier (usually on the back right pon ).

The STEM holder has 8 pos itions for sample grids. Two of these positions are specificall y for Darkfield observati on and are marked accordingly ( 10, SO) . For Darkfield observat ion the chosen sample grids should be loaded in these 2 positions when loading the entire holder prior to closing the specimen chamber.

The two detector segments, left (L) and right (R) can be switched independentl y, enabling the possibility of Brightfield contrast mode (positi ons 2.3 ,4.6,7.8) , or DarkficJd contrast mode (positi ons 10 and 50). Operation is full y integrated in the main software.

The STEM detector uses slowscan rates for normal imaging. Automatic contrast and brightness routines are not applicable.

Normally prepared TEM samples should be used with thi s detector although thick sections of biological tissue up to 2 mm can be observed wi th only Os04 fixation/staining.

Materials or hard samples should also be prepares as fo r the TEM by either Electro-chemical or Ion beam thinning techniques.

FIGURE 9-1 THE STEM DETECTOR ON A XLJO STAGE

SYSTEM OPTIONS XL FEG/SFEG STEM Detector

Detectors SE TLD

_ ../BSE

CCD Mixed

Change ...

6,7,8

2,3,4

01 and 05

Diode Switching BSE

O A

@A+B

Ok

O B

O A-B

Cancel I

Sample Grid positions for BF/DF By loading the Stem holder with a sample (tem grid) in one of the appropriate positi ons provided Brighrfield and or Darkfie ld imaging can be achieved. The foll owing table refers to the numbeling of the positions and their relaled capabi lities.

TABLE 9-1 STEM DETECTOR ON A XL30 STAGE

Brightfield observation - use Left segmem switch only.

Brightfi eld observation - use Right segment switch onl y.

DarkfieldlBrightfi eld observation - If the object for observation is lef! of the segmem separalOr then Left switching will give Brightfie ld and Ri ght switching will give Darkfield observati on. The opposite applies if the object is ri ght of the segmeJ1l separalOr.

User interface The ST EM deteClOr like other deteclOrs is selectable from the D eteClOrs' menu within MCTRL. As a temporary measure in MCTRL versions 5.50 to 5.70 use the BSE detector option to switch on the STEM detector. The 'A+B' condition (defauh) can be used to first setup as the IOtal deteClOr is then working. To switch BFfDF use the capability of switching either side of the detector diode by means of 'A 'or 'S ' in the 'Change' dialogue box. The 'A-B' condition can be ignored as thi s will give an artifactual image.

The Left segment represents the positions 6,7 and 8 and therefore switch 'A' di ode .

The Right segment represems the positi ons 2,3 and 4 and there fore switch'S'diode.

Loading samples The STEM holder part of the deteclOr therefore it can either be loaded with samples while outside the SEM or when it is mounted and fi xed to the stage movement.

It is more conveniem to load the holder before allaching to the stage .

The cemral screw on the top of the holder can be loosened and the top removed. Thi s exposes the 8 grid positi ons as recessed round holes with tweezers slots on the base plate, Positions 2,3,4,6,7 and 8 will provide onl y Brightfi eld imaging whereas positions D I and DS will

give both Brightfield and Darkfield imaging. Load the T EM Grids (samples) sample face-up in the grid holes. The holder top has raised ri ngs to press down in the grid holes 10 hold the TEM grids firml y in

50 1 01

501 01

SYSTEM OPTIONS XL FEGISFEG STEM Detector

place. The numbers on Ihe lOp should overlay the same numbers on the base plale when replaci ng Ihe holder lOp. Replace Ihe holder lOP carefully and lighten down the central screw. The deleclor and sample holder is now primed for use .

The removal of sample grids is in Ihe reverse order.

Free Working Distance position. When vacuum is obtained in the SEM swilch on Ihe hi gh voltage at

I OkV, spot 3. TV scan and focus on the lOp of Ihe STEM holder surface with the SE delector. Correci Z<>FWD and bring Ihe focused surface to 5 mm FWD by changing Ihe Z va lue on Ihe Stage Control Page . Move 10 Ihe appropriate sample position and refocus on the grid bars of Ihe TEM grid. The FWD and Z posili on has now lengthened and re-selection of 5 mm in the Z value on the Stage Control Page is necessary. Thi s procedure is necessary to prevent inadvertentl y bringing the detector in contact with the fin al lens. The minimum safe distance to Ihe sample surface for FWD is 3 mm, be aware Ihal Ihe holder surface is now closer to the lens than Ihe sample.

By moving off Ihe grid bars and fine focusing on the sample mOSI correction of image rolalion (mainly SFEG) and astigmali sm can be performed in Ihe SE o r TLD (SFEG) mode.

Obtaining a Srightfield (SF) image. The STEM deleclor like the BSE delector is so lid stale il must be operated at slow scan rates and not al TV. Swilch to a slow scan, approximately 20 ms / 968 lines.

Choose the BSE detector from the Delector Menu and select the correct diode operation either A or B, from Ihe 'Change' dialogue. depending on Ihe sample position in Ihe ho lder. An image should be visible of the transmission sample at low magnification.

Change the kV to sui I the contrast necessary through the sample. For example li ghl element malerials such as biological samples which are unslained may work beller w ith 3 - 6 kV to creale contrast, whereas melal stained samples need higher 5 - 8 kV acce leraling voltage. Dense materials such as metals may require 10 - 15 kV or higher.

Finall y increase the magnificali on to Ihal required and fine focus and stigmate the image .

If adjustment of the aperture is needed while in the STEM mode by momentaril y swilching to SE or TLD mode the procedure may be achieved more easily because TV scan speed can be use.

SYSTEM OPTIONS XL FEGISFEG STEM Detector

Obtaining a Oarkfield (OF) image. The samples that reside in the D I and D5 positi ons can be observed in Darkfi eld mode.

The separator line of the two diodes crosses venically the positi ons of D I and D5 so that an area of interest on the left side of the line can be observed with the right-hand di ode for Darkfield and with the left hand diode for Brightfield observati on. The opposite is true for the ri ght side of the line.

Dark Field observati on may require higher kY to create a suitable image as the angle subtended to the detection diode can be wide.

EOX analysis with STEM. Operate the EDX system (EDX or UHR mode for SFEG) as if using the normal SE detector mode.

Set the sample surface to 10 mm FWD for standard FEG or 5 mm FWD forSFEG

Select the area of interest in the STEM mode and perform X- ray analysis, Mapping or Linescans as appropri ate.

Because the samples are not bul k in nature the beam spread normall y associated with SEM samples will be greatly reduced and therefore hi gher spatial resolution can be obtained in the STEM mode. Thi s also provides less background in the spectru m and allows better separati on of peaks as well as lower count rate mapping.

The kY chosen for analysis will still depend mainl y on the compositi on of the sampl e.

III~-------------50101

Metrology Package

50 1 0 1

SYSTEM OPTIONS Metrology Package

Introduction The semiconductor process industry is demanding more and more inspections for quality comrol. One such inspecti on procedure is Critical Dimension (CD) measurements of line width structures. Because of inherent limitat ions in li ght microscopes. the tool of choice for such inspections is the Scanning Electron Microscope (SEM) equipped with a Line Width Measuremem System (LWMS).

The SEM uses a finely focused beam of electrons to scan over the area of interest. The beam-specimen interaction is a complex phenomenon. The electrons actually penetrate imo the sample surface. ionizing the sample and causing the release of electrons from the sample. These electrons are detected and amplified into a SEM image that consists of Back Scanered Electrons (BSE) and Secondary Electrons (SE). Since the electron beam has a specific energy and the sample a specific atomic structure. differem images will be collected from different samples. even if they have the same geometric appearance.

There are two basic requi rements for LWM - accuracy and repeatability. Accuracy is only as good as the standards or procedure that a company chooses to use. II must be noted that a standard (idea ll y) should have the same elememal make up and approximate geometric features as the inspected product. II does linle good to cali brate with a gold and nickel sample and measure (for example) a photo resist on Silicon specimen with such a calibration.

To avoid such problems, more and more companies are performing calibrati ons on their own samples using the known pilch of the panemed wafer. Pitch should be constant, regardless of the process. This procedure also eliminates variables such as elemental make up of the line and substrate and the subsequent changes in the beamspecimen interacti on,

Repeatability is essenti al, once a calibration procedure is determined. Repeatability includes comrolling the SEM operating parameters to the precise conditions day in and day out. A computeri zed SEM is essemi al for such control.

The Philips Line Width Measurement System (LWMS) allows the users to select their desired method of calibrati on and then proceeds to monitor the SEM's operating parameters to ensure maxi mum repeatability.


The LWMS is integrated into the Phi lips XL series of SEMs using Windows 3.1 software. By merely pointing and cl icking 10 the desired menu one engages the operati on of choice.

Phi lips offers several di fferent measurement algori thms to the user. Each algorithm can be tailored to a specific process. The initi al procedure to set up a measurement is qu ite simple.

First. one determines the type of profi le 10 be measured - a line profi le with distinct peaks or one where the profi le is flattened.

• Second, one determ ines what is 10 be measured - a li ne, a space, and pitch and a line or 10 fo rce a pitch to a specific value and measure the subsequent line based on the value of the forced measurement.

• Thirdl y, one determines the actual measurement algorithm.

There are fi ve basic algorithms available with the Phi li ps LWMS. They are peak-to-peak, linear regression, gradient (point of steepest slope), and inner and outer thresholds. The latter two can have a continuously variable percentage se lected. Each algori thm will give the user a different measurement, based on what they are actuall y measuring.

All data can be slOred into a resul ts fil e 10 be used with Lotus, Exce l, etc. Data can also be displayed as histogram information .

Using Metrology in Windows

When first loaded into Windows, the Metrology program is di splayed across the lower port ion of the viewing CRT. Since Microscope Control (MCTRL) is assumed to be engaged at the same time, the 'Metrology' program may cover up a pan of the MCTRL program . Simply cuck and drag the lower porti on of MCTRL so that all information is displayed at the same time 'Metrology' is di splayed.

FIGURE 9-2 THE METROLOGY MENU.

50 1 0 1

50 1 0 1

ClcZlf Gr.JIphil;5

Running Aoveragt: 4


Acquire When clicking on the Acquire fu ncti on a pull dow n menu appears.

The following commands appear on thi s menu .

FlCURE 9-3 THE ACQUIRE M ENU

• Integrate - when engaged. thi s perform s image integrati on. The number of fra mes to be integrated is selected below in the Settings comm and. This selling di alogue also appears the first time one selects Integrate. The scan rate is selected in MCTRL (i.e . TV scan, SS I , SS2 or SS3) .

• Select Window- This allows the operalOr 10 determine the 'space' from the image in whi ch video informati on is acq uired 10 deri ve a li ne profi le. This is done by clicking and dragging a window from the upper left 10 the lower right of the desired area. The larger the window is drawn the more information will be averaged.

• Clear Graphics- This allows the user to clear all frame SlOre graphics from the viewing area. This includes text, windows, line profiles and data.

• Settings - The Settings command allows the user to select, via a sliding bar, the number of frames to be averaged. One must select a value here before Integrate can be performed. An in vert command is also located in this menu . This inverts the line profil e, nOllhe SEM image .

SYSTEM OPTIONS Melrology Package

Calibrate The Calibrate menu has several commands li sted.

FIGURE 9-4 THE CALIBRATE MENU

• Calibration - This routine allows the operator to input measurement data to the system. This data is in the form of a known numeric value of a sample in microns. Within this menu other input data must be entered.

• Track Direction: The operator selects X or Y. Vertical li nes are in the Y direction.

• Waveform Type: The are two categories of waveforms - Flat and Peaks. Ei ther is selected based on the line profi le displayed of the ca libration sample . Flat denotes a profile that ri ses but has no di stinct peaks. Peak is a more common wavefonn type and is characterized by distinct peaks on the edge of the line profile.

After one Waveform Type is selected another menu pops up showing the different algorithms avai lable for that particular type of line profile. The five measurement algorithms are:

I - Gradient

2 - Inner Threshold - default is 50%. the user can select desired value (peaks only)

3 - Peak-to-Peak (peaks only)

4 - Outer Threshold - default is 50%, the user can select desired value

5 - Linear Regression (peaks only)

II:~-------------5 a 1 a 1

I

50101


These are shown graphica lly in Fig. 4.

FIG URE 9-5 VARIOUS MEASUREMENT ALGORITHMS ON A PROFILE

~(------- 4 -------71

(

\

I -Gradient 2-lime.-11lro;hold 3-Peak to P eak 4-0 uttt tJU'oshold 5-Linear Regression

• Strategy- This determines what is actuall y measured on the line profile. The points are dete rmined by the Waveform Type selected (i.e . the measurement a lgorithm ). The choices are:

I - Line - The first pair of points on the profi le are measured

2 - Space - The second pair of points on the profile are measured

3 - Pitch - the di stance from the first to third point is measured.

FIG URE 9-6 THE THREE BASIC STRATEGIES

Pilob )

Un. Space )

• View Calibration - This allows the operator to view all calibrati on conditions selected in the lnitial calibration routine. These conditions are:

1 - SEM Parameters

2 - Text


SE W

3 - Pixel Size

4 - Calibration Distance

5 - Track Direction

6 - Waveform Analysis

7 - Strategy

The View Calibration Window is Shown below in Fig. 6.

FlCURE 9-7 THE VIEW CA LIBRATION MENU

OVFn\.'IFW II

CAl. In .B471Wl Pi...!

I 1.000V ICD Cali1lrated 0,,1 I 2.011 0,. :

I 19992·1 c=:I Track Direc tion ~ 'llrloIII 'n~ hn. lI!lne jJS ; J: : !'COkIPP

~ T'" ~Wetto logp pack.aoe II Sb"ateru- P!b::h

I

IiiiiiI I

• Store Calibration - Th is allows the storage of calibrati on files fo r later recall. These fil es are stored wi th a ··.CLB" extension

• Recall Calibration - This procedure allows retri eval of a previously stored calibration. The file recalled must have a '·.CLB" extension.

• Go To Stigmator Adjustment Position - It is often difficult to adjust the stigmator adjustment coils on vert ical li nes. To aid the operator, a sample whose asti gmatism is easy to adjust can be mounted in a pre-determined stage location. Thi s sample may be gold grids, tin balls, metal grains, etc. Once the image is corrected the operator can retum to the previous position on the wafer. The stigmator adjustment positi on can be specified in the "Metro.lNI" fi le (in microns).

• Return from Stigma tor Adjust Position - This re tums the wafer to the last stage position before the Go To Stig .•. command was performed.

Measure This menu is used to carry out the desired measurement. This measurement can be done either manually or automatically. A Calibration file must be recalled or engaged fo r thi s fea ture to fu nction.

~~----------------------.. 50101

50 1 0 1


FlC URE 9-8 THE MEASURE MENU

• Measurement - This command institutes the measure sequences. The Metrology package will take the infonnation with the selected wi ndow, di splay the line profile. show locations on the profil e where the measurement is taken and di splay the subsequent value (or values if Pitch is se lected).

• Measurement on Same Profile - One may choose to change measurement algorithm or parameters but still measure on the same

profile without acquiring a new image. This will allow such acti on.

• Store Result - The Measurement results will be stored into a fi le selected in File .

• Settings - This menu is very similar to the menu used in Calibration. This allows the operator to select:

I - Track Direction - X or Y based on orientation of lines in the viewing area

2 - Type of Structure - Flat or Peak as described in 1.2.2

3 - Type of Width - Line, Space or Pitch as described in 1.2.2. Also added is Pitch CaVLine. This latter command forces the pitch to be a predetermined value and then does the subsequent measurement based on that value. A line/pitch ratio is also displayed when Pitch CaVLine and Pitch are selected.

• Calculation Method - This all ows the operator to perform an Auto or Manual or Line measurement. The Auto will be based on the above settings (Direction, Type of Structure and Type of Width). Manual will allow the operator to select points on the line profil e. One does this by scrolling the cursor to the desired positions. Line allows the user to select one line profil e instead of the average of all the lines in the window. The results will be based on the Calibration values that are loaded in the system.

SYSTEM OPTIONS Metrotogy Package

III

Sem This menu allows the user to control certain features of the SEM.

FIGURE 9-9 THE SEM MENU

• Beam Blank - Thi s engages the beam blanking system. Thi s system puts a voltage on the electron gun coi ls that de nect the beam and prevent the beam from scann ing on the sample.

• Beam Blank Auto - This feature wi ll automaticall y blank the beam when an image is ·frozen". Thi s will prevent the electron beam from continuing to scan the sample, possibl y inducing a charge or po lymerizing the sample surface.

• Balance SED's - If the SEM is equipped with two secondary electron detectors it wil l be necessary to ba lance them for opti mum detection conditions (i.e. balancing the peaks on the profile). Thi s command is actually changing the bias on the E-T detector of the SED.

Stage This menu allows the control of stage coordinates.

FIGURE 9-10 THE STAGE MENU

• Next Position:_ - This moves the stage to the next position on the stage table. The system will display the position number that it is presentl y at. At the first position the Specimen Alignment dialogue box will appear.

50 1 01

5 0 1 0 1


• Go To first Position - This sends the stage to the first position on the stage table as well as showing the Specimen Alignment dialogue box.

• Stage Table - This comm and allows one to build a stage tab le for storage or recall. When engaged, another menu appears on the screen. Thi s Stage Table Manager has seven buttons on it.

I - Move to: - A specific stage locati on may be typed in via the keyboard into the X and Y value boxes. Note that putting values into these boxes does not automaticall y put the values into the stage tab le. Cli cking on an entry in the table also fill s the X and Y boxes.

2 - Read - This reads the current positi on of the stage and adds the val ues to the X and Y boxes. Note that pUlling values into these boxes does not automatically put the values into the stage table.

3 - Add - This allows the stage co-ordinates that are di splayed in the X and Y value boxes to be added to the stage table.

4 - Insert - This editing feature allows the di splayed stage value to be inserted be fore the hi ghli ghted item on the stage table. Thi s is useful for modifying a specifi c stage position without making a whole new table.

5 - Update - This edi ting feature replaces the selected stage table entry with the values in the X and Y edit boxes.

6 - Delete - This deletes only the highlighted positi on on the stage table .

7 - Clear - This clears the entire stage table . If the stage table has not been previously stored then thi s table is permanently lost!

• Store Stage Table - This allows the above stage table to be stored in a fil e with a ·'.STG" extension.

• Recall Stage Table - The command allows a stage table to be loaded into the program.

Double clicking on an entry in the stage table will cause the stage to move to that position.


Print Thi s menu allows the operator to get hard copies via a print-o ut of the measurements taken so far. It is necessary to have a printer installed on the PC or network to perform these functi ons.

FIGURE 9-11 THE PRINT MENU

• Result File Print - Thi s command will allow the selected result fil e to be printed.

• Histogram - This a ll ows the hi stogram to be printed .

50 1 01

5 0101


Statistics This menu allows the display of Measurements in a graphi cal bar chart form.

FIGURE 9-12 THE STA TIS TICS M ENU

m De1In ltlon ...

m Reset

• Histogram Active - This engages the hi stogram. Note that one must define the hi stogram before using this command.

• Histogram Draw - This di splays the histogram on the viewing screen .• Histogram Definition - To define the hi stogram display one must input the 'ideal' value of the measured lines. A percentage variance is added. This wi II now define the range of the di splayed data. If data is co llected outside thi s range. the computer will ·beep·. Note that the percentage vari ance can be changed without losing the data already collected.

• Histogram Reset- This erases all histogram data.

Job A Job is a repetiti ve routine. Once written, one may call up thi s routine over and over again.

FIG URE 9-/3 THE JOB MENU

Store Job .. , Recoil Job."

• Define Job - This allows a repetiti ve routine to be made. One must select from a table which actions are desired.

I - Stage Control - (On or OtT) - If engaged this will use the stage table loaded in STAGE.

II


2 - Measurement - Grab (On or Off) - Operations set up in ACQUIRE are pelformed

3 - Measurement-Measure (On or Off) - Operati ons set up in MEASURE are performed

4 - Measurement-Save (On or Off) - The measured result is sent to the fil e specified in FILE.

• Execute Job - This executes the acti ve job.

Store Job - This allows the job and all subsequent parameters to be stored in a file with a ··.JOB·· extension.

• Recall Job - This all ows a prev iously slOredjob to be recalled from storage.

• Overview - This di splays all operating conditions and job conditions that are ac ti ve.

File This menu allows the storage of images, adds text on display and sets up fil e informati on.

FIGURE 9- 14 THE FILE MENU

WIfe r IderrllUc811c n ... R~Eiult Filename ... RII!:!3u lt Rle Dlgplay. __

• Load Image - This allows the input of a stored image from Metrology.

• Save Image - Any image in the viewing screen may be saved for later analysis or measurement.

• Text - This fun ction allows text to be written onto the video display in the frame store graphics. One cli cks on the area where text is to be written. At that point a di alogue box appears and text can be entered. One line of text can be entered at a time, although up to 20 lines can be written.

50 1 0 1

50 1 0 1


• Wafer ID - When a new wafer is introduced to the SEM its lD number or any label can be entered. This wi ll categori ze all subsequent measurement s into the result fil e.

• Result File - This menu a llows the user to defi ne the fi le that the results wi ll be stored into. Thi s fil e will have a ··.RES" extension. Thi s fil e can be convened by Convert to Lotus into a fil e that can be read by Lotus. Excel or other data manipulation program s.

• Result File Display - Thi s allows the user to view the entire result fil e. One may wish to cl ick on the upper right Max imize button to observe all information. When Metrology asks for the Wafer 10, one can enter "ali" to view all data in the fil e.

• Convert to Lotus - This convert s the fil e to a format that is compatible to Lotus 1,2,3 and Excel. The fil es will be ASCII with tabs to separate fields.

Calibration Procedure A cali brati on standard must have an optical signature similar to the sample being measured. This optical signature is displayed as a line profile. Several conditi ons must be met:

1 - Similar elemental make up - It is no good cali brating on a Sil icon sample and measuring on Gallium Arsenide!

2 - Similar geometries - Just as one cannot measure centimetres with a foot rule, one must calibrate with geometries that are close to the unknown. A ± 50% vari ance is the maximum recommended. (i.e. if you plan on measuring a 0.7 mi cron line you should calibrate on a line from 0.4 to one micron in size).

3 - Similar operating conditions - This includes acce lerating voltage, spot size. magnifi cati on (although the soft ware does correct for magnificati on differences between the standard and the unknown), stage till , contrast and brightness. scan rates, integrati on time and window size (to name but a few!).

4 - A stable operating environment - Besides the operating environment (magnetic fi elds, vibrations, etc.) one should maintain the integrity of the standard . One should routinely check the system against the standard .

II


Note that these are all ideal requirements. Rea lity strikes home when one reali zes that some of the above mentioned requirements are nearl y impossi ble to achieve'

The most important considerati on is consistency. The actual accuracy can be negli gib le. It is repeatability that counts.

What standard to use? More and more fabrication plants are accepti ng the fundamenta l limitati ons of LWM techniques and the lack of available standards with an optical signature similar to their product. More fab. areas accept that pitch is the on ly known and repeatable measurement and use the pitch of their product as their ca li bration ·standard · .

Some companies se ll LWM standards. Many of the 'standards' may not give your fab. area the desired results when used wi th your product. Thi s entire subj ect is an emotional issue with some companies. It is up to the user to determine the proper method and type of calibration to be used.

A step by step calibration I - Set up SEM parameters - Accelerating voltage, spot size scan rate (TV scan is most popular but slow scan may achieve bener accuracy) .

2 - ACQUIRE the image

3 - SELECT WINDOW - click and drag a window over the desired area on the image.

4 - go to CALm RATION and enter desired value (i.e. pi tch or actual known line width). One may have to try severa l algorithms to lind the correct one for this optical signat ure.

5 - Try a MEASURE on this standard to make sure it wi ll be correct. If it is, it is suggested to STORE this cali bration fi le immediately.

If the measurement value is wrong from step #5, then one may have to try a different algorithm to solve this. Thi s is where the MEASURE ON THE SAME PROFILE comes in handy.

The process of determini ng the correct measure ment algori thm can be tedious. A "via" may make use of the Inner Threshold routine. A line may use Outer Threshold or any of the other routines. Every sample wi ll be different and wi ll take a one time setup that may be rather time consuming!

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50 101


How to Measure After following the Calibration routine the measurement is rather easy. The foll owing sets are all that is needed to measure:

I - Use MCTRL to locate and focus the region of interest (ROI).

2 - ACQUIRE the image in METROLOGY. Make certain that the acquisition is done at the same scan rates as those with whi ch the calibration was done!

3 - Use SELECT AREA to draw the window around the desired ROI.

4 - Verify the measure algori thm under MEASUREMENT, SETTINGS.

5 - MEASURE (or press Crtl. FII). The measurement will automatically perform usi ng the algorithms selected.

Storage of results The file name that was last selected in RESULT FILENAME is the ac ti ve file at thi s point. STORE RESULT automatically stores the present measurement va lue and Wafer ID into that file.

To di splay the results the DISPLAY FlLE RESULTS routine can be selected . The results can be printed by selecting PRINT, RESULT FILE PRINT.

SYSTEM OPTIONS EBSP Detector

EBSP Detector

EBSP

--- I EBSP ~

I""" !he' I I ~;ub . Had<.1

1 UU<lnlif. I

1 Modify l. I 1 Modify R. I Contrast 30.0

I U I Brightness 30.0

I I I I

Generate Background

Nr. Integrations:

l,t]

h4 agnif. Factor:

1 iii

Ok

EBSP Control Area If the instru ment is equi pped with an EBSP detector. a special control area will be available. This control area is named "EBSP" and can be selected from the control area pull-down menu or button bar as usual. or may be selected fro m the detector pull down menu .

In thi s control area the system can be used to obtain Electron Backscatter Diffracti on Patterns (EBSP's) that provide information about the crystallographic orientati on of the specimen under in vesti gati on. It should be used in conjuncti on with the Crystal Orientat ion Software (COSi) to index the EBS P's and obtain a result.

The EBSP control page init iall y contains one control area (named EBSP). with two expandable sub-pages (named Generate background and Subtract background).

EBSP This button will start the EBSP mode. It invokes the following acti ons: The image on the ri ght monitor will be frozen to display the so-call ed "landscape image". The microscope will be switched to spot mode, the position of the spot on the landscape image di splayed by the intersection of green cross-hairs. On the left monitor, a li ve EBSP pattern will be shown as taken from the current beam position. All buttons in the control area wi ll be ac ti vated.

The li ve EBS P pattern will be copied to the first memory plane of the microscope and named: "EBSP live". The landscape image will be copied to the third memory plane of the microscope and named: "Landscape". These names will be displayed in the Image Manipulation page.

When switching off the EBSP mode, the camera will be switched off. The previous microscope scan parameters and video system parameters will be restored to the original values.

Gen. Back This button is enab led if EBSP mode has been switched on. By pressing the button. an extra control area is displayed for the user to select settings for the generati on of an EBSP background image. Through this control area a background image can be generated and stored in the second memory plane.

The microscope is automatically switched to TV scan rate, scanning the entire landscape area. The scan area may be reduced to 1/8, 1/4 or 1/2 of the original landscape area. In addition, the user may specify the number of integrati ons from 2 to 51 2 to produce the background image. The default setting is 64 integrations.

Background collection may be interrupted at any time by pressing the STOP button.

1I1~----------------------5 0 1 0 1

Subtract Background

Subtract Factors:

I I Back:-50% Live:50%

Subtract J Cancel I

50 1 0 1


Pressing the OK bUllon copies the background image, di splayed on the left monitor, to the second memory plane . This second memory plane will be named: "Background".

SUb. Back When pressing the "Sub. Back" bUllon, a control area is shown below the mai n control area for the user to select the sell ings fo r background subtracti on. A slidebar appears in the new contro l area which all ows to modi fy the subtract factors. Default these factors are set to 50%. 50%.

When pressing the SUBTRACT bUllon, the background image will be subtracted from the li ve EBSP pattern to form a li ve backgroundsubtracted EBSP pallern on the left moni tor. The right monitor displays the background image .

When pressing the CANCEL bUllon. the original sellings are restored. The left monitor di spl ays the li ve EBS P pattern and the ri ght monitor the landscape image.

Quantif. When pressing the QUANTIFY bUllon. the background-subtracted EBSP pallern is now displayed on the right monitor. whi le the landscape image is now di splayed on the left monitor. This is necessary for the Crystal Ori entation Soft ware to copy the EBSP pallern. and indexing of the pallern may now proceed. In additi on, the user may now record or print the EBSP pallern using all available output-media.

Switching off the QUANTIFY bUllon wi ll restore the original sellings, i.e. puts the EBSP pallern back to the left monitor and the landscape to the right monitor.

Modify R.lModify L. Afler pressing these bUllons, the monitor will display the hi stogram to modi fy the grey look-up table according to wish. This functi onality is similar to the functionality present in the image manipulation control page. Thi s fun ction is very useful the stretch the contrast in the original background subtracted EBSP pallern

Contrast/Brightness The contrast and brightness s lide bars allow to adjust the contrast and brightness of the video signal. These adjusters are also available in most other control pages.


Set-up for EBSP To set up for EBSP proceed as follows:

I. Clip the backscatter detector below the phosphor screen. With thi s deteclor the forward scattered e lectrons may be used for ori entali on imaging.

2. Find your area of interest at 0 degrees tilt unless working at eucentric working di slance, and lilt specimen to 70 degrees. Note that large samples may cause damage by striking the final lens when tilting to 70 degrees while at eucenlJic working distance.

3. If using Ihe backscatter detector for imaging, insert the phosphor screen 10 an intermediale specimen to screen distance and find the highest intensity of the BSE signal. Prepare a landscape image, preferably with some orientati on contrasl. During the operation of the EBSP system, thi s di stance may be reduced 10 enlarge the capture angle for the EBSP pattenlS.

4. Swilch on Ihe camera control box . TUIll gain one mark clockwise . tUIll offsel full y clockwise. TUIll sensiti vity off (i.e. full y counlerclockwise) to prevent overexposure of Ihe camera at all times. Shading correcti on can be off. The video select button should be in neutral posilion. These settings can be adjusled as desired, and the indicated settings are those recommended for getting st311ed .

Practical Operation This seri es of instrucli ons will guide you through a number of steps necessary 10 obtain a resull. Proceed as follows.

1. Set up the EBSP as outlined in the preceding section.

2. Press the EBSP button, locate the SpOI on the area of interest by clicking on the landscape image.

3. Focus the camera lens if necessary.

4. Adjust the specimen to screen distance to se lect the capture angle of the EBSP pattern. Thi s angle increases to 90 degrees when the specimen to screen di stance is reduced to 2 cm (minimum di stance).

5. Adjust contrastlbrightness on the EBSP pattern on the left monitor, and find maximum sensiti vity of the camera by turning the sensitivity knob clockwise. Prevent overexposure, indicated when the red lighl is IiI.

6. Generate and subtract background. Note: on single crystal specimen a background may be obtained by defocussing the camera lens.

7. Modify the lookup table for the li ve background subtracted EBSP pattern (modify L) to stretch contrast in pattern.

8. Imegrate or Average the li ve background subtracted pattern to improve signal-ta-noise rati o.

9. Press the quamify button to copy the pattern to the ri ght monitor. The pattern may now be recorded, stored on disk, or imported in the

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50101

SYSTEM OPTIONS EBSP Deleclor

Crystal Orielllation Software.

10. De-acti vate the quantify bUllon and relUrn to normal EBSP operation mode.

CAUTION 1: Increasing acceleration voltage and/or spot size may cause overexposure of the camera during operati on.

CAUTION 2: De-activate EBSP mode before closing Microscope Control to switch off the camera.

SYSTEM OPTIONS Manual User Interlace (MUI)

Manual User Interface (MUI)

/ STIGMATOR

00 X Y

IMAGE

Overview The Manual User Interface (M UI) provides knobs to perform functions that can also be performed with the soft ware:

• Stig mation

• Image contrast and brightness

• Magnificati on

• X and Y scan shift

• Coarse and fi ne focus

FIGURE 9-15 MANUAL USER IN TERFACE (M UI)

MAGNIFICATION SHIFT FOCUS

c.~'BqL(j) 00 X Y

00 Coarse Fine

TABLE 9-2 MUI SOFTWARE EQUIVALENTS

Stig mator

Image

Magnificati on

Shift

Focus

Software Equivalent

Shift + right mouse button

Stigmator two-dimensional X-V contro l on Imaging control area

Contrast and bri ghtness adjusters in all areas

+/- keys on numeli c keypad

For small steps, use the Magnifi cati on adjuster on the Imaging control area.

Beam shift icon (hand)

Right mouse button

II' ~-------------50 1 0 1

The CCO Camera

50 1 0 1

SYSTEM OPTIONS The CCD Camera

The CCD camera is a small infrared inspection camera. usually mounted on the upper left pon. The camera allows you to view directly the positioning of large and irregu lar specimens. It also is used to see the position of the sample in relati on to the final lens. Thi s is convenient with nonstandard working distances and conditions.

Select the CCD camera from the Detectors pulldown menu . Since the CCD camera only operates in TV mode. the slow scan modes are blocked. There are no other soft ware controls.

The camera image is prefocused during installation. The intensity of the image is controlled by the di aphragm setting of the camera.

The camera is equipped with a built-in light source. Thi s source is swi tched on and off when selecting the camera. When not in use, the infrared LEOs for illumination are switched off because EDX detectors and the solid state back scatter detector are sensiti ve to this li ght.

SYSTEM OPTIONS Histogram Analysis

Histogram Analysis

Introduction Hi stogram Analysis software is a separate program (icon) running with system software in the Windows™ environment.

Using thi s option, the screen displays a gray le vel histogram representation of an image (either li ve or stored). After calibration of thi s hi stogram using phases of known atomic numbers, an atomic number interpolation can be performed. You can define four windows yielding area percentages. If the Color Imaging option is installed, the image on the left monitor and the hi stogram display are in color.

The mean atomic number interpolation procedure is based on the fact that the higher the mean atomic number of a material , the more electrons are scattered back. Using a suitable electron detector, such as the BS detector, this is reflected in the image as different grayleve ls :

• White is an indication of hi gh mean atomic numbers

• Black represents relatively low mean atomic numbers.

The relationship between gray level and mean atomic number is determined by:

• Specific setting o f beam current

• Working distance

• ContrastAJrightness setting of the detector.

The calibration routine represents thi s relationship by approximating a curve using a second order polynomial. The accuracy of interpolation is optimum if the calibration points are relati vely close in atomic number to the unknown phase.

Before you begin a hi stogram analysis, be sure that the specimen is sufficient ly flat (preferably poli shed) and that its surface is parallel to the BS detector (no local tilt). A Live image suitable for atomic number calibration shou ld be visible on the right monitor. The sample should show at least three different phases (different mean atomic numbers), so that the unknown mean atomic numbers can be found from interpolation between these known phases.

Adjust the gain and brightness settings of the detector so that the corresponding video levels are between white and black as indicated by the videoscope. This lets you use the full gray level range for optimum accuracy.

50 101

Video Contrast

1+1 I II Brightness

1+1 I t I ACB I I Save

o Videoscope

-.. 0 Histogram

Measurement

501 0 1

1.:.1 23.7

j·l 46.3

1·1

I


Start-up To activate and de-activate the histogram analysis functi on, click in the checkbox next to the Histogram function found in the maximized Video control group available on the Settings control area. The system overlays a gray level hi stogram on the col umn image and di splays several menu items.

Before the hi stogram is analyzed, a calibration of the gray leve ls is required (a translation from graylevels to atomic number). A special ca lculation routine is used for this purpose .

Calculating Atomic Weight When you select Calculate from the menu. the system ca lcu lates the mean atomic number and mean atomic weight of chemical compounds. Formulas must be entered using the foll owi ng conventions:

• Use a capital letter as first letter of the element. For example: type Cu instead of cu.

• Type subscripts as normal numbers. Example Si02 can be typed in as Si02.

• Use one leve l of nesting: X2(Y 3Z4h, where X,Y and Z denote elements.

• Subscripts do not have to be positi ve integers, so X2.45 Y 1.34Z is allowed.

• Add groups of water in the usual way: XY 2*nH 20 where n is a positive integer.


Calibrating the Histogram When you select Calibrate from the menu. the screen di splays a dialog box to set the three required calibration poims:

TABLE 9-3 CALIBRATING A HISTOGRAM

Step I Action

1 Put the cursor al the lOp of a peak represeming a known phase on one of two ways:

• Place the mouse cursor on the peak and cli ck with the left mouse button. Release the mouse button.

• Grab the line cursor and move it to the desired positi on. Put the mouse cursor on top of the line cursor. The mouse cursor changes into a hand symbol. Now press the left mouse button and move the line cursor to the desired position. Release the mouse button.

2 Press the button labeled POINT 1. The screen displays the video value associated with the cursor positi on.

3 Type in the corresponding mean atomic number.

4 Enter calibrati on points so that Poim I corresponds to the lowest atomic number and Poim 3 to the hi ghest.

5 Be sure to emer three di ffe rem alOmic nu mbers.

Calibrate the two other histogram peaks.

If some peaks of interest are too small 10 view adequately, rescale the hi stogram using the UP and DOWN buttons. The RESTORE button resets the hislOg ram size to its default value.

When you click on OK, the calibra ti on curve is calculated. The soft ware is calibrated for that particular set of beam parameters and detector settings. If the points you entered are not adequate to determine a calibration curve, a dialog box displays.

To stop calibration, press CANCEL.

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50 1 01


Chang ing Column Conditions When your inspecti on of the hi stogram requires a change in column parameters. simultaneously press the SHIFT F2 keys. The screen di splays the Video control group in the foreground allowi ng you to make adjustments. When you press SHIFT F2 again , the histogram analysis is displayed as a refreshed gray level hi stogram. SHIFT F2

toggles between the two applications.

Select YES to restore the original contrast and brightness sellings . The current calibrati on curve remains valid. When you select NO, the system does not restore column parameters and the cal ibrat ion cu rve is deleted; the software needs to be recalibrated.

Inspect When you se lect INSPECT, the screen di splays a dialog box . The di splayed atomic value represents the current cursor positi on. When you move the cursor, the value is updated continuously. By typing in an atomi c value fo llowed by pressing the SET CURSOR bullon , the cursor is positioned on the corresponding atomic number value in the histogram.

Color When you select COLOR. the screen di splays a dialog box. Use thi s dialog box to define windows in the hi stogram, and to show the total area fraction of the phase corresponding wi th the wi ndows defined .

When the Color Imaging option is installed. the image is shown in colors corresponding to those defined by the wi ndows in the histogram. If the color opti on is not avai lable, it is possible to see onl y one phase at the time (in gray) on the right monitor.


To set up a window, follow these steps:

TABLE 9-4 SETIING A COLOR WINDOW

Step I Action

1 Select the Red, Blue, Yellow, or Aqua bUllon; the selected bullon starts blinking.

2 Create a wi ndow using the Click and Drag technique:

• Put the mouse cursor on first window boundary.

• Press the mouse bUllon and drag the line cursor to the second window boundary.

• Release the mouse bullon; the window is defined and colored.

3 The screen displays a check in the box next to the color bUllon and the area fraction (expressed as a percel1lage of the IOtal image area) is di splayed.

Thi s procedure allows you 10 define up 10 four windows. If the color option is avai lable, the corresponding phases arc displayed on the left monilOr. To temporarily switch off a window. click in the corresponding check box. The related color di sappears and the color box is unchecked. Cli ck in the check box to switch on the wi ndow again.

Settings When you select the menu item Sellings, a shon pull down menu is displayed. Selecting Grayscale! resets all color windows 10 black and white .

~r-----------------------.. 50101

SYSTEM OPTIONS The Electrostatic Beam Blanker

The Electrostatic Beam Blanker

5 01 0 1

Overview On the XL FEG, SFEG and Sirion a 'High-speed electrostat ic beam blanker can be mounted. The XL FEG has the blanking beam operating over a 200 ~m aperture which has to be inserted in the final lens.The difference for the SFEG/Sirion bl anker is thmthe blanking of the beam takes place on a 300 ~m aperture which is perm anently mounted in the column liner lUbe. just above the scan coils. This aperture replaces the 1.5 mm stray aperture whi ch is located at the top of thi s lining tube in a standard XL SFEG/Sirion.

FIGURE 9-16 BEAM BLAN KER CON TROL FOR S FEGISIRION

FLA Holder Me,:hanlsm

Aperture Rod

Installing the Beam Blanker Vent the specimen chamber

Replace the VAC UUM SEA L DUMMY in the BB HDLDER MECHAN ISM

just below the FLA HDLDER MECHANISM on the XL FEG column with the BEAM BLANKER ROD.

Pump down the specimen chamber.

Make sure that the blanking plates are either short circuited or connected to a suppl y that controls the bl anking.


Ali gn the blanking plates in all 4 positi ons (see below) 10 the e lectron beam in the lowest magnifi cation, NOT the other way around!!!

Beam blanking will take place when a +5V signal is applied to the blanking plates. The positi on of the blanking plates depends on the accelerat ing voltage of the electron beam:

TABLE 9-5 ALIGNMENT OF PLATES TO KV

High Voltage Position

Plate Gap (kV) Oistance(mm)

>20 10 0.25

>10 20 0.5

>5 30 1.0

>5 40 2.0

FIGURE 9-17 BEAM BLANKER PLATES

In order to get maximum blanking effect of the beam the APERTURE ROD can be moved a little outwards of the column axis in the directi on of the FLA HOLDER MECHANtSM. The best positi on is just before the beam current starts decreasing because of the mi salignment of the aperture.

Other options for increasing the On/Off ratio of the blanker are:

• Use a smaller distance between the blanker plates (lower positi on number) than is prescribed in the table above. Thi s may also increase chances of charging effects on the blanker plates.

• Use a higher voltage on the blanker plates . To allow voltages significantly above the standard value of +5V the 50 Ohm resistor between the plates has been disconnected to prevent overheating. This has resulted in a lower maximum operating frequency of the electrostatic beam blanker. The 50 Ohm resistor should always remain connected 10 ground, otherwise there is a chance of charging problems.

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50 101


When the beam bl anker plates are positioned correctl y with reference to the electron beam there should be no limitation in the fie ld-of-view of the SEM image. Place the beam blanker in position 4 when it is not in used. Also di sconnect the external cable and short-circuit the plates.

Re-align the FLA for hi gh resolution performance.

CAUTION: Do not full y retract the apert ure rod on the XUO FEG when the Beam Blanker is moumed. You must (partially) retract the Beam Blanker first before the aperture rod can be full y retracted. Otherwise damage to the aperture foil and/or the blanker plates may occur.

Cleaning the Blanking Plates After intensive use the blanking plates of the Electrostatic Beam Blanker can become contaminated. This will lead lO charging and beam drift effects that will make the SEM difficult to use for lithography appli cations.

FlCURE 9-J8 CLEANINC THE BEAM BLANKER

For initial cleaning a plasma cleaner is ideal as thi s can remove hydrocarbon based material very effectively. In cases where the Beam Blanker cannot be cleaned wi th a Plasma system only because it has been excessively contaminated, follow the procedure described below:

Cleaning of the blanking plates normall y in volves Cyclo Hexane (or Isopropanol) with ultrasonic aggitation.

I . Take the BEAM BLANKER ROD with the blanking plates out of the XL-SEM column and replace it with the VACUUM SEAL DUMMY.

2. Release the blanking plates (item I in drawing) from the BEAM

BLANKER ROD.

3. Clean the blanking plates for 15 minutes in an ultrasoni c bath with Cyclo Hexane.


4. Clean the blanking plates for 15 minutes in a Cyclo Hexane vapour

bath.

5. M ake sure that all the Cyclo Hexane has le ft the openings of the blanking plates .

6. Dry the blanking pl ates with dry nit rogen gas.

7. Do a visual inspection (magni fy ing g lasses, light mic roscope) for dust particles etc. between the blanki ng plates. Repeat the cleaning steps 3-6 if necessary.

-=B"e"a:.:m:.:.-_____ ---'L.:J 8. M ount the blanking plates again on the BEAM BLANKER ROD, using

I 10.0 kV I Operate

UpperlGP:

174pA

2.4e-9 mBor

Spot size 3.0 1+1 1 U 1 .. 1 Acc.Voltage 1+1 I.U

Fil. Off I

[2] Lens Align

-- OXOver

Gun Tilt

Ed Lens Align

Ed o Lens Modulator Contrast 23.1 1 .. 1 Ul j .. 1

Brightness 46.3 1+1 tjJ 1 .. 1 Stage

X! 192.0 !pmR' 6

vi 1460S.0 !pmTFo-.o=-

ZI24.06SI[!ImmZ <-> FWD

@Abs O ReI! Goto I

clean gloves.

9. Do not touch the bl anking plates and repeat inspecti on o f step 7.

10. Measure the resistance between the blanking plates (50 Ohm or infinite in case of a large [> I 0 Vj blank ing sig nal) and the resistance between connector and plates « I Ohm ).

II . Short c ircuit the plates by maki ng contact between the connector kerne l and shie ld.

12. Place the beam blanker in a clean holder and insert in the pl asma cleaner.

13. Plasma cleaning: A rlO 75/25% with 4 V pressure reading for 5 minutes

14. Take the beam blanker out of the pl asma cl eaner, remove short c ircuit and repeat step 10.

15 . Remove VACUUM SEAL DUMMY from XL-SEM co lumn and put the BEAM BLANKER ROD in wi thout hitting anything inside.

16 . Start the Pum p on XL-SEM , generate a beam and switch to xOVER mode found in the enlarged Beam control area of M CTRL. A lign the blanker plates to the beam for all fo ur positi ons (gap widths). A lso make sure that the plate surface is paralle l to the beam.

III'~-------------50 1 0 1

APPENDIX

Overview

This Appendix includes the foll owing documents:

• Technica l References

Technical References

The fo llowing books and periodicals are among those avai lable that provide in-depth background information:

Books Armstrong. J. ( 1988). Microbealll Analyis-1988 (D.E. Newbury. ed.) (San Francisco Press. San Francisco).

Bright. D.S .. E.B. Steel and D.E. Newbury ( 1991 ). Microbealll Analysis--I990 (D. G. Howitt. ed.) (San Francisco Press, San Francisco).

Goldstein, Joseph I. et al. ( 1992). Scanning Elecllvn Microscopy and X-Ray Microanalysis. 2nd ed. Plenum Press, New York).

Heinrich, K.FJ., and D.E. Newbury, eds. ( 199 1). Electron Probe Quantitation (Plenum Press, New York).

Heinrich, K.F.J ., ed. (1968). Quantitative £Iectron Probe Microanalysis (National Bureau of Standards Special Publication 298).

McKi nley, T.D. , K.F.J. Heinrich. and D.B. Winry, eds. ( 1966) . Th e £Iectron Microprobe (Wi ley, New York).

Periodicals Scallning Microscopy

Proc. of Int. Conf on X-Ray Optics and Microanalysis (Hermann. Pari s) .

--------------~III 50 101

GLOSSARY

Symbols

A

B

501 01

kV: see kilovolt.

nA: sec IlQIlOamp.

Q: see ohm.

pA: see picoamp.

,...A: see microomp.

,..,m: see micron.

V: see volt.

absolute coordinates: coordinates measured from the logical zero of the stage. The opposite of relative coordinates.

aperture: the final lens aperture holder contains physical apertures that vary for different imaging needs. See spolsi~es.

artifacts: smearing that typically occurs with in verted contrast as a result of specimen charging, scan distortions, stray fields, or vibrations.

astigmatism: an imperfection in the circu larity of the beams that results in elliptically shaped features in the image. This may be due to the system cleanliness, stray fields, or from the specimen itself.

beam blanking: deflecting the beam aside so that it does not hit the specimen.

beam current: the curre nt aris ing from the electron beam being absorbed by the specimen.

beam diameter: determined by column parameters. Also known as spotsizes.

beam shift: electrical shift of the beam on the sample. It can be used at high magnification (larger than 6200X) rather than stage motion.

beam voltage: accelerating voltage of the electrons.

brightness: also known as black level, thi s video system control adjusts the signal within the dynamic range where the minimum signal corresponds to the black level.

c

c

D

E

F

contrast: a range of brightness between hi ghlights and shadows on a reproduced image.

convolutions: one type of image processing filters used to decrease noise and enhance features.

Controlled Pressure: a mode of vacuum operation that reduces charging. Sometimes referred to as Low Vacuum .

delta brightness: the increment by whi ch brightness is changed for each step in the photo cdlibration routine.

detector: a dev ice for detecting and counting objects or events. often incident-charged particles or photons. In thi s system. it detects X-rays. photons and electrons generated when the electron beam strikes the samp le.

digitize: conversion of analog informati on into a digital formal.

drift : a combi nati on or indi vidual effect of therma l. mechanical and electrical changes that prevents the beam from remaining in the precise illitiallocati on.

dynamic range: the full extent of the signal range that can be handled without excessive distortion.

earth : see glVlIlid.

emitter: a substance or electrode that emits particles.

eucentric: in relation to the centre of the field of view; eucentric moves allow the fi eld of view to remain centred even after rotat ion or ti It.

FEG: Field Emission Gun.

field of view: the area of the specimen visible on the video monitor; .varies with magnificati on leve ls.

frame : rows and columns of pixels from one complete raster scan.

framestore: a dedicated computer processor that implements all storage and processing .

----------------liM 50 101

G

H

K

50 1 01

G

gain: a video system control designed to ampli fy sample signals until the amplitude matches the separation of the black and whi te levels. See brighrness.

gamma correction: software feature used in conjuncti on with Gain and Bias to provide greyscale correcti on to enhance detail. Gamma + arid Gamma - are available parameters in the computer menus.

greyscale: the number of discrete steps between black and white.

ground: a conducting path between an. electric circuit or equi pment and the earth. Also known as earth. "

gun module: the port ion of the system, incl uding the emi tter, suppressor, extractor, and first condensor lens, that produces the initi al electron beam.

high tension: synonym for high voltage, anything over 30 volts.

histogram: a global descripti on of the distri buti on of pi xels with respect to greylevel intensity.

HR Mode: High resolution mode of the S-FEG

icon: a small symbol indicating a speci fi c soft ware application.

image: a visual representation of the specimen.

image processing enhancements: enhancements applied after the frame has been grabbed.

IMG files: a system file format for stored images or graphics .

interpolation: to fill in missing data based on a chosen method , for example, linear interpolation.

interpolation nodes: points on a line representing greyscale. Computer calculations interpo late (fill in) mi ssing a ata between the nodes.

kernel: the range of neighbouring pi xels for which a filter samples.

kilovolt (kV): 103 volts.

L

L

M

, '

N-O

p

. ,

R

~! .

"

, '

last position: the last predefined position saved in the stage table to which the stage wi ll dri ve.

LaB6: Lanthanum Hexaborjde crystal used as a source material for emi1ling electrons.

"

microamp (flA ): 10-6 amp I I . ':. :.':

micron (micrometer) (flm):.J 0-6 meter. " .

micron bar: a bar that shows distances in microns in relati on 10 the current magnification oi'thc di splayed image.

mrad: milliradian, OIie th~usandth of a radian ( 10-\

nanoamp (nA): 10-9 amps:

ohm (Q) : measuTemeill of e lectric resistance.

" picoam (pA): 10-12 amps

., pixel : a picture element or cata bit from the image .

"

ra nlp: rate at..which something is changing.

raster ,saln: a left-to-right. t9p-lO-bollom (X,Y) movement of the beam . This sen es of lines is s hifted slightly from one axis to the other. A raster, while appearing continuous, consists of as many as one million' individual locations (pixels) that the beam visits.

r eal time enhancements: enhancements appli ed during the imaging process. ' o f ! . '

relative coordinates: coordinates measured from the present locati on on the stage. See absolute coordillates.

.. "

50 1 0 1

s

'.I -'

, .' "' I I

ll"

T

50 1 01

s

sample: see specimen.

scan: the collection and amplificati on of the signal emitted by the specimen surface as it is illuminated wi th the primary beam. Scans, normall y done in a regular pattern called a raSTer, can be stored or manipulated for later access of data.

secondary . .electrolls (SE) : e lectrons leaving the specimen surface after the beam strikes it.

source: the emitter, including the suppressor, fro m which the electron • • ,},' . I

bean; is generate'd. Also known as emillel:

specirn,elt: h ls~ k~oWn 'as sample: the item to be imaged.

specimen alignment: a method that associates stage points with user'denned 'jabels to ~et Lip'h mapping between stage and user coordinate systems. i

specimen chamber: includes the'specimen stage and other supporting equipmel)t~ where .the spe.cimen is placed under vacuum.

specimen charging: lypically scen in nonconducting specimens whi le operating at v~ltages other than E2 (charge neut ral). Posi tive charging is self-balancing; negative charging creates image arti facts (smearing.w.ith inverted contrast). · -.....

specimen coordinates (uu): see user-defined uniTS.

specimen stage: a platform tha1'6upports and positi ons the specimen.

spotsize: Spotsize has an assigned number that ranges from I to 7 ~ , __ .'_ .. _with nuJl!be.r~ <;:orresponding.!Q..p~a.I!LC.m:rmt JIonl IQW_IP..:bigb, IUs

proporti onally related to aperture size, beam current (given in pAl, and beam voltage (given in kV,.'

stage'coordinates (!1m}:' actu:al jihysicallocation on the stage from the 0,0 centre; given in n; icrbns: '

specim en current: ~mount of cl~rrent measured at the sample surface, Also known as sample currenT, See beam currenT,

.J ..... •

stigmator: adjusts the shape of the beam by applying currents to quadrupole correction coi ls. See aSTigmaTism. , .'

TIFF files: a standard file format for stored images or graphics; acronym for Tagged Image File Format.

tip: the essential part of the source emitting the electrons.

TLD: Through the Lens Detector, a special detector used to collect secondary electrons physically through the lens.

TUngsten Filament: The wire formed source materi al used to emit e lectrons,

u·v

u-v

w

UUR Mode: Ultra-High Resolution Mode of the S-FEG

User Units (UU) coordinates: coordinates specified by the user during 3-point alignment and shown as UU on the Static User Interface.

video monitor: the main di splay screen for specimen viewi ng and soft ware manipulation.

working distance: the distance from the bottom of the final lens to the specimen surface. otherwi se know n as the free working di stance (FWD).

50101

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