Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE....

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Consolider RUE (CSD2009-00046) Wide Band Gap Semiconductor Devices for Rational Use of Energy RUE José Millán CNM

Transcript of Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE....

Page 1: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

Wide Band Gap Semiconductor Devices for

Rational Use of EnergyRUE

José MillánCNM

Page 2: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

Outline

• Why WBG Semiconductors?• The CONSOLIDER RUE at a glance• The RUE Consortium• The RUE WPs• Results• Future Trends of WBG Power Devices

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Consolider RUE (CSD2009-00046)

“efficient processing of electrical energy through means of electronic switching devices ”

Power Electronics is:

40% of Energy consumed as electricity

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Consolider RUE (CSD2009-00046)

Power Electronics: Electrical Energy Processing

Page 5: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

Electrical Energy Areas

• Energy generation (1)

• Energy transmission &distribution (2,3)

• Energy storage (4)

• Energy usage & conversion (5,6)

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Consolider RUE (CSD2009-00046)

• Increased power densities• Lower electromagnetic emissions• Plug-and-go systems• Extreme operating environments• Higher levels of integration• Lower cost

Moore’s Law for Power Devices:

Doubling frequency and power density every 4.5 years

Page 7: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

• Si devices are limited to operation at junction temperatures lower than 200 ºC.

• Si power devices not suitable at very high frequencies.

• SiC and GaN offer the potential to overcome both the temperature, frequency and power management limitations of Si.

Why WBG Semiconductors?

Page 8: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

• SiC&GaN process technologies are more “mature”.

• At present, SiC shows the best trade-off between properties and commercial maturity.

• GaN can offer better HF and HV performances, but lacks of high quality large substrates (no vertical devices).

• GaN lower thermal conductivity than SiC.

• GaN: 2DEG heterojunctions (InAlGaN alloys) grown on SiC or Si substrates.

• Currently, it is a sort of competition SiC vs GaN, in a battle of performance versus cost.

• No clear winner at the moment. They will find their respective application niches with a tremendous potential market.

Why WBG Semiconductors?

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Consolider RUE (CSD2009-00046)

Physical Properties of Semiconductors for Power Devices

Material Eg (eV)@300K

µn(cm²/Vs)

µp(cm²/Vs)

Vsat(cm/s)

Ec(MV/cm )

λ(W/cm.ºK)

εr

Si 1.12 1450 450 1 × 107 0.25 1.5 11.7

4H - SiC 3.2 950 115 2 × 107 2.2 5 10

GaN 3.39 1000 350 2.2 × 107 3 1.3 8.9

Diamond 5.6 2200 1800 2.7 × 107 10 22 5.7

Page 10: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

WBG-based Devices

• Wider Energy Bandgap lower leakage currents and high operating temperatures. Radiation hardness is also improved.

• Higher critical electric field thinner blocking layers and higher doping concentrations lower on-resistance. Unipolar HV devices feasible.

• Higher electron saturation velocity Higher operating frequencies.

• Higher thermal conductivity better power dissipation (improves heat spreading) - possibility of working at higher current densities – higher operating temperatures.

---------------

• 2 kV SiC Schottky diode with similar losses than a 150 V Si Schottky diode

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Consolider RUE (CSD2009-00046)

Consolider RUE at a glance

• Main objective: to develop power WBG semiconductor devices aimed at• an important improvement in the performance of existing

power converters, and • the development of new power converters • In both cases seeking a more Rational Use of the electric

Energy

• SiC and GaN are the best options due to:• theoretical properties (HV capability, HT operation and HSS)• real commercial availability of the starting material (wafers)• maturity of their technological processes

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Consolider RUE (CSD2009-00046)

Consolider RUE at a glance

• The development of this generation of power devices includes:• the study, design and fabrication of new power devices• design and implementation of novel packages according to the

voltage, temperature and frequency ranges of these devices. • new characterization and simulation tools • the investigation of the suitable circuitry: new drivers,

controllers, converter topologies, control strategies, etc.

• The project would not be completed if the real advantages of the new devices were not tested in real applications !!

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Consolider RUE (CSD2009-00046)

Consolider RUE at a glance

> 60 PhDs

5 year duration

Funds: 4.56 M€

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Consolider RUE (CSD2009-00046)

The WorkPackages

The Project is split into three workpackages:

• WP1 deals with the development of SiC and GaN devices.

• WP2 develops the interface technologies to use these devices in real systems.

• WP3 includes several proofs of concepts concerning new and innovative niches for HT and HV capabilities, and HSS operation of WBG power devices.

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Consolider RUE (CSD2009-00046)

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Consolider RUE (CSD2009-00046) ApplicationsWork Package 3

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Consolider RUE (CSD2009-00046) ApplicationsWork Package 3

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Consolider RUE (CSD2009-00046)

Summary Diagram

Page 20: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

Critical Packaging Elements• Hermetically sealed package• Die attach• Die bonding

Optimized for high temperature operation and -170°C/+300°C thermal cycling

Results: 300V, 5A SiC Schottky diode for ESA BepiColombo

Mission (solar panel protection)

1,9

1,95

2

2,05

2,1

2,15

2,2

2,25

0,0 100,0 200,0 300,0 400,0 500,0

T ime (hours)

Fo

rwar

d v

olt

age

(V)

Ni Schottky diode withhermetic sealing

W Schottky diode

Forw

ard

volta

ge(V

)

Vf at 5A and 270ºC

Time (hours)1,9

1,95

2

2,05

2,1

2,15

2,2

2,25

0,0 100,0 200,0 300,0 400,0 500,0

T ime (hours)

Fo

rwar

d v

olt

age

(V)

Ni Schottky diode withhermetic sealing

W Schottky diode

Forw

ard

volta

ge(V

)

Vf at 5A and 270ºC

Time (hours)

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Consolider RUE (CSD2009-00046)

1.2kV & 3.5kV 25mm2 SiC Schottky Diodes

VAK= 1.78V @ 50A (25mm2 diode)

1.2kV diodes: estimated epilayer resistance, Repi = 1.5 mΩ.cm2

For these diodes’ size starting material is a must.

Starting material from CREE: 3” ultralow micropipes 4H substrate

Wafer ∅ 75 mm

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Consolider RUE (CSD2009-00046)

Large area SiC JFET

• ACCUMOS vertical power device• 5mmx5mm transistors• 2 or 3 terminals devices• 7 photolitographic mask levels• 2 µm minimum feature size

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Consolider RUE (CSD2009-00046)

Latest Results. Target: 10 kV

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Consolider RUE (CSD2009-00046)

Latest Results: 6 kV

Page 25: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

Latest Results: MOS gate

MOS gate:

• Surface pre-treatment ( in-situ RTA step) in H2 atmosphere

• The gate oxidation process performed in an RTP furnace in N2O

10 100 1000-1.0

-0.8

-0.6

-0.4

-0.2

0.0

0.2

0.4

0.6

0.8

290 oC

250 oC

150 oC

50 oC

Bias-stress + 10 Vtbs = 10, 36, 100, 360, 1000 s

Vds = 100 mVL/W = 12/150

∆Vth

[V]

Bias-Stress Time [s]

25 oC

100 oC200 oC

0 50 100 150 200 250 300-1.0

-0.8

-0.6

-0.4

-0.2

0.0

0.2

0.4

∆Vth

[V]

Bias-Stress Temperature [oC]

tbs = 10 s tbs = 1000 s

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Consolider RUE (CSD2009-00046)

SiC Switches

• Successful demonstration of the cascode pair (a high-voltage, normally-on SiC JFET + a low-voltage Si MOSFET).

• An industrial normally-off SiC switch is expected. The SiC MOSFET (<5kV) or either the SiC MCT or the IGBT (>5kV).

• BJTs/Darlingtons are promising, they also suffer from reliability problems.

• A normally-off SiC power transistor in the BV range of 600V-1200V available within next two years.

WBG Future Trends

WBG Power Devices Future Trends

Page 27: Wide Band Gap Semiconductor Devices for Rational Use of ...€¦ · Rational Use of Energy. RUE. José Millán. CNM. Consolider RUE (CSD2009 -00046) Outline • Why WBG Semiconductors?

Consolider RUE (CSD2009-00046)

GaN Power Devices

• GaN is already commercialised in optoelectronics.

• Its applications in power switching still require further work in materials, processing and device design.

• GaN HEMT (5-10 A, 600-1200 V normally-off)

GaN Power HEMTs

WBG Power Devices Future Trends

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Consolider RUE (CSD2009-00046)

Thanks for your attention