Waveguide Fabrication Techniques - NTUAusers.ntua.gr/eglytsis/IO/Waveguide_Fabrication_p.pdf ·...
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Waveguide Fabrication Techniques
Integrated Optics Prof. Elias N. Glytsis
School of Electrical & Computer Engineering National Technical University of Athens
20/12/2016
Optical Waveguides Fabrication Techniques
General Methods Deposition Techniques
• Deposit a higher index thin-film on a lower-index substrate Substitution Techniques • Create a higher index layer in a substrate by introducing new
atoms
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
General Criteria for Technique Selection • Thickness and Refractive Index of Thin Layer • Losses of the Substrate • Material Purity • Stability of Process and Thin Film • Reproducibility of the technique • Cost
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Dielectric Materials Step-Index (deposition)
• Sputtered-film • Polymer Film Graded-Index (substitution) • Ion Migration • Proton Exchange • Metal In-diffusion • Ion Implantation
Semiconductor Materials Step-Index (deposition)
• Liquid-Phase Epitaxy (LPE) • Vapor-Phase Epitaxy (VPE) • Molecular Beam Epitaxy (MBE) Graded-Index (substitution) • N/A
Planar (Slab) Waveguides
D. L. Lee, “Electromagnetic Principles of Integrated Optics”,J. Wiley & Sons, 1988
Optical Waveguides Fabrication Techniques
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Schematic presentation of different types of optical materials
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
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Sputtered-Film Waveguides
D. L. Lee, “Electromagnetic Principles of Integrated Optics”,J. Wiley & Sons, 1988
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Principle of thin film deposition by using pulsed laser deposition (PLD)
http://www.andor.com/learning-academy/pulsed-laser-deposition-an-introduction-to-pulsed-laser-deposition
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
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Magnetron sputtering principle
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
Sputtered-Film Waveguides
https://www.google.gr/url?sa=i&rct=j&q=&esrc=s&source=images&cd=&cad=rja&uact=8&ved=0ahUKEwiUz_7IhIPRAhXFNhoKHfq_B-MQjRwIBw&url=http%3A%2F%2Fwww.polymedia.ch%2FOpArticles%2Fview%2F57&psig=AFQjCNFsy5nyjoaluNW4_S_RtEV2y4Yx3g&ust=1482332373425643
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Techniques for Polymer Waveguides
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
Spin Coating
http://www.brewerscience.com/spin-coating-theory
Process Trend Charts
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Techniques for Polymer Waveguides
Plasma Polymerization
https://commons.wikimedia.org/wiki/File:Glow_Discharge_apparatus_color.png
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Materials for Polymer Waveguides
X. Colin Tong, “Advanced Materials for Integrated Optical Waveguides”, Springer-Verlag, 2014
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X. Colin Tong, “Advanced Materials for Integrated Optical Waveguides”, Springer-Verlag, 2014
Some Advanced Materials for Polymer Waveguides
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Ion (Proton) Exchange (H+) in Lithium Niobate
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
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Typical index profile of a H+:LiNbO3 (z-cut) waveguide
H+:LiNbO3 (z-cut) thickness variation versus protonic exchange duration for different temperature values
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
Proton Exchange (H+) in Lithium Niobate
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Ti-Indiffusion in Lithium Niobate
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
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Typical temperature profile for titanium diffusion
index profile of a titanium diffusion guide
Ti In-diffusion in Lithium Niobate
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
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Scheme of the Van de Graaff accelerator (300 KeV – 2.2 MeV)
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
Ion Implantation
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Ion Implantation Waveguide Fabrication Process
X. Colin Tong, “Advanced Materials for Integrated Optical Waveguides”, Springer-Verlag, 2014
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Effects of implantation on the material refractive index
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009
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Ordinary and extraordinary index profiles of LiNbO3 -LiTaO3 waveguide fabricated by He+ implantation
A. Boudrioua, “Photonic Waveguides”, J. Wiley & Sons, 2009 D. L. Lee, “Electromagnetic Principles of Integrated Optics”,J. Wiley & Sons, 1988
dose = 2×1016 ions/cm2 and energy = 2 MeV
LiNbO3 LiTaO3
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Semiconductor Waveguides Ga1-xAlxAs System
Controlling Al concentration can engineer band-gap energy
Eg(x) = 1.439 + 1.042x + 0.468x2 (eV)
R. G. Hunsperger, “Integrated Optics”, 6th Ed., Springer-Verlag, 2009
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Semiconductor Waveguides GaxIn1-xAsyP1-y System
Eg(y) = 1.35 – 0.775y + 0.149y2 (eV)
x = 0.1894y/(0.4184-0.013y) Lattice match
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P. Capper & M. Mauk ,“Liquid Phase Epitaxy”, J. Wiley & Sons, 2007
Liquid Phase Epitaxy (LPE)
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Liquid Phase Epitaxy (LPE)
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Hydride/Chloride Vapor Phase Epitaxy
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Hydride/Chloride Vapor Phase Epitaxy
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Metal-Organic Vapor Phase Epitaxy (MOVPE) Metal Organic Chemical Vapor Deposition (MOCVD)
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Molecular Beam Epitaxy (MBE)
http://web.tiscali.it/decartes/phd_html/III-Vms-mbe.png
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Epitaxial Growth Example
Blue laser diodes grown by MBE
SEM image showing fabricated laser.
Gold contact
M. Kauer et al. “InGaN laser diodes fabricated by molecular beam epitaxy”
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Epitaxial Growth Example Violet Laser Diodes Grown by MBE
F. Heffermann et al, Phys. Stat. Sol. (a) 201, No. 12, 2688–2671 (2004) / DOI 10.1002/pssa.200405034
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