Watlow RMG Gas Line Heater Controllerdownloads.watlowsemi.com/RMG/Watlow RMG Gas Line Controller...

The Science of Thermal Systems for the Semiconductor Industry

Watlow ConfidentialWatlow Confidential

Watlow RMG

Gas Line Heater

Controller

Setup and

Troubleshooting

Guide

0600-0104-0000 v0.1



RMG Gas Line Module

This module can contain 2 cards:

• RMG the gas line heater controller

• Modulates heater outputs

• Senses heater current, resistance and leakage

• RMUH – Ultra High Density TC

• Senses Control TCs

• Senses Over Temp TCs

• Controls over temp relay

• Provides Control loop if RMZ EtherCAT is not present



RMG Gas Line Controller Basics

The Watlow RMG is a 4 channel gas line heater

controller that provides then features:

• Switch up to 3 amps of heater current per channel.

• Switches DC or rectified AC

• The 4 channels are phase staggered by 90º to minimize overlap of

conduction times.

• High fidelity detection of load current, voltage, resistance and

power.

• Startup sequence to check heaters before full operation

• Programmable warning and shutdown levels for detected current,

heater resistance, leakage to ground.



RMG Model Number

RMGV-NNLLCCTAZZ

• V is voltage H=High 85 to 337VDC L=Low 20 to 40

• NN is number of control TC inputs

• LL is number of over temperature TC inputs

• CC is number of control loops

• T is number of outputs

• A is reserved

• ZZ is locked firmware



Device Interfaces

USB Port

Power

Power to Heaters

Over Temp Relay

TC Inputs

Power on C Connector 98 and 99 24V AC/DC

Cards: RMG RMUH



Setting Addresses

RMGRMUH

Use a small screwdriver to

set the address of each card.

1 to F(15) through the slot in the case.

This must be unique in the system



System Topology

Heater Array

Heater Array

Heater Array

Heater Array

Controller

DC or

Rectified

Power

Sense

Sense

Sense

Sense



I/O Mapping

Controller

Heater

Heater

Heater

Heater

Heater

State

Machine

Communications

interface to Master

and output

modules

Heater

Alarms

Heater

Alarms

Heater

Alarms

Heater

Alarms



Start Sequence

IDLE 1

VETTING 2

RUNNING 5

STANDBY 3

Power On

STARTUP

FAULT 4

RUNNING

FAULT 6

Pending

Request is RUN

Pending Request is

STARTUP or RUN

Pending Request is

STARTUP or RUN

and line voltage is

present

Fault occurs in

matching Fault Mask

Fault occurs in

matching Fault

Mask

Faults

Cleared

OUTPUT=Loop Power

OUTPUT=OFF

OUTPUT=OFF

OUTPUT=OFF

OUTPUT=PULSE

OUTPUT=OFF



Run Management

User Requested State

• This can be set by the system at anytime to drive towards the

requested state

Startup State

• This injects a desired state on power-up

Actual State

• This value indicated the actual state of the system

All channels have the same state.

Requesting a state on 1 channels will set the other channels to the same

value since the system is managed from a central state machine.

The state machine does not being the requested run until the line voltage is

present.



Sensed Heater Current and Voltage

Sensed Targets

Voltage and Current

• Sensed simultaneously over 100ms at

5kHz at 24-bit

• Periodic points are determined to bracket

good readings

• DSP calculates RMS values

Current Limits can be set

for high and low trip points.

Voltage is a reference

value.

Accuracy

• Voltage

• Current

+/- 1 mV

+/- 1 mA 10mA min load

Wattage

• Calculated from V * I * %Duty Cycle

Wattage is a reference

value



Sensed Resistance Values

Sensed Targets

Resistance

• Calculated from V/I

Expected Resistance

Difference from Expected (user entered)

Actual Baseline Resistance

Difference from Baselined value

(captured and saved when triggered by

user)

Accuracy

• Sensed Resistance • Resolves to 1 ohm out of 1000 ohms

• Add margin for trip limits to be

tolerance of system dither



Sensed Heater Ground Leakage

Sensed Targets

Leakage to Earth

• Connected the center earth pin on the

power connector to gas line earth. Earth

• The pin is reference from support V+ to V-

by a divider network.

Leakage Limit are set as %

of rail voltage.

• The reference point will shift relative to the

rails if the heater network gets shorted to

the gas lines.

A value of 1% with a 32V

rail would be a 320mV

swing.



Power LimitingThe outputs may be power limited to keep conduction times less than 100%.

This can limit the energy to the heaters for safety.

The 4 outputs are stagger 25% to minimize simultaneous conduction.

Only one output will be on at a time if the power is limited to 25% on all

channels. This can lengthen time to set point.

The output cycle times default to 1 second with the outputs duty cycling at

that rate.



Faults and Warning• The alarms have high and low trip levels. Each alarm can be enables as

an indication or a fault or both.

• Indicating alarm are observed in the status field.

• Faults cause the channels to shutdown (not output power) in the fault

condition.

• These are the available alarms

• Heater Current

• Heater Resistance relative to expected (matches spec)

• Heater Resistance relative to Baseline (tighter)

• Ground shift as a result of heater leakage to earth

• Open Heater

• Shorted Heater

• Shorted Heater is a hardware comparator for > 25A. Dead shorts will trip

this within 200ns.



Faults and Warning Masks• The alarms have high and low trip levels. Each alarm can be enables as

an indication or a fault or both.

0x0001 Shorted Output Fault Enable

0x0002 Open Output Fault Enable

0x0004 Leakage Fault Enable

0x0008 Heater Current Level Fault Enabled

0x0010 Heater Resistance Shift from Baseline Fault Enabled

0x0020 Heater Resistance off expected by %

0x0040 Switching Device Over-Temp Fault Enabled



Setup via EtherCAT Interface

Setup in the 0x4002 objectsMap to module via 0x4000 objects



Operate via EtherCAT Interface

Run-Time Control in the 0x3000 objectsMonitor in the 0x2000 objects

These parameters can be

mapped to User Tx PDO

These parameters can be

mapped to User Rx PDO



Setup via USB and Dashboard



Operation and Monitoring USB and Dashboard



RMUH Setup via USB

TC Input Setup Control Loop Setup Over Temp Input Setup



Trouble shooting

Faults occurring when not expected.

• Verify Fault Enable mask

• Check limit trip points

• Verify power is enabled to the heater

Faults not indicating

• Verify Warning Enable mask is set correctly

Values not reading

• Verify EtherCAT mapping



System Specifications

RMG Card Ambient Temperature Rating (Electronics): -18 to 65 C

Heater current 4 channels at 3A

Low Voltage 20 to 40 VDC

High Voltage 85 to 336 VDC

RMUH Card Ambient Temperature Rating (Electronics): -18 to 65 C

TC accuracy +- 1.0C *Pending Qualification

Limit Relay 5A 240 VAC

RS485 Standard Bus

USB Device

Communication Protocols via RMZ EtherCAT ETG.5003.2060 Compliant

Watlow Standard Bus

DeviceNet

Watlow RMG Gas Line Heater Controllerdownloads.watlowsemi.com/RMG/Watlow RMG Gas Line Controller...

Documents

Transcript of Watlow RMG Gas Line Heater Controllerdownloads.watlowsemi.com/RMG/Watlow RMG Gas Line Controller...