Vertical electrostatic actuation of torsional mirrors
description
Transcript of Vertical electrostatic actuation of torsional mirrors
![Page 1: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/1.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Vertical electrostatic actuation of torsional mirrors
• A typical 1 axis torsional mirror
Torsional spring
Electrostatic actuators
Flat, reflective mirror
![Page 2: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/2.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Vertical electrostatic actuation: problems
• Large angle + stability large gaps
• Large gaps small forces small torque
• Small torque flimsy springs
• Flimsy springs low resonant frequency!
![Page 3: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/3.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Mirror design• Reflective mirror metallic coating
• Metallic coating thermal bimorph
• Curvature requirement thick silicon
• Thick silicon higher mass slow mirror
![Page 4: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/4.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
1DOF 2DOF
![Page 5: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/5.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
2DoF Micromirror
anchor
Back-side etched cavity
anchor
![Page 6: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/6.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Challenges with this methodology
Low SCS beam/structure must be compliant in z and stiff in x, yPerformance is aspect-ratio limited => highSCS beam is too stiffLateral actuation displaces the mirror laterally
Lateral pull
x
z
y
![Page 7: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/7.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Challenges – Lateral displacement
Very little rotation due to vertical stiffness of low SCS yank legLateral pull dominates actuation
![Page 8: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/8.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Challenges: 2D mechanisms
![Page 9: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/9.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Bond/transfer results
Long HF Release of TopSCS handle wafer
Target wafer is a regular Si wafer
![Page 10: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/10.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Optical Comm Proof of Concept
Receiver• 1” lens, std. video CCD• PCMCIA Frame grabber• Software decoding
Laser transmitter– 4bps OOK– Laser pointer (Radio
Shack)
![Page 11: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/11.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Laser Comm at 5.2 km
• 14 microW, ~1mrad
• 8 mW, ~1mrad
• 3 mW, ~100mrad
Received by a CCD video camera with 3” aperture. During daylight, through light rain.
![Page 12: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/12.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Video Semaphore Decoding
![Page 13: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/13.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Smart Dust ’01 Goal
![Page 14: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/14.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
CCR Interogator
Top View of the Interrogator
CCD Camera Lens
Frequency-Doubled Beam45o mirror
Polarizing Beamsplitter
Quarter-wavePlateFilter
0.25% reflectance on each surface
YAG Green Laser Expander
![Page 15: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/15.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Smart Dust Mini Mote
![Page 16: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/16.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Simulation of CCR reflection
Goal: predict impact of diffraction and non-flat, non-perpendicular mirrorsMethodology: Divide faces into discrete rectangular elements Perform ray-tracing to determine direction and phase of each ray Sum Fraunhofer diffraction integrals from discrete elements.Author: Victor Hsu (with Joe Kahn, K. Pister, UCB; contact [email protected])
![Page 17: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/17.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
CCR Differential Scattering Cross-section
Angle error, 1 side(Courtesy: Lixia Zhou, [email protected])
0.5m rad
1m rad8m rad
![Page 18: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/18.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
2D beam scanning
laser
lens
CMOS ASIC
Steering Mirror
AR coated dome
![Page 19: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/19.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
6-bit DAC Driving Scanning Mirror
10 20 30 400
0.2
0.4
0.6
0.8
Time (seconds)
Nor
mal
ized
bea
m p
ositi
on
• Open loop control
• Insensitive to disturbance
• Potentially low power
![Page 20: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/20.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
~8mm3 laser scanner
Two 4-bit mechanical DACs control mirror scan angles.
~6 degrees azimuth, 3 elevation
![Page 21: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/21.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Optical Communication
0-25% 25%
Path loss
Loss = Areceiver / (4 d2) / Gant
Antenna Gain = 4 / ½2
![Page 22: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/22.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Theoretical Performance
Ptotal = 100uWPt = 10uW½ = 1mradBR = 5 Mbps
Areceiver = 0.1mm2 Pr = 10nW (-50dBm)Ptotal = 50uWSNR = 15 dB
5m
20pJ/bit!
![Page 23: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/23.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Theoretical Performance
Ptotal = 50mWPt = 5mW½ = 1mradBR = 2 Mbps
Areceiver = 1m2 Pr = 10nW (-50dBm)Ptotal = 50uW /pixelSNR = 17 dB
500km
25nJ/bit!
![Page 24: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/24.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Satellite Imagery
![Page 25: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/25.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Goal:10 Mbps; 10 km; 1 cm3
![Page 26: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/26.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
1 Mbps CMOS imaging receiver
1 0 cm
20 0 m
F ield of Viewof S ingle P ixel
5 m m
2 k m
CollectionLens
OpticalF ilter
64x64CMOSImager
10W, 1mrad
Photosensor
Signal ProcessingA/D Conversion
SIPO ShiftRegister
CRC CheckLocal Bus Driver
Off ChipBus Driver
Pixel Array
![Page 27: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/27.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Augmented Reality
100 200 300 400 500 600
50
100
150
200
250
300
350
400
450
100 200 300 400 500 600
50
100
150
200
250
300
350
400
450
Lau, Muller, Solgaard and students
![Page 28: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/28.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Laser pointer projector
R
G
B
EraseClear
3axis gyro
2D RGBprojector
•Stabilized laser pointer•Hand-held projector•Virtual whiteboard
•Track user motions while drawing•Refresh at 30 Hz
![Page 29: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/29.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Displays and screen doors
Display
Array of pixels
RGB(x,y) RGB(x,y,,)
Screen door
![Page 30: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/30.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
Virtual window
Pixel arrayEach pixel like a pinhole camera
Max pixel power: 5mW out, 5mm^2 Array power (out): 1kW/m^2
Power in: 50mW/pixel
Power in: 10kW/m^2 !
![Page 31: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/31.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
HDTV window
Pixel array •2000x1000 array•1mm^2, 1mW out pixels•Full video on each pixel
•Optical power out: 2kW•Shadows•Heat! (w/o sunburn)•Home defense
•Uncompressed data rate: ~20 Tbps
![Page 32: Vertical electrostatic actuation of torsional mirrors](https://reader036.fdocuments.net/reader036/viewer/2022070406/568140c5550346895dac8e2c/html5/thumbnails/32.jpg)
ksjp
, 7/0
1
MEMS Design & Fab
HDTV window – more realistic
Pixel array •Eye tracking (multi-user)~25/cones/pixel/faceData rates ~few video streams
•10W/m^2 (bright indoor)10uW/pixel averageArray power << kW
For each pixelFor each face
draw 5x5 grid ;