Varian, Turbomolecular Pump, TPS-compact Models Models: 969-8217 969-8218 ... SERVICE OPTIONS ......

TPS-compact

Models: 969-8217 969-8218 969-8219 969-8220 969-8221 969-8222 969-8223 969-8224 969-8225 969-8226 969-8227 969-8228 969-8229 969-8230 969-8231 969-8232

87-901-010-01 APRIL 2008

(I) MANUALE DI ISTRUZIONI (D) BEDIENUNGSHANDBUCH (F) NOTICE DE MODE D’EMPLOI (E) MANUAL DE INSTRUCCIONES (P) MANUAL DE INSTRUÇÕES (NL) BEDRIJFSHANDLEIDING (DK) INSTRUKSTIONSBOG (S) BRUKSANVISNING (N) INSTRUKSJON MANUAL (FIN) OHJEKÄSIKIRJA (GR) ODHGIES CRHSEWS (H) FELHASZNÁLÓI KÉZIKÖNYV (PL) PODRECZNIK INSTRUKCJI (CZ) NÁVOD K POUŽITÍ (SK) NÁVOD NA OBSLUHU (SLO) PRIROČNIK ZA NAVODILA (GB) INSTRUCTION MANUAL

Temporary Errata

http://www.idealvac.com

TPS-compact

ISTRUZIONI PER L’USO ...................................................................................................................................1 GEBRAUCHSANLEITUNG ................................................................................................................................4 MODE D’EMPLOI ...............................................................................................................................................8 INSTRUCCIONES DE USO.............................................................................................................................11 INSTRUÇÕES PARA O USO...........................................................................................................................15 GEBRUIKSAANWIJZINGEN............................................................................................................................18 BRUGSANVISNING .........................................................................................................................................22 BRUKSANVISNING..........................................................................................................................................25 BRUKERVEILEDNING.....................................................................................................................................28 KÄYTTÖOHJEET .............................................................................................................................................31 PDHGIES CRHSEWS ...........................................................................................................................................34 HASZNÁLATI UTASÍTÁS.................................................................................................................................37 INSTRUKCJA UZYTKOWANIA........................................................................................................................40 PŘÍRUČKA K POUŽITÍ.....................................................................................................................................44 NÁVOD K POUŽITIU........................................................................................................................................47 NAVODILA ZA UPORABO...............................................................................................................................50 INSTRUCTIONS FOR USE..............................................................................................................................53 TECHNICAL INFORMATION...........................................................................................................................56

DESCRIPTION OF THE TPS-COMPACT...................................................................................56 Turbopump Description .....................................................................................................56 Controller Description ........................................................................................................56 Control Panel Description ..................................................................................................56 Scroll Pump Description ....................................................................................................57

TECHNICAL SPECIFICATION ....................................................................................................57 TPS-COMPACT OUTLINE ..........................................................................................................58 INLET SCREEN INSTALLATION ................................................................................................60 HIGH VACUUM FLANGE CONNECTION...................................................................................61 HIGH VACUUM FLANGE CONNECTION CONFIGURATIONS.................................................61 INTERCONNECTIONS................................................................................................................62

Input power connector .......................................................................................................62 P3 – Vent ...........................................................................................................................62 Gauge Connector ..............................................................................................................63 Pressure Display Module...................................................................................................63 J5 – IN-OUT.......................................................................................................................64 Signal description ..............................................................................................................64 J6 – Serial ..........................................................................................................................67

RS 232/RS 485 COMMUNICATION DESCRIPTION..................................................................67 Communication Format .....................................................................................................67 Serial Communication Descriptions...................................................................................68

WINDOW PROTOCOL ................................................................................................................68 Description .........................................................................................................................68 Window Meanings .............................................................................................................70

SERVICE OPTIONS ....................................................................................................................71 Cleaning.............................................................................................................................72 Tip-Seal Replacement .......................................................................................................72

ORDERABLE PARTS..................................................................................................................74

INSTRUCTIONS FOR USE

53/74 87-901-010-01

Safety Guideline

for

Turbomolecular Pumps

Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors. In case of a malfunction of the system for example rotor/stator contact or even a rotor crash the rotational energy may be released.

WARNING! To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed!


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GENERAL INFORMATION This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. The TPS-compact is an integrated system with a turbo-molecular pump for high and ultra-high vacuum applications associated with its relevant controller and its primary pump. The system can pump any type of gas or gas compound. It is not suitable for pumping liquids or solid particles. The pumping action is obtained through a high speed turbine driven by a high-performance 3-phase electric motor. The TPS-compact is free of contaminating agents and, therefore, is suitable for applications requiring a "clean" vacuum. The TPS-compact is equipped with auxiliary connectors to control the vent valve, to be controlled from a remote site by means of an host computer connected through a serial line. The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment. Detailed information is supplied in the appendix "Technical Information". This manual uses the following standard protocol:

WARNING! The warning messages are for attracting the attention of the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.

CAUTION The caution messages are displayed before procedures which, if not followed, could cause damage to the equipment.

NOTE The notes contain important information taken from the text.

STORAGE In order to guarantee the maximum level of performance and reliability of Varian pumping systems, the following guidelines must be followed: • when shipping, moving and storing pumps, the following

environmental specifications should not be exceeded: • temperature range: -20 °C to +70 °C • relative humidity range: 0 to 95% (non condensing)

• the turbomolecular pumps must be always soft-started when received and operated for the first time by the customer

• the shelf life of a turbomolecular pump is 10 months from the shipping date.

CAUTION If for any reason the shelf life time is exceeded, the pumping system has to be returned to the factory. Please contact the local Varian Vacuum Sales and Service representative for informations.

PREPARATION FOR INSTALLATION The TPS-compact is supplied in a special protective packing. If this shows signs of damage which may have occurred during transport, contact your local sales office. When unpacking the system, be sure not to drop it and avoid any kind of sudden impact or shock vibration to it. Do not dispose of the packing materials in an unauthorized manner. The material is 100% recyclable and complies with EEC Directive 85/399.

CAUTION In order to prevent outgassing problems, do not use bare hands to handle components which will be exposed to vacuum. Always use gloves or other appropriate protection.

NOTE Normal exposure to the environment cannot damage the TPS-compact. Nevertheless, it is advisable to keep it closed until it is installed in the system, thus preventing any form of pollution by dust.

INSTALLATION

CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system. Do not install or use the pumping system in an environment exposed to atmospheric agents (rain, snow, ice), dust, aggressive gases, or in explosive environments or those with a high fire risk. During operation, the following environmental conditions must be respected: − maximum pressure: 2 bar above atmospheric pressure − temperature: from +5 °C to +35 °C − relative humidity: 0 - 95% (non-condensing) In the presence of magnetic fields the pumping system must be protected using a ferromagnetic shield. The TPS-compact can be installed in any position. Fix the TPS-compact in a stable position connecting the inlet flange of the turbopump to a fixed counter-flange capable of withstanding a torque of 50 Nm around its axis. The turbopump with ISO inlet flange must be fixed to the vacuum chamber by means of clamps or claws. The following table shows, for each fixing device, the necessary number of clamps or claws and the relevant fixing torque.

FLANGE FIXING DEVICE N. FIXING TORQUE ISO 63 M10 clamps 4 22 Nm

ISO 100 K M10 clamps 4 22 Nm ISO 160 K M10 clamps 4 22 Nm


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The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Varian hardware. See the appendix "Technical Information" for a detailed description.

NOTE The TPS-compact cannot be fixed by means of its base. For installation of optional accessories, see "Technical Information".

USE This paragraph details the fundamental operating procedures. Make all electrical an pneumatic connections before the use of the system. While heating the vacuum chamber, the temperature of the inlet flange must not exceed 120 °C.

WARNING! Never use the pumping system when the turboinlet flange is not connected to the vacuum chamber or is not blanked.

WARNING! Do not touch the turbopump or any of its accessories during the heating process. The high temperatures may cause burns.

WARNING! Avoid impacts or harsh movements of the pump when in operation. The bearings may become damaged and damages to the persons or the things could be taken place.

CAUTION Use inert gas free from dust, particles or humidity (like Nitrogen) for venting the pump. The pressure at the vent port must be less than 2 bar (above atmospheric pressure).

WARNING! When employing the pump for pumping toxic, flammable, or radioactive gases, please follow the required procedures for each gas disposal. Do not use the pumping system in presence of explosive gases.

Switching on and Use of TPS-compact To switch on the TPS-compact it is sufficient to supply the mains and then move the external switch to ON position. The integrated controller automatically recognizes the mains presence and start up the pump. At the first start up it is recommended to use the "Soft Start" mode by enabling it on the controller. For the following start ups it is recommended to disable the "Soft Start" mode. For the "Soft Start" mode activation procedure, see the paragraph "Signal Description" in the chapter "Technical Information". The blue LED “STATUS” located on the TPS-compact base rear panel indicates with its flashing frequency the system operating conditions: • with no flashing: the pump is normally rotating; • slowly flashing (period of about 400 ms): the system is in

ramp, or in braking, or in Stop, or in “Waiting for interlock” status;

• fast flashing (period of about 200 ms): error condition.

See the appendix "Technical Information" for a detailed description of the TPS-compact control panel. TPS-compact Switching off To switch off the TPS-compact it is sufficient to move the external switch to OFF position. The integrated controller immediately stops the pumping system.

Emergency Stop To immediately stop the TPS-compact in an emergency condition it is necessary to remove the supply cable from the mains plug or moving the external switch to OFF position.

MAINTENANCE The TPS-compact does not require any maintenance (except Tip-seal replacement). Any work performed on the system must be carried out by authorized personnel.

WARNING! Before carrying out any work on the system, disconnect it from the mains, vent the pump by opening the appropriate valve, wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 °C. In the case of breakdown, contact your local Varian service center.

NOTE Before returning the system to the constructor for repairs, the "Health and Safety" sheet attached to this instruction manual must be filled-in and sent to the local sales office. A copy of the sheet must be inserted in the system package before shipping. If a system is to be scrapped, it must be disposed of in accordance with the specific national standards.

DISPOSAL Meaning of the "WEEE" logo found in labels The following symbol is applied in accordance with the EC WEEE (Waste Electrical and Electronic Equipment) Directive. This symbol (valid only in countries of the European Community) indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system. The end user is therefore invited to contact the supplier of the device, whether the Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of sale.

TECHNICAL INFORMATION

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DESCRIPTION OF THE TPS-COMPACT The TPS-compact pumping system consists of a pump with an integrated controller and a forepump and is available in sixteen models which differ in the TPM size, high vacuum flange and voltage.

The models are:

P/N TMP Flange Foreline Voltage 969-8217 TV81M KF40 3.6 m3/h Scroll 110V 60Hz 969-8218 TV81M CFF 2.75 3.6 m3/h Scroll 110V 60Hz 969-8219 TV81M ISO63 3.6 m3/h Scroll 110V 60Hz 969-8220 TV81M CFF 4.5 3.6 m3/h Scroll 110V 60Hz 969-8221 TV301 ISO100 3.6 m3/h Scroll 110V 60Hz 969-8222 TV301 CFF6 3.6 m3/h Scroll 110V 60Hz 969-8223 TV301 ISO160 3.6 m3/h Scroll 110V 60Hz 969-8224 TV301 CFF8 3.6 m3/h Scroll 110V 60Hz

P/N TMP Flange Foreline Voltage 969-8225 TV81M KF40 3.0m3/h Scroll 220V 50-60Hz969-8226 TV81M CFF 2.75 3.0m3/h Scroll 220V 50-60Hz969-8227 TV81M ISO63 3.0m3/h Scroll 220V 50-60Hz969-8228 TV81M CFF 4.5 3.0m3/h Scroll 220V 50-60Hz969-8229 TV301 ISO100 3.0m3/h Scroll 220V 50-60Hz969-8230 TV301 CFF6 3.0m3/h Scroll 220V 50-60Hz969-8231 TV301 ISO160 3.0m3/h Scroll 220V 50-60Hz969-8232 TV301 CFF8 3.0m3/h Scroll 220V 50-60Hz

Turbopump Description The turbopump consists of a high frequency motor driving a turbine fitted with many bladed stages and Macrotorr stages. The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end. The turbine is made of high-strength, light alumin-ium alloy, and is machined from a single block of aluminium. The turbine blades have five different angles, from 44° to 12°, while the Macrotorr stages are in the form of discs. The turbine rotor is supported by permanently lu-bricated high precision ceramic ball bearings in-stalled on the forevacuum side of the pump. The static blades of the stator are fabricated in stainless steel. These are supported and accu-rately positioned by spacer rings. The Macrotorr stators are in the form of self-positioning machined discs with pumping channels and an opening restricted by the corresponding

rotor discs. These are fabricated in aluminium al-loy. During normal operation, the motor functions with a power feed at 54 Vac three-phase at 1330 Hz (TV81M) or 963 Hz (TV301). To reduce losses during start-up to a minimum, the frequency in-creases according to a ramp with a higher initial voltage/frequency ratio. A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating. The pump is balanced after assembly with a resid-ual vibration amplitude less than 0.01 µm.

Controller Description The integrated controller is a solid-state frequency converter which is driven by a single chip micro-computer and is composed of a PCB which in-cludes a power supply with a 3-phase AC output, analog and input/output section, microprocessor and digital section. The controller recognizes the mains presence and converts the single phase AC mains supply into a 3-phase, medium frequency output which is required to power the pump. The controller can be operated by a remote host computer via the serial connection.

Control Panel Description The following picture shows the TPS-compact con-trol panel; the associated table lists the available commands. For a detailed description see the fol-lowing paragraphs.

CONTROL NAME DESCRIPTION

J5 IN-OUT Input-output connector to remote control the TPS-compact

J6 SERIAL Serial input-output connector to control the TPS-compact via an RS 232 or RS 485 connection

STATUS Blue LED to show the system operating condition

P3 VENT Connector to control the optional vent valve

GAUGE Connector to control external EyeSys Gauge

ON-OFF switch (not shown in the picture)

It is located on the rear side of the sys-tem. It is the power supply switch.


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Scroll Pump Description The TPS-compact internal scroll creates vacuum using a simple dual scroll mechanism in which one of the nested scrolls orbits about the other, creat-ing moving zones of captured gas. Gas enters the scroll set at the perimeter and is displaced and compressed toward the center hub where it is exhausted.

TECHNICAL SPECIFICATION

Characteristic TV301 TV81M

Pumping speed (l/s) N2: 215 l/s N2: 60 l/s

Base pressure* 1x10-9 mbar (*) [CFF flanges] 7.5x10-10 Torr (*) [CFF Flanges]

1x10-8 mbar [ISO Flanges] 7.5 x 10-9 Torr [ISO Flanges]

Inlet flange ISO 100, ISO 160, CFF 6, CFF 8

KF 40, ISO 63, CFF 2.75, CFF 4.5

Rotational speed 56000 RPM 80000 RPM

Start-up time 15 s

Operating position Any

Operating ambient temperature + 5° C to + 35° C

Bakeout temperature

120° C at inlet flange max. (CF flange) 80° C at inlet flange max. (ISO flange)

Noise level 55 dB (A) at 1 meter

Lubricant permanent lubrication

Power supply (Line type): Input voltage: Input frequency: Max input power:

115 or 200–240 Vac 50 or 50 – 60 Hz

310 VA

115 or 200–240 Vac50 or 50 – 60 Hz

260 VA

Protection fuse 115 Vac: 4 A 220 Vac: 2.5 A

115 Vac: 5 A 220 Vac: 3 A

Compliance with: UNI EN 292-1 UNI EN 292-2 EN 55011 (Class A Group 1) EN 61000/3/2 EN 61000/3/3 EN 61000/4/2 EN 61000/4/3 EN 61000/4/4 EN 61010-1 EN 1012-2

Installation category II

Pollution degree 2

Power cable 115 Vac: USA plug 5 meters long 220 Vac: EU or UK plug 5 meters long

Serial communica-tion (kit)

RS232 cable with a 9-pin D type male connector and a 9-pin D type female connector, and software (optional)

Storage temperature - 20° C to + 70° C

Weight kg (lbs) 19.1 (42.1) 16.7 (36.8)

* According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat flange.

NOTE When the TPS-compact has been stored at a tempera-ture less than 5°C, wait until the TPS-compact has rea-ched the above mentioned temperature.


58/74 87-901-010-01

TPS-COMPACT OUTLINE The following figure shows the TPS-compact outline. Dimensions are in mm.

PRESSURE

x10Pa

mBar

Torr

Pa

mBar

Torr

PRESSURE

x10

TPS-compactequipped with TV301

0

50

100

150

200

250

0,0001 0,001 0,01 0,1

Inlet Pressure (mbar)

Pum

ping

spe

ed (l

/s)

Graph of pumping speed vs inlet pressure


59/74 87-901-010-01

TPS-compactequipped with TV81M

0

10

20

30

40

50

60

70

0,0001 0,001 0,01 0,1

Inlet Pressure (mbar)

Pum

ping

spe

ed (l

/s)

Graph of pumping speed vs inlet pressure

TPS-compactTV301/TV81M - 14lt Pump Down

1,E-06

1,E-05

1,E-04

1,E-03

1,E-02

1,E-01

1,E+00

1,E+01

1,E+02

1,E+03

0 60 120 180 240 300 360 420 480 540 600 660 720 780

Time [sec]

Pres

sure

[mba

r]

TV301 TV81M

Graph of pressure vs time (with a pump down volume of 1 litre)


60/74 87-901-010-01

INLET SCREEN INSTALLATION

The inlet screens mod. 969-9300, 969-9309, 969-9302 and 969-9303 prevent the blades of the pump from being damaged by debris greater than 0.7 mm diameter.

The inlet screen, however, does reduce the pump-ing speed by about 10%.

The inlet screen is fitted in the upper part of the pump, as shown in the figure.

The screen can be mounted on each pump.

The screen can be removed as shown in the fol-lowing figure.

The following figure shows the overall flange di-mensions with the protection screen fitted on pump with ISO flange and pump with CFF flange (dimensions are in inches [mm]).

0.24

[6.0

0]

0.35

[9.0

0]

2.76 [70.00]

2.09 [53.00]

ISO 63 / CFF 2.75 / CFF 4.5

KF 40

0.1

[2.5

0]

DIMENSIONS: inches [mm]

CFF 8" ISO 160

ISO 100CFF 6"

0.67

[17.

00]

0.47

[12.

00]


61/74 87-901-010-01

HIGH VACUUM FLANGE CONNECTION To connect the Turbo pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure.

Then fix the two flanges with the clamps or claws as shown in the figure.

For ConFlat flange connections we recommend using Varian hardware.

To facilitate assembly and dismantling, apply Fel-pro C-100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange.

Attach the units and tighten each one in turn. Re-peat the sequential tightening until the flange faces meet.

CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock.

HIGH VACUUM FLANGE CONNECTION CONFIGURATIONS


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INTERCONNECTIONS

Input power connector The following figure show the input power connec-tor.

Bipolarswitch

IEC320connector

Fuses

LineGND

Line

P3 – Vent

Vent Connector

This is a dedicated 24 Vdc connector to control the optional vent valve (available on request).

The vent valve can be driven by controller auto-matically or by serial line.


63/74 87-901-010-01

Vent Valve Diagram in “Auto” mode

Gauge Connector TPS-compact is equipped with new generation gauge reading card able to drive/read a Varian “EyeSys Mini-IMG” gauge or a Varian Full Range Gauge FRG-700.

The EyeSys Mini-IMG is a vacuum measurement instrument based on the inverted magnetron ion gauge design (see orderable parts table).

The gauge pressure operation range goes from 6.6x10-3 mbar [5x10-3 Torr] to 6.6x10-9 mbar [5x10-9 Torr] and its operation temperature range goes from 0°C to 50°C [32°-122°F].

The FRG-700 Full Range Gauge is a combined technologies gauge (Inverted Magnetron plus Pi-rani Gauge).

FRG-700 measure from 5x10-9 mbar to atmos-phere (3.8x10-9 Torr to atmosphere) and its tem-perature range goes from 5°C to 55°C [41°-131°F].

Pressure data is available on three independent reading channels:

1. On-board display (data expressed in mbar, Torr or Pa) – (see Pressure Display Module picture)

2. Serial communication line (Win 224)

3. Analogical output.

Pressure gauge can be connected/disconnected from the TPS-compact during normal operation.

Gauge Connector

NOTE The Mini-IMG gauge is intended for high vacuum use, so with pressure above 50 mTorr the signal is misinterpreted and a “false” pressure is displayed. Use a transition gauge to understand if the reading is really under 50 mTorr or not.

Pressure Display Module

x10

PRESSURE

Pa

mBar

Torr

Pressure display module


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EyeSys Mini-IMG gauge dimension

FRG-700 gauge dimension

J5 – IN-OUT

This connector carries all the input and output sig-nals to remote control the TPS-compact.

It is a 15-pins D type connector; the available sig-nals are detailed in the table, the following para-graphs describe the signal characteristics and use.

PIN N. SIGNAL NAME INPUT/OUTPUT

1 START/STOP (+) IN

2 START/STOP (-) IN

3 INTERLOCK (+) IN

4 INTERLOCK (-) IN

5 SPEED SETTING (+) IN

6 SPEED SETTING (-) IN

7 SOFT START (+) IN

8 SOFT START (-) IN

9 +24 Vdc Imax = 30 mA OUT

10 NORMAL OUTPUT (relay)

Vmax = 125V Imax = 200 mA

OUT

11 PROGRAMMABLE SET POINT OUT

12 NORMAL OUTPUT OUT

13 FAULT OUTPUT OUT

14 PROGRAMMABLE ANALOG SIGNAL (+)

OUT

15 • GROUND

• PROGRAMMABLE ANALOG SIGNAL (-)

OUT

Signal description START/STOP: input signal to start or stop the pump. Without the supplied cover connector the turbomolecular pump automatically starts, if you want to stop the turbo-pump from outside, you have to connect the START/STOP (+) signal to the +24 Vdc pin and the START/STOP (-) signal to the GROUND pin (this is the default configuration of the cover connector).

INTERLOCK: input signal to control the pump ro-tation. With the supplied cover connector the IN-TERLOCK (+) signal is connected to the +24 Vdc pin and the INTERLOCK (-) signal to the GROUND pin; in this condition the pump is stopped.

SOFT START: this input is used to provide a "soft start" to the pump; in this condition the ramp-up time could be up to 20 min.

SPEED SETTING: PWM input signal to set the pump speed. The PWM signal characteristics must be the following: • frequency: 100 Hz +/-20%


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• amplitude: 24 V max • duty cycle range: from 25% to 75% • corresponding to a pump speed from 1100Hz

to 1350Hz (see the following diagram).

1050

1100

1150

1200

1250

1300

1350

1400

20 30 40 50 60 70 80

Duty Cycle [%]

Exci

tatio

n Fr

eque

ncy

[Hz]

PROGRAMMABLE ANALOG SIGNAL: this out-put signal is a voltage (from 0 to 10 Vdc) propor-tional to a reference quantity (frequency or power or Temperature or Pressure) set by the user. The default setting is the frequency (see the following example diagram).

Output: Frequency setting

0

150

300

450

600

750

900

1050

1200

1350

0 1 2 3 4 5 6 7 8 9 10

Voltage (V)

Freq

uenc

y (H

z)

Output: Power setting

0

10

20

30

40

50

60

70

80

90

100

0 1 2 3 4 5 6 7 8 9 10

Voltage (V)

Pow

er (W

)

Output: Temperature setting

0

10

20

30

40

50

60

70

80

90

100

0 1 2 3 4 5 6 7 8 9 10

Voltage (V)

Tem

pera

ture

(°C

)

Output: Pressure setting

1,0E-09

1,0E-08

1,0E-07

1,0E-06

1,0E-05

1,0E-04

1,0E-03

1,0E-02

1,0E-01

0 1 2 3 4 5 6 7 8 9 10

Voltage (V)

Pres

sure

(Tor

r)

FAULT: this open collector output signal is ON when a system fault condition is detected.

PROGRAMMABLE SET POINT: this open collec-tor output signal is enabled when the reference quantity chosen (frequency, power or time or pres-sure or normal) is higher than the set threshold. The signal can be "high level active" (that is the output is normally OFF and becomes ON when ac-tivated), or "low level active" (that is the output is normally ON and becomes OFF when activated). Moreover, if the reference quantity is the frequency or the power or pressure drawn, it is possible to set the hysteresis (in % of the threshold value) to avoid bouncing. For example: − reference quantity: frequency − threshold: 867 Hz − hysteresis: 2% − activation type: "high level"


66/74 87-901-010-01

It is possible to delay the set point checking for a programmable delay time. The PROGRAMMABLE SET POINT signal has the following default settings: − reference quantity: frequency − thereshold: 867 Hz − hysteresis: 2% − activation type: high level − delay time: 0 second

NOTE The Navigator Software (optional) allows the op-erator to set all the programmable feature.

How to connect the open collector input of the controller Here below there are the typical connections of the open collector input of TPS-compact to an external system. Two cases are considered:

1. the customer supplies the 24 Vdc

2. the customer does not supply the 24 Vdc.

Please note that on the connector a 24 Vdc, 30 mA voltage, a GROUND signal and the open col-lector pin are available.

Case 1

Case 2 with relay utilisation

Case 2 with transistor utilisation


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How to connect the outputs of the controller The following figure shows a typical logic output connection (relay coil) but any other device may be connected e.g. a LED, a computer, etc., and the related simplified circuit of the controller. The fig-ure example refers to the programmable set point signal on pins 11 and 9.

Typical output connection 1

J6 – Serial

This is a 9 pin D-type serial input/output connector to control via an RS 232 or RS 485 connection the TPS-compact.

PIN N. SIGNAL NAME

1 +5 V (OUT)

2 TX (RS232)

3 RX (RS232)

4 Not used

5 GND

6 A + (RS485)

7 Not used

8 B - (RS485)

9 Not used

A serial communication kit with a serial cable and the Navigation Software is available (optional).

RS 232/RS 485 COMMUNICATION DESCRIPTION Both the RS 232 and the RS 485 interfaces are available on the connector J6. The communication protocol is the same (see the structure below), but only the RS 485 manages the address field. Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the soft-ware.

Communication Format • 8 data bit

• no parity

• 1 stop bit

• baud rate: 600/1200/2400/4800/9600 pro-grammable

5

2

3

5

2

3

Connector examples:

PC CNTTPS-COMPACT

RS 232 Connection

PC HOST(0)

TPS-compact(1)

A+

A+

A+6

6

B-

B-

B-8

8

Gnd

Gnd

Gnd5

5

120 ½ W

Ω

120 ½ W

Ω

TPS-compact(2)

RS 485 Connection


68/74 87-901-010-01

The communication port mating connector is sup-plied with the RS232 PCB (AMP/Cannon or equivalent 15-pin “D” type male connector).

For example, the Transmit data signal from con-troller (pin 2) must be connected to the host com-puter’s receive data line (pin 2) and vice versa. Consult the host computer’s instruction manual for its serial port connections.

NOTE Varian cannot guarantee compliance with FCC regulations for radiated emissions unless all exter-nal wiring is shielded, with the shield being termi-nated to the metal shround on the 0-subconnector. The cable should be secured to the connector with screws.

Serial Communication Descriptions This unit can communicate by two different proto-col: − protocol (old system) “letter” − “Window” protocol (new system). These two protocols can be used as well with 232 or 485 media.

NOTE Please use “Window” protocol for new develop-ment.

WINDOW PROTOCOL

Description

Communication Format • 8 data bit

• no parity

• 1 stop bit

• baud rate: 600/1200/2400/4800/9600 pro-grammable

Communication Protocol The communication protocol is a MASTER/SLAVE type where: • Host = MASTER

• Controller = SLAVE

The communication is performed in the following way: 1. the host (MASTER) send a MESSAGE + CRC

to the controller (SLAVE);

2. the controller answer with an ANSWER + CRC to the host.

The MESSAGE is a string with the following format: <STX>+<ADDR>+<WIN>+<COM>+<DATA>+<ETX>+<CRC>

where:

NOTE When a data is indicated between two quotes (‘...’) it means that the indicated data is the correspond-ing ASCII character. <STX> (Start of transmission) = 0x02 − <ADDR> (Unit address) = 0x80 (for RS 232)

<ADDR> (Unit address) = 0x80 + device num-ber (0 to 31) (for RS 485)

− <WIN> (Window) = a string of 3 numeric char-acter indicating the window number (from ‘000’ to ‘999’); for the meaning of each window see the relevant paragraph.

− <COM> (Command) = 0x30 to read the window, 0x31 to write into the window

− <DATA> = an alphanumeric ASCII string with the data to be written into the window. In case of a reading command this field is not present. The field length is variable according to the data type as per the following table:

DATA TYPE FIELD LENGTH

VALID CHARACTERS

Logic (L) 1 ‘0’ = OFF ‘1’ = ON

Numeric (N) 6 ‘-‘, ‘.’, ‘0’ . . . ‘9’ right justified with ‘0’

Alphanumeric (A) 10 from blank to ‘_’ (ASCII)

− <ETX> (End of transmission) = 0x03 − <CRC> = XOR of all characters subsequent to

<STX> and including the <ETX> terminator. The value is hexadecimal coded and indicated by two ASCII character.

The addressed SLAVE will respond with an AN-SWER whose structure depends from the MESSAGE type. When the MESSAGE is a reading command, the SLAVE will respond transmitting a string with the same structure of the MESSAGE.

NOTE Using the RS 485 interface, the message structure remains identical to the one used for the RS 232 interface, the only difference being that the value assigned to the ADDRESS <ADDR>.


69/74 87-901-010-01

The controller can answer with the following response types;

RESPONSE TYPE RESPONSE LENGTH

RESPONSE VALUE DESCRIPTION

Logic 1 byte - After a read instruction of a logic window

Numeric 6 bytes - After a read instruction of a numeric window

Alphanumeric 10 bytes - After a read instruction of an alphanumeric window

ACK 1 byte (0x6) The command execution has been successfully completed

NACK 1 byte (0x15) The command execution has been failed

Unknown Window 1 byte (0x32) The specified window in the command is not a valid window

Data Type Error 1 byte (0x33) The data type specified in the command (Logic, Numeric or Alphanumeric) is not accorded with the specified Window

Out of Range 1 byte (0x34) The value expressed during a write command is out of range value of the specified window

Win Disabled 1 byte (0x35) The specified window is Read Only or temporarily disabled (for example) you can’t write the Soft Start when the Pump is running)

Examples:

Command: START Source: PC Destination: Controller

02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC

Source: Controller Destination: PC

02 80 06 03 38 35 STX ADDR ACK ETX CRC

Command: STOP Source: PC Destination: Controller

02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC



Command: SOFT-START (ON) Source: PC Destination: Controller

02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC



Command: SOFT-START (OFF) Source: PC Destination: Controller

02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC



Command: READ PUMP STATUS Source: PC Destination: Controller (with address = 3)

02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC

Source: Controller (with address = 3 in stop status) Destination: PC

02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA (STATUS) ETX CRC

Command: READ SERIAL TYPE Source: PC Destination: Controller (with address = 3 in 485 mode)

02 83 35 30 34 30 03 38 31 STX ADDR WINDOW RD ETX CRC


02 83 35 30 34 30 31 03 42 30 STX ADDR WINDOW RD DATA ETX CRC


70/74 87-901-010-01

Window Meanings N. Read/

Write Data Type

Description Admitted Values

000 R/W L Start/Stop (in remote/ mode the win-dow is a read only)

Start = 1 Stop = 0

001 R/W L Low Speed Activation (in remote/ mode the window is a read only)

No = 0 Yes = 1 (default = 0)

008 R/W L Remote or Serial con-figuration

Remote = 1 Serial = 0

(default = 1)

100 R/W L Soft Start (write only in Stop condition)

YES = 1 NO = 0

101 R/W N R1 Set Point type

0 = Frequency 1 = Power 2 = Time 3 = Normal 4 =Pressure (default = 0)

102 R/W N R1 Set Point valve (expressed in Hz, W or s)

(default = 867)

103 R/W N Set Point de-lay: time be-tween the pump start and the set point check (sec-onds)

0 to 999999

(default = 0)

104 R/W L Set Point sig-nal activation type: the signal can be "high level active" or "low level ac-tive"

0 = high level ac-tive 1 = low level ac-tive

(default = 0)

105 R/W N Set point hysteresis (in % of value)

0 to 100

(default = 2)

106 R/W L Water cooling (write only in stop)

0 = NO 1 = YES

107 R/W L Active Stop (write only in stop)

0 = NO 1 = YES

(default = 0)

108 R/W N Baud rate 600 = 0 1200 = 1 2400 = 2 4800 = 3 9600 = 4 (default = 4)

109 W L Pump life/ cycle time/ cycle number reset

To reset write ‘1’

110 R/W L Interlock type (default = 1)

Impulse = 0 Continuous = 1

N. Read/ Write

DataType


111 R/W L Analog out-put type: output volt-age signal proportional to frequency or power

0 = frequency 1 = power

(default = 1)

2 = Pump temperature 3 = Pressure

117 R/W N Low Speed frequency (Hz)

1100 to “Maxi-mum rotational frequency” (win 120) (default = 1100)

120 R/W N Rotational frequency setting (Hz)

1100 to 1350 (default = 1350)

122 R/W L Set vent valve on/off

0 = Closed 1 = Open

(default = 1)

125 R/W L Set the vent valve operation

Automatic = 0 (see note 1.)

On command = 1 (see note 2.)

126 R/W N Vent valve opening delay (expressed in 0.2 sec)

0 to 65535

(corresponding to 0 to 13107 sec)

(default = 15)

147 R/W N Vent open time See “vent connector” paragraph

0 = infinite 1 bit = 0.2 sec

1 to 65535

155 R N Power limit applied Read the maximum allowable power

watt

157 R/W N Gas load type Select the gas load to the pump

Ø = N2 1 = Ar

161 R/W N Pressure Reading Con-nection Factor Table A1 Ap-pendix A Eye-Sys Manual

0 to 10 0 = 0 10 = 1 = N2

162 R/W A R1 Set Point Pressure Valve Valid if Win. 101 = 4 Format X.X E. XX Where X = 0 to 9 s = + or -

163 R/W N Pressure unit of measure

0 = mBar 1 = Pa 2 = Torr


71/74 87-901-010-01

N. Read/ Write

Data Type


167 R/W A Stop speed reading Activates / deactivates the pump speed read-ing after Stop command

0 = disable 1 = enable

(default = 0)

200 R N Pump current in mA dc

201 R N Pump volt-age in Vdc

216 R N Controller Air Temperature (°C).

0 to 70

224 R A Pressure reading Format = X.X E XX

226 R N Rotation Fre-quency (rpm)

300 R N Cycle time in minutes (ze-roed by the reset com-mand)

0 to 999999

301 R N Cycle num-ber (zeroed by the reset command)

0 to 9999

302 R N Pump life in hours (ze-roed by the reset com-mand)

0 to 999999

310 to

347

Reserved to Varian service

358 R/W N Tip-seal life (R) Tip-seal life reset (W)

0 = reset

400 R A CRC EPROM (QE)

QE8XXXX (where “XXXX” are variable)

401 R A Boot CRC (BL)

BL2XXXX (where “XXXX” are variable)

402 R A CRC Param. (PA)

PA8XXXX (where “XXXX” are variable)

404 R A CRC Pa-rameter structure

"XXXX"

406 R A Program List-ing Code

"XXXXXXXXXX"

407 R A Parameter Listing Code

"XXXXXXXXXX"

500 Reserved to Varian service

N. Read/ Write

DataType


503 R/W N RS 485 ad-dress

0 to 31

(default = 0)

504 R/W L Serial type select

0 = RS 232 1 = RS 485

(default = 0)

NOTES 1. Automatic means that when the controller

stops, the vent valve is opened with a delay defined by window n. 126; when the controller starts, the vent valve is immediately closed.

2. On command means that the vent valve is opened or closed by means of window n. 122.

3. These commands remove the pump motor supply for a short time. If they are used con-tinuously, they can cause the pump stopping.

7 6 5 4 3 2 1 0

TOO HIGH LOAD NO CONNECTION

SHORT CIRCUIT PUMP OVERTEMP.

OVERVOLTAGE CONTROLL. OVERTEMP.

Window N. 206 Bit Description

SERVICE OPTIONS Varian pumping systems will provide many years of trouble-free operation if the maintenance proce-dures are observed. Pumping System cleaning and internal scroll pump tip seal replacement are recommended when Pumping System TMP adsorbed current (with blanked inlet flange) has risen to an unacceptably high level (>500mA) or when the message “TIP-SEAL SERV” appears on the TPS-compact front side display. The warning message appears after 5000h of op-eration. If your TPS-compact exhibits humming or grinding noises from the scroll pump, a major overhaul should be done by Varian Vacuum Technologies. Advance exchange TPS-compact are available to minimize downtime. The parts needed for Tip-Seal replacement on the internal scroll pump are available in the kit de-scribed in Orderable parts Table. This kit contains seals and O-rings, and can be obtained from your Varian dealer.


72/74 87-901-010-01

Cleaning

Exterior The exterior surfaces of the TPS-compact may be cleaned with mild detergents only.

Interior Internal dry scroll pump do not contain fluid for the cleansing of accumulated dust and debris. Run the pump periodically at atmosphere for a minute or two to flush it out.

Tip-Seal Replacement The parts and tools required to replace Tip-Seals are listed below: - Tip-Seal Replacement Kit P/N IDP3TS - 4 mm Allen wrench - Razor blade or side-cutting pliers - Compressed air (optional)

Tip-Seal replacement - Figure A

Tip-Seal replacement - Figure B

Tip-Seal replacement - Figure C

To remove the worn tip-seals: Disconnect the TPS-compact from electrical power. Unlock the scroll pump support by unscrewing the screws (A) (see the Tip-Seal replacement - Fig-ure A) 1. Lift the TPS-compact in order to access the

Scroll pump site (youll hear a click noise as soon as the upper part of TPS-compact is locked).

2. Remove (4) M5 socket head bolts (B).

3. Remove the outboard housing axially off the frame (C).

4. Remove and discard the worn tip seals (D) and the main O-ring.

5. If compressed air is available, blow any re-maining seal debris off the scroll parts. If seal debris is attached to the sides, use a razor or Exacto knife to scrape the debris off.

To install the new seals and O-rings: 1. Unpack the Tip-Seals.

Two tip seals are provided in the kit; one fits the orbiting scroll and the other fits the out-board housing scroll.

2. Install the correct tip seal into the groove of the orbiting scroll by:

a. Facing the white plastic surface upwards and inserting the foam backing into the groove. Start from the center and work outward.

b. Cutting the tip seal off about 1/8" (3 mm) from the outer end of the groove.

3. Install the correct tip seal into the groove of the outboard housing scroll as in step 3.

4. Place the new main O-ring into the groove in the frame.

5. Ensure that the groove is clean.

6. Ensure the sealing face of the outboard hous-ing is clean. Carefully replace the outboard housing by lining up the locating pins. Ensure the tip seal has not fallen out of its groove.

7. Reinstall (4) M5 bolts (B) and torque the (4) M5 bolts to 5.6 N-m (50 in-lb).

8. Unlock the upper part of TPS-compact by slid-ing the small lever you can find on the bottom side of TPS-compact.

9. Reconnect the TPS-compact to the electrical power mains.

10. Disable the TIP-SEAL SERV warning mes-sage by serial interface. To disable the Tip-seal Service message you have to reset the Tip-seal hour-meter (Win 358). Write a 0 on the window 358. The message will be showed


73/74 87-901-010-01

again after 5000 h of operation. To check the Tip-seal life you have just to read the Win 358.

WARNING! If dangerous gases were being pumped, flush the pump with air or inert gas for at least 10 minutes prior to disassembly.

To test the pumping system: 1. Run the TPS-compact for about 5 seconds.

Verify that the front fan is running. If you hear loud noises from the Scroll pump this indi-

cates that the tip seal or main O-ring are pos-sibly out of place.

2. Disassemble and repair as necessary.

3. The pump is now ready to return to service.

NOTE Newly installed tip seals may require several hours of run time to seat properly and enable the pump to meet speed and base pressure specifications.

Troubleshooting Chart

Problem Possible Causes Corrective Actions Scroll Pump motor thermal protec-tor open

Allow motor to cool. Identify cause of overload. TMP doesn’t reach NORMAL OPERATION Vacuum system leak Locate and repair leak.

Excessive voltage drop Check size and length of cable. System will not start Fuses burnt-out Check fuses and if necessary replace.

Vacuum system leak Locate and repair leak. Water in TPS-compact Flush the system with air or dry nitrogen. Solvent in pump Flush the system with air or dry nitrogen. Install

trap or filter. Scroll Pump seals worn out Replace tip seals.

Poor ultimate pressure

Poor conductance to TPS-compact Replumb with shorter and/or larger diameter tub-ing.

Scroll pump overheated Check ventilation to TPS-compact. Check ambient temperature.

Hammering noise

Debris in Scroll pump Flush the TPS-compact. Disassemble pump and inspect.

Internal Scroll Pump runs inter-mittently

Motor thermal protector is cycling open and closed.*

Allow the scroll motor to cool. Identify the cause of the overload.

* The internal Scroll Pump is equipped with an auto-reset thermal motor protector. This protector automati-cally shuts down the pump when it detects an overload condition, and automatically restarts the pump when the motor has cooled to within an acceptable temperature range.


74/74 87-901-010-01

ORDERABLE PARTS

TPS-compact TV 81-M KF40

TV 81-MCFF 2.75"

TV 81-MISO 63

TV 81-MCFF 4.5"

TV 301 ISO 100

TV 301 CFF 6"

TV 301 ISO 160

TV 301 CFF 8"

120 V 969-8217 969-8218 969-8219 969-8220 969-8221 969-8222 969-8223 969-8224

220 V 969-8225 969-8226 969-8227 969-8228 969-8229 969-8230 969-8231 969-8232

Accessories

DIY EyesSys Gauge Kit 969-9185 969-9196 969-9186 969-9187 969-9188 969-9197 969-9189 969-9198

DIY Full Range Gauge Kit 969-9190 969-9199 969-9192 969-9193 969-9194 969-9201 969-9195 969-9202

Wheels accessory kit 969-8233 969-8233 969-8233 969-8233 969-8233 969-8233 969-8233 969-8233

US Power cord [5 m] 969-8452 969-8452 969-8452 969-8452 969-8452 969-8452 969-8452 969-8452

EU Power cord [5 m] 969-8450 969-8450 969-8450 969-8450 969-8450 969-8450 969-8450 969-8450

UK Power cord [5 m] 969-8451 969-8451 969-8451 969-8451 969-8451 969-8451 969-8451 969-8451

US Power cord [2 m] 969-9397 969-9397 969-9397 969-9397 969-9397 969-9397 969-9397 969-9397

EU Power cord [2 m] 969-9396 969-9396 969-9396 969-9396 969-9396 969-9396 969-9396 969-9396

UK Power cord [2 m] 969-9398 969-9398 969-9398 969-9398 969-9398 969-9398 969-9398 969-9398

Vibration damper - - - - 969-9340 969-9376 969-9344 969-9334 969-9345 969-9335

Inlet screen 969-9309 - - 969-9300 969-9300 969-9302 969-9302 969-9304 969-9304

FRG-700 1.5 m cable 969-9959 969-9959 969-9959 969-9959 969-9959 969-9959 969-9959 969-9959

FRG-700 3 m cable 969-9960 969-9960 969-9960 969-9960 969-9960 969-9960 969-9960 969-9960

FRG-700 5 m cable 969-9961 969-9961 969-9961 969-9961 969-9961 969-9961 969-9961 969-9961

EyeSys Mini-IMG cable [1 m] 969-9943 969-9943 969-9943 969-9943 969-9943 969-9943 969-9943 969-9943

EyeSys Mini-IMG ext. cable 969-9944 969-9944 969-9944 969-9944 969-9944 969-9944 969-9944 969-9944

Serial cable and T-Plus SW 969-9883 969-9883 969-9883 969-9883 969-9883 969-9883 969-9883 969-9883

Tip-seal replacement kit IDP3TS IDP3TS IDP3TS IDP3TS IDP3TS IDP3TS IDP3TS IDP3TS

For a complete overview of Varian's extensive product lines, please refer to the Varian catalog.

Request for Return

1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out,

signed and returned to Varian Customer Service. 2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN). 3. The customer is expected to take the following actions to ensure the Safety of workers at Varian: (a) Drain any oils or

other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).

4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you. North and South America

Varian Vacuum Technologies 121 Hartwell Ave

Lexington, MA 02421 Phone : +1 781 8617200

Fax: +1 781 8609252

Europe and Middle East Varian SpA

Via Flli Varian 54 10040 Leini (TO) – ITALY

Phone: +39 011 9979111 Fax: +39 011 9979330

Asia and ROW Varian Vacuum Technologies

Local Office

CUSTOMER INFORMATION

Company name: ..………………….……..……………….………………………………..……………………...…………..…. Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…....

Fax: …………………………….…...…..…… E-Mail: ..……………………..…………..…..…..….. Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......………..

Europe only: VAT reg. Number: ………………..……………... USA only: Taxable Non-taxable

Customer Ship To: ………………………….……… Customer Bill To: …………………..……………... ……………..…………………... ..………………………………... ………………..………………... ..………………………………...

PRODUCT IDENTIFICATION Product Description Varian P/N Varian S/N Purchase Reference

TYPE OF RETURN (check appropriate box) Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other ……………….

HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.

The equipment listed above (check one): HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that

equipment was exposed to, check all categories that apply: Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.

.……………………………………………………………………………………………………………………..

Print Name: …………………………………. Customer Authorized Signature: ……………...…………………….

Print Title: …………………………………... Date: ..…../..…../……

NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.

Do not write below this line Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..

Request for Return

FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS

Does not start Noise Vertical Power: Rotational Speed: Does not spin freely Vibrations Horizontal Current: Inlet Pressure: Does not reach full speed Leak Upside-down Temp 1: Foreline Pressure: Mechanical Contact Overtemperature Other: Temp 2: Purge flow: Cooling defective …………………. OPERATION TIME:

TURBOCONTROLLER ERROR MESSAGE: ION PUMPS/CONTROLLERS VALVES/COMPONENTS

Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other

Customer application: Customer application: LEAK DETECTORS INSTRUMENTS

Cannot calibrate No zero/high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other

Customer application: Customer application: PRIMARY PUMPS DIFFUSION PUMPS

Pump doesn’t start Noisy pump (describe) Heater failure Electrical problem Doesn’t reach vacuum Over temperature Doesn’t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other

Customer application: Customer application:

FAILURE DESCRIPTION (Please describe in detail the nature of the malfunction to assist us in performing failure analysis):

NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese. REMARQUE : Sur demande ce document est également disponible en allemand, italien et français. HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.

Sales and Service Offices

France and Benelux Varian s.a. 7 Avenue des Tropiques Z.A. de Courtaboeuf - B.P. 12 Les Ulis cedex (Orsay) 91941 France Tel: (33) 1 69 86 38 84 Fax: (33) 1 69 86 29 88 From Benelux Tel: (31) 118 67 15 70 From Benelux Fax: (31) 118 67 15 69 Canada Central coordination through: Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free # 1 (800) 882 7426 China Varian Technologies - Beijing Rm 1648 Central Tower South Wing Beijing Junefield Plaza No. 10 XuanWuMenWai Street Beijing 100052 P.R. China Tel: (86) 10 63108550 Fax: (86) 10 63100141 Toll Free: 800 820 6556 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel: (49) 6151 703 353 Fax: (49) 6151 703 302 India Varian India PVT LTD 101-108, 1st Floor 1010 Competent House 7, Nangal Raya Business Centre New Delhi 110 046 India Tel: (91) 11 28521171 Fax: (91) 11 28521173 Italy Varian Inc. Vacuum Technologies Via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 111 Fax: (39) 011 997 9 350 03/06

Japan Varian Vacuum Technologies Sumitomo Shibaura Building, 8th Floor 4-16-36 Shibaura Minato-ku, Tokyo 108 Japan Tel: (81) 3 5232 1253 Fax: (81) 3 5232 1263 Toll Free: 0120 655 040

Korea Varian Technologies Korea, Ltd Shinsa 2nd Bldg. 2F 966-5 Daechi-dong Kangnam-gu, Seoul Korea 135-280 Tel: (82) 2 3452 2452 Fax: (82) 2 3452 2451 Toll Free: 080 222 2452 Mexico Varian, S. de R.L. de C.V. Concepcion Beistegui No 109 Col Del Valle C.P. 03100 Mexico, D.F. Tel: (52) 5 523 9465 Fax: (52) 5 523 9472 Taiwan Varian Technologies Asia Ltd. 14F-6, No.77, Hsin Tai Wu Rd., Sec. 1 Hsi chih, Taipei Hsien Taiwan, R.O.C. Tel: (886) 2 2698 9555 Fax: (886) 2 2698 9678 Toll Free: 0800 051342

UK and Ireland Varian Ltd. 6 Mead Road Oxford Industrial Park - Yarnton Oxford OX5 1QU - England Tel: (44) 1865 291570 Fax: (44) 1865 291571 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437

Other Countries Varian Inc. Vacuum Technologies Via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 111 Fax: (39) 011 997 9 350 Customer Support & Service: North America Toll-Free: 1 800 882 7426 [email protected] Europe Tel: 00 800 234 234 00 [email protected] China Toll-Free: 800 820 8266 [email protected] Japan Toll-Free: 0120 655 040 [email protected] Korea Toll-Free: 080 222 2452 [email protected] Taiwan Toll-Free: 0 800 051 342 [email protected] Worldwide Web Site, Catalog and Order On-line: www.varianinc.com Representative in most countries

Varian, Turbomolecular Pump, TPS-compact Models Models: 969-8217 969-8218 ... SERVICE OPTIONS ......

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Transcript of Varian, Turbomolecular Pump, TPS-compact Models Models: 969-8217 969-8218 ... SERVICE OPTIONS ......