Valves for Ultra High Purity Gases - MHz...

Va l v e s f o r U l t r a H i g h P u r i t y G a s e s

Product Catalogue

KITZ SCT Corporation

�

KITZ SCT Valve Line-Up is essential for �semiconductor production processes.

■Major Production Process

Selecting and standardizing a highly clean material sharply reduced non-metal particles and outgases. Further, production of vacuum double-solvent material that is highly resistant to corrosion under extremely low Mn condition, and Hasteroy C-22 material are even made possible.

Carefully selected materials

Using state-of-the art machining center, and fully automatic, high precision, high-speed lathe, a precision machining process is established. With high precision locating, automatic dimensional calculation and automatic compensation, an unattended, labor-reduced production process is made possible.

High Precision Machining Process

Using the KITZ SCT unique technology for super cleanness, a clean passive treatment by means of special electropolishing, etc. is applied to the smooth cutting surface before polishing process. This enables to forms a highly corrosion-resistant and super clean surface structure.

Cleaning Process of the Surface in Contact with Gases

Clean welding method is made available by using a high speed, full-automatic welding machine. Using a sealed inner and outer manostat gauge in the clean room, inner pressure is controlled with hyper pure inert-gas so that the totally clean welding technology can fully contribute to realization of the flat bead condition, etc..

Clean Welding

An automatic processing line including ultra pure hot water with resistivity of more than 18MΩcm, vacuum drying, and baking, etc. has been established in the clean room. The best possible cleaning condition is achieved here prior to the assembly.

Ultra Precision Cleaning

Production staffs fully acquainted with the special assembling method are dedicated to the assembly process in the clean room.

Assembly in the Clean Room

Packing is carried out at the specific booth that is locally and intensively controlled to maintain a clean condition in the clean room. In this way, mixing-in of foreign particles at the time of packing is extensively reduced to its minimum.

Clean Packing

1

INDEX

To furnish a gas supply system at the use-point with high purity and high reliability is essential for semiconductor production.�KITZ SCT Super Clean Valves (SCV) are the products that can satisfy the exact needs of users, and are highly appreciated because of its high reliability and durability. These excellent features include the improved gas replacement due to the minimized inner capacity, improved degas behavior and preventing the expansion of plastic material due to the minimized seat surface that comes in contact with gas, and improved valve operation speed due to the use of aluminum for the piston.�KITZ SCT keeps supplying various products including its high-grade model, [KD4 Series] to match different applications by utilizing its advanced technologies and plenty of know-how.

■�　 �　 �　�

■�　 �

■�　 �

■�　　�

■�　 �

■�　 �

■�　 �　 �

■�　 �

■�　 �

■�　 �

■�　 �　 �

■�■�

�

�

�

�

�

�

�

�

�

�

�

�

�

■KD (Diaphragm Valve) �　 Strait Type / Shunt Type�　 Double-Valve 3-Way Block Type / 2-Step Type�　 High Temp.(250℃)-Compatible Type�

■SD (Diaphragm Valve)�　 Lightweight Diaphragm Valve�

■WD (Diaphragm Valve)�　 Diaphragm Valve for Liquid Gases�

■RD (Diaphragm Valve)�　　High Pressure Diaphragm Valve�

■KCD (Diaphragm Valve)�　 Straight Type / Double-Port 3-Way Block Type�

■IC�　 Check Valve�

■IB (Bellows Valve)�　 Straight Type / Variable Flow Variac Type�　 Needle Type�

■SB(Bellows Valve)�　 Straight Type�

■IBB (Bellows Valve)�　 Straight Type�

■IBC・IBD・IBE (Bellows Valve)�　 Straight Type�

■TD/TCD・TD Series�　 B-SEAL IGS Valves/C-SEAL IGS Valves�　 Diaphragm Valve�

■Products Specifications�■Treatment an operating manual��

・・・・・・2

・・・・・・・・・・・・11

・・・・・・・13

・・・・・・・・15

・・・21

・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・24

・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・25

・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・33

・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・31

・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・35

・・・・・・・・・・・・・・・・・・・・・・・・・・・37

・・・・41

・・・・45

Note:�1. Delivered goods may look different from the photo listed in this brochure.�2. Contact our sales representative for special size and shape.�3. Specifications are subject to change without prior notice due to improvement of the product.�4. The standard handle color is blue. For other handle colors, please specify in the product code list.

KD(Diaphragm Valve)�

Strait Type / Branch Type�2-Valve 3-Way Block Type / 2-Step Type�High Temp.(250℃)-Compatible Type

KD Series is a product line of compactly designed diaphragm valves. Due to the very high Cv value, ultimately reduced inner capacity of the chamber in contact with gas, combined with newly introduced aluminum piston and actuator structure of new design, a reliable valve with accelerated open/close speed is made possible.

2

■Major Specifications ■Product GradeType (Size)�Cv Value�

Internal Volume�Max.Working Pressure�

��

Max.Working Temp��

Operating Pressure�Internal Leakage Allowance�External Leakage Allowance�

Cycle Life

��

0.98MPa（G.）（142psig）�PCTFE：-10～42℃（14～108F）�PFA: Manual Valve-10～150℃,�

Pneumatic Valve-10～120℃(500,000 repeats at 150℃, actual test)�PI：-10～150℃�Metal：-10～200℃�

0.4～0.7MPa（G.）（60～100psig）��

KD2（1/8"）�0.05�0.22cm3

KD4（1/4"）�0.27�1.2cm3�

�

�

�

�

�

�

�

≦3×10-10Pa・m3/sec（≦3×10-9atm cc/sec）�≦3×10-12Pa・m3/sec（≦3×10-11atm cc/sec）�Pneumatic Valve 2 mil. repeats (N2 charged, own test) � Manual 100,000 repeats (N2 charged, own test)

KD8（1/2"）�

0.7�6.6cm3

KD12（3/4"）�2.4�

34.6cm3��

�

�

�

�

�

�5×10-10Pa・m3/sec�5×10-10Pa・m3/sec�30,000 repeats�(N2 charged, own test)

STD��

Ry3.2μm or less�Machining finish�

3-bath degrease�＋�

6-bath precision �washing��

Ordinary air-�conditioned room�

Single

Grade�Material��

Inner Surface Roughness�Polishing�

��

Cleaning��

After Cleaning��

Packing

EP��

��

Ry0.7μm or less�Electropolishing finish�3-bath degrease�

＋�6-bath precision�

＋�8-bath super precision washing�

class10�Clean circumstances�

Double packing with clean pack, �N2 charged

SEP�SUS316LE�

(Double-Melt Material)

■Flow Characteristics (Air･Water / 21℃)�

△P（MPa）��0.1�0.5�0.98

�Air�

（ℓ/min）�130�400�700

�Water�（ℓ/min）�3.9�8.4�13.5

KD4：Cv0.27 KD8：Cv0.7�Air�

（ℓ/min）�300�850�1,500

�Water�（ℓ/min）�10.0�22.0�31.5

■Product Specifications

��

Material

SUS316L,SUS316LE��

PCTFE,PI,PFA,Metal��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm

■Internal Structure

■Features

12

3 4

5

6

7

①Reduced inner capacity：�Minimizing the vertical hole to achieve 1.2cm3 of inner capacity(KD1/4"male CVC type under valve open) �adds excellent displacement features to this valve.�②Minimal seat volume (0.066cm3)：�Reduction of seat surface(0.3cm2) that is in contact with gas enhances the degas features, which in consequence prevents the expansion of plastic �caused by the material gases.�③Increased seal surface (3.5 times more, compared with previous type of our own)：�Increased seal surface prevent internal leakage caused by mixing-in of foreign particles.�④Diaphragm：�Using cobalt alloy of 500 series that is highly resistant to corrosion, and strict control of rolling process ensures a high durability of the product.�⑤Increased operation speed：Using aluminum as a material for piston increases the valve operation speed.�⑥Spring washer structure：Repulsion of spring washer ensures the shut off of the fluid when the valve is closed.�⑦Handle：4 different types, i.e., 90° open/close, 90° open/close with lock function, 180° /270° revolving shut off types are available.

Seal Width

Diaphragm

■Handles

270° open/close KD Standard

Open Close

90° open/close Optional 90° open/close with lock function※ Handles with lock function are advantageous to prevent operational failures.

SUS316L

�

(1/4") Size��

KD Series　Straight Type

■Manual Type : 270° Open/Close Valve Dimensions

3

KD2MS-WC�

KD4MS-WC�

KD6MS-WC�

KD8MS-WC�

KD12MS-WC

1/8"Tube-End�

1/4"Tube-End�

3/8"Tube-End�

1/2"Tube-End�

3/4"Tube-End

（42.0）�

（54.0）�

（69.0）�

（69.0）�

（156.0）�

（57.0）�

（68.0）�

（81.0）�

（81.0）�

（103.0）�

（24.0）�

（42.0）�

（42.0）�

（42.0）�

（58.0）�

（19.0）�

（26.0）�

（36.0）�

（36.0）�

（46.0）�

（21.5）�

（27.0）�

（36.0）�

（36.0）�

（39.0）�

（7.0）�

（11.0）�

（16.0）�

（16.0）�

（23.0）�

（11.5）�

（14.0）�

（16.5）�

（16.5）�

（55.0）�

（17.0）�

（25.4）�

（28.0）�

（28.0）�

（35.0）�

1.65�

2.13�

2.72�

2.72�

6.14

2.24�

2.68�

3.19�

3.19�

4.06

0.94�

1.65�

1.65�

1.65�

2.28

0.75�

1.02�

1.42�

1.42�

1.81

0.85�

1.06�

1.42�

1.42�

1.54

0.28�

0.43�

0.63�

0.63�

0.91

0.45�

0.55�

0.65�

0.65�

2.17

0.67�

1.00�

1.10�

1.10�

1.38

KD2MS-VFC�

KD4MS-VFC�

KD8MS-VFC�

KD12MS-VFC

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female�

3/4"CVC Female

（56.0）�

（70.6）�

（83.0）�

（179.2）�

（57.0）�

（68.0）�

（81.0）�

（103.0）�

（24.0）�

（42.0）�

（42.0）�

（58.0）�

（19.0）�

（26.0）�

（36.0）�

（46.0）�

（21.5）�

（27.0）�

（36.0）�

（39.0）�

（7.0）�

（11.0）�

（16.0）�

（23.0）�

（18.5）�

（22.3）�

（23.5）�

（66.6）�

（17.0）�

（25.4）�

（28.0）�

（35.0）�

2.20�

2.78�

3.27�

7.06

2.24�

2.68�

3.19�

4.06

0.94�

1.65�

1.65�

2.28

0.75�

1.02�

1.42�

1.81

0.85�

1.06�

1.42�

1.54

0.28�

0.43�

0.63�

0.91

0.73�

0.88�

0.93�

2.62

0.67�

1.00�

1.10�

1.38

（2-M4 Depth5）�









KD2MS-VC�

KD4MS-VC�

KD8MS-VC�

KD12MS-VC�

�

1/8"CVC Male�

1/4"CVC Male�

1/2"CVC Male�

3/4"CVC Male

（41.0）�

（57.0）�

（77.0）�

（160.0）�

（57.0）�

（68.0）�

（81.0）�

（103.0）�

（24.0）�

（42.0）�

（42.0）�

（58.0）�

（19.0）�

（26.0）�

（36.0）�

（46.0）�

（21.5）�

（27.0）�

（36.0）�

（39.0）�

（7.0）�

（11.0）�

（16.0）�

（23.0）�

（11.0）�

（15.5）�

（20.5）�

（57.0）�

（17.0）�

（25.4）�

（28.0）�

（35.0）�

1.61�

2.24�

3.03�

6.30

2.24�

2.68�

3.19�

4.06

0.94�

1.65�

1.65�

2.28

0.75�

1.02�

1.42�

1.81

0.85�

1.06�

1.42�

1.54

0.28�

0.43�

0.63�

0.91

0.43�

0.62�

0.81�

2.24

0.67�

1.00�

1.10�

1.38





Model Type Fitting Connector L H A B C D E M M1unit: inch(mm)

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.31

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.31

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.31

KD2QS-VC�

KD4QS-VC�

KD8QS-VC

1/8"CVC Male�

1/4"CVC Male�

1/2"CVC Male

（41.0）�

（57.0）�

（77.0）�

（58.0）�

（73.0）�

（86.0）�

（37.0）�

（49.0）�

（49.0）�

（19.0）�

（26.0）�

（36.0）�

（21.5）�

（27.0）�

（33.5）�

（7.0）�

（11.0）�

（16.0）�

（11.0）�

（15.5）�

（20.5）�

（17.0）�

（25.4）�

（28.0）�

KD2QS-WC�

KD4QS-WC�

KD6QS-WC�

KD8QS-WC

1/8"Tube-End�

1/4"Tube-End�

3/8"Tube-End�

1/2"Tube-End

（42.0）�

（54.0）�

（69.0）�

（69.0）�

（58.0）�

（73.0）�

（86.0）�

（86.0）�

（37.0）�

（49.0）�

（49.0）�

（49.0）�

（19.0）�

（26.0）�

（36.0）�

（36.0）�

（21.5）�

（27.0）�

（33.5）�

（33.5）�

（7.0）�

（11.0）�

（16.0）�

（16.0）�

（11.5）�

（14.0）�

（16.5）�

（16.5）�

（17.0）�

（25.4）�

（28.0）�

（28.0）�

1.65�

2.13�

2.72�

2.72

2.28�

2.87�

3.39�

3.39

1.46�

1.93�

1.93�

1.93

0.75�

1.02�

1.42�

1.42

0.85�

1.06�

1.32�

1.32

0.28�

0.43�

0.63�

0.63

0.45�

0.55�

0.65�

0.65

0.67�

1.00�

1.10�

1.10





KD2QS-VFC�

KD4QS-VFC�

KD8QS-VFC

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female

（56.0）�

（70.6）�

（83.0）�

（58.0）�

（73.0）�

（86.0）�

（37.0）�

（49.0）�

（49.0）�

（19.0）�

（26.0）�

（36.0）�

（21.5）�

（27.0）�

（33.5）�

（7.0）�

（11.0）�

（16.0）�

（18.5）�

（22.3）�

（23.5）�

（17.0）�

（25.4）�

（28.0）�

1.61�

2.24�

3.03

2.28�

2.87�

3.39

1.46�

1.93�

1.93

0.75�

1.02�

1.42

0.85�

1.06�

1.32

0.28�

0.43�

0.63

0.43�

0.62�

0.81

0.67�

1.00�

1.10

2.20�

2.78�

3.27

2.28�

2.87�

3.39

1.46�

1.93�

1.93

1.75�

1.02�

1.42

0.85�

1.06�

1.32

0.28�

0.43�

0.63

0.73�

0.88�

0.93

0.67�

1.00�

1.10







Model Type Fitting Connector L H A B C D E M M12-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20

KD4MS-VFC ■Product Code ListModel

KD：KD type�Diaphragm�Valve

2：1/8"�4：1/4"�6：3/8"�8：1/2"

M：Manual S：Straight�A：Angle�Ｌ：L-Shaped

V ：CVC Male�VF：CVC Female�W ：Tube-End

C：PCTFE�A：PFA�P：PI�M：Metal

STD�EP�SEP�(only vacuum �double-melt �material)

Handle ColorRD : Red� GR : Green� SL : Silver� BK : Black� YE : Yellow� BR : Brown�

Non Mark : Blue(Standard)

Size Operational Method Valve Shape Connection Seat Material Grade

KD - --4 M S VF C EP

Option

■Manual Type : 90° Open/Close Valve Dimensions unit: inch(mm)

KD4QS-VFC ■Product Code ListModel


2：1/8"�4：1/4"�6：3/8"�8：1/2"

Q：90 M゚anual S：Straight�A：Angle�Ｌ：L-Shaped




Handle ColorPOC：�90 L゚ock Type�※�

RD : Red� GR : Green� SL : Silver� WH : White� BK : Black� YE : Yellow�



KD - --4 Q S VF C EP

Option

※Refer to P.2 for handles.

(option)

(option)

φA

H

C

D

E BL

E

φA

H

C

D

E BL

E

φA

H

C

D

E BL

E

φA

H

C

D

E BL

E

φA

H

C

D

E BL

E

φA

H

C

D

E BL

E

M1

45゚�

M

M1

45゚�

M

M1

45゚�

M

M1

45゚�

M

M1

45゚�

M

M1

45゚�

M

4

■Automatic Type : Normally Close/Normally Open Valve Dimensions

KD2□S-WC�

KD4□S-WC�

KD6□S-WC�

KD8□S-WC�

KD12□S-WC

1/8"Tube-End�

1/4"Tube-End�

3/8"Tube-End�

1/2"Tube-End�

3/4"Tube-End

（42.0）�

（54.0）�

（69.0）�

（69.0）�

（156.0）�

（53.0）�

（67.0）�

（84.0）�

（84.0）�

（148.0）�

（28.0）�

（39.7）�

（55.0）�

（55.0）�

（□85.0）�

（19.0）�

（26.0）�

（36.0）�

（36.0）�

（46.0）�

（7.0）�

（11.0）�

（16.0）�

（16.0）�

（23.0）�

（11.5）�

（14.0）�

（16.5）�

（16.5）�

（55.0）�

（17.0）�

（25.4）�

（28.0）�

（28.0）�

（35.0）�

1.65�

2.13�

2.72�

2.72�

6.14

2.09�

2.64�

3.31�

3.31�

5.83

1.10�

1.56�

2.17�

2.17�

□3.35

0.75�

1.02�

1.42�

1.42�

1.81

0.28�

0.43�

0.63�

0.63�

0.91

0.45�

0.55�

0.65�

0.65�

2.17

0.67�

1.00�

1.10�

1.10�

1.38






KD2□S-VFC�

KD4□S-VFC�

KD8□S-VFC�

KD12□S-VFC

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female�

3/4"CVC Female

（56.0）�

（70.6）�

（83.0）�

（179.2）�

（53.0）�

（67.0）�

（84.0）�

（148.0）�

（28.0）�

（39.7）�

（55.0）�

（□85.0）�

（19.0）�

（26.0）�

（36.0）�

（46.0）�

（7.0）�

（11.0）�

（16.0）�

（23.0）�

（18.5）�

（22.3）�

（23.5）�

（66.6）�

（17.0）�

（25.4）�

（28.0）�

（35.0）�





KD2□S-VC�

KD4□S-VC�

KD8□S-VC�

KD12□S-VC

1/8"CVC Male�

1/4"CVC Male�

1/2"CVC Male�

3/4"CVC Male

（41.0）�

（57.0）�

（77.0）�

（160.0）�

（53.0）�

（67.0）�

（84.0）�

（148.0）�

（28.0）�

（39.7）�

（55.0）�

（□85.0）�

（19.0）�

（26.0）�

（36.0）�

（46.0）�

（7.0）�

（11.0）�

（16.0）�

（23.0）�

（11.0）�

（15.5）�

（20.5）�

（57.0）�

（17.0）�

（25.4）�

（28.0）�

（35.0）�2.20�

2.78�

3.27�

7.06

2.09�

2.64�

3.31�

5.83

1.10�

1.56�

2.17�

□3.35

0.75�

1.02�

1.42�

1.81

0.28�

0.43�

0.63�

0.91

0.73�

0.88�

0.93�

2.62

0.67�

1.00�

1.10�

1.38

1.61�

2.24�

3.03�

6.30

2.09�

2.64�

3.31�

5.83

1.10�

1.56�

2.17�

□3.35

0.75�

1.02�

1.42�

1.81

0.28�

0.43�

0.63�

0.91

0.43�

0.62�

0.81�

2.24

0.67�

1.00�

1.10�

1.38





Model Type Fitting Connector L H A B D E M M1unit: inch(mm)

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.31

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.31

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.31

KD4□S-VFC

※The option is available only for pneumatic valves.

■Product Code ListModel


2：1/8"�4：1/4"�6：3/8"�8：1/2"

C：Normally Close�O：Normally Open

S：Straight�A：Angle�Ｌ：L-Shaped




S：with Sensor�※�


KD - --4 C S VF C EP

Option

■Manual Type : Flow Control Valve Dimensions

KD2FS-VF4M CVC1/4"Female（62.6）�（96.0）�（22.0）�（19.0）�（11.0）�（21.8）�（17.0）�

KD2FS-V4M CVC1/4"Male（50.0）�（96.0）�（22.0）�（19.0）�（11.0）�（15.5）�（17.0）�

2.46 3.78 0.87 0.75 0.43 0.86 0.67

1.97 3.78 0.87 0.75 0.43 0.61 0.67

Model Type Fitting Connector L H A B D E Munit: inch(mm)

KD2FS-V4M ■Product Code ListModel


2：1/8" F：Flow Control S：Straight V4 ：CVC1/4"Male�VF4：CVC1/4"Female

M：Metal STD�EP�SEP�(only vacuum �double-melt �material)


KD - -2 F S V4 M EP

(option)

φA

H

D

E BL

E

A

H

D

E BL

E

A

H

D

E BL

E

M1

45゚�

M

M1

45゚�

M

M1

45゚�

M

A

H

D

E BL

E

A

H

DE B

LE

2-M4�Depth5

45゚�

M

2-M4�Depth5

45゚�

M

Cv Value

0.01

0.02

0.03

0.04

0.05

0 1 2 3 4 5 6 7 8Handle Rotation

5

KD Series　Branch Type

KD4MB-VFC

※Different flow types as listed in the right are available.

KD2MB-WC-□�

KD4MB-WC-□�

KD6MB-WC-□�

KD8MB-WC-□�

1/8"Tube-End�

1/4"Tube-End�

3/8"Tube-End�

1/2"Tube-End

（42.0）�

（54.0）�

（69.0）�

（69.0）�

（57.0）�

（68.0）�

（81.0）�

（81.0）�

（24.0）�

（42.0）�

（42.0）�

（42.0）�

（19.0）�

（26.0）�

（36.0）�

（36.0）�

（21.5）�

（27.0）�

（36.0）�

（36.0）�

（7.0）�

（11.0）�

（16.0）�

（16.0）�

（11.5）�

（14.0）�

（16.5）�

（16.5）�

（17.0）�

（25.4）�

（28.0）�

（28.0）�

1.65�

2.13�

2.72�

2.72

2.24�

2.68�

3.19�

3.19

0.94�

1.65�

1.65�

1.65

0.75�

1.02�

1.42�

1.42

0.85�

1.06�

1.45�

1.42

0.28�

0.43�

0.63�

0.63

0.45�

0.55�

0.65�

0.65

0.67�

1.00�

1.10�

1.10

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20





KD2MB-VFC-□�

KD4MB-VFC-□�

KD8MB-VFC-□�

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female

（56.0）�

（70.6）�

（83.0）�

（57.0）�

（68.0）�

（81.0）�

（24.0）�

（42.0）�

（42.0）�

（19.0）�

（26.0）�

（36.0）�

（21.5）�

（27.0）�

（36.0）�

（7.0）�

（11.0）�

（16.0）�

（18.5）�

（22.3）�

（23.5）�

（17.0）�

（25.4）�

（28.0）�

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20




KD2MB-VC-□�

KD4MB-VC-□�

KD8MB-VC-□�

1/8"CVC Male�

1/4"CVC Male�

1/2"CVC Male

（41.0）�

（57.0）�

（77.0）�

（57.0）�

（68.0）�

（81.0）�

（24.0）�

（42.0）�

（42.0）�

（19.0）�

（26.0）�

（36.0）�

（21.5）�

（27.0）�

（36.0）�

（7.0）�

（11.0）�

（16.0）�

（11.0）�

（15.5）�

（20.5）�

（17.0）�

（25.4）�

（28.0）�

2.20�

2.78�

3.27

2.24�

2.68�

3.19

0.94�

1.65�

1.65

0.75�

1.02�

1.42

0.85�

1.06�

1.42

0.28�

0.43�

0.63

0.73�

0.88�

0.93

0.67�

1.00�

1.10

1.61�

2.24�

3.03

2.24�

2.68�

3.19

0.94�

1.65�

1.65

0.75�

1.02�

1.42

0.85�

1.06�

1.42

0.28�

0.43�

0.63

0.43�

0.61�

0.81

0.67�

1.00�

1.10

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20




Model Type Fitting Connector L H A B C D E M M1■Manual Type : 270° Open/Close Valve Dimensions unit: inch(mm)



2：1/8"�4：1/4"�6：3/8"�8：1/2"

M：Manual B：Branch V ：CVC Male�VF：CVC Female�W ：Tube-End



Handle ColorA Flow�B Flow�※�

RD:Red�GR:Green�SL :Silver�BK :Black

YE:Yellow�BR:Brown�Non Mark:�Blue(standard)

Size Operational Method Valve Shape Connection Seat Material Flow Grade

KD - -- -4 M B VF C EP

Option

KD4QB-VFC ■Product Code ListModel


2：1/8"�4：1/4"�6：3/8"�8：1/2"

Q：90 M゚anual B：Branch V ：CVC Male�VF：CVC Female�W ：Tube-End



Handle ColorPOC：�90° Lock Type�※1

RD :Red�GR :Green�SL :Silver�WH:White

BK:Black�YE:Yellow�Non Mark:�Blue(standard)


KD - --4 Q B VF C EP

Option

※1 Refer to P.2 for handles.�※2 Different flow types as listed in the right are available.

KD2QB-WC-□�

KD4QB-WC-□�

KD6QB-WC-□�

KD8QB-WC-□�

1/8"Tube-End�

1/4"Tube-End�

3/8"Tube-End�

1/2"Tube-End

（42.0）�

（54.0）�

（69.0）�

（69.0）�

（58.0）�

（73.0）�

（86.0）�

（86.0）�

（37.0）�

（49.0）�

（49.0）�

（49.0）�

（19.0）�

（26.0）�

（36.0）�

（36.0）�

（21.5）�

（27.0）�

（33.5）�

（33.5）�

（7.0）�

（11.0）�

（16.0）�

（16.0）�

（11.5）�

（14.0）�

（16.5）�

（16.5）�

（17.0）�

（25.4）�

（28.0）�

（28.0）�

1.65�

2.13�

2.72�

2.72

2.28�

2.87�

3.39�

3.39

1.46�

1.93�

1.93�

1.93

0.75�

1.02�

1.42�

1.42

0.85�

1.06�

1.32�

1.32

0.28�

0.43�

0.63�

0.63

0.45�

0.55�

0.65�

0.65

0.67�

1.00�

1.10�

1.10





2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20

KD2QB-VFC-□�

KD4QB-VFC-□�

KD8QB-VFC-□�

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female

（56.0）�

（70.6）�

（83.0）�

（58.0）�

（73.0）�

（86.0）�

（37.0）�

（49.0）�

（49.0）�

（19.0）�

（26.0）�

（36.0）�

（21.5）�

（27.0）�

（33.5）�

（7.0）�

（11.0）�

（16.0）�

（18.5）�

（22.3）�

（23.5）�

（17.0）�

（25.4）�

（28.0）�

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20




KD2QB-VC-□�

KD4QB-VC-□�

KD8QB-VC-□�

1/8"CVC Male�

1/4"CVC Male�

1/2"CVC Male

（41.0）�

（57.0）�

（77.0）�

（58.0）�

（73.0）�

（86.0）�

（37.0）�

（49.0）�

（49.0）�

（19.0）�

（26.0）�

（36.0）�

（21.5）�

（27.0）�

（33.5）�

（7.0）�

（11.0）�

（16.0）�

（11.0）�

（15.5）�

（20.5）�

（17.0）�

（25.4）�

（28.0）�

2.20�

2.78�

3.27

2.28�

2.87�

3.39

1.46�

1.93�

1.93

0.75�

1.02�

1.42

0.85�

1.06�

1.42

0.28�

0.43�

0.63

0.73�

0.88�

0.93

0.67�

1.00�

1.10

1.61�

2.24�

3.03

2.28�

2.87�

3.39

1.46�

1.93�

1.93

0.75�

1.02�

1.42

0.85�

1.06�

1.42

0.28�

0.43�

0.63

0.43�

0.61�

0.81

0.67�

1.00�

1.10

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20




Model Type Fitting Connector L H A B C D E M M1■Manual Type : 90° Open/Close Valve Dimensions unit: inch(mm)

Flow

A Flow�B Flow�※2

-

A Flow B FlowA C

B

A C

B

●Flow

A Flow B FlowA C

B

A C

B

●Flow

(option)

(option)

φA

H

C

D

E BL

E

φA

H

C

D

E BL

E

φA

H

C

D

E BL

E

M1

45゚�

M

M1

45゚�

M

M1

45゚�

M

φA

H

C

D

E BL

E

M1

45゚�

M

φA

H

C

D

E BL

E

M1

45゚�

M

M1

45゚�

M

φA

H

C

D

E BL

E

6

KD4CB-VFC

※1 Different flow types as listed in the right are available.�※2 The sensor is available only for pneumatic valves.

Model Type Fitting Connector L H A B �D E

KD2□B-WC-□�

KD4□B-WC-□�

KD6□B-WC-□�

KD8□B-WC-□�

1/8"Tube-End�

1/4"Tube-End�

3/8"Tube-End�

1/2"Tube-End

（42.0）�

（54.0）�

（69.0）�

（69.0）�

（53.0）�

（67.0）�

（84.0）�

（84.0）�

（28.0）�

（39.7）�

（55.0）�

（55.0）�

（19.0）�

（26.0）�

（36.0）�

（36.0）�

（7.0）�

（11.0）�

（16.0）�

（16.0）�

（11.5）�

（14.0）�

（16.5）�

（16.5）�

（17.0）�

（25.4）�

（28.0）�

（28.0）�

1.65�

2.13�

2.72�

2.72

2.09�

2.64�

3.31�

3.31

1.10�

1.56�

2.17�

2.17

0.75�

1.02�

1.42�

1.42

0.28�

0.43�

0.63�

0.63

0.45�

0.55�

0.65�

0.65

0.67�

1.00�

1.10�

1.10





KD2□B-VFC-□�

KD4□B-VFC-□�

KD8□B-VFC-□�

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female

�（56.0）�

（70.6）�

（83.0）�

（53.0）�

（67.0）�

（84.0）�

（28.0）�

（39.7）�

（55.0）�

（19.0）�

（26.0）�

（36.0）�

（7.0）�

（11.0）�

（16.0）�

（18.5）�

（22.3）�

（23.5）�

（17.0）�

（25.4）�

（28.0）�




KD2□B-VC-□�

KD4□B-VC-□�

KD8□B-VC-□�

1/8"CVC Male�

1/4"CVC Male�

1/2"CVC Male

�（41.0）�

（57.0）�

（77.0）�

（53.0）�

（67.0）�

（84.0）�

（28.0）�

（39.7）�

（55.0）�

（19.0）�

（26.0）�

（36.0）�

（7.0）�

（11.0）�

（16.0）�

（11.0）�

（15.5）�

（20.5）�

（17.0）�

（25.4）�

（28.0）�

2.20�

2.78�

3.27

2.09�

2.64�

3.31

1.10�

1.56�

2.17

0.75�

1.02�

1.42

0.28�

0.43�

0.63

0.73�

0.88�

0.93

0.67�

1.00�

1.10

1.61�

2.24�

3.03

2.09�

2.64�

3.31

1.10�

1.56�

2.17

0.75�

1.02�

1.42

0.28�

0.43�

0.63

0.43�

0.61�

0.81

0.67�

1.00�

1.10




M M1

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20

2-M4 Depth0.20�

2-M5 Depth0.20�

2-M5 Depth0.20

■Pneumatic Type : Normally Close / Normally Open Valve Dimensions unit: inch(mm)

A Flow B FlowA C

B

A C

B

●Flow


KD：� 2：1/8"�4：1/4"�6：3/8"�8：1/2"


B：Branch V ：CVC Male�VF：CVC Female�W ：Tube-End



S：�with Sensor�※2

A Flow�B Flow�※1

Size Operational Method Valve Shape Connection Seat Material Flow Grade

KD - -- -4 C B VF C EP

Option

(option)

φA

H

D

E BL

E

A

H

D

E BL

E

A

H

D

E BL

E

M1

45゚�

M

M1

45゚�

M

M1

45゚�

M

7

KD Series　2-Valve 3-Way Block Type


■Internal Flow

■FeaturesThese are the highly advanced valves that enabled the piping system to be space-saving, and achieved a minimal dead space as

well as cost reduction at the same time. In addition to the outgas-free status in the valve due to its outstandingly excellent degas

feature, a metal diaphragm structure without any sliding mechanism is newly employed for the part in contact with gases. Particle-

free status is achieved due to the combination of the special valve seat structure that is newly developed in order to minimize the

generation of dust particles and super precision clean wash process. Further, as a result of extremely minimized dead space due

to avoidance of metal gasket, less purge time is now required.

■Major SpecificationsType (Size)�Cv Value�


��



Cycle Life

��

PCTFE：-10～42℃�PFA: Manual Valve-10～150℃, Pneumatic Valve-10～120℃�

(500,000 repeats at 150℃, actual test)�PI：-10～150℃�Metal：-10～200℃�0.4～0.7MPa（G.）�

≦3×10-10Pa・m3/sec（≦3×10-9atm cc/sec）�≦3×10-12Pa・m3/sec（≦3×10-11atm cc/sec）�

Pneumatic Valve 2 mil. repeats (N2 charged, own test) �Manual 100,000 repeats (N2 charged, own test)

KD4（1/4"）�0.22�3.2cm3�

0.98MPa（G.）�

KD8（1/2"）�0.7�

19.8cm3�

0.98MPa（G.）�

A Flow B Flow

B23V type B23H type B23V type B23H type

A

B

C A CB

A

B

C A CB

A Flow B Flow

Bottom Mount

■Product GradeSTD��





Single

Grade�

Material��


��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�

(Double-Melt Material)SUS316L


△P（MPa）��0.1�0.5�0.98

�Air�

（ℓ/min）�110�330�600

�Water�（ℓ/min）�3.3�7.0�11.6

KD4：Cv0.22 KD8：Cv0.7�Air�

（ℓ/min）�300�850�1,500

�Water�（ℓ/min）�10.0�22.0�31.5


��

Material


PCTFE,PI,PFA��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm

15

40

4-Ｍ5�Depth5

8

B23HKD4M-VFC-□�

B23HKD2M-VFC-□�

B23HKD4M-VFC-□�

B23HKD8M-VFC-□�

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female

B23VKD2M-VFC-□�

B23VKD4M-VFC-□�

B23VKD8M-VFC-□�

1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female

Model Type Fitting Connector

（89.0）�

（107.6）�

（143.0）�

（89.0）�

（107.6）�

（143.0）�

L

（52.0）�

（72.0）�

（87.0）�

（52.0）�

（72.0）�

（87.0）�

H

（90.0）�

（122.0）�

（142.0）�

（90.0）�

（122.0）�

（142.0）�

A

（52.0）�

（64.0）�

（97.0）�

（52.0）�

（64.0）�

（97.0）�

B

（29.0）�

（34.8）�

（41.0）�

（45.5）�

（53.8）�

（71.5）�

C

（7.0）�

（11.0）�

（16.0）�

（7.0）�

（11.0）�

（16.0）�

D

（18.5）�

（21.8）�

（23.0）�

（18.5）�

（21.8）�

（23.0）�

3.50�

4.24�

5.63

3.50�

4.24�

5.63

2.05�

2.83�

3.43

2.05�

2.83�

3.43

3.54�

4.80�

5.59

3.54�

4.80�

5.59

2.05�

2.52�

3.82

2.05�

2.52�

3.82

1.14�

1.37�

1.61

1.79�

2.12�

2.81

0.28�

0.43�

0.63

0.28�

0.43�

0.63

0.73�

0.86�

0.91

0.73�

0.86�

0.91

E

■Manual Type : 270° Open/Close Valve Dimensions unit: inch(mm)

B23VKD4□□-VFC-□�

B23HKD2□□-VFC-□�



1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female




1/8"CVC Female�

1/4"CVC Female�

1/2"CVC Female

Model Type Fitting Connector

（89.0）�

（107.6）�

（143.0）�

（89.0）�

（107.6）�

（143.0）�

L

（56.0）�

（70.5）�

（98.5）�

（56.0）�

（70.5）�

（98.5）�

H

（98.0）�

（120.0）�

（165.0）�

（98.0）�

（120.0）�

（165.0）�

A

（52.0）�

（64.0）�

（97.0）�

（52.0）�

（64.0）�

（97.0）�

B

（29.0）�

（34.8）�

（41.0）�

（45.5）�

（53.8）�

（71.5）�

C

（7.0）�

（11.0）�

（16.0）�

（7.0）�

（11.0）�

（16.0）�

D

（18.5）�

（21.8）�

（23.0）�

（18.5）�

（21.8）�

（23.0）�

3.50�

4.24�

5.63

3.50�

4.24�

5.63

2.20�

2.78�

3.88

2.20�

2.78�

3.88

3.86�

4.72�

6.50

3.86�

4.72�

6.50

2.05�

2.52�

3.82

2.05�

2.52�

3.82

1.14�

1.37�

1.61

1.79�

2.12�

2.81

0.28�

0.43�

0.63

0.28�

0.43�

0.63

0.73�

0.86�

0.91

0.73�

0.86�

0.91

E

■Pneumatic Type : Normally Close / Normally Open Valve Dimensions unit: inch(mm)

■Product Code List

※1 Refer to P.7, Internal Flow for direction of ports and flows.�※2 Refer to P.2 for 90° lock handles.�※3 Only one code shall be shown when all actuators are same.�※4 In the case that the fittings are different in type, please list the code in order of A, B, C shown in the internal flow on P.7.�　　ex) CVC Female for "A", CVC Female for "B", CVC Male for "C", the connection shall be in order of VFVFV.


Grade

EP

L：Laterally �　Reversed

A�B

A

POC：�90° Lock Type�※2

Option�Port DirFlowV1 V2

Option

C：PCTFE�A：PFA�P：PI��

Seat�Material

CM Q

V ：CVC Male�VF：CVC Female�W ：Tube-End�※4

M：Manual Valve�Q：90° Manual Valve�※3

Connection

VF

Block�Valve

B

Number of �Actuators

2

Number of�Ports

3

V：Vertical�H：Horizontal�※1

Number of�Ports

V

Model

KD

KD

2：1/8"�4：1/4"�8：1/2"

Size

4 -- - -

Option


※1 Refer to P.7, Internal Flow for direction of ports and flows.�※2 Only one code shall be shown when all actuators are same.�※3 In the case that the fittings are different in type, please list the code in order of A, B, C shown in the internal flow on P.7.�　　ex) CVC Female for "A", CVC Female for "B", CVC Male for "C", the connection shall be in order of VFVFV.


Grade

EP

L：Laterally �　Reversed

A�B

A

Option�Port DirFlowV1 V2


Seat�Material

CC O


C：Normally Close�O：Normally Open�※2

Connection

VF

Block�Valve

B

Number of �Actuators

2

Number of�Ports

3


Number of�Ports

V

Model

KD

KD

2：1/8"�4：1/4"�8：1/2"

Size

4 -- -

Option

Handle Color��RD : Red�

GR : Green�SL : Silver�BL : Blue�BK : Black�YE : Yellow

A

D

H

E EBL

C

A

D

H C

E EBL

A

D

H

E EBL

C

A

D

H

E EBL

C

9

KD4TS-VC

KD Series　2-Step Valves

■Comparison of Old �　/ New Method

■Features

■Characteristics of Cv Value

■Major Specifications ■Product GradeType (Size)�

Cv Value��


�Max.Working Temp�

�Operating Pressure�Internal Leakage Allowance�External Leakage Allowance�Cycle Life

��

0.98MPa（G.）��

Valve Open：-10～80℃（PCTFE）、-10～150℃（PI）��

0.4～0.7MPa（G.）�Valve Seat Leakage3×10-10Pa・m3/sec�External Leakage3×10-12Pa・m3/sec�

Pneumatic Valve 2 mil. repeats (N2 charged, own test)

1/4"�Small Flow：0.02～0.12,�Full-Open：0.27�1.2cm3

1/2"�Small Flow：0.05～0.26,�

Full-Open：0.7�6.6cm3


�

�

Material

SUS316L,SUS316LE�

�

PCTFE,PI�

�

Nickel/Cobalt Alloy

Body�

�

Seat�

�

Diaphragm

KD4TS-VC�

KD8TS-VC

1/4"CVC Male�

1/2"CVC Male

（57.0）�

（77.0）�

（121.0）�

（141.5）�

（44.0）�

（58.0）�

（26.0）�

（36.0）�

（98.0）�

（113.5）�

（11.0）�

（16.0）�

（15.5）�

（20.5）�

（25.4）�

（28.0）�

KD4TS-VFC�

KD8TS-VFC

1/4"CVC Female�

1/2"CVC Female

（70.6）�

（83.0）�

（121.0）�

（141.5）�

（44.0）�

（58.0）�

（26.0）�

（36.0）�

（98.0）�

（113.5）�

（11.0）�

（16.0）�

（22.3）�

（23.5）�

（25.4）�

（28.0）�

2.24�

3.03

4.76�

5.57

1.73�

2.28

1.02�

1.42

3.86�

4.47

0.43�

0.63

0.61�

0.81

1.00�

1.10

2.78�

3.27

4.76�

5.57

1.73�

2.28

1.02�

1.42

3.86�

4.47

0.43�

0.63

0.88�

0.93

1.00�

1.10

Model Type Fitting Connector L H A B C D E M■Dimensions unit: inch(mm)

①Body　�

②Air Inlet (FAST)　�

③Air Inlet (SLOW)　�

④Lift Adjuster Knob�

⑤Actuator Lock　�

⑥Adjuster Knob Lock Screw

Slow Leakage Cv Value

1/4" 1/2"

0 0.02

2.5�

2.0�

1.5�

1.0�

0.5�

00.04 0.06 0.08 0.10 0.12 0.14 0.16 0.18 0.20 0.22 0.24 0.26

Rotation of Slow Leakage Adjuster Knob

1

2

3

4

5

6

Previous Method 2-Step Valve

１�２� ８�９�０�１�２� ８�９�０�

（SLOW）�

（FAST）�



4：1/4"�8：1/2"

T：2-Step S：Straight�A：Angle (option)�B：Branch (option)

V ：CVC Male�VF：CVC Female

C：PCTFE�P：PI



KD - -4 T S V C EP

With this valve alone, 2-step control, i.e., fine flow control and full-open / close control is made possible. 2-step valve is a revolutionary valve that controls the fluid by diaphragm instead of needle. Due to this mechanism, both particle-free status and speedy gas supply are achieved. As a result, bypasses or controllers that are necessary for the previous system becomes unnecessary, thus extensive cost reduction and space-saving are made possible. Also to be noted is that you can set any Cv value that is most suitable to the application. �Note : When the inner pressure is lower than that of the atmospheric pressure at the time of use, fine control of Cv for very small flow may be difficult. In this case, set the Cv value that is used in the actual use.

STD��





Single

Grade�

Material��


��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�


2-M5Depth5

45゚�

M

2-M5Depth5

45゚�

M

H

D

C

E BLE

□A

H

D

C

E BL

E

□A

10

KD Series　High Temp.(250℃) All Metal Diaphragm Valve

KD4KCS-VM

■Features

■Major Specifications ■Product GradeType (Size)�

Cv Value��



�Operating Pressure�Internal Leakage Allowance�External Leakage Allowance�Cycle Life

��

0.98MPa（G.）��

-10～250℃��

0.5～0.7MPa（G.）�Internal≦3×10-10Pa・m3/s�External≦3×10-12Pa・m3/s�

50,000 repeats (N2 charged, own test)

1/2"（3/8"）�Normal Temperature：0.7,250℃：0.5,�

250℃Vacuum Inside：0.35�6.6cm3

KD4K□S-VM�

KD8K□S-VM

1/4"CVC Male�

1/2"CVC Male

（57.0）�

（77.0）�

（101.5）�

（130.0）�

（52.0）�

（62.0）�

（26.0）�

（36.0）�

（70.5）�

（94.0）�

（11.0）�

（16.0）�

（15.5）�

（20.5）�

（25.4）�

（28.0）�

KD4K□S-WM�

KD6K□S-WM�

KD8K□S-WM

1/4"Tube-End�

3/8"Tube-End�

1/2"Tube-End

（54.0）�

（69.0）�

（69.0）�

（101.5）�

（130.0）�

（130.0）�

（52.0）�

（62.0）�

（62.0）�

（26.0）�

（36.0）�

（36.0）�

（70.5）�

（94.0）�

（94.0）�

（11.0）�

（16.0）�

（16.0）�

（14.0）�

（16.5）�

（16.5）�

（25.4）�

（28.0）�

（28.0）�

KD4K□S-VFM�

KD8K□S-VFM

1/4"CVC Female�

1/2"CVC Female

（70.6）�

（83.0）�

（101.5）�

（130.0）�

（52.0）�

（62.0）�

（26.0）�

（36.0）�

（70.5）�

（94.0）�

（11.0）�

（16.0）�

（22.3）�

（23.5）�

（25.4）�

（28.0）�

2.24�

3.03

4.00�

5.12

2.05�

2.44

1.02�

1.42

2.78�

3.70

0.43�

0.63

0.61�

0.81

1.00�

1.10

2.24�

2.72�

2.72

4.00�

5.12�

5.12

2.05�

2.44�

2.44

1.02�

1.42�

1.42

2.78�

3.70�

3.70

0.43�

0.63�

0.63

0.55�

0.65�

0.65

1.00�

1.10�

1.10

2.78�

3.27

4.00�

5.12

2.05�

2.44

1.02�

1.42

2.78�

3.70

0.43�

0.63

0.88�

0.93

1.00�

1.10

Model Type Fitting Connector L H A B C D E M■Dimensions unit: inch(mm)

Having changed the whole material for actuator to metal, the valve can now be used even at 250℃. In addition, using Kitz SCT's unique mechanism in place of existing shaft seal bellows achieved high quality, compact and low cost valve.�Note : Because the valve can be used in a high temperature tank, it is recommended to use this valve in the process of organometals, where the temperature needs to be kept high.

■Flow Characteristics (Air)�

△P（MPa）��0.1�0.5�0.98

KD4K：Cv0.25�Air�

（ℓ/min）�130�400�700

KD8K：Cv0.7�Air�

（ℓ/min）�300�850�1,500


��

Material


Metal��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm



4：1/4"�6：3/8"�8：1/2"

KC：Normally Close�KO：Normally Open

S：Straight�B：Branch


M：Metal STD�EP�SEP�(only vacuum �double-melt �material)


KD - -4 K□� S V M EP

STD��





Single

Grade�

Material��


��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�


1/4"�Normal Temperature：0.25,250℃：0.24,�

250℃Vacuum Inside：0.23�1.2cm3

φA

H

D

C

E BL

E

φA

H

D

C

E BL

E

2-M5Depth5

45゚�

M

2-M5Depth5

45゚�

M

2-M5Depth5

45゚�

M

φA

H

D

C

E BL

E

11

Assuming that the valve shall be used in sub-main or after of the bulk gas piping system, where the valve is not frequently operated to open or close, the design is reviewed in detail to develop a low cost valve. Pursuing the simplicity and ease of use, component parts are reduced to minimum, and the mechanism is simplified. A larger window hole and easy-to-see OPEN/CLOSE mark are adopted so that whether it is open or close is instantly noticed. The shunt port of the shunt type can be set to any direction.


Straight Type Branch Type

12345

6

1

23456

①Body ③Diaphragm ⑤Cap�

②Valve Seat ④Diaphragm Piece ⑥Bonnet

①Tee ③Valve Seat ⑤Diaphragm Piece�

②Body ④Diaphragm ⑥Bonnet

SDLightweight Diaphragm Valve

■Major Specifications ■Product GradeSize�

Cv Value�Internal Volume�Max.Working Pressure�

��


Internal Leakage Allowance�External Leakage Allowance�Cycle Life

1/4"�0.27�1.2cm3�

0.98MPa（G.）��

PCTFE：-10℃～42℃,�PI：-10℃～150℃,�PFA：-10℃～150℃�

�≦3×10-10Pa・m3/s�≦3×10-12Pa・m3/s�

50,000 repeats (N2 charged, own test)


■Features①Reduced inner capacity：�Minimizing the vertical hole to achieve 1.2cm3 of inner capacity(KD1/4"male CVC type under valve open) adds excellent displacement �features to this valve.�②Minimal seat volume (0.066cm3)：�Reduction of seat surface(0.3cm2) that is in contact with gas enhances the degas features, which in consequence prevents the expansion �of plastic caused by the material gases.�③Increased seal surface (3.5 times more, compared with previous type of our own)：�Increased seal surface prevent internal leakage caused by mixing-in of foreign particles.�④Diaphragm：�Using cobalt alloy of 500 series that is highly resistant to corrosion, and strict control of rolling process ensures a high durability of the product.�⑤Handle：270° revolving shut off types

STD��





Single

Grade�

Material��


��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�


��

Material


PCTFE,PI,PFA��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm

�

36631

100,000

SD Series　Straight Type/Branch Type

■Straight Type Dimensions

12

Model Type Fitting Connectorunit: inch(mm)

L H H1 D C E M Ｌ1

SD4MS-VC�

SD8MS-VC

1/4"CVC Male�

1/2"CVC Male

（57.0）�

（77.0）�

（62.4）�

（76.0）�

（11.0）�

（16.0）�

（26.0）�

（36.0）�

（25.0）�

（36.0）�

（15.5）�

（20.5）�

（25.4）�

（28.0）�

―�

―�

SD4MS-SC�

SD6MS-SC�

SD8MS-SC

1/4"Swage Lock Equivalent�


1/2"Swage Lock Equivalent

（48.0）�

（64.0）�

（64.0）�

（62.4）�

（76.0）�

（76.0）�

（11.0）�

（16.0）�

（16.0）�

（26.0）�

（36.0）�

（36.0）�

（25.0）�

（36.0）�

（36.0）�

（11.0）�

（14.0）�

（14.0）�

（25.4）�

（28.0）�

（28.0）�

（63.2）�

（79.0）�

（84.0）�

2.24�

3.03

2.46�

2.99

0.43�

0.63

1.02�

1.42

0.98�

1.42

0.61�

0.81

1.00�

1.10

1.89�

2.52�

2.52

2.46�

2.99�

2.99

0.43�

0.63�

0.63

1.02�

1.42�

1.42

0.98�

1.42�

1.42

0.43�

0.55�

0.55

1.00�

1.10�

1.10

2.49�

3.11�

3.31

Manual

SD4MS-VC

■Branch Type Dimensions

Model Type Fitting Connector H B C D H1 F Weight(g)unit: inch(mm)

SD4MB-W15AVC�

SD4MB-W25AVC�

SD4MB-W32AVC�

SD4MB-W40AVC�

SD4MB-W50AVC�

SD4MB-W65AVC

1/4"CVC Male�

1/4"CVC Male�

1/4"CVC Male�

1/4"CVC Male�

1/4"CVC Male�

1/4"CVC Male

（21.7）�

（34.0）�

（42.7）�

（48.6）�

（60.5）�

（76.3）�

（1.65）�

（1.65）�

（1.65）�

（1.65）�

（1.65）�

（2.1）�

（110.0）�

（120.0）�

（140.0）�

（140.0）�

（140.0）�

（150.0）�

（31.0）�

（37.8）�

（48.5）�

（52.0）�

（58.5）�

（66.5）�

（47.0）�

（47.0）�

（59.0）�

（59.0）�

（59.0）�

（59.0）�

（345.0）�

（425.0）�

（535.0）�

（545.0）�

（645.0）�

（885.0）�

SD8MB-W15AVC�

SD8MB-W25AVC�

SD8MB-W32AVC�

SD8MB-W40AVC�

SD8MB-W50AVC�

SD8MB-W65AVC

1/2"CVC Male�

1/2"CVC Male�

1/2"CVC Male�

1/2"CVC Male�

1/2"CVC Male�

1/2"CVC Male

（92.0）�

（105.0）�

（120.5）�

（127.0）�

（139.5）�

（155.0）�

（109.0）�

（122.0）�

（131.5）�

（138.5）�

（152.5）�

（167.5）�

�

（21.7）�

（34.0）�

（42.7）�

（48.6）�

（60.5）�

（76.3）�

（1.65）�

（1.65）�

（1.65）�

（1.65）�

（1.65）�

（2.1）�

（110.0）�

（120.0）�

（140.0）�

（160.0）�

（160.0）�

（180.0）�

（39.0）�

（46.1）�

（51.0）�

（55.0）�

（63.0）�

（70.0）�

（65.5）�

（65.5）�

（65.5）�

（65.5）�

（65.5）�

（65.5）�

（586.5）�

（656.5）�

（736.5）�

（926.5）�

（1006.5）�

（1316.5）�

0.85�

1.34�

1.68�

1.91�

2.38�

3.00

0.06�

0.06�

0.06�

0.06�

0.06�

0.08

4.33�

4.72�

5.51�

5.51�

5.51�

5.91

1.22�

1.49�

1.91�

2.05�

2.30�

2.62

1.85�

1.85�

2.32�

2.32�

2.32�

2.32

13.58�

16.73�

21.06�

21.46�

25.39�

34.84

3.62�

4.13�

4.74�

5.00�

5.49�

6.10

4.29�

4.80�

5.18�

5.45�

6.00�

6.59

0.85�

1.34�

1.68�

1.91�

2.38�

3.00

0.06�

0.06�

0.06�

0.06�

0.06�

0.08

4.33�

4.72�

5.51�

6.30�

6.30�

7.09

1.54�

1.81�

2.01�

2.17�

2.48�

2.76

2.58�

2.58�

2.58�

2.58�

2.58�

2.58

23.09�

25.85�

29.00�

36.48�

39.63�

51.83

Manual

SD4MB-W15AVC ■Product Code List


SD：SD type�Diaphragm�Valve

4：1/4"�6：3/8"�8：1/2"

M：Manual S：Straight�※��

V ：CVC Male�VF：CVC Female�W ：Tube-End�S ：Swage Lock Equivalent

C：PCTFE�A：PFA�P：PI�M：Metal (option)


Handle Color


SD - --4 M S VF C EP

Option

A FlowA C

B

●Flow

Model

SD：SD type�Diaphragm�Valve

4：1/4"�6：3/8"�8：1/2"

V：CVC Male�※1�

S：Swage Lock � Equivalent

C：PCTFE�P：PI�A：PFA


Size Connection Type Seat Material Grade

SD 4

M：�Manual �Valve

Operational�Method

M

Ｗ：�Main Pipe

Connection

W

B：Branch

Valve�Shape

B V

15A,20A,�25A,32A,�40A,50A,�65A�(Code available only �for shunt type)

Port Size

15A C EP

Option

※1 Note : Contact us for 1VFC (CVC Female) type.�※ With the branch valves, it is possible to supply prefabricated assy(header).� Refer to the diagram in the right for flow.

- - -

※Contact our sales representative for branch type, etc..

Handle Color

RD : Red� GR : Green� SL : Silver� BK : Black� YE : Yellow� BR : Brown�

Non Murk : Blue(Standard)

RD :Red�GR :Green�SL :Silver�BK :Black

YE :Yellow�BR :Brown�Non Mark:�Blue(Standard)

φ42

H1

H

E EＤ�L

φ42

H1

H

E EＤ�L

L1

D

H

C

φ42

φB

F

H1

D

H

C

φ42

φB

H1

F

M

2-M5Depth5

45 �゚

Ｃ�

M

2-M5Depth5

45 �゚

Ｃ�

This valve is developed exclusively for liquid gas containers such as TEOS, and achieved an extraordinary clean level on top of safety. Adopting a non-sliding, direct-acting diaphragm mechanism achieved particle-free production and at the same time enabled a precision surface processing. This extensively enhanced the purging capability, resolved the problem of inner residue, and reduced the material contamination. In addition, maintenance of the product such as cleaning is facilitated due to the replaceable valve seat (assy), this in consequence enables reuse of the major part of valve, thus reducing the running cost.

WDDiaphragm Valve for Liquid Gases


■Parts for MaintenanceNo�

1�

2�

　2-1�

　2-2�

　2-3�

3

Quantity�

2�

1�

1�

1�

1�

1

Type�

WD4-D4M0241-06�

�

WD4-D4M0321-01�

�

�WD4-D4M0241-11

Material�

SUS316L�

―�

SUS316L�

SUS316L�

PCTFE�

SUS316L(PTFE Coating)

Parts�

Back Up Diaphragm�

Diaphragm Sub-Assy�

Diaphragm�

Seat Holder�

Valve Seat�

Gasket

①Body�

②Valve Seat�

③Seat Holder�

④Diaphragm�

⑤Stem�

⑥Bonnet�

⑦Cap�

⑧Gasket�

⑨O-ring�

⑩Thrust Washer

※1 When it is male, CVC equivalent, and valve open.

2

3

1

1

3

2

2-1�

2-2�

2-3

1234567

8

910

13


Internal Volume※1�Max.Working Pressure�

��


Internal Leakage Allowance�External Leakage Allowance�Cycle Life

1/4"�0.3�3.2cm3�

2.94MPa（G.）��

PCTFE：-10～42℃�PI：-10～150℃�PFA：-10～150℃�

�Valve Seat Leakage≦5×10-10Pa・m3/sec�External Leakage≦5×10-10Pa・m3/sec�30,000 repeats(N2 charged, own test)


��

Material


PCTFE,PI、PFA��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm

■FeaturesFeatures①Reduced inner capacity：�Minimizing the vertical hole to achieve 3.2cm3 of inner capacity adds excellent displacement features to this valve.�②Minimal seat volume (0.066cm3)：�Reduction of seat surface(0.3cm2) that is in contact with gas enhances the degas features, which in consequence prevents the expansion �of plastic caused by the material gases.�③Increased seal surface (3.5 times more, compared with previous type of our own)：�Increased seal surface prevent internal leakage caused by mixing-in of foreign particles.�④Diaphragm：�Using cobalt alloy of 500 series that is highly resistant to corrosion, and strict control of rolling process ensures a high durability of the product.��

STD��





Single

Grade�

Material��


��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�


�

WD Series　Straight Type/Branch Type

14

■Straight Type Dimensions

Model Type Fitting Connector H H1 H2 L E D C Munit: inch(mm)

WD4MS-VC-N-588 1/4"CVC Male （69.0）�（11.0）�（27.0）�（57.0）�（15.5）�（26.0）�（25.0）�（25.4）�

WD4MS-VFC 1/4"CVC Female （69.0）�（11.0）� ―� （70.6）�（22.3）�（26.0）�（25.0）�（25.4）�

WD4MS-W6C-N-544 1/4"Tube-End （69.0）�（11.0）�（27.0）�（48.0）�（11.0）�（26.0）�（25.0）�（25.4）�

2.72 0.43 1.63 2.24 0.61 1.02 0.98 1.00

2.72 0.43 2.78 0.88 1.02 0.98 1.00

2.72 0.43 1.63 1.89 0.43 1.02 0.98 1.00

Manual

■Parts for Maintenance

Model

WD4-D4M0241-06�

WD4-D4M0321-01�

WD4-D4M0241-11�

�

1�

2�

3

CodeType

WD4MS-VC-N-588 ■Product Code ListModel

WD：WD type�Diaphragm�Valve

4：1/4" 6：3/8"�8：1/2"

M：�Manual Valve

S：Straight�B：Branch


C：PCTFE�P：PI�A：PFA

STD�EP

A Flow�B Flow


WD 4 M S VF C EP

Option

- - -

1

3

2

2-1�

2-2�

2-3

Handle Color

A Flow B FlowA C

B

A C

B

●Flow

RD : Red�GR : Green�SL : Silver�WH : White�BK : Black�YE : Yellow

CM

45゚�

φ48

H1

H

H2

E ED

L2-M5

2-M5

CM

45゚�

φ48

H1

H

H2

E ED

L

2-M5

CM

45゚�

φ48

H1

H

H2

E ED

L

Depth5

Depth55

Depth555

15

RD Series consists of High-Pressure Manual Valves that with its compact body require even less torque to operate than the low torque types in the past. Due to the resin-coated handle that is newly employed, you can feel very smooth operation. A larger window hole and easy-to-see OPEN/CLOSE mark are adopted so that whether it is open or close is instantly noticed. The shunt port of the shunt type can be set to any direction.

RDHigh-Pressure Diaphragm Valve

The new cylinder-shaped actuator moves on a minimal line pitch, thus it is not necessary to consider the orientation after the installation. Also to be noted is the patented wedge-toggle structure that is incorporated in this valve, and ensures the operation even under high surge pressure. In addition, rigidity at the conjunction point between the body and actuator is increased so that the reliability is increased. It needs 0.4 ̃ 0.7MPa of operating air pressure, and a stable operation is ensured even at the low limit of the air pressure.





�Operating Pressure�Internal Leakage Allowance�External Leakage Allowance�

Cycle Life

1/4"�0.1�

１．０ｃｍ3�16.2MPa（G.）,20.6MPa（G.）�

PCTFE：-10～42℃�PI：-10～150℃�

�0.4～0.7MPa（G.）�

Valve Seat Leakage≦3×10-10Pa ・m3/s�External Leakage≦3×10-12Pa ・m3/s�

Pneumatic Valve 100,000 repeats (N2 charged, own test)�Manual 30,000 repeats(N2 charged, own test)

■Features of RD Manual Valve Series ■Features of RD Pneumatic Valve Series


△P（MPa）��0.1�0.5�0.98

�Air�

（ℓ/min）�16.0�50.0�93.0

�Water�（ℓ/min）�0.6�1.3�1.8

RD2：Cv0.04 RD4：Cv0.1 RD8：Cv0.28�Air�

（ℓ/min）�40�120�220

�Water�（ℓ/min）�1.4�3.2�4.1

�Air�

（ℓ/min）�140�410�760

�Water�（ℓ/min）�4.2�8.6�14.6


��

Material


PCTFE,PI��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm

1/8"�0.04�

０．１２ｃｍ3�

16.2MPa（G.）�

1/2"�0.28�６．５ｃｍ3�

20.6MPa（G.）�

Manual Valve (1/4") Pneumatic Valve (1/4")

7

6

54

1

2

3

1 Body2 Valve Seat3 Diaphragm4 Diaphragm Piece5 Cap6 Nut7 Handle Knob

1 Body2 Valve Seat3 Diaphragm4 Diaphragm Piece5 Cap6 Nut7 Actuator Assy

7

5

1

6

3

2

4

STD��





Single

Grade�

Material��


��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�


■ A new, high-pressure valve that is compactly designed and has a simple external appearance to match today's needs.�

■ Reduced torque and improved durability are added to the manual valve.�■ Simple and compact piping system is made possible by using the automatic valve that has a slim cylinder shape with an air piping in the upper side.�

■ Newly added 210K Type, High-Pressure Valve (1/2") satisfies the user seeking for Large Volume High-Pressure Valve.

RD Series　Straight Type

16

Model Type Fitting Connector L H H1 E B C M φA M1

RD2MSH-VC�

RD4MSH-VC

1/8"CVC Male�

1/4"CVC Male

（41.0）�

（57.0）�

（60.0）�

（81.0）�

（7.0）�

（11.0）�

（11.0）�

（15.5）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（34.0）�

（52.0）�



2-M4 Depth0.20�

2-M5 Depth0.20

RD2MSH-VFC�

RD4MSH-VFC

1/8"CVC Female�

1/4"CVC Female

（56.0）�

（76.0）�

（60.0）�

（81.0）�

（7.0）�

（11.0）�

（18.5）�

（22.3）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（34.0）�

（52.0）�



2-M4 Depth0.20�

2-M5 Depth0.20

RD8MSI-VC�

�

1/2"CVC Male

RD4MSI-VC 1/4"CVC Male

（77.0）�

�

（57.0）�

（99.0）�

�

（81.0）�

（16.0）�

�

（11.0）�

（20.5）�

�

（15.5）�

（36.0）�

�

（26.0）�

（36.0）�

�

（25.0）�

（28.0）�

�

（25.4）�

（60.0）�

�

（52.0）�

2-M5 Depth0.20

2-M5 Depth0.20



RD4MSI-VFC 1/4"CVC Female

RD8MSI-VFC�

�

1/2"CVC Female�

�

（76.0）�

（83.0）�

�

（81.0）�

（99.0）�

�

（11.0）�

（16.0）�

�

（22.3）�

（23.5）�

�

（26.0）�

（36.0）�

�

（25.0）�

（36.0）�

�

（25.4）�

（28.0）�

�

（52.0）�

（60.0）�

1.61�

2.24

2.36�

3.19

0.28�

0.43

0.43�

0.61

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.34�

2.05

2.20�

2.99

2.36�

3.19

0.28�

0.43

0.73�

0.88

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.34�

2.05

3.03

2.24

3.90

3.19

0.63

0.43

0.81

0.61

1.42

1.02

1.42

0.98

1.10�

�

1.00

2.36

2.05

2.99

3.27

3.19

3.90

0.43

0.63

0.88

0.93

1.02

1.42

0.98

1.42

1.00

1.10

2.05

2.36

2-M5 Depth0.20

2-M5 Depth0.20



RD4MSI-VC

■Manual Straight Type Dimensions


RD：RD type�Diaphragm �Valve

2：1/8"�4：1/4"�8：1/2"

Size

RD 4



M

S：Straight��

Valve Shape

S


C：PCTFE�P：PI


H：16.2MPa� I：20.6MPa

Pressure Connection Seat Material Grade

H V C EP- -

Option

-

Handle Color

unit: inch(mm)

RD : Red� GR : Green� SL : Silver� BK : Black� YE : Yellow� BR : Brown�


φA

H

H1

E BL

E

φA

H

H1

E BL

E

φA

H

H1

E BL

E

φA

H

H1

E BL

E

M1

45゚�

M C

M1

45゚�

M C

M1

45゚�

M C

M1

45゚�

M C

RD Series　Straight Type

17

RD2CSH-VFC

RD4CSI-VFC�

RD8CSI-VFC

1/4"CVC Female�

1/2"CVC Female

（70.6）�

（83.0）�

（112.0）�

（187.5）�

（11.0）�

（16.0）�

（22.3）�

（23.5）�

（26.0）�

（36.0）�

（25.0）�

（36.0）�

（25.4）�

（28.0）�

（38.0）�

（56.0）�

2-M5 Depth0.20�

2-M5 Depth0.20



RD4CSI-VC�

RD8CSI-VC

1/4"CVC Male�

1/2"CVC Male

（57.0）�

（77.0）�

（112.0）�

（187.5）�

（11.0）�

（16.0）�

（15.5）�

（20.5）�

（26.0）�

（36.0）�

（25.0）�

（36.0）�

（25.4）�

（28.0）�

（38.0）�

（56.0）�

2-M5 Depth0.20�

2-M5 Depth0.20



RD2CSH-VFC�

RD4CSH-VFC

1/8"CVC Female�

1/4"CVC Female

（56.0）�

（70.6）�

（89.5）�

（112.0）�

（7.0）�

（11.0）�

（18.5）�

（22.3）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（32.0）�

（38.0）�

2-M4 Depth0.20�

2-M5 Depth0.20



RD2CSH-VC�

RD4CSH-VC

1/8"CVC Male�

1/4"CVC Male

（41.0）�

（57.0）�

（89.5）�

（112.0）�

（7.0）�

（11.0）�

（11.0）�

（15.5）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（32.0）�

（38.0）�

2.78�

3.27

4.41�

7.38

0.43�

0.63

0.88�

0.93

1.02�

1.42

0.98�

1.42

1.00�

1.10

1.50�

2.20

2.24�

3.03

4.41�

7.38

0.43�

0.63

0.61�

0.81

1.02�

1.42

0.98�

1.42

1.00�

1.10

1.50�

2.20

2.20�

2.78

3.52�

4.41

0.28�

0.43

0.73�

0.88

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.26�

1.50

1.61�

2.24

3.52�

4.41

0.28�

0.43

0.43�

0.61

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.26�

1.50

2-M4 Depth0.20�

2-M5 Depth0.20



Model Type

■Automatic : Normally Close Type Dimensions

Fitting Connector L H H1 E D C M φA M1



2：1/8"�4：1/4"�8：1/2"��

Size

RD 4

C：�Pneumatic �Valve Normaly �Close


C

S：Straight��

Valve Shape

S

V：CVC Male�VF：CVC Female

C：PCTFE�P：PI




H V C EP- --

unit: inch(mm)

φA

H

H1E D

LE

φ38

H

H1

E DL

E

φA

H

H1

E DL

E

M1

45゚�

M C

φA

H

H1

E DL

E

M1

45゚�

M C

M1

45゚�

M C

M1

45゚�

M C

RD Series　Branch Type

18

RD2MBH-VC�

RD4MBH-VC

1/8"CVC Male�

1/4"CVC Male

（41.0）�

（57.0）�

（60.0）�

（82.0）�

（7.0）�

（11.0）�

（11.0）�

（15.5）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（34.0）�

（52.0）�

RD2MBH-VFC�

RD4MBH-VFC

1/8"CVC Female�

1/4"CVC Female

（56.0）�

（70.6）�

（60.0）�

（82.0）�

（7.0）�

（11.0）�

（18.5）�

（22.3）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（34.0）�

（52.0）�

RD4MBI-VC�

RD8MBI-VC

1/4"CVC Male�

1/2"CVC Male

（57.0）�

（77.0）�

（82.0）�

（99.0）�

（11.0）�

（16.0）�

（15.5）�

（20.5）�

（26.0）�

（36.0）�

（25.0）�

（36.0）�

（25.4）�

（28.0）�

（52.0）�

（60.0）�

RD4MBI-VFC�

RD8MBI-VFC

1/4"CVC Female�

1/2"CVC Female

（70.6）�

（83.0）�

（82.0）�

（99.0）�

（11.0）�

（16.0）�

（22.3）�

（23.5）�

（26.0）�

（36.0）�

（25.0）�

（36.0）�

（25.4）�

（28.0）�

（52.0）�

（60.0）�

1.61�

2.24

2.36�

3.23

0.28�

0.43

0.43�

0.61

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.34�

2.05

2.20�

2.78

2.36�

3.23

0.28�

0.43

0.73�

0.88

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.34�

2.05

2.24�

3.03

3.23�

3.90

0.43�

0.63

0.61�

0.81

1.02�

1.42

0.98�

1.42

1.00�

1.10

2.05�

2.36

2.78�

3.27

3.23�

3.90

0.43�

0.63

0.88�

0.93

1.02�

1.42

0.98�

1.42

1.00�

1.10

2.05�

2.36

Model Type

■Manual Open/Close Dimensions

RD4MBH-VC

A Flow B FlowA C

B

A C

B

●Flow

Fitting Connector L H H1 E D C M M1φA



2：1/8"�4：1/4"�8：1/2"��

Size

RD 4



M

B：Branch

Valve Shape

B


C：PCTFE�P：PI




H V C EP- -

�

Option

-

Handle Color

unit: inch(mm)

2-M5 Depth0.20�

2-M5 Depth0.20



2-M5 Depth0.20�

2-M5 Depth0.20



2-M4 Depth0.20�

2-M5 Depth0.20



2-M4 Depth0.20�

2-M5 Depth0.20



RD : Red�GR : Green�SL : Silver�BK : Black

YE : Yellow�BR : Brown�Non Mark:�Blue(Standard)

Flow

A Flow�B Flow

-

φA

H

H1

E DL

E

φA

H

H1

E DL

E

φA

H

H1

E DL

E

φA

H

H1

E DL

E

M1

45゚�

M C

M1

45゚�

M C

M1

45゚�

M C

M1

45゚�

M C

RD Series　Branch Type

19

（41.0）�

（57.0）�

（89.5）�

（112.0）�

（7.0）�

（11.0）�

（11.0）�

（15.5）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（32.0）�

（38.0）�

RD2□BH-VC�

RD4□BH-VC

1/8"CVC Male�

1/4"CVC Male

（56.0）�

（70.6）�

（89.5）�

（112.0）�

（7.0）�

（11.0）�

（18.5）�

（22.3）�

（19.0）�

（26.0）�

（19.0）�

（25.0）�

（17.0）�

（25.4）�

（32.0）�

（38.0）�

RD2□BH-VFC�

RD4□BH-VFC

1/8"CVC Female�

1/4"CVC Female

（57.0）�

（77.0）�

（112.0）�

（187.5）�

（11.0）�

（16.0）�

（15.5）�

（20.5）�

（26.0）�

（36.0）�

（25.0）�

（36.0）�

（25.4）�

（28.0）�

（38.0）�

（56.0）�

RD4□BI-VC�

RD8□BI-VC

1/4"CVC Male�

1/2"CVC Male

（70.6）�

（83.0）�

（112.0）�

（187.5）�

（11.0）�

（16.0）�

（22.3）�

（23.5）�

（26.0）�

（36.0）�

（25.0）�

（36.0）�

（25.4）�

（28.0）�

（38.0）�

（56.0）�

1.61�

2.24

3.52�

4.41

0.28�

0.43

0.43�

0.61

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.26�

1.50

2.20�

2.78

3.52�

4.41

0.28�

0.43

0.73�

0.88

0.75�

1.02

0.75�

0.98

0.67�

1.00

1.28�

1.50

2.24�

3.03

4.41�

7.38

0.43�

0.63

0.61�

0.81

1.02�

1.42

0.98�

1.42

1.00�

1.10

1.28�

2.20

2.78�

3.27

4.41�

7.38

0.43�

0.63

0.88�

0.93

1.02�

1.42

0.98�

1.42

1.00�

1.10

1.28�

2.20

RD4□BI-VFC�

RD8□BI-VFC

1/4"CVC Female�

1/2"CVC Female

Model Type

RD4CBH-VFC

A Flow B FlowA C

B

A C

B

●Flow

L H H1 E D C M φA M1

■Pneumatic : Normally Close

Fitting Connector



2：1/8"�4：1/4"�8：1/2"

Size

RD 4

C：�Pneumatic �Valve Nomaly�Close


C

B：Branch

Valve Shape

B

Flow


C：PCTFE�P：PI


A Flow�B Flow



H V C EP- - -

unit: inch(mm)

2-M5 Depth0.20�

2-M5 Depth0.20



2-M5 Depth0.20�

2-M5 Depth0.20



2-M4 Depth0.20�

2-M5 Depth0.20



2-M4 Depth0.20�

2-M5 Depth0.20



φA

H

H1

E DL

E

φA

H

H1

E DL

E

φA

H

H1

E DL

E

φA

H

H1

E DL

E

M1

45゚�

M C

M1

45゚�

M C

M1

45゚�

M C

M1

45゚�

M C

RD Series　2-Valve 3-Way Block Type (Special Order)

20

（120.6）�（120.0）�（38.0）�（66.5）�（36.8）�（11.0）�（27.05）�B23HRD4CH-VFC 1/4"CVC Female

■3-Valve 4-Way Block Type Dimensions

（142.0）�

（159.6）�

（96.5）�

（122.5）�

（32.0）�

（38.0）�

（98.0）�

（116.0）�

（36.0）�

（38.05）�

（11.0）�

（11.0）�

（22.0）�

（21.8）�

5.59�

6.28

3.80�

4.82

1.26�

1.50

3.86�

4.57

1.42�

1.50

0.43�

0.43

0.87�

0.86

B34HRD2CH-VFC�

B34HRD4CH-VFC

1/8"CVC Female�

1/4"CVC Female

Model Type Fitting Connector L H A B C D E


RD 2：1/8"�4：1/4"

Size

RD 4

C：Pneumatic Valve�M：Manual Valve


C

Block Valve

Number �of Valves

B

Shunt �Direction

3

3：Number of Actuators�4：Number of Ports

Number �of Ports

4

V：Vertical�H：Horizontal

H

●Contact our sales representative for the product code of Block Valve Special Order, Block Valve specifications (production).�●Contact our sales representative for the flow.


C：PCTFE�P：PI



Pressure Connection Seat�Material Grade

H V C EP- -

�3-Valve 4-Way Block Type (Special Order)

■2-Valve 3-Way Block Type Dimensions

（107.0）�（96.5）�（32.0）�（63.0）�（29.5）�（11.0）�（22.0）�

4.75 4.72 1.50 2.62 1.45 0.43 1.65

4.21 3.80 1.26 2.48 1.16 0.43 0.87B23HRD2CH-VF4V4C 1/4"CVC Female�1/4"CVC Male

Model Type Fitting Connector L H A B C D E


RD 2：1/8"�4：1/4"

Size

RD 2

C：Pneumatic Valve�M：Manual Valve


C

Block Valve

Number �of Valves

B

Shunt �Direction

Number �of Ports

2

2：Number of Actuators�3：Number of Ports

3

V：Vertical�H：Horizontal

H

●Contact our sales representative for the product code of Block Valve Special Order, Block Valve specifications (production).


C：PCTFE�P：PI



Pressure Connection Seat�Material Grade

H V C EP- -

unit: inch(mm)

unit: inch(mm)

Model Flow

A Flow�B Flow�※�

-

D

E EBL

A

C

H

D

E EB

L

A

C

H

C

A

D

E EBL

H

21

KCD(Compact type Diaphragm Valve)�

Straight Type�2-Valve 3-Way Block Type

KCD Series was designed and manufactured as a small flow valve aiming at the use in the gas supply system for semiconductor/LCD production process. It looks identical with KD series, yet it is more compact (approx. 20% smaller than KD Series) and lighter with the inner capacity of approx. 0.97cm3.

■Major SpecificationsSize�

Cv Value�Internal Volume�Max.Working Pressure�


��

Operating Pressure�Internal Leakage Allowance�External Leakage Allowance�Cycle Life

KCD4（1/4"）�0.1�

0.97cm3�

0.98MPa（G.）�PCTFE:-10～42℃�

PFA:Manual Valve-10～150℃,�Pneumatic Valve-10～120℃.(500,000 repeats at 150℃, actual test)�

PI:-10～150℃�0.4～0.7MPa（G.）�


Pneumatic Valve 2 mil. repeats (N2 charged, own test) Manual 100,000 repeats (N2 charged, own test)


��

Material

SUS316L��

PCTFE, PI, PFA��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm


■Features

■Handles

180° open/close KCD Standard 90° open/close

Open Close

①Reduced inner capacity:�Minimizing the vertical hole to achieve 1.2cm3 of inner capacity(KD1/4"male CVC type under valve open) adds excellent displacement features to this valve.�②Minimal seat volume (0.066cm3):�Reduction of seat surface(0.3cm2) that is in contact with gas enhances the degas features, which in consequence prevents the expansion of plastic �caused by the material gases.�③Increased seal surface (3.5 times more, compared with previous type of our own):�Increased seal surface prevent internal leakage caused by mixing-in of foreign particles.�④Diaphragm:�Using cobalt alloy of 500 series that is highly resistant to corrosion, and strict control of rolling process ensures a high durability of the product.�⑤Increased operation speed:�Using aluminum as a material for piston increases the valve operation speed.�⑥Spring washer structure:�Repulsion of spring washer ensures the shut off of the fluid when the valve is closed.�⑦Handles:2 different types, i.e., 90° open/close and 180° revolving types are available.

3

Seal Width

Diaphragm

124

567


△P（MPa）��0.1�0.5�0.98

�Air�

（ℓ/min）�50�130�240

�Water�（ℓ/min）�1.7�3.5�4.5

KCD4：Cv0.1






Single

Grade�

Material��


��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�


22

KCD4MS-VC

KCD4MS-VC 1/4"CVC Male （52.0）�（68.5）�（32.0）�（20.0）�（24.5）�（11.0）�（16.0）�（17.0）�

KCD4MS-VFC 1/4"CVC Female （66.0）�（68.5）�（32.0）�（20.0）�（24.5）�（11.0）�（23.0）�（17.0）�

KCD4MS-WC 1/4"Tube-End （50.0）�（68.5）�（32.0）�（20.0）�（24.5）�（11.0）�（15.0）�（17.0）�

2.05 2.70 1.26 0.79 0.96 0.43 0.63 0.67

2.60 2.70 1.26 0.79 0.96 0.43 0.91 0.67

1.97 2.70 1.26 0.79 0.96 0.43 0.59 0.67

Model Type Fitting Connector L H A B C D E Munit: inch(mm)

KCD Series　Straight Type

KCD4□S-VC

Model Type Fitting Connector L H A B D E

KCD4□S-VC 1/4"CVC Male （52.0）�（61.0）�（35.0）�（20.0）�（11.0）�（16.0）�（17.0）�

KCD4□S-VFC 1/4"CVC Female （66.0）�（61.0）�（35.0）�（20.0）�（11.0）�（23.0）�（17.0）�

KCD4□S-WC 1/4"Tube-End （50.0）�（61.0）�（35.0）�（20.0）�（11.0）�（15.0）�（17.0）�

2.05 2.40 1.38 0.79 0.43 0.63 0.67

2.60 2.40 1.38 0.79 0.43 0.91 0.67

1.97 2.40 1.38 0.79 0.43 0.59 0.67

M

■Pneumatic : Normally Close / Normally Open Dimensions��

unit: inch(mm)

■Manual Type : 180° Open/Close Valve Dimensions��


KCD：KCD type�Diaphragm�Valve

4：1/4" M：Manual�Q：90 ゚Manual

S：Straight�A：Angle�B：Branch�Ｌ：L-Shaped



STD�EP�SEP�(only vacuum�double-melt�material)

Handle ColorRD : Red� GR : Green� SL : Silver� WH : White� BK : Black� YE : Yellow�


Size Operation Method Valve Type Connection Seat Material Grade

KCD - --4 M S VF C EP

Option


KCD：KCD type�Diaphragm�Valve

4：1/4" C：Normally Close�O：Normally Open

S：Straight�A：Angle�B：Branch�Ｌ：L-Shaped


C：PCTFE�A：PFA�P：PI�　�

STD�EP�SEP�(only vacuum�double-melt�material)��

Size Operation Method Valve Type Connection Seat Material Option Grade

KCD - -4 C S VF C EP

2-M5Depth5

45゚�

M

A

H

D

Ｃ�

E BL

E

2-M5Depth5

45゚�

M

A

H

D

Ｃ�

E BL

E

2-M5Depth5

45゚�

M

A

H

D

Ｃ�

E BL

E

A

H

D

E BL

E

2-M5Depth5

45゚�

M

2-M5Depth5

45゚�

M

A

H

D

E BL

E

2-M5Depth5

45゚�

M

A

H

D

E BL

E

23

KCD Series　2-Valve 3-Way Block Type

■Internal Flow


■FeaturesThese are the highly advanced valves that enabled the piping system to be space-saving, and achieved a minimal dead space as well as cost reduction at the same time. In addition to the outgas-free status in the valve due to its outstandingly excellent degas feature, a metal diaphragm structure without any sliding mechanism is newly employed for the part in contact with gases. Particle-free status is achieved due to the combination of the special valve seat structure that is newly developed in order to minimize the generation of dust particles and super precision clean wash process. Further, as a result of extremely minimized dead space due to avoidance of metal gasket, less purge time is now required.



�



KCD4（1/4"）�0.07�2.8cm3�

0.98MPa（G.）�PCTFE：-10～42℃�

PFA：Manual Valve-10～150℃,�Pneumatic Valve-10～120℃(500,000 repeats at 150℃, actual test)�

PI：-10～150℃�0.4～0.7MPa（G.）�


Pneumatic Valve 2 mil. repeats (N2 charged, own test) Manual 100,000 repeats (N2 charged, own test)


��

Material

SUS316L, SUS316LE��

PCTFE, PI, PFA��

Nickel/Cobalt Alloy

Body��

Seat��

Diaphragm

A Flow B Flow

A Flow B Flow

B23V type B23H type B23V type B23H type

A

B

C A CB

A

B

C A CB


△P（MPa）��0.1�0.5�0.98

�Air�

（ℓ/min）�35�100�190

�Water�（ℓ/min）�1.2�2.7�3.6

KCD4：Cv0.07

B23VKCD4□□-VFC-□�

B23VKCD4□□-VFC-□� 1/4"CVC Female（115.0）�（65.5）�（109.0）�（56.0）�（57.5）�（11.0）�（29.5）�（12.0）�（40.0）�4.53 2.58 4.29 2.20 2.26 0.43 1.16 0.47 1.57

Model Type Fitting Connector L H A B C D E Ｍ1 Ｍ2

■Pneumatic : Normally Close / Normally Open Dimensions��

unit: inch(mm)


※1 Refer to P.17, Internal Flow for direction of ports and flows.�※2 Only one code shall be shown when all actuators are same.�※3 In the case that the fittings are different in type, please list the code in order of A, B, C shown in the internal flow on P.17.�　　ex) CVC Female for "A", CVC Female for "B", CVC Male for "C", the connection shall be in order of VF･VF･V.

STD�EP�SEP�(only vacuum�double-melt�material)

Grade

EP

L：Laterally�　Reversed

A�B

A

Port Dir.FlowV1 V2


Seat Material

CC O


C：Normally Close�O：Normally Open�※2

Connection

VF

Block Valve

B

Number of�Actuators

2

Number of�Ports

3


Number of Ports

V

Model

KCD

KCD

4：1/4"��

Size

4 - - -

Option






Single

Grade�

Material��

Inner Surface Roubhness�Polishing�

��

Cleaning��


Packing

EP��

��






SEP�SUS316LE�


A

D

H

E EBL

C

Ｍ1

Ｍ2

4-Ｍ5�Depth5

24

Despite of the fact that this check valve has a mechanism of sliding poppet, precision interlocking assembly offers a smooth open/close operation. In addition, with the specially designed elastomer, sealing is ensured through low to high pressure, and due the compact design, remaining gas is dramatically reduced.

ICCheck Valve

①Using SUS316L as a material, corrosion resistance is improved.�②When a strong reverse flow occurs, the poppet hits the body by metal to metal. This mechanism helps to always keep the pressure and stress of the molded packing and poppet unchanged, thus extending the product lifetime.�③Specially designed molded packing is used as an elastomer instead of existing O-ring so that the room for remaining gas is minimized.�④Guide-stopper / support ring / gasket are all integrated into a simple but essential component. In addition, use of metal seal ensures external airtightness.�⑤Assembly is made as the bodies precisely interlock to each other. This brings the poppet and the molded packing to be kept in face-t-face contact, and as a result, an excellent sealing property is achieved.�⑥Clamping the body housing tighter and using the best out of the elastomer's elasticity, excellent sealing property (inner and outer) is achieved. In combination with the stepping treatment of the molded packing and body, a blow-out is avoided.

■Dimensions

IC4-□-V□�

IC8-□-V□�

1/4"CVC Male�

1/2"CVC Male

（19.0）�

（24.0）�

（56.4）�

（69.0）�

（25.4）�

（32.0）�

（15.5）�

（18.5）�

―�

―�

IC4-□-VF□�

IC8-□-VF□�

1/4"CVC Female�

1/2"CVC Female

（19.0）�

（24.0）�

（70.0）�

（70.4）�

（25.4）�

（32.0）�

（22.3）�

（22.5）�

0.75�

0.94

2.22�

2.72

1.00�

1.26

0.61�

0.73

0.75�

0.94

2.76�

2.77

1.00�

1.26

0.88�

0.89

―�

―�

IC4-□-S□�

IC6-□-S□�

IC8-□-S□�



1/2"Swage Lock Equivalent

（19.0）�

（24.0）�

（24.0）�

（46.0）�

（55.9）�

（57.8）�

（25.4）�

（32.0）�

（32.0）�

（8.0）�

（9.5）�

（12.7）�

（61.2）�

（70.5）�

（78.0）�

0.75�

0.94�

0.94

1.81�

2.20�

2.28

1.00�

1.26�

1.26

0.31�

0.37�

0.50

2.41�

2.78�

3.07

Model Type Fitting Connector A L D E L1unit: inch(mm)

IC4-□-VF

■Major Specifications ■Product GradeSize�

Cv Value�Max.Working Pressure�

��


External Leakage Allowance�Finishing Grade Inside�Cracking Stress(kPa)�Reverse Pressure Seal(kPa)�

�

1/4"�0.35

1/2"�1.1

3/8"�1.1�

16.2MPa（G.）��

-10～80℃��

≦3×10-12Pa・m3/sec�STD、EP

��

1/3：2.30�29.4

��

1/3：2.30�29.4

��

1：6.89�29.4

��

10：68.9�4.9

��

25：172�4.9

STD��


�3-bath degrease�

+ �6-bath precision washing�

��

Single

Grade�Material�


��

Cleaning��


Packing

EP��


+ �6-bath precision�

+�8-bath super precision washing�

Class 10,�Clean circumstances�Double packing with clean pack,�

N2 charged

■Notes :

■Features■Internal Structure

① Seals for the valves need to be classified in appropriate differential pressure according to the clacking pressure.�② When the differential pressure is little under certain usage, it may show different sealing properties.�③ Use at the beginning or reuse after a long period of non-use may show a little higher cracking pressure than what is described in the specifications.�④ Clacking pressure means the pressure of a flow that constantly runs, and the seal opens at a lower pressure than what is listed.


IC

Model

IC：Check Valve 4：1/4"�6：3/8"�8：1/2"

V ：CVC Male�VF：CVC Female�S ：Swage Lock�　　Equivalent

F ：Fluorine Rubber�N ：Nitrile Rubber�S ：Silicon Rubber�NE：Neoprene Rubber

STD�EP

Size Connection Seat Material Grade

4

kPa 1/3H：2.30� 1H：6.89� 10H：68.9� 25H：172

1/3H

Clacking Pressure

V F EP- -

�SUS316L

※Compatible only with 1/4" size.

※KL：Kalretz

1

2

3

4 5

6

φA

DE E

L

φA

DE EL

φA

D EELL1

IB(Bellows Valve)�

Straight Type�Variac Type�Needle Type

25


Cv Value�Internal Volume (cc)�Max.Working Pressure�


�Operating Pressure�Internal Leakage Allowance�External Leakage Allowance�

Cycle Life

1/4"�0.3�

3.03（CVC Male）�

1/2"�0.85�


��

VAC～0.98MPa（G.）��

-10～100℃��

0.4～0.7MPa（G.）�5×10-10Pa・m3/sec or less�5×10-10Pa・m3/sec or less�

Pneumatic Valve 1 mil. repeats�Manual 100,000 repeats (N2 charged, own test)

■Flow Characteristics (Air･Water / 21℃) ■Standard Material�

△P（MPa）��0.1�0.5�0.98

IB4：Cv0.3�Air�

（ℓ/min）�150�450�800


（ℓ/min）�425�1275�2270


■Features

■Handles

With IB open/close indicator (option)IB Standard Specification

Open Close

①The valve is designed to minimize the dead volume.�②Handles : 3 different types, i.e., standard type with/without open/close indicator, 90° open/close with lock function are available.�③Installation can be made either by panel-mount or bottom-mount.

In addition to the use in gas supply system, IB Series offers various valves that have special features such as high temperature-durable, high corrosion-resistance, variable flow, etc. for the use in exhaust piping. Shape of the seat has been changed to achieve reduction of particles, higher durability and further improvement. To select manual valves for the similar application, we recommend SB Series that is replacing the previous type.

Manual Valve Pneumatic Valve

(with the secondary port open)

Body�

Bellows�

Disk�

Bellows Flange�

Bonnet�

Bonnet Gasket

SUS316L�

SUS316L�

PCTFE�

SUS316L�

SUS304�

PCTFE

①Body�

②Disk�

③Trim Unit�

④Bonnet Gasket�

⑤Actuator�

⑥Handle

■Product GradeSTD(Standard Product)�

SUS316L�Ry3.2μm or less�

No bead cut at welding part�

Unfinished��

3-bath degrease� + �

6-bath precision washing��

Ordinary air-conditioned room�Single

Grade�Material�

　　　　　��

Cleaning��

After Cleaning�Packing

EP(Electropolished Product)�SUS316L�

Ry0.7μm or less�No bead cut at welding part�Electropolishing finish�

(excluding specified smoothness)�3-bath degrease�


+�8-bath super precision washing�Class 10, Clean circumstances�Double packing with clean pack, N2 charged

��Body�Inner Surface�

Bellows (trim)

Inner�Surface�Roughness

1234

5

6

26

IB4MS-V□□�

※Only STD grade is available when the connection is swage lock type.�※Contact our sales representative for handle colors.


IB4MS-V□□�

IB8MS-V□□�

1/4" CVC Male�

1/2" CVC Male

（57.1）�

（65.1）�

―�

―�

（58.0）�

（65.0）�

―�

―�

（11.0）�

（16.0）�

（27.0）�

（34.0）�

（0.3）�

（0.85）�

（25.4）�

（25.4）�

2.25�

2.56

2.28�

2.56

0.43�

0.63

1.06�

1.34

0.01�

0.03

1.00�

1.00

IB4MS-S□□�

IB6MS-S□□�

IB8MS-S□□�

1/4"�Swage Lock Equivalent�


1/2"�Swage Lock Equivalent

―�

―�

―�

（7.9）�

（9.5）�

（12.7）�

（48.0）�

（64.0）�

（64.0）�

（58.0）�

（65.0）�

（65.0）�

（14.3）�

（12.7）�

（12.7）�

（27.0）�

（34.0）�

（34.0）�

（25.4）�

（25.4）�

（25.4）�

（0.3）�

（0.85）�

（0.85）�

0.31�

0.37�

0.50

1.89�

2.52�

2.52

2.28�

2.56�

2.56

0.56�

0.50�

0.50

1.06�

1.34�

1.34

1.00�

1.00�

1.00

0.01�

0.03�

0.03

1/4" Butt Weld�

3/8" Butt Weld�

1/2" Butt Weld

IB4MS-W□□�

IB6MS-W□□�

IB8MS-W□□�

（6.35）�

（9.53）�

（12.7）�

（150.0）�

（150.0）�

（150.0）�

（58.0）�

（65.0）�

（65.0）�

―�

―�

―�

（14.3）�

（16.0）�

（16.0）�

（27.0）�

（34.0）�

（34.0）�

（25.4）�

（25.4）�

（25.4）�

�

（0.3）�

（0.85）�

（0.85）�

―�

―�

（70.6）�

（83.0）�

IB4MS-VF□□�

IB8MS-VF□□�

1/4" CVC Female�

1/2" CVC Female

―�

―�

（58.0）�

（65.0）�

（11.0）�

（16.0）�

（27.0）�

（34.0）�

（25.4）�

（25.4）�

（0.3）�

（0.85）�

2.78�

3.27

2.28�

2.56

0.43�

0.63

1.06�

1.34

1.00�

1.00

0.01�

0.03

IB4MS-S□□-JH�

IB6MS-S□□-JH�

IB8MS-S□□-JH




―�

―�

―�

（7.9）�

（9.5）�

（12.7）�

（48.0）�

（64.0）�

（64.0）�

（58.0）�

（65.0）�

（65.0）�

（14.3）�

（12.7）�

（12.7）�

（27.0）�

（34.0）�

（34.0）�

（25.4）�

（25.4）�

（25.4）�

�

（0.3）�

（0.85）�

（0.85）�

0.31�

0.37�

0.50

1.89�

2.52�

2.52

2.28�

2.56�

2.56

0.56�

0.50�

0.50

1.06�

1.34�

1.34

1.00�

1.00�

1.00�

�

0.01�

0.03�

0.03

IB4MS-V□□-JH�

IB8MS-V□□-JH

1/4" CVC Male�

1/2" CVC Male

―�

―�

―�

―�

―�

―�

―�

（1.0）�

（1.0）�

（1.24）�

0.25�

0.38�

0.50

5.91�

5.91�

5.91

2.28�

2.56�

2.56

0.56�

0.63�

0.63

1.06�

1.34�

1.34

1.00�

1.00�

1.00�

�

0.01�

0.03�

0.03

0.04�

0.04�

0.05

―�

―�

―�

―�

―�

―�

―�

（57.1）�

（65.1）�

―�

―�

（58.0）�

（65.0）�

（11.0）�

（16.0）�

（27.0）�

（34.0）�

（25.4）�

（25.4）�

（0.3）�

（0.85）�

2.25�

2.56

2.28�

2.56

0.43�

0.63

1.06�

1.34

1.00�

1.00

0.01�

0.03

unit: inch(mm)

Model Type Fitting Connector d L L1 H H1 H2 M Cv Value

IB Series　Straight Type

Option■Product Code ListModel

IB：IB type�Bellows Seal �Valve

4：1/4"�6：3/8"�8：1/2"

M：Manual S：Straight�A：Angle

C：PCTFE�M：SUS316L�(PFA Coating)

Size Operation Method Valve Type Bonnet Gasket Material

IB -4 M

V ：CVC Male�VF：CVC Female�S ：Swage Lock� Equivalent�W ：Butt Weld

Connection

V

C：PCTFE�F：Fluorine Rubber�A：PFA

Disk Material

CS C -

STD�EP

Grade

-

No Code：Standard�JH ：Open/Close� Indicator�(IB Series)

Handle Type

JH EP

tφ48

H

H1

H2

L

2-M5Depth8

45゚�

M

2-M5Depth8

45゚�

M

φ48

H

H1

H2

L

2-M5Depth8

45゚�

M

2-M5Depth8

45゚�

M

2-M5Depth8

45゚�

M

φ48

H

H1

H2

L

2-M5Depth8

φ48

H1

H

φdH2

t

L

45゚�

M

LL1L1

φ48

H

H1

H2

LL1L1

φ48

H

H1

H2

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

27


―�

―�

2.78�

3.27

―�

―�

IB4MS-VF□□-JH�

IB8MS-VF□□-JH

1/4" CVC Female�

1/2" CVC Female

2.28�

2.56

0.43�

0.63

1.06�

1.34

0.01�

0.03

Model Type Fitting Connector td L MH H1 H2 Cv Valueunit: inch(mm)

1/4" Butt Weld�

3/8" Butt Weld�

1/2" Butt Weld

IB4MS-W□□-JH�

IB6MS-W□□-JH�

IB8MS-W□□-JH

0.25�

0.38�

0.50

0.04�

0.04�

0.05

5.91�

5.91�

5.91

2.28�

2.56�

2.56

0.43�

0.63�

0.63

1.06�

1.34�

1.34

1.00�

1.00

（70.6）�

（83.0）�

（58.0）�

（65.0）�

（11.0）�

（16.0）�

（27.0）�

（34.0）�

（0.3）�

（0.85）�

（25.4）�

（25.4）�

1.00�

1.00�

1.00

0.01�

0.03�

0.03

（6.35）�

（9.53）�

（12.7）

（1.0）�

（1.0）�

（1.24）�

（150.0）�

（150.0）�

（150.0）�

（58.0）�

（65.0）�

（65.0）�

（11.0）�

（16.0）�

（16.0）�

（27.0）�

（34.0）�

（34.0）�

（25.4）�

（25.4）�

（25.4）�

（0.3）�

（0.85）�

（0.85）�





�

IB4QS-S□□�

IB6QS-S□□�

IB8QS-S□□�

1.89�

2.52�

2.52

0.31�

0.37�

0.50

2.90�

3.24�

3.24

0.56�

0.50�

0.50

1.06�

1.34�

1.34

1.00�

1.00�

1.00

0.01�

0.03�

0.03

（48.0）�

（64.0）�

（64.0）�

（7.9）�

（9.5）�

（12.7）�

（73.7）�

（82.3）�

（82.3）�

（14.3）�

（12.7）�

（12.7）�

（27.0）�

（34.0）�

（34.0）�

（25.4）�

（25.4）�

（25.4）�

（0.3）�

（0.8）�

（0.8）�

IB4QS-V□□�

IB8QS-V□□�

1/4" CVC Male�

1/2" CVC Male

―�

―�

2.25�

2.56

2.91�

3.23

0.43�

0.63

1.06�

1.34

1.00�

1.00

0.01�

0.03

（57.1）�

（65.1）�

（74.0）�

（82.0）�

（11.0）�

（16.0）�

（27.0）�

（34.0）�

（25.4）�

（25.4）�

（0.3）�

（0.8）�

Model Type Fitting Connector ML L1 H H1 H2 Cv Valueunit: inch(mm)

IB Series　Straight Type

IB4QS-V□□� ■Product Code List

※Only STD grade is available when the connection is swage lock type.�※Contact our sales representative for handle colors.

Model


4：1/4"�6：3/8"�8：1/2"

Q：90°� Manual Valve

S：Straight�A：Angle



IB -4 Q


Connection

V


Disk Material

CS C -

STD�EP

Grade

EP

2-M5Depth 8

45゚�

M

φ48

H

H1

H2

L

φ48

H1

H

φdH2

t

L

2-M5Depth 8

45゚�

M

2-M5Depth 8

45゚�

M

49

H

H1

H2

L

2-M5Depth 8

45゚�

M

49

H

H1

H2

LL1 L1

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

28

IB4□S-V□□�

■Pneumatic : Normally Close / Normally Open Dimensions




IB4□S-S□□�

IB6□S-S□□�

IB8□S-S□□�

1.89�

2.52�

2.52

2.28�

2.64�

2.64

0.56�

0.50�

0.50

0.01�

0.03�

0.03

1.00�

1.00�

1.00

1.54�

1.89�

1.89

0.31�

0.37�

0.50

（48.0）�

（64.0）�

（64.0）�

（58.0）�

（67.0）�

（67.0）�

（14.3）�

（12.7）�

（12.7）�

（0.3）�

（0.85）�

（0.85）�

（25.4）�

（25.4）�

（25.4）�

（39.0）�

（48.0）�

（48.0）�

（7.9）�

（9.5）�

（12.7）�

―�

―�

―�

IB4□S-V□□�

IB8□S-V□□�

1/4" CVC Male�

1/2" CVC Male

2.25�

2.56

2.28�

2.64

0.43�

0.63

0.01�

0.03

1.00�

1.00

1.54�

1.89

（57.1）�

（65.1）�

（58.0）�

（67.0）�

（11.0）�

（16.0）�

（0.3）�

（0.85）�

（25.4）�

（25.4）�

（39.0）�

（48.0）�

―�

―�

―�

―�

1/4" Butt Weld�

3/8" Butt Weld�

1/2" Butt Weld

IB4□S-W□□�

IB6□S-W□□�

IB8□S-W□□�

5.91�

5.91�

5.91

0.04�

0.04�

0.05

0.25�

0.38�

0.50

2.28�

2.64�

2.64

0.43�

0.63�

0.63

1.54�

1.89�

1.89

―�

―�

―�

1.00�

1.00�

1.00

0.01�

0.03�

0.03

（150.0）�

（150.0）�

（150.0）�

（1.0）�

（1.0）�

（1.24）�

（6.35）�

（9.53）�

（12.7）�

（58.0）�

（67.0）�

（67.0）�

（11.0）�

（16.0）�

（16.0）�

（39.0）�

（48.0）�

（48.0）�

（25.4）�

（25.4）�

（25.4）�

（0.3）�

（0.85）�

（0.85）�

IB4□S-VF□□�

IB8□S-VF□□�

1/4" CVC Female�

1/2" CVC Female

2.78�

3.27

2.28�

2.64

0.43�

0.63

0.01�

0.03

1.00�

1.00

1.54�

1.89

（70.6）�

（83.0）�

（58.0）�

（67.0）�

（11.0）�

（16.0）�

（0.3）�

（0.85）�

（25.4）�

（25.4）�

（39.0）�

（48.0）�

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

Model Type Fitting Connector td L A MH H1 L1 Cv Valueunit: inch(mm)



※Only STD grade is available when the connection is swage lock type.�※For the pneumatic valve with the maximum usable temperature at 180℃, materials used for the component shall be ; � F : Fluorine Rubber for disk / SUS316L (PFA Coating) for bonnet gasket. � With this combination, the actuator dimensions (φA) shall be φ39 for 1/4" ̃ 1/2". A Hot shell for the dedicated heater is also available.

Model


4：1/4"�6：3/8"�8：1/2"

S：Straight�A：Angle



IB -4 C


Connection

V


Disk Material

CS C -

STD�EP

Grade

EP

2-M5Depth 8

45゚�

M

2-M5Depth 8

45゚�

M

2-M5Depth 8

45゚�

M

φA

H

H1

L

2-M5Depth 8

45゚�

M

φA

H

H1

L

φA

H

H1

L

φd t

φA

H

H1

LL1 L1

RC1/8

RC1/8

RC1/8

RC1/8

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

29

IB Series　Variac Type

■Comparison of Old / � New Method

■Features

■Characteristics of Cv Value� (Disk Material : PCTFE ・O-Ring)

■Major SpecificationsType (Size)�Disk Material�Cv Value�

Internal Volume（cc）�Max.Working Pressure�

�



�PCTFE, O-Ring (Fluorine Rubber)�

��


Standard　-10～100℃�High Temperature System　-10～180℃�

�0.4～0.7MPa（G.）�

5×10-10Pa・m3/sec or less�5×10-10Pa・m3/sec or less�

1 mil. repeats(N2 charged, own test)

1/4"��

0.01～0.28�3.03（CVC Male）�

1/2"(3/8")��

0.01～0.74�5.88（CVC Male）�

１� ２�８� ９� ０�１�２� ８�９�０�Previous Method Variac Valve

Cv Value00

90

180

270

360

450

570

0.05 0.1 0.5 1.0

Rotatio

n Angle of Handle (degree)

1/4" PCTFE

1/4" O-Ring

1/2" PCTFE

1/2" O-Ring

IB4V□S-V□□�

IB4V□S-VF□□�

IB8V□S-VF□□�

1/4" CVC Female�

1/2" CVC Female

2.78�

3.27

1.73�

2.13

2.64�

2.95

0.43�

0.63

―�

―�

1.00�

1.00

（70.6）�

（83.0）�

（44.0）�

（54.0）�

（67.0）�

（75.0）�

（11.0）�

（16.0）�

（25.4）�

（25.4）�

IB4V□S-V□□�

IB8V□S-V□□�

1/4" CVC Male�

1/2" CVC Male

2.25�

2.56

1.73�

2.13

2.64�

2.95

0.43�

0.63

―�

―�

1.00�

1.00

（57.1）�

（65.1）�

（44.0）�

（54.0）�

（67.0）�

（75.0）�

（11.0）�

（16.0）�

（25.4）�

（25.4）�




IB4V□S-S□□�

IB6V□S-S□□�

IB8V□S-S□□�

1.89�

2.52�

2.52

1.73�

2.13�

2.13

2.64�

2.95�

2.95

0.56�

0.50�

0.50

0.31�

0.37�

0.50

1.00�

1.00�

1.00

（48.0）�

（64.0）�

（64.0）�

（44.0）�

（54.0）�

（54.0）�

（67.0）�

（75.0）�

（75.0）�

（14.3）�

（12.7）�

（12.7）�

（7.9）�

（9.5）�

（12.7）�

（25.4）�

（25.4）�

（25.4）�

Model Type Fitting Connector L A C D L1 Munit: inch(mm)■Dimensions

①Flow can be controlled by rotating the black handle with knurl located on the upper part of actuator.�②The valve seat is so designed that it produces less dust and gas residue.�③Using a variac valve, a piping layout can be simplified.�④It can be used for high temperature system (maximum usable temperature=180℃). A dedicated heater (hot shell) is also available.

■Product GradeSTDSTD(Standard Product)�SUS316L�

Ry3.2μm or less�No bead cut at welding part�

Unfinished��

3-bath degrease�+�


Ordinary air-conditioned room�

Single

Grade�Material��

Cleaning��

After Cleaning�

Packing


Bellows (trim)


Ry0.7μm or less�No bead cut at welding part�Electropolishing finish�(excluding specified smoothness)�3-bath degrease�

+�6-bath precision�

+�8-bath super precision washing�Class 10, Clean circumstances�Double packing with clean pack,�

N2 charged

※Only STD grade is available when the connection is swage lock type.�※For the valve with the maximum usable temperature at 180℃, materials used for the component shall be ; � F : Fluorine Rubber for disk / SUS316L (PFA Coating) for bonnet gasket.� With this combination, the actuator dimensions (φA) shall be φ44 for 1/4" ̃ 1/2". A Hot shell for the dedicated heater is also available.�※316L is used for all parts that come in contact with gases.



4：1/4"�6：3/8"�8：1/2"

VC：Normally Close�VO：Normally Open

S：Straight C：PCTFE�M：SUS316L�(PFA Coating)


IB -4 VC

V ：CVC Male�VF：CVC Female�S ：Swage Lock� Equivalent

Connection

V

C：PCTFE�F：Fluorine Rubber

Disk Material

CS C -

STD�EP

Grade

EP

Inner�Surface�Rough-�ness��

2-M5Depth 8

45゚�

M

2-M5Depth 8

45゚�

M

φA

D

C

L

２�１�０�９�

2-M5Depth 8

45゚�

M

φA

D

C

L

２�１�０�９�

φA

H1

H

LL1 L1

①Body　�

②Air Inlet　�

③Handle Lock Screw�

④Handle�

⑤Gauge1

234

5

２�１�０�９�

RC1/8

RC1/8

RC1/8

30

IB Series　Flow Control Needle Valve

■Internal� Structure

■Features

■Characteristics of Cv Value


Internal Volume(cc)�Max.Working Pressure�

�



��

VAC～0.98MPa（G.）�-10～100℃�

��

0.4～0.7MPa（G.）��

接ガス部は全てSUS316Lを使用�

1/4"（Orifice φ1.4）�0.017

1/4"（Orifice φ4.0）�0.27

IB4BN4.0S-VM

0.16�

0.16

IB4BN1.4S-VFM�

IB4BN4.0S-VFM

1/4" CVC Female�

1/4"CVC Female

2.78�

2.78

4.13�

4.13

1.10�

1.10

0.43�

0.43

1.06�

1.06

1.00�

1.00

（0～4.0）�

（0～4.0）�

（70.6）�

（70.6）�

（105.0）�

（105.0）�

（28.0）�

（28.0）�

（11.0）�

（11.0）�

（27.0）�

（27.0）�

（25.4）�

（25.4）�

0.16�

0.16

IB4BN1.4S-VM�

IB4BN4.0S-VM

1/4" CVC Male�

1/4" CVC Male

2.25�

2.25

4.13�

4.13

1.10�

1.10

0.43�

0.43

1.06�

1.06

1.00�

1.00

（0～4.0）�

（0～4.0）�

（57.1）�

（57.1）�

（105.0）�

（105.0）�

（28.0）�

（28.0）�

（11.0）�

（11.0）�

（27.0）�

（27.0）�

（25.4）�

（25.4）�

Model Type Fitting Connector L H A H1 H2 M Sunit: inch(mm)■Dimensions

①Super-precisely processed needle assy that has no backrush enables to control even a very small flow.�②Metal gasket that is featured as standard improves the heat resistance.



4：1/4" S：Straight STD�EP

Size Valve Type Grade

IB - -4


Connection

VS

M：Metal

Seat Material

M

B：�Non-Backrush

B EP

N：Needle 1.4：1.4mm�4.0：4.0mm

N 1 ・� 4

Orifice Diameter

��

3.03（CVC Male）�VAC～0.98MPa（G.）�

�

-10～150℃��

0.4～0.7MPa（G.）�―�

1×10-10Pa・m3/sec or less�―�

Orifice�Diameterφ1.4

Orifice�Diameterφ4.0

Handle Rotatio

ns

Cv Value0 0.01 0.02

8�

�7

6

5

4

3

2

1

Cv Value0 0.1 0.2 0.3

Handle Rotatio

ns8�

�7

6

5

4

3

2

1

①Body　�

②Needle　�

③Bonnet Gasket�　 (Metal)�

④Trim Unit�

⑤Gauge�

⑥Handle Lock Screw�

⑦Handle




Unfinished��




Grade�Material�

　　　　　��

Cleaning��








Bellows (trim)


φA

H

H1

S

H2

L

45゚�

2-M5　Depth 8

M

45゚�

2-M5　Depth 8

M

φA

H

H1

L

S

H2

12

3

4

6

7

5

SB(Bellows Valve)�

Straight Type

31


Cv Value�Internal Volume (cc)�Max.Working Pressure�

�



1/4"�0.3�


1/2"�0.85�


��


-10～100℃��

0.4～0.7MPa（G.）�5×10-10Pa・m3/sec or less�5×10-10Pa・m3/sec or less�

100,000 repeats(N2 charged, own test)

■Flow Characteristics (Air･Water / 21℃) ■Standard Material�

△P（MPa）��0.1�0.5�0.98


（ℓ/min）�150�450�800


（ℓ/min）�425�1275�2270

■Features

■Handles

With open/close indicator

Open Close

①The valve is designed to minimize the dead volume.�

②Handle with an open/close indicator is standardized.�

③Installation can be made by bottom-mount.�

④Lower in height than IB Series.

With a design concept of reasonable progress, "SB" Series is developed to succeed IB Series.�Responding to the needs arose from many users, the open / close indicator is featured as standard with SB Series, while it was option with the previous IB Series.

(with the secondary port open)

Body�

Bellows�

Disk�

Bellows Flange�

Cap�

Bonnet Gasket

SUS316L�

SUS316L�

PCTFE�

SUS316L�

SUS304�

PCTFE




Unfinished��




Grade�Material�

　　　　　��

Cleaning��








Bellows (trim)


32

SB4MS-V□□�

※Only STD grade is available when the connection is swage lock type.

■Manual Open / Close Dimensions

SB4MS-V□□�

SB8MS-V□□�

1/4" CVC Male�

1/2" CVC Male

2.25�

2.56

―�

―�

2.61�

2.80

―�

―�

0.43�

0.63

0.01�

0.03

1.00�

1.00

（57.1）�

（65.1）�

（66.2）�

（71.1）�

（11.0）�

（16.0）�

（0.3）�

（0.85）�

（25.4）�

（25.4）�

SB4MS-S□□�

SB6MS-S□□�

SB8MS-S□□�




�

―�

―�

―�

0.31�

0.37�

0.50

1.89�

2.52�

2.52

2.61�

2.80�

2.80

0.56�

0.50�

0.50

1.00�

1.00�

1.00

0.01�

0.03�

0.03

（7.9）�

（9.5）�

（12.7）�

（48.0）�

（64.0）�

（64.0）�

（66.2）�

（71.1）�

（71.1）�

（14.3）�

（12.7）�

（12.7）�

（25.4）�

（25.4）�

（25.4）�

（0.3）�

（0.85）�

（0.85）�

1/4" Butt Weld�

3/8" Butt Weld�

1/2" Butt Weld

SB4MS-W□□�

SB6MS-W□□�

SB8MS-W□□�

0.25�

0.38�

0.50

5.91�

5.91�

5.91

2.61�

2.80�

2.80

―�

―�

―�

0.56�

0.63�

0.63

1.00�

1.00�

1.00�

�

0.01�

0.03�

0.03

―�

―�

2.78�

3.27

SB4MS-VF□□�

SB8MS-VF□□�

1/4" CVC Female�

1/2" CVC Female

―�

―�

2.61�

2.80

0.43�

0.63

1.00�

1.00

0.01�

0.03

（70.6）�

（83.0）�

（66.2）�

（71.1）�

（11.0）�

（16.0）�

（25.4）�

（25.4）�

（0.3）�

（0.85）�

―�

―�

―�

―�

―�

0.04�

0.04�

0.05

（6.35）�

（9.53）�

（12.7）�

（150.0）�

（150.0）�

（150.0）�

（66.2）�

（71.1）�

（71.1）�

（14.3）�

（16.0）�

（16.0）�

（25.4）�

（25.4）�

（25.4）�

�

（0.3）�

（0.85）�

（0.85）�

（1.0）�

（1.0）�

（1.24）�

―�

―�

unit: inch(mm)

Model Type Fitting Connector d L L1 H H1 M Cv Value

SB Series　Straight Type

Option■Product Code ListModel

SB：SB type�Bellows Seal �Valve

4：1/4"�6：3/8"�8：1/2"

M：Manual S：Straight C：PCTFE�M：SUS316L�(PFA Coating)


SB -4 M


Connection

V


Disk Material

CS C -

STD�EP

Grade

-

Handle ColorRD : Red� GR : Green� SL : Silver� BK : Black� YE : Yellow� BR : Brown�


EP

t

2-M5Depth 8

45゚�

M

2-M5Depth 8

45゚�

M

2-M5Depth 8

45゚�

M

2-M5Depth 8

45゚�

M

φ42

H

H1

L

φ42

H

H1

LL1L1

φ42

H

H1

φd t

L

L

φ42

H

H1

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

33

■Features

■Major Specifications

■Standard Material

Type (Size)�Cv Value�

Internal Volume (cc)�Max.Working Pressure�

��


Internal Leakage Allowance�External Leakage Allowance�※Cycle Life

��


-10～100℃��

5×10-10Pa・m3/sec or less�5×10-10Pa・m3/sec or less

10A�2.1�38��

100,000 repeats

15A�3.3�53��

100,000 repeats

20A�4.5�86��

100,000 repeats

25A�8.0�143��

50,000 repeats

Union Type Flange Type Butt Weld Type

Body�

Bellows�

Disk Packing�

Disk Holder�

Bellows Flange�

Stem�

Bonnet�

Bonnet Gasket

SUS316L�

SUS316L�

PTFE�

SUS316L�

SUS316L�

SUS304�

SUS304�

PCTFE

IBB(Bellows Valve)�

Straight Type


①The body is made by means of forging, which helps reduce the total weight.�

②The valve seat is so designed that it produces less dust and gas residue.�

③The grand part adopted a double-seal structure using D-shape molded PTFE packing.�

④Due to the engraved steps on the stem (piston rod), whether the valve is open or close can be easily seen.

①Body Unit　②Disk　③Bellows Unit　④Bonnet Gasket　⑤Grand Packing　⑥Handle




Unfinished��




Grade�Material�

　　　　　��

Cleaning��








Bellows (trim)


※The cycle life of the valve is a test result obtained at KITZ-SCT with N2 gas being charged.

12345

6

12345

6

12345

6

34

IBB Series　Straight Type

■Product Code ListIBB20MS-RFCT

IBB10MS-UCT�

IBB15MS-UCT�

IBB20MS-UCT�

IBB25MS-UCT

10A Union�

15A Union�

20A Union�

25A Union

0.39�

0.59�

0.59�

0.59

1.18�

1.38�

1.38�

1.38

3.54�

3.94�

4.33�

4.72

―�

―�

―�

―�

4.21�

4.21�

4.84�

5.59

0.79�

0.94�

1.10�

1.34

0.18�

0.18�

0.24�

0.30

0.70�

0.87�

1.09�

1.36

―�

―�

―�

―�

―�

―�

―�

―�

1.18�

1.18�

1.38�

1.57

2.76�

2.76�

2.76�

3.15

（10.0）�

（15.0）�

（15.0）�

（15.0）�

（30.0）�

（35.0）�

（35.0）�

（35.0）�

（90.0）�

（100.0）�

（110.0）�

（120.0）�

（107.0）�

（107.0）�

（123.0）�

（142.0）�

（20.0）�

（24.0）�

（28.0）�

（34.0）�

（4.5）�

（4.5）�

（6.0）�

（7.5）�

（17.8）�

（22.2）�

（27.7）�

（34.5）�

（30.0）�

（30.0）�

（35.0）�

（40.0）�

（70.0）�

（70.0）�

（70.0）�

（80.0）�

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

0.08�

0.13�

0.18�

0.31

（2.1）�

（3.3）�

（4.5）�

（8.0）�

Model Type Fitting�Connector L2L1Ld H H1 S D t n-hB A C G f Cv�

Value

unit: inch(mm)

IBB10MS-RFCT�

IBB15MS-RFCT�

IBB20MS-RFCT�

IBB25MS-RFCT

10ARF Flange�

15ARF Flange�

20ARF Flange�

25ARF Flange

―�

―�

―�

―�

―�

―�

―�

―�

3.94�

4.25�

4.61�

5.00

0.47�

0.59�

0.79�

0.98

4.21�

4.21�

4.84�

5.59

0.79�

0.94�

1.10�

1.30

0.18�

0.18�

0.24�

0.30

3.54�

3.74�

3.94�

4.92

0.47�

0.47�

0.55�

0.55

0.16-�

0.16-�

0.16-�

0.16-

0.59�

0.59�

0.59�

0.75

1.18�

1.18�

1.38�

1.57

2.76�

2.76�

2.76�

3.15

2.56�

2.76�

2.95�

3.54

1.81�

2.01�

2.20�

2.64

0.04�

0.04�

0.04�

0.04

0.08�

0.13�

0.18�

0.31

（100.0）�

（108.0）�

（117.0）�

（127.0）�

（12.0）�

（15.0）�

（20.0）�

（25.0）�

（107.0）�

（107.0）�

（123.0）�

（142.0）�

（20.0）�

（24.0）�

（28.0）�

（33.0）�

（4.5）�

（4.5）�

（6.0）�

（7.5）�

（90.0）�

（95.0）�

（100.0）�

（125.0）�

（12.00）�

（12.00）�

（14.00）�

（14.00）�

（4-15）�

（4-15）�

（4-15）�

（4-19）�

（30.0）�

（30.0）�

（35.0）�

（40.0）�

（70.0）�

（70.0）�

（70.0）�

（80.0）�

（65.0）�

（70.0）�

（75.0）�

（90.0）�

（46.0）�

（51.0）�

（56.0）�

（67.0）�

（1.0）�

（1.0）�

（1.0）�

（1.0）�

（2.1）�

（3.3）�

（4.5）�

（8.0）�

IBB10MS-WCT�

IBB15MS-WCT�

IBB20MS-WCT�

IBB25MS-WCT

10A Butt Weld�

15A Butt Weld�

20A Butt Weld�

25A Butt Weld

―�

―�

―�

―�

1.97�

1.97�

1.97�

1.97

7.48�

7.87�

8.27�

8.66

0.59�

0.72�

0.94�

1.21

4.21�

4.21�

4.84�

5.59

0.79�

0.94�

1.10�

1.30

0.18�

0.18�

0.24�

0.30

0.68�

0.85�

1.07�

1.34

0.05�

0.06�

0.06�

0.06

―�

―�

―�

―�

1.18�

1.18�

1.38�

1.57

2.76�

2.76�

2.76�

3.15

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

―�

0.08�

0.13�

0.18�

0.31

（50.0）�

（50.0）�

（50.0）�

（50.0）�

（190.0）�

（200.0）�

（210.0）�

（220.0）�

（14.9）�

（18.4）�

（23.9）�

（30.7）�

（107.0）�

（107.0）�

（123.0）�

（142.0）�

（20.0）�

（24.0）�

（28.0）�

（33.0）�

（4.5）�

（4.5）�

（6.0）�

（7.5）�

（17.3）�

（21.7）�

（27.2）�

（34.0）�

（1.20）�

（1.65）�

（1.65）�

（1.65）�

（30.0）�

（30.0）�

（35.0）�

（40.0）�

（70.0）�

（70.0）�

（70.0）�

（80.0）�

（2.1）�

（3.3）�

（4.5）�

（8.0）�

■寸法表�

Option

Model

IBB：IBB type�Bellows Seal �Valve（UB,ISS）�

10：10A�15：15A�20：20A�25：25A

M：Manual S：Straight C：PCTFE


IBB - -15 M

W ：Butt Weld�U ：Union�RF：RF Flange

Connection

W

T：PTFE

Disk Material

T

No Code：No Port�IP　：Primary Side�OP ：Secondary Side�PP ：Both Sides

Purge Port

IPS C -

STD�EP

Grade

EP

※For handle colors, contact our sales representative.

2-M6Depth 10

B

H1

L2

L L1L1

φD

φA

H

S

2-M6 Depth 10

B

H1

L

φdφGφD

φA

H

S

t

f

n-φh

φC

H1

L2L

φDφd

t

φA

H

S

B

2-M6 Depth 10

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

35

■Major SpecificationsModel�

Type (Size)�Cv Value�

Internal Volume (cc)�Max.Working Pressure�


��

Internal Leakage Allowance�External Leakage Allowance�

Cycle Life

IBC��


-10～100℃��



�32A�21.0�368

�40A�28.0�440

�50A�72.0�980

�65A�120.0�1710

�80A�175.0�2910

�100A�363.0�5890

�125A�582.0�11310

�150A�860.0�19290

�250A�1590.0�71100

�300A�3400.0�131260

IBD��


-10～100℃��



IBE�200A�1590.0�45700�


-10～100℃��



IBC Type IBD Type IBE Type

IBCIBDIBE


①Due to its Y-shaped structure, larger Cv value than that of S-shaped valve is achieved.�

②Inner surface is processed by whole surface cylindrical grinding, thus facilitating the polishing work and providing a uniform surface roughness.�

③The valve seat is so designed that it produces less dust and gas residue.�

④The grand part adopted a double-seal structure using O-ring.�

⑤Due to the engraved steps on the stem (piston rod), whether the valve is open or close can be easily seen.

①Due to its Y-shaped structure, larger Cv value than that of S-shaped valve is achieved.�

②Inner surface is processed by whole surface cylindrical grinding, thus facilitating the polishing work and providing a uniform surface roughness.�


④The grand part adopted a double-seal structure using O-ring.�

⑤Due to the engraved steps on the stem (piston rod), whether the valve is open or close can be easily seen.

① Due to its Y-shaped structure, larger Cv value than that of S-shaped valve is achieved.�

②Inner surface is processed by whole surface cylindrical grinding, thus facilitating the polishing work and providing a uniform surface roughness. (125A ̃ 150A)�


④The grand part adopted a double-seal structure using D-shaped molded PTFE packing.�

⑤With the open/close indicator plate attached to the body, whether the valve is open or close can be easily seen. (125A ̃ 150A)�

⑥Due to the screw sleeve that has a bearing incorporated, less operation torque is necessary to operate the handle, and thus ensuring a smooth handle operation. �

�

■Features of IBC Type ■Features of IBD Type ■Features of IBE Type

■Product Grade�

STD(Standard Product)�

SCS16��

Approx. Ry6.0μm �

�Unfinished�

�3-bath degrease�

＋�6-bath precision washing�

�Ordinary air-conditioned room�

Single

Series�Grade�

Material��

Cleaning�

��

After Cleaning�

Packing

IBC Series IBD Series IBE Series��Body Inner� Surface

��Bellows (trim)

�EP(Electropolished Product)�

SCS16��

Ry0.7μm or less��

Electropolishing finish (excluding specified smoothness)�


6-bath precision washing�＋�

8-bath super precision washing�class10, Clean circumstances�Double packing with clean pack,� N2 charged

�STD(Standard Product)�

SCS16��

Approx. Ry6.0μm ��

Unfinished��




Single

�EP(Electropolished Product)�

SCS16��

Ry0.7μm or less�

�Electropolishing finish (excluding specified smoothness)�




�STD(Standard Product)�SCS16（125A～150A）�SUS316L（200A～300A）�

Approx. Ry6.0μm（125A～150A）�Ry12.0μm or less（200A～300A）�

Unfinished��




Single

�EP(Electropolished Product)�SCS16（125A～150A）�SUS316L（200A～300A）�

�Ry0.7μm or less�

�Electropolishing finish (excluding specified smoothness)�




Valves to handle a larger flow for facilities are more and more requested

following the miniaturization of devices, KITZ SCT's original Y-Shaped

Large Flow Valve Series has a wide range of sizes to 300A.

(Bellows Valve)�Straight Type

（□□MY3）�

（□□MY2）�

Inner�Surface�Roughness　　　　　��

36

IBC/IBD/IBE Series　Straight Type

■Dimensions

IBC32MY3-WCT�

IBC40MY3-WCT

32AButt Weld�

40AButt Weld��

（1.65）�

（1.65）�

�

（55.0）�

（55.0）�

�

（39.4）�

（45.3）�

�

（42.7）�

（48.6）�

�

（270.0）�

（270.0）�

�

（217.0）�

（217.0）�

�

（125.0）�

（125.0）�

�

（21.0）�

（28.0）�

�

0.06�

0.06

2.17�

2.17

1.55�

1.78

1.68�

1.91

10.63�

10.63

8.54�

8.54

4.92�

4.92�

�

0.83�

1.10�

�

Model Type Fitting Connector dD t L E H A Cv Valueunit: inch(mm)

■Dimensions

IBD50MY3-WCT�

IBD65MY3-WCT�

IBD80MY3-WCT�

IBD100MY3-WCT

50AButt Weld�

65AButt Weld�

80AButt Weld�

100AButt Weld��

（60.5）�

（76.3）�

（89.1）�

（114.3）�

�

（57.2）�

（72.1）�

（84.9）�

（110.1）�

�

（1.65）�

（2.1）�

（2.1）�

（2.1）�

（340.0）�

（380.0）�

（420.0）�

（520.0）�

�

（60.0）�

（60.0）�

（60.0）�

（80.0）�

�

（246.0）�

（272.0）�

（346.0）�

（373.0）�

�

（266.0）�

（297.0）�

（376.0）�

（411.0）�

�

（72.0）�

（120.0）�

（175.0）�

（363.0）�

�

2.38�

3.00�

3.51�

4.50

2.25�

2.84�

3.34�

4.33

0.06�

0.08�

0.08�

0.08

13.39�

14.96�

16.54�

20.47

2.36�

2.36�

2.36�

3.15

9.69�

10.71�

13.62�

14.69

10.47�

11.69�

14.80�

16.18

2.83�

4.72�

6.89�

14.29


■Product Code List Option

Model

IBC：IBC type Bellows �Seal Valve（UB、ISS）�

32：32A�40：40A

M：Manual Y3：Y-Shaped Mold C：PCTFE


IBC - -32 M

W：Butt Weld

Connection

W

T：PTFE

Disk Material

T

No Code : No Port�IP　：Primary Side�OP ：Secondary Side�PP ：Both Sides

Purge Port

IPY3 C -

STD�EP

Grade

EP


Model

IBD：IBD type Bellows �Seal Valve（BB、ISS）�

50：50A�60：60A�80：80A�100：100A

M：Manual Y3：Y-Shaped Mold C：PCTFE


IBD - -50 M

W：Butt Weld

Connection

W

T：PTFE

Disk Material

T

Purge Port

IPY3 C -

STD�EP

Grade

EP





200AButt Weld�

250AButt Weld�

300AButt Weld��

IBE200MY2-WCT�

IBE250MY2-WCT�

IBE300MY2-WCT

（210.7）�

（260.6）�

（310.5）�

（216.3）�

（267.4）�

（318.5）�

（2.8）�

（3.4）�

（4.0）�

（875.3）�

（1005.0）�

（1195.0）�

（900.0）�

（1100.0）�

（1340.0）�

（52.0）�

（64.0）�

（77.0）�

（400.0）�

（450.0）�

（560.0）�

（1590.0）�

（2270.0）�

（3400.0）�

IBE125MY3-WCT�

IBE150MY3-WCT

125AButt Weld�

150AButt Weld��

（620.0）�

（720.0）�

（139.8）�

（165.2）�

（2.8）�

（2.8）�

（134.2）�

（159.6）�

（80.0）�

（90.0）�

（593.0）�

（683.0）�

（300.0）�

（355.0）�

（582.0）�

（860.0）�

24.41�

28.35

5.50�

6.50

0.11�

0.11

5.28�

6.28

3.15�

3.54

23.35�

26.89

11.81�

13.98

22.91�

33.86

■Dimensions


■Dimensions

Model Type Fitting Connector D

（110.0）�

（135.0）�

（176.0）�

8.30�

10.26�

12.22

8.52�

10.53�

12.54

0.11�

0.13�

0.16

34.46�

39.57�

47.05

35.43�

43.31�

52.76

2.05�

2.52�

3.03

15.75�

17.72�

22.05

62.60�

89.37�

133.86

4.33�

5.31�

6.93

Ed t L H S A Cv Valueunit: inch(mm)


Model

IBE：IBE type Bellows �Seal Valve（BB、OSY）�

125：125A�150：150A

M：ManualY3：Y-Shaped Mold C：PCTFE


IBE - -125 M

W：Butt Weld

Connection

W

T：PTFE

Disk Material

T

Purge Port

IPY3 C -

STD�EP

Grade

EP


Model

IBE：IBE type Bellows �Seal Valve（BB、OSY）�

200：200A�250：250A�300：300A

M：ManualY2：Y-Shaped Steel Pipe

C：PCTFE


IBE - -200 M

W：Butt Weld

Connection

W

T：PTFE

Disk Material

T

Purge Port

IPY2 C -

STD�EP

Grade

EP




φA

H

S

L

φdφD

t

E E

φA

H

EE L

φdφD

t45゜�

φA

H

EEL

φdφD

t45゜�

φA

H

EE L

φdφD

t50゜�

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

36631

37

TD/TCD Series is a group of compact valves for the accumulated gas system (BIS/BISF) that is developed by KITZ SCT.TD/TCD

B-SEAL IGS Valves


Max.Working Pressure��



Cycle Life

��

0.98MPa （142psi）�

PCTFE -10～42℃（14～108F）�PFA -10～120℃（14～248F）�

�0.4～0.7MPa（60～100psi）�

≦3×10-10Pa・m3/sec（3×10-9atm・cc/sec）�≦3×10-12Pa・m3/sec（3×10-11atm・cc/sec）�

Pneumatic 1,000,000�Manual 50,000

TCD�0.15

TD�

0.3Grade�Material�


��

Cleaning��


EP�316L�

Ry0.7μm（Ra5μinch）�Electropolishing finish�3-bath degrease�

＋�6-bath degrease�

＋�8-bath super precision cleaning�class10 Clean circumstances�

W-Packing with clean pack. N2-charge

■Valve Features①KITZ-SCT's unique B-SEAL structure：Speedy and sure installation is made possible due to its center-lock mechanism. Reduction of assembly �process and time required for the maintenance by user is expected to contribute to an overall cost reduction. �②Using KITZ-SCT's unique snap mechanism incorporated in manual valves extensively facilitates the operation even in a limited working space. �In addition, the valve can be operated by one-touch, which helps avoid insufficient or excessive torque when turning the handle to either end, and �thus increases an operational reliability.　Considering safety, a miss-operation protective mechanism (fixing screw) is newly adopted.�③The valve is equipped with a mechanism to avoid miss-insertion and miss-installation by means of notch located on the base.�④The seal type use 1/8" CVC fitting that has been proven in a conventional gas system.

■Composite Valves

TCD4CI-1/3-GCF-□-EP�

TCD4OI-1/3-GCF-□-EP�

�

NO�

NC

Model Type Operation

■Check Valves

IC4-1/3-GF-75-EP�

IC4-1-GF-82-EP�

IC4-10-GF-84-EP�

�

1/3psi�

1psi�

10psi

Model Type Cracking�Pressure

�

フッ素ゴム�

Packing

■Manual Valves

TCD4MS-GC-546-EP�

TD4MS-GC-548-EP�

�

0.15�

0.30

Model Type Cv Value

■Flow Control Valves

TCD-4FS-GM-04

Model Type

■Pneumatic Valves（N.O.）�

TCD4OS-GC-□-EP�

TD4OS-GO-□-EP�

�

0.15�

0.30

Model Type Cv Value

■Pneumatic Valves（N.C.）�

TCD4CS-GC-386-EP�

TD4CS-GC-509-EP�

�

0.15�

0.30

Model Type Cv Value

36631

Fluorine Rubber

38

B-SEAL （IGS1.5-1.125"）�C-SEAL （IGS1.125"）�

●BIS（INTEGRATED GAS SYSTEM 1.5"）�

●BISF（INTEGRATED GAS SYSTEM 1.125-1.5"）�

●IGS（INTEGRATED GAS SYSTEM 1.125"）�

39

TD/TCD Series is a group of compact valves for 1.125inch-C-SEAL.TD/TCDC-SEAL IGS Valves





Cycle Life

��

0.98MPa （142psi）�

PCTFE -10～42℃（14～108F）�PFA -10～120℃（14～248F）�

�0.4～0.7MPa（60～100psi）�



TCD�0.1

TD�

0.3Grade�Material�


��

Cleaning��


EP�316L�





■Valve Features①These valves are diaphragm valves of Surface Mount type, and are compatible with 1.125" C-SEAL. Both manual and pneumatic valves in this �series incorporate a compact actuator, which allows the valve to suit to fine line pitches.�②The manual valves are 90° open/close types, and capable to equip a lock key for preventing miss-operations.�③TD Series has achieved 0.3 for Cv value that is still higher than that of our KD Series.�④The surface that comes in contact with gases are made rich in chrome, and achieved Cr/Fe > 2.0. (SEP specification)�⑤Achieving Hv300 on the sealing surface, repeated detachability is further improved.

■Pneumatic Valves 2 Port（N.O.）�

TCD4OS-GC-□-FA�

TD4OS-GC-124-FA�

�

NO�

NC

Model Type 作動�

■Pneumatic Valves 2 Port（N.C.）�

■Manual Valves

TCD4QS-GC-106-FA�

TD4QS-GC-130-FA

0.1�

0.3

Model Type Cv Value

TCD4CS-GC-967-FA�

TD4CS-GC-985-FA

0.1�

0.3

Model Type Cv Value■Pneumatic Valves 3 Port（N.O.）�

TCD4OB-GC-□-FA�

TD4OB-GC-125-FA

0.15�

0.30

Model Type Cv Value

■Pneumatic Valves 3 Port（N.C.）�

TCD4CB-GC-984-FA�

TD4CB-GC-1003-FA�

�

0.1�

0.3

Model Type Cv Value

The standard model is TD Series.

40

TD SeriesDiaphragm Valve





Cycle Life

TD�

0.3�0.98MPa （142psi）�

PCTFE -10～42℃（14～108F）�PFA -10～120℃（14～248F）�

�0.4～0.7MPa（60～100psi）�



Grade�Material�


��

Cleaning��


EP�316L�





■Valve Features①High Flow Coefficient(CV Value)：0.3�②Compact Actuator：Φ1.063inch（Outside Diameter）�③Gas Contacting Surface Finish：5Ra Standard(by Electro Polissing)�④Cr Rich Gas contacting Surface Conditon：Cr/Fe>2.0�⑤Super Clean 316L Double Melting Stainless Steel


A Flow

A C

B

B Flow

A C

B

A Flow

A C

B

B Flow

A C

B

Note 2Note 1

Note 1： When specifying 3 ports branch valve,Please select the flow direction in below. Note 2： When specifying 3 ports Block valve,Please select the flow direction in below.

Model

TD：TD type�Diaphragm Seal �Valve

TD

Size

4：1/4"��

4

Operation

Q

Style

S

End Connection

V

Seat Material

C

Flow Direction Insid Surface

SEP

Material

316LE

C：Normally Close�O：Normally Open�M：Manual�Q：Manual90 ゚Turn

S：Straight�B：Branch�Ｌ：Comer�A：Angle

V ：Male�VF：Female�W ：Tube-End�G ：Surface Mount

C：PCTFE�A：PFA�P：PI

A�B�Note 1

5Ra μ in max�EP ：316L�SEP：316LE

316L ：� Singte Melt�316LE：� Double Melt

Single Valve

TD：TD type�Diaphragm Seal �Valve

B23V

Model

4：1/4"��

TD

Size

4

Operation

Q

End Connection

VF

Seat Material

C

Flow Direction Insid Surface

EP

Material

316LE

C：Normally Close�O：Normally Open�M：Manual�Q：Manual90 ゚Turn

V ：Male�VF：Female�W ：Tube-End

C：PCTFE�A：PFA�P：PI

A�B�Note 2

P

5Ra μ in max�EP ：316L�SEP：316LE

316L ：� Singte Melt�316LE：� Double Melt

2valve 3way�B23V：�Vertical branch�B23H：�Horizontal branch

- - - -

- - - -

41

Valves for Ultra High Purity Gases　Product List

KD2MS-VC�KD4MS-VC�KD8MS-VC�KD12MS-VC-W�KD2MS-VFC�KD4MS-VFC�KD8MS-VFC�KD12MS-VFC�KD2MS-WC�KD4MS-WC�KD6MS-WC�KD8MS-WC�KD12MS-WC�KD2QS-VC�KD4QS-VC�KD8QS-VC�KD2QS-VFC�KD4QS-VFC�KD8QS-VFC�KD2QS-WC�KD4QS-WC�KD6QS-WC�KD8QS-WC�KD2□S-VC�KD4□S-VC�KD8□S-VC�KD12□S-VC-W�KD2□S-VFC�KD4□S-VFC�KD8□S-VFC�KD12□S-VFC�KD2□S-WC�KD4□S-WC�KD6□S-WC�KD8□S-WC�KD12□S-WC�KD2MB-VC-□�KD4MB-VC-□�KD8MB-VC-□�KD2MB-VFC-□�KD4MB-VFC-□�KD8MB-VFC-□�KD2MB-WC-□�KD4MB-WC-□�KD6MB-WC-□�KD8MB-WC-□�KD2QB-VC-□�KD4QB-VC-□�KD8QB-VC-□�KD2QB-VFC-□�KD4QB-VFC-□�KD8QB-VFC-□�KD2QB-WC-□�KD4QB-WC-□�KD6QB-WC-□�KD8QB-WC-□�KD2□B-VC-□�KD4□B-VC-□�KD8□B-VC-□�KD2□B-VFC-□�KD4□B-VFC-□�KD8□B-VFC-□�KD2□B-WC-□�KD4□B-WC-□�KD6□B-WC-□�KD8□B-WC-□�

Diaphragm�Valve

KD�Series

0.98MPa�（G.）�

Straight

Branch

―�

―�

A･B

STD�EP�SEP

PCTFE�PFA�PI�Metal

Manual 90°�Open/Close

Pneumatic:�Normally Close�Normally Open

Manual



Manual

1/8”�

1/4”�

1/2”�

3/4”�

1/8”�

1/4”�

1/2”�

3/4”�

1/8”�

1/4”�

3/8”�

1/2”�

3/4”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

3/8”�

1/2”�

1/8”�

1/4”�

1/2”�

3/4”�

1/8”�

1/4”�

1/2”�

3/4”�

1/8”�

1/4”�

3/8”�

1/2”�

3/4”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

3/8”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

3/8”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

3/8”�

1/2”�

�

CVC Male�

�

�

�

CVC Female��

�

�

�

Tube-End�

�

�

�

CVC Male�

�

�

CVC Female�

�

�

Tube-End��

�

�

CVC Male�

��

�

CVC Female��

�

�

�

Tube-End�

�

�

�

CVC Male�

�

�

CVC Female�

�

�

Tube-End��

�

�

CVC Male�

�

�

CVC Female�

�

�

Tube-End��

�

�

CVC Male�

�

�

CVC Female�

�

�

Tube-End��

�

Standard Type

Valve Category Model Application/Features Max. Usable�Pressure

Port�Direction

Seat�Material

Flow�TypeProduct Code Size Connection Operation Method Valve Type Grade

42

�Vertical��

Horizontal��

Vertical��

Horizontal��―��

Vertical�Horizontal�

��

―�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

1/2”�

1/8”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/8”�

�

�

�

�

�

�

�

1/4”��

�

�

�

�

�

�

1/4”�

1/2”�

1/4”�

3/8”�

�

�

1/4”��

�

�

�

�

1/2”��

�

�

�

�

1/4”��

�

�

1/8”�

1/4”�

1/8”�

1/4”�

1/8”�

1/4”�

�

�

�

�

�

CVC Female��

�

�

�

�

�

CVC Male��

CVC Female��

CVC Male��

CVC Female��

�

Tube-End�

�

CVC1/4"Male�

CVC1/4"Female�

CVC Male�

CVC Female�

Tube-End�

CVC Male�

CVC Female�

Tube-End�

CVC Male�

CVC Female�

Tube-End�

CVC Male�

CVC Female�

Tube-End�

CVC Female��

CVC Male��

Swage Lock�

Equivalent�

�

�

�

�

�

CVC Male��

�

�

�

�

�

CVC Male�

CVC Female�

Tube-End�

�

―�

�

CVC Male�

�

CVC Female�

�

CVC Male

B23VKD2M-VFC-□�B23VKD4M-VFC-□�B23VKD8M-VFC-□�B23HKD2M-VFC-□�B23HKD4M-VFC-□�B23HKD8M-VFC-□�B23VKD2□□-VFC-□�B23VKD4□□-VFC-□�B23VKD8□□-VFC-□�B23HKD2□□-VFC-□�B23HKD4□□-VFC-□�B23HKD8□□-VFC-□�KD4TS-VC�KD8TS-VC�KD4TS-VFC�KD8TS-VFC�KD4K□S-VM�KD8K□S-VM�KD4K□S-VFM�KD8K□S-VFM�KD4K□S-WM�KD6K□S-WM�KD8K□S-WM�KD2FS-V4M�KD2FS-VF4M�KCD4MS-VC�KCD4MS-VFC�KCD4MS-WC�KCD4□S-VC�KCD4□S-VFC�KCD4□S-WC�KCD4MB-VC-□�KCD4MB-VFC-□�KCD4MB-WC-□�KCD4□B-VC-□�KCD4□B-VFC-□�KCD4□B-WC-□�B23VKCD4□□-VFC-□�B23HKCD4□□-VFC-□�SD4MS-VC�SD8MS-VC�SD4MS-SC�SD6MS-SC�SD4MB-W15AVC�SD4MB-W25AVC�SD4MB-W32AVC�SD4MB-W40AVC�SD4MB-W50AVC�SD4MB-W65AVC�SD8MB-W15AVC�SD8MB-W25AVC�SD8MB-W32AVC�SD8MB-W40AVC�SD8MB-W50AVC�SD8MB-W65AVC�WD4MS-VC-N-588�WD4MS-VFC�WD4MS-W6C-N-544�WD4-D4M0241-11�WD4-D4M0321-01�WD4-D4M0241-06�RD2MSH-VC�RD4MSH-VC�RD2MSH-VFC�RD4MSH-VFC�RD2CSH-VC�RD4CSH-VC

Diaphragm�Valve

KD�Series

KCD�Series

SD�Series

0.98MPa�（G.）�

0.98MPa�（G.）�

0.98MPa�（G.）�

A･B

―�

―�

A･B

STD�EP�SEP

STD�EP�SEP

STD�EP

PCTFE�PFA�PI�Metal

PCTFE�PFA�PI

PCTFE�PFA�PI

Metal

PCTFE�PI

Manual

Manual

Manual

Manual

Manual

Pneumatic



Pneumatic

Pneumatic:�Normally Close�Normally Open�




Manual

Standard Type

For Two-Step�Control

For 250℃�High Temperature�

Use

Flow Control Valve

Compact Type�(Cv Value : 0.1)

Light-Weight Type�(Panel Nutless)

For Liquid Gases

Low Torque Compact Type�High Pressure Manual Valve

Cylindrical Compact Type�High Pressure Pneumatic Valve

2-Valve�3-Way Block

Straight

Branch

Branch

2-Valve�3-Way Block

Straight

Straight

Straight

Straight

Maintenance�Parts―� ―�

2.94MPa�（G.）

16.2MPa�（G.）�

WD�Series

RD�Series

PCTFE�PI


Port�Direction

Seat�Material


43

Valves for Ultra High Purity Gases　Product List

RD2CSH-VFC�RD4CSH-VFC�RD2MBH-VC-□�RD4MBH-VC-□�RD2MBH-VFC-□�RD4MBH-VFC-□�RD2CBH-VC-□�RD4CBH-VC-□�RD2CBH-VFC-□�RD4CBH-VFC-□�B34VRD2MH-VFC-□�B34VRD4MH-VFC-□�B34HRD2MH-VFC-□�B34HRD4MH-VFC-□�B34VRD2□□H-VFC-□�B34VRD4□□H-VFC-□�B34VRD4MI-VFC-□�B34HRD4MI-VFC-□�RD4MSI-VC�RD8MSI-VC�RD4MSI-VFC�RD8MSI-VFC�RD4CSI-VC�RD8CSI-VC�RD4CSI-VFC�RD8CSI-VFC�RD4MBI-VC-□�RD8MBI-VC-□�RD4MBI-VFC-□�RD8MBI-VFC-□�RD4CBI-VC-□�RD8CBI-VC-□�RD4CBI-VFC-□�RD8CBI-VFC-□�IC4-□-V□�IC8-□-V□�IC4-□-VF□�IC8-□-VF□�IC4-□-S□�IC6-□-S□�IC8-□-S□�

Straight�

��

Branch��

3-Valve�4-Way Block�

�

��

Straight��

Branch��

Straight

Pneumatic��

Manual��

Pneumatic��

Manual��

Pneumatic/Manual��

Manual��

Pneumatic��

Manual��

Pneumatic�

��―�

1/8”�

1/4”�

1/8”�

1/4”�

1/8”�

1/4”�

1/8”�

1/4”�

1/8”�

1/4”�

1/8”�

1/4”�

1/8”�

1/4”�

1/8”�

1/4”�

1/4”�

1/4”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

CVC Female�

�

CVC Male�

�

CVC Female�

�

CVC Male�

�

�

�

�

CVC Female�

�

�

�

�

CVC Female�

�

CVC Male�

�

CVC Female�

�

CVC Male�

�

CVC Female�

�

CVC Male�

�

CVC Female�

�

CVC Male�

�

CVC Female�

�

CVC Male�

�

CVC Female��

Swage Lock�

Equivalent

Cylindrical Compact Type�High Pressure Pneumatic Valve�

�Low Torque Compact Type�High Pressure Manual Valve�

��


��

Low Torque Compact Type�High Pressure Manual Valve�

��


��


��


��


��

For Prevention of�Backflow

Vertical��

Horizontal��

Vertical��

Vertical�Horizontal

Diaphragm�Valve

Check�Valve

RD�Series

IC�Series

16.2MPa�（G.）�

20.6MPa�（G.）�

16.2MPa�（G.）�

―�

―�

―�

―�

STD�EP

STD�EP�SEP

PCTFE�PI

Fluorine�Rubber�Nitrile�Rubber�Silicon�Rubber�Neoprene�Rubber


Port�Direction

Seat�Material


Valve Category Model Application/Features Usable�Pressure

Bonnet Gasket�Material

Disk�Material

Handle�TypeProduct Code Size Connection Operation Method Valve Type Option Grade

Bellows�Valve

IB�Series General-Purpose

VAC～�0.98MPa�（G.）�

Manual

90°Open/Close

Straight

STD�EP�(Only STD�type is�available�when the�connection�is made�by swage�lock)

IB�Standard�Specification

IB�With�Open�/�

Close�Indicator

Queue�Lock�Standard�Specification

PCTFE�Fluorine�Rubber�PFA

PCTFE�SUS316L�（PFA�　Coating）�

―�

IB4MS-V□□�IB8MS-V□□�IB4MS-S□□�IB6MS-S□□�IB8MS-S□□�IB4MS-VF□□�IB8MS-VF□□�IB4MS-W□□�IB6MS-W□□�IB8MS-W□□�IB4MS-V□□-JH�IB8MS-V□□-JH�IB4MS-S□□-JH�IB6MS-S□□-JH�IB8MS-S□□-JH�IB4MS-VF□□-JH�IB8MS-VF□□-JH�IB4MS-W□□-JH�IB6MS-W□□-JH�IB8MS-W□□-JH�IB4QS-V□□�IB8QS-V□□�IB4QS-S□□�IB6QS-S□□�IB8QS-S□□�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

CVC Male��

Swage Lock�

Equivalent��

CVC Female��

�

Butt Weld�

�

CVC Male��

Swage Lock�

Equivalent��

CVC Female��

�

Butt Weld�

�

CVC Male��

Swage Lock�

Equivalent

―�

A･B

A･B

Cylindrical Compact Type �High Pressure Pneumatic Valve�Low Torque Compact Type �High Pressure Pneumatic Valve

Valve Category Model Application/Features Usable�Pressure

Bonnet Gasket�Material

Disk�Material

Handle�TypeProduct Code Size Connection Operation Method Valve Type Option Grade

VAC～�0.98MPa�（G.）�

44

IB4□S-V□□�IB8□S-V□□�IB4□S-S□□�IB6□S-S□□�IB8□S-S□□�IB4□S-VF□□�IB8□S-VF□□�IB4□S-W□□�IB6□S-W□□�IB8□S-W□□�IB4V□S-V□□�IB8V□S-V□□�IB4V□S-S□□�IB6V□S-S□□�IB8V□S-S□□�IB4V□S-VF□□�IB8V□S-VF□□�IB4BN1.4S-VM�IB4BN4.0S-VM�IB4BN1.4S-VFM�IB4BN4.0S-VFM�SB4MS-V□□�SB8MS-V□□�SB4MS-S□□�SB6MS-S□□�SB8MS-S□□�SB4MS-VF□□�SB8MS-VF□□�SB4MS-W□□�SB6MS-W□□�SB8MS-W□□�IBB10MS-UCT�IBB15MS-UCT�IBB20MS-UCT�IBB25MS-UCT�IBB10MS-RFCT�IBB15MS-RFCT�IBB20MS-RFCT�IBB25MS-RFCT�IBB10MS-WCT�IBB15MS-WCT�IBB20MS-WCT�IBB25MS-WCT�IBC32MＹ3-WCT�IBC40MＹ3-WCT�IBD50MY3-WCT�IBD65MY3-WCT�IBD80MY3-WCT�IBD100MY3-WCT�IBE125MY3-WCT�IBE150MY3-WCT�IBE200MY2-WCT�IBE250MY2-WCT�IBE300MY2-WCT

1/4”�

I1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

�

1/4”��

�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

1/4”�

1/2”�

1/4”�

3/8”�

1/2”�

10A�

15A�

20A�

25A�

10A�

15A�

20A�

25A�

10A�

15A�

20A�

25A�

32A�

40A�

50A�

65A�

80A�

100A�

125A�

150A�

200A�

250A�

300A

CVC Male��

Swage Lock�

Equivalent�

�

CVC Female��

�

Butt Weld�

�

CVC Male��

Swage Lock�

Equivalent��

CVC Female�

�

CVC Male�

�

CVC Female�

�

CVC Male��

Swage Lock�

Equivalent��

CVC Female��

�

Butt Weld�

�

�

Union��

�

�

RF Flange�

�

�

�

Butt Weld�

�

�

Butt Weld �

�

�

Butt Weld��

�

�

�

Butt Weld

Bellows�Valve

IB�Series

SB�Series

IBB�Series

IBC�Series

IBD�Series

IBE�Series

General-Purpose

General-Purpose�(Valves succeeding�

IB Series)

Variac Type

Needle Type

Forged Body��

Forged Body

Steel Pipe�Welded Body


Manual

Straight

Straight

Ｙ Type

STD�EP

―�

Variac�Standard�Specification

Needle�Standard�Specification

Standard�Specification

―�Metal

PTFE

SUS316L�（PFA�　Coating）�

PCTFE

Purge�Port





With�Open�/�

Close�Indicator

STD�EP�(Only STD�type is�available�when the�connection�is made�by swage�lock)

45

Valves for Ultra High Purity Gases　Treatment an operating manual

��（1）Check at the arrival of the goods�　　Before opening the packing, check that the delivered goods is identical to what you have selected.��　　●Example of ＫＤ４ＭＳ－ＶＣ－□��（2）Handling at Installation�　　①Unpack and handle the goods under clean circumstances.��　　　・The valve is packed in double (single for the standard product) with the clean packing material that is charged with high purity gas.�　　　 Unpacking should be done just before the installation of components, and avoid a contact with atmosphere as little as possible.��　　　・For the valves that have fitting connectors of mechanical metal gasket type (threaded connector), special attention has to�　　　 be paid not to scratch or contaminate the seal surface of the connector with particles and other substances.�　　　 (Refer to the CVC Fitting Instruction Manual for the details of surface seal for mechanical metal gasket types)�　　②Strictly avoid directly touching or blowing the part that comes in contact with gases.��　　　・The part of valve, that comes in contact with gases are processed in a super clean washing and assembled in a clean�　　　 room. Never risk the handling that may lead to particle adhesion on the surface.�　　③Check the flow direction indicated on the valve body and that intended for the piping.�　　④Use the valve within the pressure level displayed on the valve body.�　　⑤Never apply external twisting force that may change the clamping balance of valve body and nut.��　　　・Failure in handling such as those described in the above or any other handling that is not intended by its design may lead�　　　 to a poor performance as the valve, and in the worst case, it may lead to serious injury including a loss of life. ��（3）Baking�　　①Check that the seat material is appropriate considering the baking temperature.�　　②Baking should be carried out with the valve fully open.��　　　・Failure to follow the above instructions when baking, it may lead to a deformation of the valve seat, and in consequence it�　　　 may cause internal leakage. Thus special attention should be paid to avoid such risk.��（4）Gas Purge�　　①Gas purge treatment using an inert-gas should be carried out prior to the use.�　　②Pulsed purge is an effective means to remove foreign particles.�　　③Before detaching the valves that are used for corrosive gases, make sure to purge the remaining gas by using inert-gases such as nitrogen.��　　　・Failure to purge the remaining gas may accelerate corrosion inside the valve due to the chemical component created by�　　　 the reaction between the remaining corrosive gas and substance in the atmosphere.��（5）Others�　　①Never attempt to disassemble or reassemble the valve, body and nut.��　　　・Disassembling or reassembling may cause inconsistent quality level, and in the worst case, it may lead to the accident�　　　 that cause serious injury including a loss of life.Should such is the case that the valve needs to be disassembled at the�　　　 user, the user of the valve is deemed to be fully responsible for such action. �　　②When welding the fitting with tube-end, fully open the valve and flow the back-sealed gas so that the inner baking should not occur.��（1）Manual Type�　　①These valves can be opened or closed by operating the handle. �　　②Rotate the handle counterclockwise to open, and clockwise to close.�　　③Due to its structural reason, the close position of the valve is not fixed.Clamp the valve with an appropriate torque.�　　　These valves incorporate a protective mechanism against excessive torque to protect the valve seat from excessive force.��　　　・Standard torque to clamp the valve is set between 15̃25 kg・cm.�　　　 (With this level of torque, an ordinary adult can clamp the valve without difficulties.)�

＜Notes on the backside＞�

Production Serial No.

Valve SizeMaterial

Grade

Pressure �Specification

Seat Material

Panel Nut

Flow Direction

Turning Direction�of the Handle

Features of the Product1

Valve Operations2

Caution

Caution

Caution

Caution

Note

Note

Warning

Warning

46

　　④With the open/close indicator incorporated in the valve, whether the valve is open or close can be easily seen through the�　　　 window located on the upper surface of the handle knob.��　　　・Please note that this open/close indicator simply shows whether it is "full open" or "full close".�　　　・Due to its structural reason, it will show "OPEN" or "CLOSE" even in the midst of such operation, however, this does not�　　　 necessarily mean that the valve is "OPEN" or "CLOSE". �　　　　　The status of valve to be judged full open or full close.�　　　　　　　・「Full Open」・・・Handle knob comes to full stop when rotated counterclockwise�　　　　　　　・「Full Close」・・・Status described in the above 　（1）③�　　⑤Always manually operate to open or close the valve.��　　　・Using any device may cause excessive force and may cause a damage on the valve.��（2）Pneumatic Type�　　These valves can be opened or closed by supplying an air pressurized between 0.4～0.7MPa through the driving air inlet�　　 port. Follow the instructions below when connecting a fitting to the air inlet port.�　　　・ Use the fitting that has a correct size for the driving air inlet port.（Ｒｃ１／８）�　　　・To screw a fitting into the driving air inlet port, hold the cylinder cover by hand, and pay attention not to apply torque to the�　　　 valve body. Install a detent between the two faces of cylinder cover and valve body (30 between the faces).�　　　・Properly seal the fitting, and clamp the fitting with the recommended clamping torque.��　　①Align the horizontal hole of the handle to the hole of open/close indicator plate.�　　②Remove the screws with hexagonal screw hole (M3 x 5), and then remove the handle, open/close indicator plate in that order. �　　③Rotate the spindle counterclockwise to the full stop to fully open the valve.(Using the handle makes rotation easier)�　　④Remove the panel nuts, mount the valve at an appropriate position, and then fix the valve with panel nuts.��　　　・In this procedure, install detent at the hexagonal side of the nut so that�　　⑤Firmly thrust the open/close indicator plate into the groove until you hear the click, and then align the horizontal hole to the�　　　marking on the body that is indicating the flow direction. ��　　　・Failure to settle firmly in the groove may cause the open/close indicator plate to slide while being used.�　　⑥Install the handle with the hole on the handle and the direction �　　　of the body as indicated in the figure below, and then fix �　　　the handle with hexagonally-headed screws.

Caution signs used in this operation manual

Note : Notes for installation and handling.��Caution : Cautions for installation and handling.� This is especially describing the note that may affect the safety and quality of the valve. � It is necessary to pay more attention comparing to what is described in "Note".��Warning : If failed to properly install or handle the product, it may lead to a significant damage. � Because this implies the danger level that may affect not only the safety or quality of the valve � but also may lead to serious injury including a loss of life, call your special attention to these articles.

Following caution signs are attached in some pages of this instruction manual in order to draw an attention to the article that �needs a special note.Carefully read through the description attached to these caution signs and follow the instructions.

Caution

Note

Warning

Hole on the open/close �indicator plate

Groove on the body

Handlr nove

Hexagonally-headed�screw for handle knob

Open/close�indicator plate

Spindle

Panel Nut

For the panel mount use (Diaphragm Manual Valves) 3

2

Caution

Caution

Caution

Note

0206②AW

●Tokyo Head Office�Omorieki Higashiguchi Bldg. 2F, 1-5-1 Omorikita, Ota-Ku, Tokyo 143-0016, Japan�Tel: 81-3-6404-2171 Fax: 81-3-6404-2172�●Osaka Sales Office�401 MG Amagasaki Ekimae Bldg., 21 Misono-Cho, Amagasaki-City, Hyogo-Pref. 660-0861, Japan�Tel: 81-6-6413-4177 Fax: 81-6-6413-4188�●Hokuriku Sales Office�1-4-38 Shinnezuka-Machi, Toyama-City, Toyama-Pref. 939-8205, Japan�Tel: 81-76-422-6931, Fax: 81-76-422-6105�●Kyushu Sales Office�12-13 Higashikasuga-Cho, Oita-City, Oita-Pref. 870-0037, Japan�Tel: 81-97-533-9101 Fax: 81-97-533-9103�●Sendai Sales Office�Prospere Honda Bldg. 5F, 1-16-8 Uesugi, Aoba-Ku, Sendai-City, Miyagi-Pref. 980-0011, Japan�Tel: 81-22-221-4081 Fax: 81-22-221-4086�●Nagoya Representative Office�Taiyo Seimei Mei-Eki Bldg. 7F, 3-16-4 Mei-Eki,Nakamura-Ku, Nagoya-City, Aichi-Pre. 450-0002, Japan�(Located within KITZ Chubu Branch Office)� Tel: 03(6404)2171　Fax: 03(6404)2172�●Nitta SC Plant�150-2 Aza Shinwari, Oaza Kaya, Nitta-Machi, Nitta-Gun, Gunma-Pref. 370-0352, Japan�Tel: 81-276-60-9600 Fax: 81-276-60-9330�●TAIWAN REPRESENTATIVE OFFICE �10F-2.,No.169,Pei-Ta Road.,Hsinchu 300 Taiwan. R.O.C.�Tel: 886-3-5250000 Fax: 886-3-5250066�●KITZ SCT America�1183 Bordeaux Dr., Suite 15 Sunnyvale, CA 94089, U.S.A.�Tel: 1-(408)747-5546 Fax: 1-(408)747-5726

KITZ SCT Corporation

Warranty�（1）Warranty term�This warranty shall remain in effect for full one(1) year after shipment. For any defect that is found due to the failure in fulfillment of the specification �intended at the time of delivery, warrantor will repair or replace the defective product fully at warrantor's cost.�

（2）Liability�This warranty is limited to the product manufactured and delivered from Nitta SC Plant. This means, for example, this warranty shall not cover any damage caused �by failure to record the test data due to the defect of the product sold to the purchaser. Responsibility to maintain safety considering the use of the product or its �peripheral devices shall be totally attributed to the user.�

（3） Exemption�In no event shall KITZ SCT be liable for the cases listed below even the warranty remains in effect.�1) Damage due to the result of replacement of the parts(maintenance) performed by other person than KITZ SCT engineer.�2) Damage due to natural disaster or factors of force majeure. �3) Damage due to product misuse or negligence of the necessary remarks for operation by the user.�4) Damage due to use or storage of the product under the condition other than what KITZ SCT recommends.�5) Damage due to use exceeding the limit of the specifications, modification after the delivery or use of the product for the purpose other than what it is designed for. �6) Damage or corrosion caused by external factors or corrosive gases.�7) Damage due to the fact that shall be fairly judged not attributable to KITZ SCT. ��KITZ SCT Corporation Nitta SC Plant (Quality Control Sec., Quality Control Dep.)

Valves for Ultra High Purity Gases - MHz...

Documents

Transcript of Valves for Ultra High Purity Gases - MHz...