VACUUM VALVES · vacuum valves (vent valves, 3 way valves, leak valves, throttling valves…)...

VACUUM VALVES

C25.02

VACUUM VALVES

Common specificationsAll vacuum valves have the followingcommon specifications:

• Guaranteed tightness• Individually tested• Standard flanges• High conductance• High reliability• Operation in all positions

Isolation and tightnessCertain functionalities are necessaryfor vacuum technology:• Connections: The majority of

vacuum systems require connectionswith either pumping systems ordifferent peripheral accessories.

• Tightness: It is often necessary thatconnections are perfectly tight whenclosed in order to preserve vacuumintegrity, while still allowing servicing.

• Specific parameters: Differentvacuum applications will havedifferent needs, with stringentrequirements regarding: materials,dimensions,… These parametersmust be considered in order toselect the best vacuum valvesolution for the specific application.

Vacuum valves: the Alcatel offer

Alcatel supplies customers with complete pumping systems thatcombine pumps with top-qualityaccessories, including vacuum valves.The new Adixen range of vacuumvalves has been created incooperation with VAT, world leader invacuum valves and sealingtechnology.

A number of products presented inthis section of the catalogue aredesigned and manufactured by VATfor Alcatel. This partnership helps toensure that we offer our customers thebest vacuum components available onthe market.

A broad range

Alcatel offers a solution for eachapplication.• Variations by type: Each type of

valve (Gate, Butterfly, Angle…) isavailable in different versions,offering different materials, flanges,actuators, etc…, to provide themost appropriate solution to any ofa wide range of demands.

• Special valves: A variety of specialvacuum valves (vent valves, 3 wayvalves, leak valves, throttlingvalves…) complements the Alcateloffer.

Introduction

C25.03

Gate valves

Gate valves allow a 100 % open positionand thus a maximum conductance. In the open position, the mechanism (gateand counter plate) is completely insertedin the body; no obstacle will modify thegas flow.• Compact and low profile, they can be

easily integrated into equipment in anyposition.

• The locking device, designed with unlubricated balls, allows minimal closing shock and minimal wear, preventing seat seal damage when closing and opening.

• UHV gate valves (stainless steel body)have a bellow sealed shaft feedthroughand metal seal between body and bon-net. Vacuum gate valves (Aluminium

body) have FPM seals for shaft feedthrough and bonnet.

• Models with pneumatic actuators areclosed in case of power failure. Theystay mechanically locked even with compressed air failure.

Butterfly valves

• Butterfly valves can be a compact andeconomic alternative for gate valves.Based on a rugged and simple design,they consist of a circular plate rotatinginto the valve body.

• Models DN 63 to DN 200 have aunique plate actuating mechanism.The plate first swings to the closed position without any friction from

the plate seal. The sealing procedure issimilar to that of a gate valve, with alinear movement (driven by the patentedspiral mechanism). Only for applicationsin clean vacuum systems because ofexposed plate seal.

• Available with stainless steel body (CF-Fflanges) and aluminium body (ISO-F flanges) they have a bellow sealed shaft

feedthrough.• Models with pneumatic actuators are

delivered with position indicator andsolenoid.

• Models DN 40 and DN 50 (manualactuators) are suitable for numerousapplications: accessory isolation, venting...

Angle valves

• The angle valve range is characterizedby its variety of models and its actuating principles.

• Manual, pneumatic and electromagneticangle valves are among the most used inall applications of vacuum technology.

• The choice of materials, of differenttightness designs and levels, make itpossible to find suitable solutions forthe majority of requirements:

- pumping systems- connection between pumps- pure gas- corrosive gas

- medium vacuum- high vacuum- ultra-high vacuum

• From DN 16 to DN 250, the broadrange of angle valve configurations letsusers select the best compromise between cost and performances.

Special valves

As a complement to its range of Gate,Butterfly and Angle valves, Alcatel offersa line of special vacuum valves for speci-fic demands.• Isolation valves for medium vacuum

and high pressure (gas and fluids)- diaphragm valves DN 16-25-40

- ball valves DN 16-40 (2 ways - 3 ways)

• Micro flow regulation valves DN 16• Leak valves DN 16• Vent valves DN 16• Safety Isolation Valves for rotary vane

pumps DN 16-25

Other modelsFor applications that require valves otherthan those listed above, Alcatel will bepleased to advise suitable solutions.

p C25.05

p C25.13

p C25.19

p C25.31

C25.04

VACUUM VALVES

Vacuum valves:

Direct current

Frequency50/60 Hz

Frequency50 Hz

Frequency60 Hz

12 V24 V48 V100 V100/115 V110/115 V200 V200/230 V220/230 V

ABK

EUFCGHDI

JS

L

V

P

Q

R

Gate valveUHVHV

S.S.alu

DN 63 to 250DN 16 to 250

manual or pneumaticmanual or pneumatic

Butterfly valve

Angle valve

UHVHV

S.S.alu

DN 63 to 200DN 63 to 200

pneumaticpneumatic

UHVHVHVHVHV

S.S.alualuS.S.alu

DN 16 - 40 - 63DN 25 - 40

DN 16 to 160DN 16 to 80DN 16 to 160

manual or pneumaticelectro-magnetic

manual or pneumaticmanual or pneumatic

pneumatic

All valves with pneumatic actuatorsare delivered with position indicatorsand solenoids.

Table of voltages

This table of voltages provides theletters required to complete the codeswhen ordering some valve models.The letter is to be added to the codenumber, in order to define theappropriate voltage.

Seal kit

For any seals kit of valves not refered in this catalogue, please contact the Alcatel Vacuum Technology Commercial Department.

Seal kit = 1 seal for the plate + 1 seal for the body.

C25.05

HV Gate valvesDN 16 - 250

HV Gate valves DN 16 - 250

(aluminium body, FPM/shaft feedthrough)Manual and pneumatic actuators(double acting cylinder, with position indicator and solenoid)

PART NUMBERmm

Flange DN

inch

30385K30386K30387K30388K31152K31546K31153K31532K31533K31534K

162540506380100160200250

5/8

111/2

221/2

346810

Main Specifications

Aluminium bodyThin profile and light weightHigh quality shaft feedthrough: FPM sealsLeak rate, body seat: <10 -9 mbar.l/sPressure range: DN 16 - 50: 1.10-7 mbar to 1 bar (abs)

DN 63 - 200: 1.10-7 mbar to 1.6 bar (abs)DN 250: 1.10-7 mbar to 1.2 bar (abs)

Differential pressure on the gate:DN 16 - 50: ≤ 1 bar in either directionDN 63 - 200: ≤ 1.6 bar in either directionDN 250: ≤ 1.2 bar in either direction

Max differential pressure at opening ≤ 30 mbarCycles until first service: DN 16 - 50: 50 000

DN 63 - 100: 200 000DN 160 - 250: 100 000

Bake-out temperature:• Valve DN 16 - 50 ≤ 100 °C• Valve DN 63 - 250 ≤ 120 °C• Manual and pneumatic actuator 80 °C• Position indicator 80 °C• Solenoid 50 °CSeals:• Bonnet FPM• Plate FPM

* Please indicate the appropriate letter:- M for manual actuator- for pneumatic actuator, one of the options A, B, E, F, G, H, I, K, U from voltages table page C25.04.- DN 200 - DN 250 not available with manual actuator

Seal kits (see page C25.04)

For HV gate valves, DN 16 - 250Manual and pneumatic actuators

JISISO-FISO-KF

PART NUMBER

mm

Flange DN

inch

31545 *31033 *31034 *31035 *31036 *

31024 *31544 *31025 *31026 *31027 *31028 *

30381 *30382 *30383 *30384 *

162540506380100160200250

5/8

111/2

221/2

346810

C25.06

VACUUM VALVES

U

AK

I

O

B D

TM

NQ

*L

H

V

DN 16 - 50 (5/8" - 2 ")

seat side

required for dismantling

leak detection portmech. pos. indication

Technical data Manual Pneumatic

DN(nom. I. D)

Standard flanges

ISO-KF ISO-F JIS

Clos

ing

orop

enin

g tim

e

Mol

ecula

r flo

wco

nduc

tanc

e

Weight

Compressed airpressure

min. - max.overpressure

Volume of aircylinder Weight

mm inch I/s kg Ibs bar psig I Ft3 s kg Ibs

162540506380100160200250

5/8

111/2

221/2

3468

10

16254050

6380100160200250

6380100150200250

10341402605501000200060001200022000

0.40.40.71.43

3.84.59--

0.90.91.53791020--

4.5 - 74.5 - 74.5 - 74.5 - 74 - 74 - 74 - 74 - 74 - 74 - 7

65 - 10065 - 10065 - 10065 - 10055 - 10055 - 10055 - 10055 - 10055 - 10055 - 100

0.010.030.070.070.160.200.220.500.901.50

.0004

.0010

.0020

.0020

.0060

.0007

.0080

.0180

.0320

.0530

0.80.11.21.31.51.72.02.03.05.0

0.80.81.21.23

3.84.591825

1.81.82.72.77910203855

Dimensions manual actuator DN mminch

165/8

251

4011/2

502

A mminch

B mminch

D mminch

H mminch

I mminch

K mminch

L mminch

M mminch

N mminch

O mminch

Q mminch

T mminch

U mminch

V mminch

552.1775

2.9549

1.9352.22.06

3.1233

1.302409.4537.51.481084.2575

2.9565

2.5693

3.6740

1.5755

2.17

401.5730

1.1815.5917.2.683

.1225.981003.9415.5939

1.5530

1.1828.9837

1.4625.9830

1.18

501.9740

1.5724.9426.21.03

3.1232

1.261395.4722.8759

2.3244

1.7335

1.3850

1.9732

1.2630

1.18

512.0155

2.1739

1.5441.21.62

3.1231

1.222088.1932.51.2893

3.6665

2.5655

2.1785

3.3540

1.5750

1.97


V

0

W

U

P

K

N

L

T

Q

C25.07

DN 63 -100 (21/2" - 4")

seat side


Dimensions manual actuator

DN mminch

6321/2

K mminch

L mminch

N mminch

O mminch

P mminch

Q mminch

T mminch

U mminch

V mminch

W mminch

1004

361.42413

16.26203.58.011405.5148

1.8925

0.98209.58.2543

1.69943.775

2.95

803

361.42363

14.29173.56.831184.6548

1.8925

0.98189.57.4643

1.69943.775

2.95

DN 160 (6")

seat side


U

PK

NT

LQ

*V

W

O

DN mminch

1606

K mminch

L mminch

N mminch

O mminch

P mminch

Q mminch

T mminch

U mminch

V mminch

W mminch

361.42329.512.97155.56.121003.9448

1.8925

0.981746.8543

1.69943.775

2.95

582.28547

21.54280

11.021927.5670

2.7660

2.36267

10.5165

2.561224.895

3.74

HV Gate ValvesDN 16 - 250

C25.08

VACUUM VALVES

DN 16 - 50 (5/8 " - 2")

seat side

required for dismantlingmech. pos. indication

comp. air connection(1/8" NPT for USA)

electrical connection

B D H

N

A

I

OK

ML

Q *

R1/8"

M5 V W

W 1

U

Dimensions pneumatic actuator

DN mminch

165/8

251

4011/2

502

A mminch

B mminch

D mminch

H mminch

I mminch

K mminch

L mminch

M mminch

N mminch

O mminch

Q mminch

U mminch

V mminch

W mminch

W1 mminch

552.1775

2.9549

1.9352.22.06

3.1233

1.302208.6637.51.481034.0675

2.9565

2.5640

1.5765

2.5666

2.6050

1.97

401,5730

1.1815.5917.2.683

.1225.981054.1315.5939

1.5530

1.1825.9825.9856

2.2055

2.1750

1.97

501.9740

1.5724.9426.21.03

3.1232

1.261365.3522.8756

2.2044

1.7335

1.3832

1.2661

2.4060

2.3650

1.97

512.0155

2.1739

1.5441.21.62

3.1231

1.221967.7232.51.2888

3.4665

2,5655

2.5740

1.5765

2.5661

2.4050

1.97


C25.09

DN 63 - 100 (2 1/2" - 4")

seat siderequired fordismantlingemergencyposition

comp. air connection(1/8" NPT for USA)electricalconnectionposition indicator


DN mminch

632 1/2

K mminch

L mminch

N mminch

O mminch

P mminch

Q mminch

T mminch

U mminch

V mminch

W mminch

W1 mminch

1004

361.42425

16.69203.58.011405.5158

2.2825

0.98221.58.7255

2.17562.272

2.8336.51.44

803

361.42375

14.76173.56.831184.6558

2.2825

0.98201.57.9355

2.17562.272

2.8336.51.44

DN 160 - 250 (6" - 10")

seat siderequired for dismantlingcomp. air connection(1/8" NPT for USA)electrical connection

DN mminch

1606

2008

25010

K mminch

L mminch

N mminch

O mminch

P mminch

Q mminch

T mminch

U mminch

W mminch

V mminch

762.99843

33.19453

17.83308

12.1396

3.781003.94390

15.3586

3.3984.53.3367

2.64

662.6688

27.09363.514.312409.4580

3.1580

3.15324.512.78

752.9576.53.0162

2.44

361.42341.513.45155.56.121003.9458

2.2825

0.981867.3255

2.17562.272

2.8336.51.44

582.28547

21.54280

11.021927.5670

2.7660

2.36267

10.5165

2.5671.52.8257

2.24


NT

LQ

R 1/8"

O

V WU

P

K

VL

NTW

Q

O

R 1/8"

W1

K

P

U

C25.10

VACUUM VALVES

ISO F - DN 63 - 250 (2 1/2" - 10")

Flange dimensions DN mminch

632 1/2

A mminch

B mminch

C mminch

D mminch

E x F

G mminch

H mminch

I mminch

M mminch

O1 mminch

JIS - DN 63 - 250 (2 1/2" - 10")

602.361305.121104.3365

2.56

4 x M8

120.4770

2.763

0.1265.52.581315.16

803

602.361455.711254.9280

3.15

8 x M8

120.4783

3.273

0.1273

2.871465.75

1004

602.361656.51455.711003.94

8 x M8

120.471024.02

30.1283

3.271666.54

1606

702.762359.252007.871505.91

8 x M10

160.631536.02

50.2

117.54.632379.33

2008

803.15288

11.34260

10.242007.87

12 x M10

160.632138.39

50.21445.6729011.42

25010

1003.94350

13.7831012.2261

10.27

12 x M10

160.63

----

1756.8935213.86

DN mminch

632 1/2

A mminch

B mminch

C mminch

D mminch

E x F

G mminch

M mminch

O1 mminch

602.361455.711204.7265

2.56

4 x M10

120.4773

2.871465.75

803

602.361606.31355.3180

3.15

4 x M10

120.4781

3.191616.34

1004

602.361857.281606.31003.94

8 x M10

120.4793

3.661867.32

1506

702.762359.252108.271505.91

8 x M10

160.63117.54.632379.33

2008

803.15288

11.34270

10.632007.87

8 x M12

160.631445.6729011.42

25010

1003.94350

13.7832012.6261

10.27

12 x M12

160.631756.8935213.86

HV Gate valves

C

O1

ExF

A

M

G

DB

seat side

seat side

C

G

O1

ExF

A

M

DB H

C25.11

UHV Gate valvesDN 63 - 250

UHV Gate valves DN 63 - 250

(stainless steel body, bellows sealed)Manual and pneumatic actuators(double acting cylinder, with position indicator and solenoid)

ASA-LPISO-FCF-FUNF threads

CF-Fmetric threads

PART NUMBER

mm

Flange DN

inch

30015 *30550 *(1)

30016 *30017 *30018 *30019 *

30010 *30549 *30011 *30012 *30013 *30014 *

30005 *30548 *30006 *30007 *30008 *30009 *

30000 *30547 *30001 *30002 *30003 * 30004 *

6380100160200250

21/2

346810

* please indicate the appropriate letter:- M for manual actuators- for pneumatic actuator, one of the options A, B, E, F, G, H, I, K, U from voltages table page C25.04.

- (1) 30550 *: on request.


For UHV gate valves DN 63 - 250Manual and pneumatic actuators

PART NUMBERmm

Flange DN

inch

30100K30551K30101K30102K30103K30104K

6380100160200250

21/2

346810

Main Specifications

Stainless steel body

Cycles until first service: 50 000

Bake-out temperature:

• Valve ≤ 250 °C (open) ≤ 200 °C (closed)

• Manual actuator 250 °C

• Pneumatic actuator 200 °C

• Position indicator 80 °C

• Solenoid 50 °C

Leak rate:

• Body < 5.10-10 mbar.l/s

• Seat < 1.10-9 mbar.l/s

Pressure range: DN 63 - 200: 1.10-10 mbar to 1.6 bar (abs)

DN 250: 1.10-10 mbar to 1.2 bar (abs)

Differential pressure on the gate: DN 63 - 200: ≤1.6 bar in either direction

DN 250: ≤1.2 bar in either direction

Max differential pressure at opening: ≤ 30 mbar

Seals:

• Gate FPM

• Bonnet metal

Shaft feedthrough: non lubricated bellow

U

Ø10

DN

160

/200

K

P

Q*

LM

NT

O1

S

O

U1

V

C25.12

VACUUM VALVES


Manual Pneumatic

DN(nom. I. D)

Standard flanges

ISO-F CF-FASA-LPASA

Mol

ecul

ar fl

owco

nduc

tanc

e

Clos

ing

orop

enin

g tim

e

Turn

s pe

rst

roke Weight



Volume of aircylinder

Weight

mm inch O.D I/s n kg Ibs bar psig I Ft3 s kg Ibs

6380100160200250

21/2

34683

6380100160200250

41/2

41/2

681012

2-3468

600800170060001200026000

1010131717-

9912182952

2020264062

114

4 - 74 - 74 - 74 - 74 - 75 - 7

55 - 10055 - 10055 - 10055 - 10055 - 10070 - 100

0.080.080.110.140.250.35

.0028

.0028

.0038

.0049

.0087

.0122

1.01.01.21.52.04.0

99 12182842

202026406292

Technical data

DN 63 - 200 (21/2" - 8")

seat side


leak detection port

mech. pos. indication

for attachment

DN mminch

632

1/2

1004

1606

2008

K mminch

L mminch

M mminch

N mminch

O mminch

O1 mminch

P mminch

Q mminch

S mminch

T mminch

U mminch

U1 mminch

V mminch

351.38660

25.981254.92430

16.932509.842409.4580

3.15350

13.7838.51.522007.8790

3.541034.0694

3.70

271.06408

16.0657

2.241927.561154.531124.4170

2.761807.0911

0.431847.2470

2.7683

3.2777

3.03

803

271.06421

16.5757

2.242058.071154.531124.4170

2.761807.0911

0.431847.2470

2.7683

3.2777

3.03

271.06462

18.1973

2.872479.721455.711425.5970

2.762208.66

90.351847.2470

2.7683

3.2777

3.03

271.06552

21.7399

3.90336

13.232007.871927.5670

2.76290

11.4225

0.981847.2470

2.7683

3.2777

3.03

Dimensions manual actuator

C25.13


DN 63 - 200 (2 1/2" - 8")

seat side



electrical connectioncomp. air connection(1/8" NPT for USA)

MN

TL

Q*

V W

S

O

U1

U

P

KO1


DN mminch

632

1/2

1004

1606

2008

K mminch

L mminch

M mminch

N mminch

O mminch

O1 mminch

P mminch

Q mminch

S mminch

T mminch

U mminch

U1 mminch

V mminch

W mminch

271.06346

13.6257

2.241927.561154.531124.4170

2.761807.0911

0.431546.0670

2.7683

3.271455.7177

3.03

803

271.06358

14.0757

2.242058.071154.531124.4170

2.761807.0911

0.431546.0670

2.7683

3.271455.7177

3.03

271.06418

16.4673

2.872479.721455.711425.5970

2.762208.66

90.351716.7370

2.7683

3.271455.7177

3.03

271.06523

20.5999

3.90336

13.232007.871927.5670

2.76290

11.4225

0.981877.3670

2.7683

3.271455.7177

3.03

351.38630

24.801254.92430

16.932509.842409.4580

3.15350

13.7838.51.522007.8790

3.541034.061556.1087

3.42

25010

411.61800

31.501616.3455922345

13.5032212.680

3.15450

17.7265

2.562409.4590

3.541034.061556.1087

3.42

C25.14

VACUUM VALVES

ISO F - DN 63 - 250 (2 1/2" - 10")

DN mminch

632 1/2

A mminch

B mminch

C mminch

D mminch

E x F

G mminch

H mminch

I mminch

702.761305.121104.3370

2.76

4 x M8

130.51

----

803

702.761455.711254.92763

8 x M8

130.5183

3.274.5

0.18

1004

702.761656.51455.711003.94

8 x M8

130.511024.02

30.12

1606

702.762258.862007.871505.91

8 x M10

150.591536.02

50.2

2008

803.15285

11.22260

10.242007.87

8 x M10

150.592138.39

50.2

25010

1003.94350

13.7831012.2261

10.27

12 x M10

150.59

----

DN mminch

632 1/2

O.D.inch

A mminch

B mminch

C mminch

D mminch

E x F

H1 mminch

H2 mminch

4 1/2

702.76113.54.4792.13.6370

2.76

8 x M8

82.53.2577.43.05

803

4 1/2

702.76117.54.63102.44.08763

10 x M8

91.53.686.33.4

1004

6

702.76151.65.97130.25.131003.94

16 x M8

120.654.75115.54.55

1606

8

702.76202.47.971817.131505.91

20 x M8

171.456.751666.54

2008

10

803.15253.29.97231.89.132007.87

24 x M8

222.38.752178.54

25010

12

1003.94350

13.78284

11.1825410

32 x M8

273.1510.75267

10.51

DN mminch

632 1/2

O.D.inch

A mminch

B mminch

C mminch

D mminch

E x F

H1 mminch

H2 mminch

4 1/2

702.76113.54.4792.13.6370

2.768 x 5/16”

24 UNF82.53.2577.43.05

803

4 1/2

702.76117.54.63102.44.08763

10 x 5/16”

24 UNF91.53.686.33.4

1004

6

702.76151.65.97130.25.131003.94

16 x 5/16”

24 UNF120.65

4.75115.54.55

1606

8

702.76202.47.971817.131505.91

20 x 5/16”

24 UNF171.45

6.751666.54

2008

10

803.15253.29.97231.89.132007.87

24 x 5/16”

24 UNF222.38.752178.54

25010

12

1003.94350

13.78284

11.1825410

32 x 5/16”

24 UNF273.1510.75267

10.51

CF - F - DN 63 - 250 (2 1/2" - 10")Metric threads

CF-F - DN 63 - 250 (2 1/2" - 10")UNF threads

UHV Gate valves

Flanges dimensions

seat side

seat side

seat side

C25.15

ASA-LP - DN 63 - 250 (2 1/2" - 10")

UHV Gate valves

DN mm

inch

63

2 1/2

80

3

100

4

160

6

200

8

250

10

ASA - LP

A mminch

B mminch

C mminch

D mminch

E x F

G mminch

H mminch

O’ringI.D. X d

2

702.76

152.46

120.74.7570

2.764 x 3/8”

16 UNC15

0.5988.93.5

88.49 x 3.533.48 x 0.139

-

702.76

177.87

139.75.5763

4 x 3/8”

16 UNC15

0.5988.93.5

88.49 x 3.533.48 x 0.139

3

702.76

190.57.5

152.46

1003.94

4 x 3/8”

16 UNC15

0.59120.654.75

120.24 x 3.534.73 x 0.139

4

702.762258.86190.5

7.51505.918x 3/8”

16 UNC15

0.59158.75

6.25158.34 x 3.536.23 x 0.139

6

803.15279.4

11241.3

9.52007.87

8 x 3/4”

10 UNC19

0.75206.48.13

202.79 x 3.537.98 x 0.139

8

1003.94350

13.78298.511.7525410

8 x 3/4”

10 UNC19

0.75266.710.5

266.29 x 3.5310.48 x 0.139

Flanges dimensions

seat side

"A"

A

ExF

"B"

B D H

HG

C25.16

VACUUM VALVES

Main Specifications

Stainless steel and aluminium body

Bellow sealed from atmosphere to UHV

Linear movement with patented spiral mechanism, first swing,

then pivot, no friction from the plate seal.

Leak rate

• Body < 1. 10 -9 mbar.l/s

• Seat < 1.10 -9 mbar.l/s

Pressure range 1.10 -8 mbar to 2 bar (abs)

Differential pressure on the plate ≤ 1.2 bar in opening direction

≤ 1.6 bar in closing direction

Max differential pressure at opening: ≤ 500 mbar

Cycles until first service 100 000

Bake-out temperature

• Valve ≤ 120 °C

• Position indicator ≤ 80 °C

• Solenoid ≤ 50 °C

Seals

• Plate FPM

• Bonnet FPM

Feedthrough bellow

Butterfly valves

(Aluminium or stainless steel body, bellows sealed)Pneumatic actuators(double acting cylinder with position indicator and solenoid)

AluminiumISO-F

PART NUMBER PART NUMBER

mm

Flange DN

inch Stainless steelISO-F

31041 *31554 *31042 *31043 *31044 *

6380100160200

21/2

3468

* Please indicate the appropriate letter:- for pneumatic actuator, one of the options A, B, E, G, H, U from voltages table page C25.04.

Seal kits (See p. C25.04)

DN 63 - 200Pneumatic actuators

PART NUMBERmm

Flange DN

inch

31114K31555K31115K31116K31117K

6380100160200

21/2

3468

Butterfly valvesDN 63 - 200

31037 *31553 *31038 *31039 *31040 *

C25.17

Technical dataPneumatic

DN(nom. I. D)

ISO-F CF-F

Mol

ecul

ar fl

owco

nduc

tanc

e

Clos

ing

orop

enin

g tim

e

Stainless steelbody Aluminium

WeightVolume of air

cylinder

mm

6380100160200

inch

21/2

3468

6380100160200

O.D

41/2

-68

10

I/s

550700140035007500

4 - 74 - 74 - 74 - 74 - 7

60-10060-10060-10060-10060-100

0.040.080.080.130.30

.0014

.0003

.0003

.0045.001

0.40.80.81.41.8

4.67.58

15.634.2

10.116.517.634.475.4

2.33.84

7.416.1

5.18.48.816.335.5

bar psig I Ft3 s kg Ibs kg Ibs

Standardflanges




C25.18

VACUUM VALVES

Flange dimensions



DN 63 - 200 (21/2" - 8")

seat side

comp. air connection


DN mminch

632

1/2

1004

1606

2008

A mminch

B mminch

D mminch

L mminch

M mminch

N mminch

O mminch

S mminch

U mminch

U1 mminch

V mminch

W mminch

903.54300

11.811927.56371

14.611405.51147.55.812007.8745

1.771034.0690

3.5480

3.1530

1.18

501.971305.1263

2.481817.1376

2.9965

2.5667

2.6425

0.9860

2.3650

1.9760

2.3644

1.73

803

602.361455.7176

2.992288.9886

3.3982.53.2580

3.1530

1.1870

2.7660

2.3665

2.5640

1.57

602.361656.595

3.742288.9886

3.3982.53.251003.9430

1.1870

2.7660

2.3665

2.5640

1.57

702.762258.861425.59285

11.221104.331134.451475.7935

1.3883

3.2770

2.7670

2.7640

1.57

W

D

N

L

U1 UV

M

B

R1/8"

SA

A1

O

ISO-F - DN 63 - 200 (21/2" - 8") DN mminch

632

1/2

1004

1606

2008

A mminch

B mminch

C mminch

D mminch

E x F

G mminch

H mminch

I mminch

S mminch

903.54300

11.81260

10.241927.56

12 x M10

150.592138.394.50.1846

1.77

501.971305.121104.3363

2.48

4 x M8

120.4770

2.762.50.125

0.98

803

602.361455.711254.9276

2.99

8 x M8

120.4783

3.272.50.130

1.18

602.361656.51455.7195

3.74

8 x M8

120.471024.022.50.130

1.18

702.762258.862007.871425.59

8 x M10

150.591536.024.50.1835

1.38

seat side

D H

IG

ExF

SA

A1

C

B

H(H

)

C25.19

DN 40 - DN 50

D

A

DN

DN

B

C

DN mm 40 50

ABCDWeight (g)

97.5684044550

152.51117060

1350

Main Specifications


Bronze shaft

Quarter turn for opening and closing

Visual indication of valve position

Closes and opens against atmospheric pressure

Leak rate:

• External 10-8 mbar.l/s

• Plate 10-8 mbar.l/s

Conductance: DN 40: 135 l/s at 1 mbar

DN 50: 385 l/s at 1 mbar

Seal: Perbunan

Ordering informationManual actuator

Dimensions in mm

PART NUMBERISO-KFmm

Flange DN

inch

786557786365

PART NUMBERSeal kits

033591033592

4050

11/2

2

Butterfly valvesDN 40 - DN 50

C25.20

VACUUM VALVES

Double Butterfly Valve DN 40

Butterfly valvesDouble butterfly valve DN 40

Main Specifications


Two butterfly plates in the same body

In-line main way, angle by-pass port

with smooth tube 27.5 mm O.D.



Leak rate:

• External 10 -8 mbar.l/s

• Plate 10 -8 mbar.l/s

Seals: Perbunan

Weight: 1600 g


Dimensions in mm

PART NUMBERISO-KFmm

Flange DN

inch

786558

PART NUMBERSeal kits

03359040 11/2

130.

597.568

104

Ø27.5

DN DN

60 22

92

29

62.5

Ø59

C25.21

Three Port Butterfly Valves DN 25 - DN 40

DN mm 25 40

ABCDEWeight (g)

5010924.565

54.5550

7011434.56562

3300

Main Specifications


Bronze shaft



Closes and opens against atmospheric pressure

Leak rate:


• Plate 10-8 mbar.l/s

Conductance: DN 25: 65 l/s at 1 mbar

DN 40: 135 l/s at 1 mbar

Seal: Perbunan


Dimensions in mm

PART NUMBERISO-KFmm

Flange DN

inch

786967785121

PART NUMBERseal kits

033588033589

2540

111/2

DC

B

A

DNDN

DN E

A

Butterfly valvesThree port butterfly valves DN 25 - DN 40

C25.22

VACUUM VALVES

HV Angle valves DN 16 - 160

(aluminium or stainless steel body, bellows sealed)Manual and pneumatic actuators(single acting cylinders, with position indicator and solenoid)

ISO-KISO-KF

PART NUMBER - Aluminium PART NUMBER - Stainless steel

mm

Flange DN

inch ISO-K ISO-KF

31069 *31070 *31071 *31072 *

162540506380100160

5/8

111/2

221/2

346


HV DN 16 - 160Manual and pneumatic actuators

PART NUMBERmm

Flange DN

inch

31132K31133K31134K31135K31136K31543K31530K31531K

162540506380100160

5/8

111/2

221/2

346

Main Specifications

Stainless steel and aluminium body

Bellow feedthrough

Cycles until first service DN 16 - 80: 3 millions

DN 100 - 160: 1 million

Leak rate: Body, Seat <1.10-9 mbar.l/s

Pressure range (open and closed in closing direction) :

DN 16 - 50: 1.10-8 mbar to 4 bar (abs)

DN 63 - 160: 1.10-8 mbar to 5 bar (abs)

Max. differential pressure at opening: ≤ 1 bar in either direction

Differential pressure on the plate

Manual actuator: DN 16 - 25: 4 bar

DN 40 - 50: 3 bar

DN 63: 2 bar

Pneumatic actuator: DN 16 - 63: 2 bar

DN 100 - 160: 1.2 bar


• Valve body ≤ 150 °C

• Manual and pneumatic actuator ≤ 150 °C

• Position indicator ≤ 80 °C

• Solenoid ≤ 80 °C

Seals:

• Plate, Bonnet FPM

31062 *31063 *31064 *31065 *

31066 *31542 *31067 *31068 *

31073 *

Angle valvesHV Angle valves DN 16 - 160

* Please indicate the appropriate letter: - M for manual actuator- for pneumatic actuator, one of the options DN 16 - 50: A, B, F, H / DN 63 - 160: A, B, F, H, J, S, L, P, V, Q, Rfrom the voltages table page C25.04.

- DN 100 - DN 160 not available with manual actuator

C25.23

Technical data

Manual Pneumatic

DN(nom. I. D)

ISO-KF ISO-K Aluminiumbody

Stainlesssteel body M

olec

ular

flow

cond

ucta

nce

Turn

s pe

r str

oke

Clos

ing

time

Weight

Aluminiumbody

Stainlesssteel body

WeightVolume ofair cylinder

mm

162540506380100160

inch

5/8

111/2

221/2

346

16254050----

----

6380100160

I/s

5144580160200440

1000

3.63.84.54.86.66.6

--

0.200.270.60.942.93.1

--

0.4410.5951.3232.0726.3936.834

--

0.260.340.751.11.7

---

0.5730.7501.6532.4253.748

---

4 - 84 - 84 - 84 - 84 - 84 - 84 - 84 - 8

60-11560-11560-11560-11560-11560-11560-11560-115

0.0040.0110.0350.0470.1120.1120.3301.050

0.00010.00040.00120.00170.00400.00400.01170.0371

0.10.2 0.550.650.70.71.0

2.00

0.370.51.061.542.993.198.0914.79

0.8151.1022.3363.3956.5917.03217.83530.622

0.430.61.221.71.79

---

0.9481.3222.6893.7473.946

---

n kg Ibs kg Ibs bar psig I Ft3 s kg Ibs kg Ibs

Standardflanges

Compressedair pressuremin. - max.overpressure

DN 16 - 50 (5/8" - 2") ISO-KF

Dimensions Manual actuator

DN mminch

165/8

251

4011/2

502

A mminch

B mminch

D mminch

L mminch

L1 mminch

Q mminch

V mminch

Z mminch

702.7677

3.0350

1.97101.13.98104.1

4.185.53.3560

2.369.30.37

652.5665

2.5640

1.5794.33.7197.33.8373.52.8960

2.367.9

0.31

401.5740

1.5716

0.6364.92.5667.42.6546

1.8140

1.573.60.14

501.9748

1.8925

0.9860.92.464.32.5344

1.7340

1.574.7

0.19


A

AD

L/L1

Z

Q

V

B

B

seat side



L: aluminiumL1:stainless steel

C25.24

VACUUM VALVES

DN 63 - 80 (2 1/2" - 3) ISO-K

A

AD

L/L1

ZQ

V

B

DN mminch

6321/2

A mminch

B mminch

D mminch

L mminch

L1 mminch

Q mminch

V mminch

Z1) mminch

683.461234.84632.5

114.84.52114.84.521054.1369

2.7213.30.55

803

883.461234.84803

114.84.52114.84.521054.1369

2.7213.30.55

Angle ValvesHV Angle Valves DN 16 - 160

seat side



L: aluminiumL1:stainless steel

Dimensions Manual actuator

A

AL/

L1QZ

E/E1

DB

B

F

M5

C25.25

Dimensions Pneumatic Actuator

DN 16 - 50 (5/8" - 2") ISO-KF DN 63 - 160 (2 1/2" - 6" ) ISO-K

AL

Z

Q

TD

U

R1/8"

B

A

DN mminch

165/8

A mminch

B mminch

D mminch

E mminch

E1 mminch

F mminch

L mminch

L1 mminch

Q mminch

Z mminch

401.5740

1.5716

0.6335.61.4

38.11.59

0.3565.22.5767.72.67 46

1.812

0.08

251

501.9748

1.8925

0.9830.61.234

1.3413

0.5160.62.3864

2.52 44

1.734

0.16

4011/2

652.5665

2.56 40

1.5751.62.0354.62.1518.90.7487.73.4590.73.57 73.52.899.5

0.37

502

702.7677

3.0350

1.9758.42.361.42.4220

0.7996

3.78993.9 85.53.3510.50.41

DN mminch

6321/2

A mminch

B mminch

D mminch

E mminch

L mminch

Q mminch

T mminch

U mminch

Z mminch

883.461234.8463

2.4871.42.811234.841054.1345.11.78943.7 21.60.85

803

903.541234.8480

3.1571.42.811234.841054.1345.11.78943.7 21.60.85

1004

1084.251556.1 1024.021315.16206.58.131706.6981

3.191234.84

60.24

1606

1385.432168.5 1536.021174.612027.951957.6886.53.411807.09

60.24


seat side

required for dismantlingmech. pos. indication

leak detection port

comp. air connection(1/8" NPT for USA)

E: aluminiumE1:stainless steelL: aluminiumL1:stainless steel

C25.26

VACUUM VALVES

Angle valvesUHV Angle valves DN 16 - 40 - 63

Technical Data

DN

Mol

ecul

ar fl

owco

nduc

tanc

e

Clos

ing

time


min. - Max.overpressure

WeightVolume of air cylin-

derWeight

mm

164063

inch

5/8

11/2

21/2

I/s

545160

Turn

s pe

r str

oke

n

CF-F

flan

ge

36

8.5

11/3

23/4

41/2

kg

0.551.86.3

Ibs

1.24.013.9

bar

4 - 84 - 84 - 8

psig

60 - 11560 - 11560 - 115

I

0.0050.0320.100

Ft3

0.00020.00110.0035

s

0.050.30.7

kg

0.72.06.3

Ibs

1.544.413.9

Main Specifications

Formed stainless steel body without corners

Extremely low outgassing rate

Suited for most corrosive gases

Bellow sealed

Cycles until first service: DN 16 - 40: 3 millions

DN 63: 1 million

Leak rate:

• Body < 5.10 -10 mbar.l/s


Pressure range:

Open and closed in closing direction 1.10 -10 mbar to 5 bar (abs)

Differential pressure on the plate in opening direction

Manual actuator: DN 16: ≤ 5 bar

DN 40: ≤ 3 bar

DN 63: ≤ 2 bar

Pneumatic actuator: DN 16 - 63: ≤ 2 bar

Max. differential pressure at opening: ≤ 1 bar in either direction


• Valve ≤ 200° C open, 150° C closed

• Manual and pneumatic actuator ≤ 150° C

• Position indicator ≤ 80° C

• Solenoid ≤ 80° C

Seals:

• Plate FPM

• Bonnet metal

Feedthrough: bellow

Manual and pneumatic actuator(simple acting cylinder, with position indicator and solenoid)

CF-R

PART NUMBER

mm

Flange DN

inch

30076 *30077 *30078 *

SEAL KITS(see page C25.04)

30139K30140K30141K

164063

5/8

11/2

21/2

* Please indicate the appropriate letter: M for manualactuator, for pneumatic actuator, one of the options A, B, F,H, J, L, P, Q, R, S, V from the voltages table page C25.04.

Manual Pneumatic

C25.27

seat siderequired for dismantling

comp. air connection(1/8" NPT for USA)mech. pos. indication

seat siderequired for dismantling

comp. air connection(1/8" NPT for USA)mech. pos. indication

Manual actuatorDN 16 - 63 (5/8" - 21/2") CF-R

Pneumatic actuatorDN 16 - 63 (5/8" - 21/2") CF-R

ExF A

AL

Q

ZD

U

V

R1/8"

P

DN mminch

165/8

4011/2

6321/2

O.D inchA mm

inchD mm

inchE X F mm

inchL mm

inchP mm

inchQ mm

inchU mm

inchV mm

inchZ mm

inch

41/2

1054.1364

2.528 x 8.48 x .33

1305.121003.941405.511094.2946.51.8318.71

23/4

632.4840

1.576 x 6.66 x .26

973.8168

2.6895

3.7485

3.3534.51.3613.51

11/3

381.5016.63

6 x 4.36 x .17

682.6835

1.3855

2.1754

2.1320.50.81

6.24

DN mminch

165/8

4011/2

6321/2

O.D inchA mm

inchD mm

inchE x F mm

inchL mm

inchP mm

inchQ mm

inchU mm

inchV mm

inchZ mm

inch

41/2

1054.1364

2.528 x 8.48 x .33

1546.061003.941405.511094.2982

3.2919.75

23/4

632.4840

1.576 x 6.66 x .26

1184.6568

2.6895

3.7482

3.2363

2.4813.51

11/3

381.5016

0.636 x 4.36 x .17

933.6635

1.3855

2.1747

1.8550

1.976

.24

Angle valvesUHV Angle Valves DN 16 - 40 - 63

Dimensions actuator

See page C25.28 for position indicator and solenoid dimensions

C25.28

VACUUM VALVES

DN mminch

165/8

4011/2

6321/2

A mminch

B mminch

C mminch

D mminch

E x F mminch

H1 mminch

H2 mminch

K mminch

L mminch

M mminch

N mminch

O mminch

SW mminch

T mminch

U mminch

Z mminch

1054.13113.54.4792.13.6364

2.528 x 8.4

82.53.2577.43.05141.55.5719

0.7556.62.2374

2.91943.722

0.8751.52.0354

2.1320

0.79

632.4869.52.7458.72.3140

1.576 x 6.6

48.31.942

1.6570

2.7613

0.5133.61.3251.72.04712.810

0.39––––

2.50.1

381.5034

1.3427

1.0616

0.636 x 4.3

21.40.8418.50.73662.67.30.2925.6

127.51.0834

1.3410

0.3930.51.219

0.758.5

0.33

Angle valves

Flanges dimensions

Position indicator and solenoid for pneumatic angle valve DN 16 to DN 63

Indicator

Solenoid

PG9

105

PG9

46

72

72

comp. air connection (1/8" NPT for USA)


C25.29

Technical data

Main Specifications

Aluminium body

Electromagnetic actuator with solenoid and electronic booster (delivered with the valve)

Pressure range: < 1.10 -8 mbar to 2 bar

Leak rate:

• Body < 1.10 -9 mbar.l/s


Max. differential pressure at plate: 2 bar in either direction


Max. strokes nb: 15 / mn at 20 °C

Working temperature: 0 °C to 40 °C

Seals:

• Body, Plate FPM

Voltage - frequency PART NUMBER

100/115 V - 50/60 Hz200/230 V - 50/60 Hz

30146Z30147Z

DN 4025

Ordering information

Normally closed (power off)

Electronic booster and coil

(identical for both valve sizes)

ISO-KF

PART NUMBER

mm

Flange DN

inch

30082 *30083 *

SEAL KITS(see page C25.04)

30144K30145K

2540

111/2

Delivered with electronic booster andcoil. Normally closed (power off).* Please indicate the appropriateletter: option D or C from the voltages table page C25.04.

7008

0.10.1

45

1.84

0.40.9

7008

0.10.1

14

1.43

1.84

Starting power WHolding power WClosing time sOpening time sConductance molecular flow l/s

Weight valve kglbs

Electronic booster kglbs

Vacuum valvesElectromagnetic Angle Valves DN 25 - 40

C25.30

VACUUM VALVES

DN 25 - 40 (1" - 11/2")

seat side



LA

D

P

60 Q*68

PG9

A

1818

PG9

PG11

1101150

120

100

60

15.5

32

31

DN mminch

251

4011/2

A mminch

D mminch

L mminch

P mminch

Q mminch

652.5640

1.5793

3.6678

3.0760

2.36

501.9725

0.9883

3.2757

2.2460

2.37

Vacuum valvesElectromagnetic angle valves DN 25 - 40

mech. pos. indication

C25.31

Main Specifications

Aluminium body

Suitable for isolation venting and rough flow regulation

For gas and liquid

Pressure range: 1.10 -7 mbar to 5 bar (abs)

Leak rate: Body, Seat < 1.10 -9 mbar.l/s



• Valve ≤ 150 °C

• Hand wheel ≤ 50 °C

Seal: FPM diaphragm

Weight DN 16 - 25 - 40: 0.16 - 0.50 - 1.2 kg

0.35 - 1.1 - 2.60 lbs

PART NUMBER

ISO-KF DIAPHRAGMmm

Flange DN

inch

30122K30123K30124K

30052M30053M30054M

162540

5/8

111/2


Manual Actuator

DN 16DN 25

DN 40

MN

LT

Z

V

O

PA

I

DHB

DN mminch

165/8

251

4011/2

A mminch

B mminch

D mminch

H mminch

I mminch

L mminch

M mminch

N mminch

O mminch

P mminch

T mminch

V mminch

Z mminch

1054.1355

2.1729

1.1441.21.62

3.121325.22.7.1122.3.88

74/792.91/3.11

75/802.95/3.15

773.0369

2.72--

803.1540

1.5719.7526.21.03

3.121114.37

2.0814.55

54/542.13/2.13

54/542.13/2.13

562.247.51.8710.39

522.0530

1.1815.5917.2.683

.1266.52.6210.3910.39

32.5/32.51.28/1.28

32/321.26/1.26

301.1830

1.185.5.22

Special valvesDiaphragm valves DN 16 - 25 - 40

C25.32

VACUUM VALVES

Main Specifications

Nickel-plated brass body

Pressure range: 10-5 mbar to 20 bar

Leak rate:


• Seat 10-3 mbar.l/s

Seals: Teflon and Perbunan

PART NUMBERISO-KFmm

Flange DN

inch

785048785049785050

162540

5/8

111/2


Manual Actuator

Dimensions in mm

BD

C

A

DNDN

DN

DN mm 16 25 40

ABCDWeight (g)

2609519465

1500

10860

10050

1000

70467540

450

Special valvesThree Way Ball Valves DN 16 - 25 - 40

C25.33

Main Specifications

Nickel-plated brass body

Pressure range: 10-5 mbar to 20 bar

Leak rate:



Conductance at 1 mbar: DN 16: 24 l/s

DN 25: 150.l/s

Seals: Teflon and Perbunan

PART NUMBERISO-KF

786367786368

Ordering information Manual Actuator

Dimensions in mm B

C

D

A

DNDNDN mm 16 25

ABCDWeight (g)

10860

100158800

704675

107.5360

mm

Flange DN

inch

1625

5/81

Special valvesBall Valves DN 16 - DN 25

C25.34

VACUUM VALVES

Main Specifications


For venting small volumes

Leak rate:

• External 5.10-8 mbar.l/s

• Seat 5.10-8 mbar.l/s

PART NUMBERISO-KF

786544786200


Manual actuator

Dimensions in mm

31

Ø 18

DN 16

36

Ø 18

Ø 14

mm

Flange DN

inch

1610/14

5/8

*

* Smooth tube ID: 10 mm OD: 14 mm

Special valvesManual Vent Valves DN 10 - 16

10/14

C25.35

102743100788100789100790102604

102607102608102609102610102611

230 V - 50/60 Hz110/115 V - 50/60 Hz

200 V - 50/60 Hz24 V 50/60 Hz

24 V DC

230 V - 50/60 Hz110/115 V - 50/60 Hz

200 V - 50/60 Hz24 V 50/60 Hz

24 V DC

PART NUMBERVoltageItem

Valve

Spare coil


DN 10 - KFFlange

Technical data

Dimensions in mm

I.D.Status power offClosing timeConductanceVenting timeProtection rateElectrical connectorNb of cycles

6 mmClosed

10 to 15 ms2.5 l/s at 1 mbar

7 s for 15 l 55 s for 100 lIP 65

DIN 43650100 000

34

4 tapped holes M4x6 on Ø 30

32

Special valvesElectromagnetic Isolation Valve DN 10

Main Specifications

Leak rate:



Material:

• Body Nickel plated brass

• Seals FPM

85

60

85

C25.36

VACUUM VALVES

PART NUMBERFlange DN mm

78654316


Dimensions in mm

56

72 Max DN 16

DN 16

Technical data

Flow

mba

r. l/

s

Number of turns

100

50

10

1 5 10 15 20

Special valvesMicro flow leak Valve DN 16

Main Specifications

Brass body

Flange DN 16 ISO-KF

Weight 0.2 kg

Settable gas flow 10 to 100 mbar.l/s

DN 16 ISO-KF

130

117.

5

DN 16 ISO-KF30

30

O42

Technical data103

102

101

110-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103

Gas flow (mbar l/s)

Dig

ital d

ispl

ay

Main Specifications


Flange DN 16 ISO-KF

Weight 0.4 kg

Settable gas flow5.10-6 to

1000 mbar.l/s

Tightness 1.10-9 mbar.l/s

Max. differential2.5 bar

mesure

PART NUMBERFlange DN mm

30536016


Dimensions in mm

Leak Valve DN 16

• Digital Flow indicator• Quick on/off

C25.37

The ISV valve is used at the inlet ofrotary vane pumps (4 to 20 m3/h) whenever isolation is required withvacuum circuit, in case of power failure.In addition, the ISV acts as a ventingvalve for the rotary vane pump, whileisolating the vacuum chamber.Suitable for neutral or slightly corrosivegas.

Features

• Total safety for pumping systems• Low energy consumption• Low dust production, thanks to slowreturn to atmospheric pressure• Optional dry nitrogen gas, can beinjected instead of air• Operation in all positions• Opens only when the inlet pressureof the pump is lower than the pressureinto the vacuum chamber


Flange DN

DN 16DN 25

Spare coil

Model

ISV 16ISV 25

220 V50/60 HZ

033697066832

038121

240 V50/60 HZ

033683066884

038124

100 V50/60 HZ

033681066883

100/115 V50/60 HZ

033680066881

200 V50/60 HZ

033682066882

24 V - DC

NC066867

038126 038122 038125 038066

Technical data

Weight: 0.640 kgMaterial: aluminium body - elastomermembraneElectrical supply: see ordering informationMaximum working temperature: 40° CFlanges: DN 16 and DN 25 ISO-KFLeak rate: <10-4 mbar.l/sAir venting at closing: 7.10-2 mbar.l/s

Applications

Safety feature between rotary vanepumps and turbomolecular or diffusion pumps.Avoid hydrocarbon backstreamingfrom the rotary vane pump.

Special valvesSafety isolation valves DN 16 - 25

PART NUMBER

C25.38

VACUUM VALVES

a/ Start-up conditions:The different parts of the valve areat atmospheric pressure.No power is supplied to electric coil.The piston (4) is opened under pressure from return spring.

b/ Operating conditions:The electrical coil is powered.The solenoid valve (10) closes, isolating the upper chamber of the valve from external air.The pumping is performed in thedirection of the arrow (“pump”).

Pressure in the chamber over themembrane (8) is progressively reduced (pressure reduction by the nozzle (6)). All valve elementsare at pump inlet pressure. The piston (4) is stable in the openposition.

c/ Stoppage, during power failure:The electrical coil is no longer powered and therefore immediatelyallows air at atmospheric pressure to enter the chamber over the membrane.

The piston (4) is pushed back, compressing the spring (7) and thevalve closes.The pumping unit gradually returns toatmospheric pressure via the opensolenoid valve (10) and the nozzle.

Nota: on closing, a slight flow of air (around7.10-2 mbar.l /s) enters the vacuum chamber.

Conductance

Spare parts Dimension (mm)

P/N

Inlet pressure

10-2 mbar10 -1 mbar1 mbar

6 l/s15 l/s66 l/s

MembraneO-Ring C 2 D 30Spring

066838082252066837

1513471510129

16

14

2 8

3

19

6

17

18

50 (D

N25

)

145 (DN25)

60

60

75

Cable feedthrough

50

80

20

Pum

p

140 (DN16)

45 (D

N16

)

50 (DN25)45 (DN16)

Special valvesSafety isolation valves DN 16 - 25

Operating principle

C25.39

CHINAAlcatel Vacuum Technology Shanghai Tel: (86) 21 5027 0628 Fax: (86) 21 3895 3815

FRANCEAlcatel Vacuum Technology France Tel: 33 (0) 4 50 65 77 77 Fax: 33 (0) 4 50 65 77 89

GERMANYAlcatel Hochvakuum Technik GmbH Tel: (49) 9342 96 10 0 Fax: (49) 9342 96 10 30

I TALYAlcatel Vacuum Systems S.p.a. Tel: (39) 039 686 3855 Fax: (39) 039 667 125

JAPANAlcatel Japan Tel: (81) 44 797 5920 Fax: (81) 44 797 5932

KOREAAlcatel Vacuum Technology KoreaTel: (82) 2 409 6277 Fax: (82) 2 409 6279

NETHERLANDSAlcatel Vacuum TechnologyNetherlandsTel: (31) 306 35 13 60Fax: (31) 306 35 12 21

SINGAPOREAlcatel Singapore Pte LtdTel: (65) 6254 0828Fax: (65) 6254 7018

TAIWANAlcatel Vacuum Technology TaiwanTel: (886) 3 5599 230Fax: (886) 3 5599 231

UNITED KINGDOMAlcatel Vacuum Technology (U.K.) Tel: (44) 1 506 418 000 Fax: (44) 1 506 418 002

USAAlcatel Vacuum Products Tel: (1) 781 331 4200 Fax: (1) 781 331 4230

Alcatel Vacuum Technology98 Avenue de Brogny - BP 2069 - 74009 Annecy Cedex - France - Tel.: 33 (0) 4 50 65 77 77 - Fax: 33 (0) 4 50 65 77 89

www.adixen.com

Part

Num

ber:

791

596

- Apr

il 20

06 -

All

info

rmat

ion

can

be m

odifi

ed w

ithou

t prio

r no

tice

- Rea

lizat

ion:

VACUUM VALVES · vacuum valves (vent valves, 3 way valves, leak valves, throttling valves…)...

Documents

Transcript of VACUUM VALVES · vacuum valves (vent valves, 3 way valves, leak valves, throttling valves…)...