Vacuum Pump Systems (Stand 06 - Leybold Online Shop · Vacuum Pump Systems Fore Vacuum Pump...

Vacuum Pump Systems

Fore Vacuum Pump Systems - oil-sealed (RUTA)Central Vacuum Supply Systems with SOGEVACFore Vacuum Pump Systems - dry compressing (RUTA)High Vacuum Pump Systems TMP

with oil sealed Fore Vacuum Pumpswith dry compressing Fore Vacuum Pumps

UNIVEX High Vacuum Experimentation SystemsCalibration Systems

250.00.02Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog 2013Catalog Part Vacuum Pump SystemsEdition 2013

Vacuum Pump Systems

Vacuum Pump Systems - oil sealed (RUTA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3General

Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Types of Pumps Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Products

Pump Systems

Oil Sealed Vacuum Pump System RUTA Three-Stage Pump Systems

with Two-Stage TRIVAC Backing PumpsAdaptor Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10Frame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Two-Stage Pump Systemswith Single-Stage SOGEVAC Backing Pumps

Adaptor Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Frame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Two- and Three-Stage RUTA Pump Systemswith Single- and Two-Stage Rotary Piston Vacuum Pumps as Backing Pump . . . . . . . . . . . . . . . . . . . . . . 22

RBS - B/BCS Roots Pump Systems (Only available for purchase in North and South America)with Two-Stage TRIVAC Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

HTS Close-Coupled Pump Systems (Only available for purchase in North and South America)with Single-Stage SOGEVAC Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Central Vacuum Supply Systems with SOGEVAC Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Tank Mounted Medical Vacuum Systems (Only available for purchase in North and South America) . . . . . . . . 40

Vacuum Pump Systems - dry compressing (RUTA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42Products

Pump Systems

Dry Compressing Vacuum Pump System RUTAwith SCREWLINE Backing Pump

Adaptor Versionwithout palette . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42with palette . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

with SCREWLINE Backing PumpFrame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48Adaptor Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

SP Close-Coupled Pump Systems (Only available for purchase in North and South America)with SCREWLINE Dry Compressing Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

Further Products

Dry Compressing Vacuum Pump System RUTAAdaptor Version

with DRYVAC DV 650 Backing Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60

Frame Versionwith DRYVAC DV 650 Backing Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62with DRYVAC DV 1200 Backing Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

Contents

leybold Oerlikon Leybold VacuumCatalog Part Vacuum Pump Systems, Edition 2013 3

leyboldOerlikon Leybold VacuumCatalog Part Vacuum Pump Systems, Edition 20134

DRYVAC Pump Systems Adaptor Version

Load Lock Pump Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66Process Pump Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

with RUVAC WH Backing Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70enclosed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

RUVAC RAV Roots Vacuum Pumps with Pre-Admission Cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

TVD Pump Systems for Drying, Evaporation and Distillation Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76

Accessories for oil sealed and dry compressing Pump Systems

Sound Proofing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

Isolation against Vibrations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

Dust Separators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

Frequency Converter RUVATRONIC RT 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

Electric Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79

Pressure Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79

Dust Filter F-xxx-C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80

Bellows with Vibration Absorbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82

Bus Interfaces for Monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83

Miscellaneous to oil sealed and dry compressing Pump Systems

Checklist for Inquiries (Fax Form) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84

High Vacuum Pump Systems TMP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85General

General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85

Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85

With oil sealed Forevacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86

Products

Turbomolecular Pump Systems

PT 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86

PT 151 / PT 361 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88

PT 50 KIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92

PT 151 / PT 361 KIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92

With dry compressing Forevacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94

Products

Turbomolecular Pump Systems

PT 80 DRY / PT 80 H DRY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94

TURBOLAB 80 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96

PT 151 DRY / PT 361 DRY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100

PT 300 DRY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104

Turbomolecular Pump Systems (Only available for purchase in North and South America)

PT-Flex DRY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106

Accessories for High Vacuum Pump Systems TMP

Control Unit for Turbomolecular Pump Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110

Adsorption Traps with Aluminium Oxide Insert . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111

TSC - TurboSystem Controller (Only available for purchase in North and South America) . . . . . . . . . . . . . . . 112

TPC - TurboPump Controller (Only available for purchase in North and South America) . . . . . . . . . . . . . . . . 114

UNIVEX High Vacuum Experimentation Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117General

General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117

Applications and Accessories forUNIVEX High Vacuum Experimentiation Systems / Process Components . . . . . . . . . . . . . . . . . . . . . . . . . . . 117

Products

Bell Jar SystemUNIVEX 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118Options for the UNIVEX 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121

Door SystemsUNIVEX 350 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122UNIVEX 350 G . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126UNIVEX 450 B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130

Special SystemsUNIVEX 450 for Dactyloscopy (Vacuum Metal Deposition) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134UNIVEX 450 C / Test Systems with a Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135

Accessories for UNIVEX High Vacuum Experimentation Systems

Standard Accessories for UNIVEX Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136

Componentsfor Thermal Evaporation of High Melting Point Materials (metals) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138for Thermal Evaporation of Low Melting Point Materials (organic) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140for Electron-Beam Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140for Sputtering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141for Glow Discharge Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142for Film Thickness Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143

Substrate Manipulation Solutions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144

Calibration Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146CS Calibration Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146



Applications and Accessoriesfor UNIVEX High Vacuum Experimentation Systems

Passive components

Sensor technology

Opto-electronics

Tribology

Soldering

Dactyloscopy (Vacuum metal deposition)

Glove box applications

Special applications

Thermal conduction experiments

UNIVEX 35

0

■ ■ ■ ■ ■

■ ■ ■ ■ ■

■ ■ ■ ■ ■

■ ■ ■ ■ ■

■ ■ ■ ■ ■

■

■ ■ ■ ■ ■

■ ■ ■ ■ ■

■ ■

■ ■ ■ ■ ■

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Sonde

rausfü

hrun

gen

Accessories / Process Components

Page

136

138 / 140

140

141

141

142

143

144

UNIVEX 3

50 G

UNIVEX 4

50 B

Standard accessories

Thermal evaporation

Electron-beam evaporation

DC sputtering

RF sputtering

Glow discharge cleaning

Film thickness measurement

Substrate manipulation

(rotation, heating, cooling, bias)

Applications Bell jar system Door systems

UNIVEX 30

0

General

The UNIVEX multi-purpose experimen-tation systems were developed byOerlikon Leybold Vacuum for applica-tions in research and development, aswell as for setting up pilot productionsystems.

Their range of applications focuseschiefly on vacuum coating technologyas well as vacuum process engineeringexperiments.

The universal experimentation systemsfrom Oerlikon Leybold Vacuum arebased on a modern modular conceptsuited for customized expansion.

Generalto UNIVEX High Vacuum Experimentation Systems


UNIVEX 300

Bench System with a Vacuum Bell Jar (300 mm diameter)

Typical Applications

- Vacuum coating in research anddevelopment

- Special experiments

Basic Unit

- The pump system and the electricalsupply system are housed in a 19" rack cabinet

- Moreover, the 19" cabinet providesspace for a vacuum gauge and athickness measuring instrument aswell as power supply units for theprocess components

- The basic unit may be placed on abench top

Vacuum Chamber

- The base plate is attached to thelateral intake port of the basic unit

- Either a vacuum chamber made ofstainless steel or glass may beplaced on the base plate

Pump System

- The standard pumping equipmentcomprises a TRIVAC D 8 B two-stage rotary vane pump and a TURBOVAC 361 turbomolecularpump

Vacuum Measurement

- Depending on the type of applica-tion, a combination vacuum gaugeoperating according to the coldcathode or hot cathode principlemay be installed

Advantages to the User

- Modular system design

- Any kind of process componentmay be installed (except RF)

- Process components may be retro-fitted without problems

- Free access to vacuum bell jar,base plate and chamber units

- Very simple to operate and use

- Pump system adapted to the indi-vidual use

Options

- Upon request, the UNIVEX 300 maybe equipped with a manual liftingfacility for the bell jar or also a PLCcontroller for process automation

- For processes in which aggressivemedia need to be pumped, a seal-ed gas version of the turbomolecu-lar pump and a rotary vane pumpwith a special oil filling can be sup-plied

- For particularly sensitive processes,a dry compressing backing pumplike the SCROLLVAC SC 30 D canbe used

More information on these optionsis available upon request.

UNIVEX 300, typical arrangement with stainless steel bell jar and process components

Products

Bell Jar System


486 = 19"

UNIVEX 300

1040

803 = 18 HE

928

61

Ø 300

398

462

620

566304

280

269

Dimensional drawing for the UNIVEX 300 with base plate and stainless steel bell jar

120

170Height = 14

230

30° 15°DN 40 KF

DN 10 KF

DN 10 KFDN 100 ISO-K

Dimensional drawing for the base plate on the UNIVEX 300


Technical Data UNIVEX 300

Stainless Steel with Viewing Window (optional: Pyrex glass)

Vacuum chamber

Diameter mm

Base plate

Material

High vacuum connection flange DN

Dimensions (H x dia.) mm

Installation bores mm

Further side flanges DN

Vacuum bell jar

High vacuum pump

Nominal pumping speed for N2 l x s-1

Power supply

Backing pump

Nominal pumping speed m3 x h-1

Controller

Electrical connection

Cooling water connection

Hose DN 10 bar

Cooling water consumption, approx.

l x min-1

Weight, approx. kg

Base panel with bell jar fitted from the top

300

Stainless steel

100 ISO-K, attached at the side

60 x 350

� 34.5 (13 x) 1)

2 x 10 ISO-KF, 1 x 40 ISO-KF 1)

Stainless steel with viewing window (optional: Pyrex glass)

TURBOVAC 361

345

TURBOTRONIK NT 20

TRIVAC D 8 B

9.7

Power supply with main switch slot module

230 V, 50 Hz, max. 16 A 2), 3)

4 to 7

1 3)

170 3)

Ordering Information

UNIVEX 300

1) Standard configuration, other hole patterns / flanges upon request2) Other voltages and frequencies upon request3) Without chamber installations / process components

Part No.

upon request

UNIVEX 300


Options for the UNIVEX 300

Technical Data

350 x 300

200

FPM (FKM)

5.6


Bell jar, Pyrex glass

1) With punched steel cover for implosion protection

Part No.

upon request 1)

350

341 300

373

Dimensional drawing for the glass bell jar withimplosion protection

Pyrex Glass Bell Jar (Vacuum Chamber)

Technical Data

380 x 321

300

FPM (FKM)

9.6


Bell jar, stainless steel

2) With DN 100 viewing window and 2 carrying handles; hole at the top (34.5 mm dia.)

Part No.

upon request 2)

321

380

190

Drawn offsetby 90°

160

10

Dimensional drawing for the stainless steel bell jar

Stainless Steel Bell Jar (Vacuum Chamber)

Bell Jar, Pyrex Glass

Bell Jar, Stainless Steel

Bell Jar, Stainless Steel


Height, cylindrical section mm

Seal

Weight kg


Height, cylindrical section mm

Seal

Weight kg

Bell Jar, Pyrex Glass


UNIVEX 350

Laboratory System with Cubic Vacuum Chamberand Front Door (350 mm diameter)



Pre-production trials


Design

- The UNIVEX 350 consists of twoseparable 19" rack mount cabinets

- The process chamber and thepump system are accommodated inone cabinet

- Accommodated in the second cabi-net section is the electric powersupply with the PLC based systemcontroller with graphic touchscreen.Moreover, the supply units for theprocess components are also ac-commodated in this cabinet section



- Freedom of installation and retrofit-ting of process components withoutproblems

- Vacuum chamber with front door foradded flexibility

- Convenient access to the chamberinstallations

- Very simple to operate and use viaprogrammable control

- For installation into clean-room walls

- High frequency sputtering possible

- Pump system adapted to the indivi-dual process

UNIVEX 350

Vacuum Chamber

- The base plate is attached to thebase frame

- The door is equipped with a viewingwindow

- Bottom plate and lid are providedwith installation holes

- Additional flanges at the side forpump system and process compo-nents

Pump System

- The standard pumping equipmentcomprises a TRIVAC D 25 B two-stage rotary vane pump and a TURBOVAC 600 C turbomolecularpump

Vacuum Measurement

- Depending on the type of applica-tion, a combination vacuum gaugeoperating according to the coldcathode or hot cathode principlemay be installed

UNIVEX 350, custom version with higher vacuumchamber and on castors

UNIVEX 350, custom version with second coatingmodule

Door Systems


Options

- A water-cooled vacuum chambercan also be supplied

- Evaporation protection plates whichmay be easily disassembled areavailable

- Fitting of a second coating modulewith a vacuum chamber (fitted tothe right of the electrical cabinet) ispossible

- For processes requiring large vol-umes of gas or which require lowoperating pressures, the UNIVEX 350 can also be equippedwith a turbomolecular pump havinga higher pumping speed (TURBOVAC 1000, for example) orwith cryopumps

- For processes which involve pump-ing corrosive gases, a corrosionresistant version of the turbomole-cular pump and a rotary vane pumpwith a filling of special oil may besupplied

- For especially sensitive processesalso a dry compressing pump likethe SCROLLVAC SC 30 D can beused as the backing pump

1472 = 33 HE

486

UNIVEX 350

486 = 19"

380

894840

370

100

566 566

1132

1233

1652

1742

Dimensional drawing for the UNIVEX 350

484

440

500580

370

220 220

195

380

Dimensional drawing for the vacuum camber

Number, size as well as position of the flangesand installation bores can be adapted accord-ing to customer specifications!


Technical Data UNIVEX 350

Vacuum chamber

Material

Dimensions

Inside width mm

Inside depth mm

Inside heigth mm

Connections 1)

Front side

Rear side DN

Bottom plate

Cover plate

Left side DN

Right side DN

High vacuum pump

Nominal pumping speed for N2 l x· s-1

Power supply

Backing pump


Controller

Required supplies

Voltage

Cooling water

Inlet pressure bar (abs.)

Consumption, approx. l x min-1

Feed temperature °C

Compressed air bar (abs.)

Weight, approx. kg

Stainless steel

370

380

500

Door with window

160 ISO-K (pump system connection), 2 x 16 ISO-KF, 2 x 40 ISO-KF

15 installation holes 34.5 mm dia.


160 ISO-K

160 ISO-K

TURBOVAC 600 C

560

TURBOTRONIK NT 20

TRIVAC D 25 B

29.5

PLC with graphic touchscreen

400 V, 3 phases + N, 50/60 Hz 2)

4 to 7

1 3)

+15 to +25

4 to 7

400 3)


UNIVEX 350

1) Standard configuration, other hole patterns/flanges upon request2) Other voltages and frequencies upon request3) Without chamber installations / process components

Part No.

upon request

UNIVEX 350


Notes


UNIVEX 350 G


- Intended for fitting to the rear sideof a glove box

- Convenient access to the processthrough the glove box by means ofthe sliding front door

- Easy access to the chamber unitthrough the rear service door

- Only the sliding door is located inthe glove box. All other systemcomponents can be easily acces-sed from the outside





- Pump system adapted to the indivi-dual process

Laboratory System for Glove Box Attachmentwith Cubic Vacuum Chamberand Front Sliding Door (350 mm diameter)



- Pre-production trials


Design

- The UNIVEX 350 G consists of acoating module and a 19" rackcabinet

- Installed in the coating module isthe process chamber and the pumpsystem

- Accommodated in the cabinet is theelectric power supply with the PLCbased system controller with gra-phic touchscreen. Moreover, thesupply units for the process compo-nents are also accommodated inthis cabinet section

UNIVEX 350 G, consisting of electrical cabinet (left) and coating module (right)

Vacuum Chamber


- The sliding front door is operatedmanually and closed pneumatically



Pump System

- The standard pumping equipmentcomprises a TRIVAC D 25 B two-stage rotary vane pump and a TURBOVAC 600 C turbomolecularpump

Vacuum Measurement

- Depending on the type of appli-cation, a combination vacuumgauge operating according to thecold cathode or hot cathode prin-ciple may be installed


Options

- Easy to disassemble coating pro-tection panels are available

- For short pumpdown times, abypass line bypassing the highvacuum pump can be provided

- For processes producing increasedamounts of gas or for low operatingpressures, the UNIVEX 350 G mayalso be equipped with turbomolecu-lar pumps offering a higher pumpingspeed (TURBOVAC 1100 C, forexample) or cryogenic pumps maybe specified

- For processes which involve pump-ing corrosive gases, a corrosionresist version of the turbomolecularpump and a rotary vane pump witha special oil filling can be supplied


490

315

1708

1676

1365

1023

762

320

1189

544

Dimensional drawing for the UNIVEX 350 G

3D view of a glove box with the UNIVEX 350 G coating module fitted to the rear

Turnkey Solutions

Upon request Oerlikon LeyboldVacuum will also arrange the deliveryof turnkey solutions consisting of theUNIVEX 350 G coating system and aglove box from a single source.

More information on such systemsis available upon request.


Technical Data UNIVEX 350 G

Vacuum chamber

Material

Dimensions

Inside width mm

Inside depth mm

Inside heigth mm

Connections 1)

Front side

rear side

Bottom plate

Cover plate

Left side DN

Right side DN

High vacuum pump


Power supply

Backing pump


Controller

Required supplies

Voltage

Cooling water





Weight, approx. kg

Stainless steel

370

380

500

Sliding door for glove box access; manually operated and pneumatically closing

turning door for service access; manually locked



160 ISO-K (pump system connection), 40 ISO-KF, 16 ISO-KF

40 ISO-KF, 16 ISO-KF

TURBOVAC 600 C

560

TURBOTRONIK NT 20

TRIVAC D 25 B

29.5


400 V, 3 phases + N, 50/60 Hz 2)

4 to 7

1 3)

+15 to +25

4 to 7

350 3)


UNIVEX 350 G

1) Standard configuration, other hole patterns / flanges / viewing windows upon request2) Other voltages and frequencies upon request3) Applies only to the coating module, without chamber units / process components

Part No.

upon request

UNIVEX 350 G


Notes


UNIVEX 450 B

Laboratory System with Cubic Vacuum Chamberand Front Door (500 mm diameter)



- Pre-production trials


Design

- The UNIVEX 450 B consists of twoseparable 19" cabinet sections

- Accommodated in one cabinet sec-tion is the process chamber and thepump system

- Accommodated in the second cabi-net section is the electric powersupply with the PLC based systemcontroller with graphic touchscreen.Moreover, the supply units for theprocess components are also ac-commodated in this cabinet section




- Vacuum chamber with door

- Convenient access to the chamberinstallations


- Suited for being installed in a cleanroom wall


- Pump system adapted to the individual process

UNIVEX 450 B with water-cooled vacuum chamber (option)

Vacuum Chamber


- The door is equipped with a viewingwindow



Pump System

- The standard pumping equipmentcomprises a TRIVAC D 65 B two-stage rotary vane pump and a TURBOVAC 1100 C turbomole-cular pump

Vacuum Measurement

- Depending on the type of appli-cation, a combination vacuumgauge operating according to thecold cathode or hot cathode prin-ciple may be installed

UNIVEX 450 B with water-cooled process chamber and manually operatedload lock chamber (option)


Options

- The chamber can also be deliveredin a water-cooled version

- Easy to disassemble coating pro-tection panels are available

- For short pumpdown times, abypass line bypassing the highvacuum pump can be provided

- Fitting of a second coating modulewith a vacuum chamber (fitted tothe right of the electrical cabinet) ispossible

- For processes producing increasedamounts of gas or for low operatingpressures, the UNIVEX 450 B mayalso be equipped with turbomolecu-lar pumps offering a higher pumpingspeed (TURBOVAC T 1600, forexample) or cryogenic pumps maybe specified

- For processes in which aggressivemedia need to be pumped, a sealgas version of the turbomolecularpump and a rotary vane pump witha special oil filling can be supplied


Dimensional drawing for the vacuum camber

Number, size as well as position of the flangesand installation bores can be adapted accord-ing to customer specifications!

700

660760

300 300

500

235

520

702 486 = 19"

1348782 566

160636HE

1922

1826

1270

100

500

520480

1020

136

840

976

Dimensional drawing for the UNIVEX 450 B


Technical Data UNIVEX 450 B

Vacuum chamber

Material

Dimensions

Inside width mm

Inside depth mm

Inside heigth mm

Connections 1)

Front side

Rear side DN

Bottom plate

Cover plate

Left side DN

Right side DN

High vacuum pump


Power supply

Backing pump


Controller

Required supplies

Voltage

Cooling water





Weight, approx. kg

Stainless steel

500

500

650

Door with window

250 ISO-K (pump system connection), 4 x 16 ISO-KF, 2 x 40 ISO-KF



250 ISO-K

250 ISO-K

TURBOVAC 1100 C

1050

TURBOTRONIK NT 20

TRIVAC D 25 B

29.5


400 V, 3 phases + N, 50/60 Hz 2)

4 to 7

1 3)

15 to 25

4 to 7

500 3)


UNIVEX 450 B

1) Standard configuration, other flanges / hole patterns / viewing windows upon request2) Other voltages and frequencies upon request3) Applies only to the basic unit without coating equipment

Part No.

upon request

UNIVEX 450 B


Notes


UNIVEX 450 for Dactyloscopy (VMD)

Special Systems

Benefits of this method

- Simple thermal deposition processwith proven results

- VMD has been shown to detectlatent prints even after othermethods have been tried and failed(e.g. cyanoacrylate or fuming)

- Large surface areas (up to 80 x 40 cm) can be coated

- Process time can be as little as 10 minutes depending on the mate-rial makeup of the evidence

- Good contrast on multicolour surfa-ces

- Deposition process does not dam-age the evidence. Zinc can beremoved using regular householdvinegar

UNIVEX 450 for dactyloscopy

Dactyloscopy is the science of finger-print identification. Oerlikon LeyboldVacuum has designed a system thatuses a process known in the forensicsworld as Vacuum Metal Deposition(VMD), for developing fingerprints.

VMD is a well established forensic toolfor the development of latent finger-prints. Latent prints are formed by perspiration or grease from the skinsurface which is left on a different surface. They are not visible to thenaked eye and must therefore be“developed” before they can be seen.

The process requires a piece of evi-dence suspected of having these

latent prints to be placed inside avacuum chamber. After pumping thechamber down to a relatively low pres-sure (10-5 mbar (Torr)), a monolayer ofgold is then evaporated onto the evi-dence. These gold atoms will then beabsorbed by the greasy ridges thatmake up the print but will remain be-hind in the valleys between the ridges.Next, a second metal layer of zinc isdeposited. Zinc has a unique propertyin that it only adheres to other metalssuch as gold left behind in the valleys.The end result will be a very distinctnegative image of a fingerprint. Theimage is photographed and reversedfor final identification.


UNIVEX 450 C

For special applications we can alsosupply cluster systems based on theUNIVEX concept. These clusters areequipped according to customers re-quirements and incorporate separateprocessing and load lock and transferchambers.

UNIVEX 450 C with coating module and electrical cabinet (example photograph). The coating module consists of two process chambers (left and right) as well as the loadlock and transfer chamber in between

Test Systems with a Vacuum Chamber

We can also supply vacuum chamberswith custom pump systems for testingof various components.

Test system with a 700 mm dia. chamber


Technical Data

Material

Seal

Weight kg

Stainless steel

FPM (FKM)

0.1


Blank-off screw fitting

Part No.

030 40

Blank-off screw fitting

Standard Accessories for UNIVEX Systems

Blank-Off Screw Fitting

For 34.5 mm dia. hole.



Technical Data

Switching pressure mbar

Return switching pressure mbar

Switching inaccuracy mbar

Max. permissible operating pressure (abs.)mbar

Storage temperature range °C

Nominal temperature range °C

Switching contact

Contact life

Switching capacity mA / V ACmA / V AC

Electrical connection

Vacuum connection DN

Materials in contact with the medium

Protection class IP

approx. 6 below atmospheric pressure

3 below atmospheric pressure

2

2000

-25 to +85

0 to +85

Changeover contacts, gold-plated,for prog. controls

> 105 switching cycles

100 / 2430 / 24

6.3 mm flat plug

16 ISO-KF

Stainless steel 1.4305, 1.4310,Stainless steel 1.4300 PTFE coated

44


Low pressure safety switch PS 113 A, DN 16 ISO-KF; complete with 3 m long cable

Part No.

230 011

PS 113 A Safety Switch

PS 113 A Safety Switch

For safety interlock arrangements inconnection with the UNIVEX systemcontroller, respectively optionally con-nected power supply equipment (forsputtering, electron-beam evaporationor vacuum etching, for example).

Safety Switch

Safety Switch

Technical Data

Gas admission rate qL mbar x l x s-1

Connection flange DN

5 x 10-6 to 1 x 103

16 ISO-KF


Variable leak valve with isolation valve

(see also Catalog Part “Valves”)

Part No.

215 010

Variable Leak Valve withIsolation Valve

For manually controlled admission ofgas in connection with plasma proces-ses (sputtering, etching and glow dis-charge cleaning).

Variable Leak Valve with Isolation Valve

Variable Leak Valve with Isolation Valve

Accessories


Technical Data

Gas flow, max. sccm

Supply voltage V DC

Control signal V

selectable between 10 and 500

24

0 - 5 analog


Gas flow controller

Part No.

upon request

Gas Flow Controller (MFC)

For controlled admission of gas in con-nection with automated plasma pro-cesses (sputtering, etching, glow dis-charge cleaning). Intended to be remo-tely controlled by the customer’s PC orPLC, i.e. a separate MFC controllerunit is not included in the delivery.

Gas Flow controller

Gas Flow controller

Technical Data

Control voltage V DC

Dimensions of the shutter panel mm

Weight kg

24 (pulses per second)

different, for example 42 x 42 or 100 mm dia.

0.2


Electrically operated vapor source shutter

Part No.

upon request

Electrically Operated VaporSource Shutter

For covering the source during thermalor electron-beam evaporation. Withgear motor and shutter panel; can befitted to the inside sections of thechamber.

Vapor Source Shutter

Vapor Source Shutter

Technical Data

Rating per conductor VA

Seal

Weight kg

max. 70016

FPM (FKM)

0.3


6-way measurement feedthrough

Part No.

upon request

6-way measurement feedthrough

6-Way MeasurementFeedthroughs

For connection of the vapor sourceshutter; for 34.5 mm holes, plug-in soldered contact on the inside.

Technical Data

Lenght m

Weight kg

3

0.2


6-way control cable

Part No.

upon request

Control Cable, 6-Way

For connection between measurementfeedthrough and power supply unit forthe vapor source shutter, completewith connection plugs.

Measurement Feedthrough

Control Cable

Measurement Feedthrough

Control Cable

Technical Data

Mechanical closing contact

Electrical closing contact

Safety door switch

floating


Interlocking kit for UNIVEX vacuum chamber

Part No.

upon request

Interlocking Kit

Interlocking Kit

Interlocking Kit

For providing touch protection againsthigh-voltage carrying parts within thevacuum chamber. The safety contactmust be connected to the interlock in-put at the high-voltage power supplyunit thereby ensuring that the equip-ment can be enabled only while thechamber door is closed.


Technical Data

Rating per conductor V

A

Seals

Water connection mm

Weight kg

max. 100

500

FPM (FKM)

Hose 4/6 dia.

2.5


Single thermal evaporator

Part No.

upon requestSingle thermal evaporator

Components for Thermal Evaporation of High Melting Point Materials (metals)Single Thermal Evaporator

Consisting of two water-cooled highvoltage feedthroughs with terminalblocks for 34.5 mm dia. holes.

Technical Data

Rating per conductor V

A

Seals

Water connection mm

Weight kg

max. 100

500

FPM (FKM)

Hose 4/6 dia.

3.9


Dual thermal evaporator

Part No.

upon requestDual thermal evaporator

Dual Thermal Evaporator

Consisting of three water-cooled highvoltage feedthroughs with terminalblocks for 34.5 mm dia. holes.

Technical Data

Length m

Rating V

A

Cross section mm2

Weight kg

2 1)

max. 100

500

120

3.5


Power supply cable

1) Standard length. Other lengths can be specified2) For the single thermal evaporator, two supply lines are required

For the dual thermal evaporator, three supply lines are required

Part No.

upon request 2)

Power Supply Cables

For single and dual thermal evapora-tors, equipped with terminals andclamping pieces.

Single Thermal Evaporator


Power Supply Cable

Single Thermal Evaporator


Power Supply Cable


Technical Data

Cabinet

mm

Outputs

Inputs

Main power supply

Weight kg

1/2 19" rack module, 3 HU

400 deep

1 x evaporator output, 5 V, 400 A max.

can be rewired to 10 V, 200 A max.

1 x shutter output, 24 V DC,

1 s pulse

Remote control unit for controlling the

evaporation power (0 to 10 V)

Remote control for the shutter

230 V, 50/60 Hz, 10 A

15


AS 053 power supply unit

Part No.

upon request

AS 053 power supply unit

AS 053 Power Supply Unit

For supplying thermal evaporators andone solenoid-actuated source shutter.With LCD display for current read outand membrane key pad.

AS 053/2 Power Supply Unit

For supplying power to two thermalevaporators with vapor sourceshutters.With LCD display for current read outand membrane key pad.

Power Supply Unit

Power Supply Unit

Technical Data

Cabinet

mm

Outputs

Inputs

Main power supply

Weight kg

19" rack module, 3 HU

400 deep

2 x evaporator output, 5 V, 400 A max.

can be rewired to 10 V, 200 A max.

2 x shutter output, 24 V DC,

1 s pulse

Remote control unit for controlling the

evaporation power (0 to 10 V)

Remote control for the shutter

Switchover evaporator 1 / 2

230 V, 50/60 Hz, 10 A

30


AS 053/2 power supply unit

Part No.

upon request

Power Supply Unit

Power Supply Unit


For the purpose of evaporating tempe-rature sensitive materials, commonly ofan organic nature, Oerlikon LeyboldVacuum is offering special organicmaterial evaporators.

These ensure a coating process atprecisely controlled evaporation tem-peratures which typically range be-tween 200 °C and 400 °C.

Components for Thermal Evaporation of Low Melting Point Materials (organic)

Various models of electron-beam eva-porators and power supplies are avail-able for installation in the UNIVEXsystems.

Electron-Beam Evaporator

The selection of a suitable electron-beam evaporator will primarily dependon the amount of available space, thedesired evaporation rate and the filmthickness as well as the number andtype of materials which need to beevaporated. Single crucible as well asrotatable multi-crucible evaporators areavailable.

Power Supplies

The power supply unit for the individualelectron-beam evaporators is selecteddepending on the maximum evapora-tion power which is required, as wellas the demanded properties for X/Ybeam deflection. Models with outputpower ratings ranging from 3 kW to 10 kW are available.

As a rule, the maximum output powerof the power supply may not exceedthe maximum permissible power speci-fied for the evaporator.

Safety Regulationsfor Electron-Beam EvaporatorApplications

When installing electron-beam evapo-rators within the UNIVEX 300, only thestainless steel bell jar can be used.Moreover, a safety interlocking systemwill be necessary for all UNIVEX types.For the UNIVEX 300 a separate inter-locking kit is available; in the case ofthe UNIVEX 350 and 450 B this kit isalready included.

Additionally a water flow monitor isrequired for each electron-beam eva-poration unit so as to ensure adequatecooling of the electron-beam evapora-tor.

This water flow monitor is included inthe delivery of a UNIVEX system equip-ped with an electron-beam evaporator.

Components for Electron-Beam Evaporation

Upon request we shall be pleased to provide an offer which specifically matches the requirements of your applica-tion.

For installation within the UNIVEXsystems, Oerlikon Leybold Vacuumsupplies organic material evaporatorsas a complete package, consisting ofevaporator source, automatic shutter,rotary vacuum feed through and 19"rack mount controller.


DC Sputtering

A variety of DC sputtering sources maybe fitted within all UNIVEX systems.Their selection will depend on the sizeof the substrate, the required targetmaterial and the available installationspace. Circular planar sputtering sour-ces of 50 mm to 200 mm in diameteras well as various rectangular sourcesare available. The power supply units(providing an output power between500 W and 3 kW) may be installedwithin the UNIVEX 19" electrical cabi-nets.

DC sputtering equipment is suited forall UNIVEX systems.

RF Sputtering

A variety of RF sputtering sources maybe fitted within all UNIVEX systems(exception: UNIVEX 300). Their selec-tion will depend on the size of the sub-strate, the required target material andthe available installation space. Circularplanar sputtering sources of 50 mm to200 mm in diameter as well as variousrectangular sources together with thenecessary RF matching componentsare available. The power supply units(providing an output power between150 W and 1.5 kW) may be installedwithin the UNIVEX systems.

Gas Inlet

Sputtering sources can only be opera-ted with a process gas present. Forthis, manually operated variable leakvalves or automatically controlled massflow controllers are available.

Throttling the Pumping Speed

In order to protect the high vacuumpump against the high process pres-sure present during plasma operation,and to reduce process gas consump-tion, the UNIVEX systems are generallyequipped with a three position highvacuum gate valves.

Components for Sputtering

Safety Regulations in Connection with SputteringApplications

When installing electron-beam evapo-rators within the UNIVEX 300, only thestainless steel bell jar can be used.Moreover, a safety interlocking systemwill be necessary for all UNIVEX types.For the UNIVEX 300 a separate inter-locking kit is available; in the case ofthe UNIVEX 350 and 450 B this kit isalready included.

Additionally a water flow monitor isrequired for each electron-beam eva-poration unit so as to ensure adequatecooling of the electron-beam evapora-tor.

This water flow monitor is included inthe delivery of a UNIVEX system equip-ped with an electron-beam evaporator.

Upon request we shall be pleased to provide an offer which specifically matches the requirements of your applica-tion.


Technical Data

Electrode material

Insulation

Max. ratings V

mA

Sealing material of the

high voltage feedthrough

Aluminum

Ceramics

3000

100

FPM (FKM)


Glow discharge assembly

for UNIVEX 300, 350 and 350 G

for UNIVEX 450 B

Part No.

upon request

upon requestGlow discharge assembly with high voltage feed-through and connection cable

Components for Glow Discharge Cleaning

Glow Discharge Assembly

The glow discharge electrode utilizes ahigh voltage feedthrough mounted in a34.5 mm dia. hole along with a con-nection cable fitted to a central rotaryfeedthrough.

Technical Data

Cabinet

Output V

mA

Electrical connection V / Hz

Remote control and locking input

19" rack module, 3 HU

max. 3000

max. 100

230 / 50/60 Hz

included


HP 2500 high voltage power supply unit

Part No.

upon request

HP 2500 High VoltagePower Supply Unit

For supplying the glow dischargeassembly.


High Voltage Power Supply Unit


High Voltage Power Supply Unit

Gas Admission

To operate the glow discharge cleaningaccessory, a process gas such asArgon is required. A simple manuallyoperated gas dosing valve or automati-cally controlled mass flow controllersare available upon request.

Throttling the Pumping Speed

In order to protect the high vacuumpump against the high process pres-sure present during plasma operation,and reduce process gas consumption,the UNIVEX systems are generallyequipped with high vacuum gate val-ves having three positions which arefitted between chamber and highvacuum pump.

High voltage power supply unit HP 2500


Components for Film Thickness Measurements

Various thin film thickness measuringinstruments may be installed in theUNIVEX units.

The selection depends on the mea-surements needed and the requireddegree of automation.

As standard, oscillating crystal systemsare used. These may consist of one orseveral sensing heads with or withoutshutter, and upon request are availablefor UHV operation (i.e. are suitable fordegassing).

These are driven either by a monitor(allowing only the measurement ofdeposition rate and film thickness) orby a controller (allowing measurementof the film parameters and control ofthe deposition rate).

Upon request we can provide anoffer which specifically matches therequirements of your application.


Substrate Rotation

In order to improve or change the filmproperties during the deposition pro-cess, rotation of the substrates is oftennecessary.

The Oerlikon Leybold Vacuum UNIVEXsystem is available with a wide rangeof possible accessories for substraterotation such as a simple static or ro-tatable workholder plate or a more ela-borate planetary drive mechanism.Additional options include the heating,cooling or biasing of the substratebefore, during or after the depositionprocess. Your specific requirements willdictate how the UNIVEX will be confi-gured.

Substrate Manipulation Solutions

Planetary gear

Substrate Holding

For mounting the substrate within thechamber, Oerlikon Leybold Vacuumoffers vacuum substrate holders manu-factured according to customer’s spe-cifications.

Rotatable, temperature controlled substrate hol-der with substrate shutter

Substrate Heating

For temperature controlled heating ofsubstrates, Oerlikon Leybold Vacuumoffers a variety of different optionssuch as resistance heaters or a widerange of quartz lamp heaters. Depend-ing on the size of the substrate andthe temperature range specified, weare prepared to offer customized solu-tions.

Substrate Cooling

Heat sensitive substrates or substratemasks require cooling during deposi-tion. Oerlikon Leybold Vacuum offerssubstrate holders that can be water-cooled, LN2 cooled or used with spe-cial cooling fluids.

Substrate Bias

Precleaning of the substrate with RF orDC biasing prior to deposition canimprove the adhesive properties of thefilm. Oerlikon Leybold Vacuum offerssubstrate biasing using insulated sub-strate mounts and the customer speci-fied power supply units and matchingnetworks when required.

Notes



CS Calibration Systems

The requirements imposed on vacuumengineering with regard to accuracy ofthe measurements, reproducibility andunambiguity of the determined vacuumpressures have increased significantlyover the last years.

500 mm(19.69 in.)

500 mm

(19.69 in.)

850

mm

(33.

64 in

.)

2100 mm(82.68 in.)

1750

mm

(68.

90 in

.)

CS7 calibration system

CS3 calibration system

Routine calibrations of vacuum gaugesare an important component of qualityassurance schemes. The calibrationsystems from Oerlikon LeyboldVacuum put the customer in a positionto check and recalibrate on his ownthe specified and necessary accuracyof his vacuum gauges.

Calibration systems are available for thispurpose which cover a calibration rangefrom 1000 mbar to 1 x 10-7 mbar(750 to 0.75 x 10-7 Torr).

Each system is equipped with severalcertified reference pressure sensors(transmitter standards), which eachcover a part of the specified range ofcalibration pressures. In the pumpsystem, turbomolecular pumps withTRIVAC rotary vane or DIVAC dia-phragm pumps are used. A variableleak valve is used to admit the gas intothe calibration chamber. In the case ofthe calibration system CS7, the gasinlet line is, moreover, equipped withit’s own pump system.

The CS7 is equipped with a heater forthe vacuum chamber, for the purposeof attaining lower chamber pressuresmore rapidly. The temperature of theheating collars can be controlled whereby the maximum degassing tem-perature will depend on the compo-nents installed (flanges, pressure sen-sors, valves).


- Vacuum gauges and measurementsystems of any make may becalibrated

- Designed in accordance with DIN 28 418/ISO/DIS 3567

- Transfer standards with PTB-, DAkkS- or factory certificate

- Easier DIN/ISO 9000 approval

- Reliable and reproducible measure-ments

- Quick start-up

- Measurement system free of hydro-carbons when using dry com-pressing vacuum pumps

- Simple operation

- CE approval

depthapprox. 900 mm

(35.43 in.)


Diaphragm sensors

BOURDONVAC

Capsule vacuum gauges

DIAVAC DV 1000

DI 200, DI 2000

CTR 90, CTR 91, CTR 100(1000 - 1 Torr full scale)

CTR 91 (0.1 Torr full scale)

THERMOVAC sensors

TR 301, TR 306

TR 211, TR 216, TTR 211, TTR 216, TTR 90, TTR 91, TTR 96, TTR 100

VISCOVAC sensor (spinning rotor viscosity gauge)

VK 201

PENNINGVAC sensors

PR 25, PR 26, PR 27, PR 35, PR 36, PR 37, PTR 90, PTR 225

IONIVAC sensors

ITR 90, ITR 100, ITR 200

IE 414, IE 514


Technical Data Calibration System

CS3 CS71000 to 1 x 10-3 1000 to 1 x 10-7

(750 to 0.75 x 10-3) (750 to 0.75 x 10-7)

1000 to 2 x 10-6 1000 to 2 x 10-9

(750 to 1.5 x 10-6) (750 to 1.5 x 10-9)

5 (3) x DN 16 ISO-KF 6 (3) x DN 16 CF1 (0) x DN 25 ISO-KF 6 (4) x DN 40 CF

via variable leak valve via variable leak valve

no yes

no yes

Calibration range mbar(Torr)

Pressure measurement range mbar(Torr)

Vacuum chamber connections(in brackets: quantity available on the side of the customer’s system)

Admitting gas

Extra pump system for admitting gas

Heater for the vacuum chamber

Typ of Sensor

■ ■

■ ■

■ ■

■ ■

■ ■

■

■ ■

■ ■

■

■

■

■

Application examples: Which pressure sensors may be calibrated with which system?

Ordering information and options

Part No. Part No.

upon request upon request

Calibration System

CS3 CS7

Calibration System

CS3 CS7

OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 0Fax: +49-(0)221-347 [email protected]

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JapanOerlikon Leybold VacuumJapan Co., Ltd.Headquarter23-3, Shin-Yokohama3-chomeTobu A.K. Bldg. 4th FloorKohoku-kuYokohama-shi 222-0033Sales:Phone: +81-45-471-3330Fax: [email protected]@oerlikon.com

Oerlikon Leybold VacuumJapan Co., Ltd.Osaka Sales Office3F, Shin-Osaka Terasaki No.3 Bldg.1-5-28 Nishi-MiyaharaYodogawa-ku, Osaka-shiOsaka 532-0004Phone: +81-6-6399-6271Fax: [email protected]@oerlikon.com

SpainOerlikon Leybold Vacuum Spain, S.A.C/ Huelva 7E-08940 Cornellà de Llobregat(Barcelona)Sales:Phone: +34-93-666 43 11Fax: +34-93-666 43 [email protected]:Phone: +34-93-666 46 16Fax: +34-93-685 43 [email protected]

SwitzerlandOerlikon Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales:Phone: +41-44-308 40 50Fax: +41-44-302 43 [email protected]: Phone: +41-44-308 40 62Fax: +41-44-308 40 [email protected]

Oerlikon Leybold Vacuum USA Inc.5700 Mellon RoadUSA-Export, PA 15632Phone: +1-724-327-5700Fax: [email protected]:Phone: +1-724-327-5700Fax: +1-724-333-1217Service:Phone: +1-724-327-5700Fax: +1-724-325-3577

P.R. ChinaOerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Beichen EconomicDevelopment Area (BEDA),No.8 Western Shuangchen RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]@[email protected]

Oerlikon Leybold Vacuum (Tianjin) Co. Ltd.Beichen EconomicDevelopment Area (BEDA),No.8 Western Shuangchen RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 [email protected]@[email protected]

BelgiumOerlikon Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales:Phone: +32-2-711 00 83Fax: +32-2-720 83 [email protected]:Phone: +32-2-711 00 82Fax: +32-2-720 83 [email protected]

FranceOerlikon Leybold Vacuum France S.A.S.7, Avenue du QuébecZ.A. de CourtaboeufF-91140 Villebon-sur-yvetteSales and Service:Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected]@oerlikon.com

Oerlikon Leybold Vacuum France S.A.S.Valence Factory640, Rue A. BergèsB.P. 107F-26501 Bourg-lès-Valence CedexService:Phone: +33-4-75 82 33 00Fax: +33-4-75 82 92 [email protected]

Great BritainOerlikon Leybold Vacuum UK LTD.Silverglade Business ParkLeatherhead Road Unit 2KT9 2QL Chessington, Surrey(London)Sales:Phone: +44-13-7273 7300Fax: +44-13-7273 [email protected]:Phone: +44-20-8971 7030Fax: +44-20-8971 [email protected]

ItalyOerlikon Leybold Vacuum Italia S.r.l.Via Trasimeno 8I-20128 MilanoSales:Phone: +39-02-27 22 31Fax: +39-02-27 20 96 [email protected]:Phone: +39-02-27 22 31Fax: +39-02-27 22 32 [email protected]

NetherlandsOerlikon Leybold Vacuum Nederland B.V.Proostwetering 24NNL-3543 AE UtrechtSales and Service: Phone: +31-(30) 242 6330Fax: +31-(30) 242 [email protected]@oerlikon.com

Oerlikon Leybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1234Fax: +49-(0)221-347 [email protected]

Oerlikon Leybold Vacuum GmbHSales Area North/NortheastBranch Office BerlinIndustriestrasse 10bD-12099 BerlinPhone: +49-(0)30-435 609 0Fax: +49-(0)30-435 609 [email protected]

Oerlikon Leybold Vacuum GmbHSales Area South/SouthwestBranch Office MunichKarl-Hammerschmidt-Strasse 34D-85609 Aschheim-DornachPhone: +49-(0)89-357 33 9-10Fax: +49-(0)89-357 33 [email protected]@oerlikon.com

Oerlikon Leybold Vacuum GmbHSales Area West & BeneluxBranch Office CologneBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1270Fax: +49-(0)221-347 [email protected]

Oerlikon Leybold Vacuum GmbHService Competence CenterEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1538Fax: +49-(0)221-347 [email protected]

OerlikonLeybold Vacuum GmbHMobil Customer ServiceEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 2001Fax: +49-(0)221-347 [email protected]

Oerlikon Leybold VacuumDresden GmbHService Competence CenterZur Wetterwarte 50, Haus 304D-01109 DresdenService:Phone: +49-(0)351-88 55 00Fax: +49-(0)351-88 55 [email protected]

JapanOerlikon Leybold VacuumJapan Co., Ltd.Tsukuba Technical Service Center1959, KamiyokobaTsukuba, Ibaraki305-0854 JapanService:Phone: +81-29 839 5480Fax: +81-29 839 [email protected]

MalaysiaOerlikon Leybold MalaysiaOerlikon Leybold VacuumSingapore Pte. Ltd.No. 1 Jalan Hi-Tech 2/6Kulim Hi-Tech ParkKulim, Kedah DarulAman 09000MalaysiaSales and Service:Phone: +604 4020 222Fax: +604 4020 [email protected]@[email protected]

South KoreaOerlikon Leybold Vacuum Korea Ltd.3F. Jellzone 2 TowerJeongja-dong 159-4Bundang-gu Sungnam-siGyeonggi-doBundang 463-384, KoreaSales:Phone: +82-31 785 1367Fax: +82-31 785 [email protected]

Service:623-7, Upsung-DongCheonan-SiChungcheongnam-DoKorea 330-290Phone: +82-41 589 3035Fax: +82-41 588 [email protected]

SingaporeOerlikon Leybold VacuumSingapore Pte. Ltd.8 Commonwealth Lane#01-01, Singapore 149555Sales and Service:Phone: +65-6303 7030Fax: +65-6773 [email protected]@oerlikon.com

TaiwanOerlikon Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chunghsin Road., ChutungHsinchu County 310Taiwan, R.O.C.Sales and Service:Phone: +886-3-500 1688Fax: +886-3-583 [email protected]@oerlikon.com

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