Vacuabond Vacuum MeasurementVVacuum Measurementacuum ... · Vacuabond Vacuum MeasurementVVacuum...
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Vacuum MeasurementVacuum MeasurementVacuum MeasurementVacuum MeasurementVacuabond
Vacuabond, Inc.3074 Kenneth Street, Santa Clara, California 95054 Tel (408) 261-6402 Fax (408) 516-5889 [email protected] Fax (408) 516 5889 Contact@vacuabond com
High Quality Vacuum System DesignHigh Quality Vacuum System DesignHigh Quality Vacuum System DesignHigh Quality Vacuum System Design
New Concept ofoncept of Pressure ressure Measurementeasurement
Crystal GaugeGauge
Crystalion Gauge
MiniatureIon Gauge
1E-9 1E-7 1E-5 1E-3 1E-1 1E+1 1E+3 1E+5 Reference Pressure (Pa)
Crys
talio
n Ga
uge
Pres
sure 1E+5
1E+31E+11E-11E-31E-51E-71E-9
1E+31E+11E-11E-31E-51E-71E-91E-11
Torr Pa
C Miniature MiniatureIon on GaugeGauge
5 1E 3 1E 1 1E+1 1E
Crystalion rystalion Gauge
Canon Anelva Technix
M-320XG
M-330MX
M-310HG
M-Gauge Head and Controller
Crystal Gauge provides Reliable, Repeatable and Fast ResponseMeasurement in atmospheric pressure range as well as in lower pressure range of 10 -4 Torr.
■ Wide Measurement Range■ Fast Response, Excellent Stability & Repeatability■ No High Current No High Voltage No High Temperature ■ Excellent Process Gas Resistance ■ Full Range Stability in any Installation Angle ■ Built-in Controller & Communication Module ■ Simple, Compact & Light-weight Design ■ Low Power Consumption: only 2W
Combination of Crystal and Miniature Ion Gauge.■ ■ Seamless pressure measurement from ATM to 3 x 10 -10 Torr■ ■ Wide Measurement Range■ Excellent Linearity & Repeatability
Display Unit M-390 & M-391
Pa: 1E-9 1E-7 1E-5 1E-3 1E-1 1E+1 1E+3 1E+5
Torr: 1E-11 1E-9 1E-7 1E-5 1E-3 1E-1 1E+1 1E+3
A-NET Series Measurement RangeCrystalion M-330MX
ATM - 3x10 -10 Torr
Crystal M-320XG
ATM - 7x10 -4 Torr
Ion Miniature M-310HG
10 -1 - 7x10 -9 Torr
Miniature M-430HG M-832HG 10 -1 - 10 -9 Torr
TC CombinationIonization M-922HG
10 -4 - 10 -11 Torr
Wide operation range from 0.10.1 Torr to 10 -9-9 Torr.■ ■ Durable & Compact Metal Sensor Head 1/20 volume of B-A type■ ■ Low Power Consumption, only 10W
A-NET Series
Canon Anelva Precise Vacuum Gaugesfrom
■ Simple, Compact & Light-weight Design ■ Low Power Consumption: only 2W
3
■ Low Power Consumption: only 2W
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E+3 1E+5E+3 1E+5
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HG310HMM-3
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DisD DisDis M-3M
A-NET Series Measurement Range
TechnixGaugesG
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splay UUUnitsp390 & M-391
hnix
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Crystal Gauge provides Relides RelMeasurement in atmosphe
iesiesMeasu
NMM-320XGG
C t l G iid
Quartz Crystal Actuator Electrode
r
W
MM
M-Gau andW M-Ga
rr.HeadHead
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