United States Patent (10) Patent No.: US 6,878,909 B2 … · (12) United States Patent Bergstrom et...

(12) United States Patent Bergstrom et al.

USOO6878909B2

US 6,878,909 B2 Apr. 12, 2005

(10) Patent No.: (45) Date of Patent:

(54) INDUCTION HEATING OF THIN FILMS

(75) Inventors: Paul L. Bergstrom, Houghton, MI (US); Melissa L. Trombley, Chassell, MI (US)

(73) Assignee: Board of Control of Michigan Technological University, Houghton, MI (US)

(*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 4 days.

(21) Appl. No.: 10/376,497 (22) Filed: Feb. 28, 2003 (65) Prior Publication Data

US 2003/0164371 A1 Sep. 4, 2003

Related U.S. Application Data (60) Provisional application No. 60/360,667, filed on Mar. 1,

2002.

(51) Int. Cl. .................................................. H06B 6/10 (52) U.S. Cl. ........................................ 219/635; 219/647 (58) Field of Search ................................. 219/635, 647,

219/645; 118/724, 725, 50.1

(56) References Cited

U.S. PATENT DOCUMENTS

2,393,541. A 1/1946 Kohler ....................... 219/634 4,007,369 A * 2/1977 Dietze ........................ 219/390 4,980,198 A * 12/1990 Dowben et al. ............ 427/584 4,983,804 A 1/1991 Chan et al. ................. 219/635 6,096,149 A 8/2000 Hetrick et al. 6,288,376 B1 9/2001 Tsumura ..................... 219/635 6,368,673 B1 4/2002 Seo 6,465,281 B1 10/2002 Xu et al.

2001/0014268 A1 * 8/2001 Bryson et al. .............. 414/217

2001/0021570 A1 9/2001 Cheng 2002/0183721 A1 12/2002 Santini et al. 2003/0010775 A1 *

- - - - - - - - - - - 604/890.1

1/2003 Kim ........................... 219/647

FOREIGN PATENT DOCUMENTS

WO 01/20671

OTHER PUBLICATIONS

WO 3/2001

George H. Brown, Cyril N. Hoyler, and Rudolph A. Bier wirth, Theory and Application of Radio-Frequency Heating, Sep. 1948, pp. 27-32, D. Van Nostrand Company, Inc., New York. Chester A. Tudbury, Basics of Induction Heating, vol. 1, May 1960, pp. 1-13 and 1-71. Magnetic Susceptibility of the Elements and Inorganic Com pounds, CRC Handbook of Chemistry and Physics, 80th Edition, 1999, pp. 4-131 to 4-136, CRC Press, Boca Raton, Florida. Constantine A. Balanis, Advanced Engineering Electromag netics, 1989, p. 55; John Wiley & Sons, New York. Properties of Magnetic Materials, CRC Handbook of Chem istry and Physics, 80th Edition, 1999, pp. 12-117 to 12-125, CRC Press, Cleveland, Ohio.

(Continued) Primary Examiner Teresa J. Walberg (74) Attorney, Agent, or Firm Michael Best & Friedrich LLP

(57) ABSTRACT

A method of performing regional heating of a System having a Substrate. The method may include applying a thin film to the System, and controllably energizing a coil positioned near the thin film. The energized coils thereby generate a magnetic flux. The method further includes inducing a current in the thin film with the magnetic flux thereby heating the System.

83 Claims, 3 Drawing Sheets

US 6,878,909 B2

OTHER PUBLICATIONS

Electrical Resistivity of Pure Metals, CRC Handbook of Chemistry and Physics, 80th Edition, 1999, pp. 12-45 to 12-47, CRC Press, Boca Raton, Florida. S.M. Sze, Physics of Semiconductor Devices, Appendix H, Second Edition, 1981, pp. 850-851, John Wiley & Sons, New York. Magnetic Materials: High-permeability Materials, CRC Handbook of Chemistry and Physics, 70th Edition, 1989, p. E-128, CRC Press, Boca Raton, Florida. M.L. Trombley, P.L. Bergstrom, and B.P. Gogoi, Selective annealing of polysilicon microStructures by the inductive heating of thin cobalt films, Applied Physics Letters, pp. 1-3, Jan. 2003. M.L. Trombley, B.P. Gogoi, and P.L. Bergstrom, Inductive Heated Thin Ferromagnetic Films for Localized Microstruc tural Annealing, XII International Materials Research Con gress (2003) Program Abstracts, Aug. 17-21, 2003, p. 10-3, Cancun, Mexico. Edward T. Zellers, K.D. Wise, K. Najafi, D. Aslam, R.B. Brown, Q.Y. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M.D. Hsieh, C.T.C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M. Kaviany, C.J. Lu, A. Matzger, M. Oborny, S. Pang, J. Potkay, R. Sacks, W.C. Tian, W. Steinecker, J. Whiting, Q. Zhong, Determinations of Complex Vapor Mixtures in Ambient Air with a Wireless Microanalytical System: Vision, Progress, and Homeland Security Applications, Engineering Research Center for Wireless Integrated MicroSystems, Nov. 13-14, 2002, pp. 92-95, Digest IEEE Conference on Technologies for Home land Security, Waltham, MA. Melissa Trombley, Paul Bergstrom Anand Kulkarni, Craig Friedrich, and Bishnu Gogoi, Post-CMOS Microsystem Integration through Inductive Annealing of Low-Tempera ture Materials, Engineering Research Center for Wireless Integrated MicroSystems, ASSociated Grants and Contracts, Project Description, May 2002.

Melissa L. Trombley and Paul L. Bergstrom, Microstruc tural Annealing using Inductively Heated Films, NSF, ERC for Wireless Integrated MicroSystems, Michigan Techno logical University, Department of Electrical and Computer Engineering, Houghton, MI, May 14, 2002.

K. Thompson, J.H. Booske, Y.B. Gianchandani, and R.F. Cooper, Electromagnetic Annealing for the 100 nm Tech nology Node, IEEE Electron Device Letters, Mar. 2002, pp. 127-129, vol. 23, No. 3, IEEE Electron Devices Society, New York.

Keith Thompson, Yogesh B. Gianchandani, John Booske, Reid F. Cooper, Direct Silicon-Silicon Bonding by Electro magnetic Induction Heating, Journal of Microelectrome chanical Systems, Aug. 2002, pp. 285–292, vol. 11, No. 4, IEEE/ASME Publication.

Andrew Cao, Mu Chiao, and Liwei Lin, Selective and Localized Bonding Using Induction Heating, Technical Digest, Solid-State Sensor, Actuator and Microsystems Workshop, Jun. 2002, pp. 153–156.

Valery I. Rudnev, Raymond L. Cook, Don L. Loveless, and Micah R. Black, Induction Heat Treatment, Reprint of Chapters 11A and 11B of the Steel Heat Treatment Hand book, 1997, pp. 775–782 & pp. 794-802, Marcel Dekker. Ross Spencer, Displacement Current, 1997, http://maxwell ..byu.edu/spencerr/websumm1122/node 72.html, Apr. 8, 1997.

Felicity Chipperfield, Induction Welding of Thermoplastics, Dec. 2000, http://www.twi.co.uk/32k/protected/band 3/ksfc005.html, 2000.

* cited by examiner

U.S. Patent Apr. 12, 2005 Sheet 1 of 3 US 6,878,909 B2

FIG.2

U.S. Patent Apr. 12, 2005 Sheet 2 of 3 US 6,878,909 B2

US 6,878,909 B2 Sheet 3 of 3 Apr. 12, 2005 U.S. Patent

US 6,878,909 B2 1

INDUCTION HEATING OF THIN FILMS

CROSS REFERENCE TO RELATED APPLICATIONS

This application claims priority under 35 U.S.C. S 119 to provisional patent application No. 60/360,667, filed on Mar. 1, 2002, the entire contents of which is incorporated herein by reference.

BACKGROUND OF THE INVENTION

The invention relates to induction heating. Modern microelectronic circuit proceSS technologies

incorporate device Structures having high Sensitivities to thermal treatment. The high Sensitivities are due to the precise definition of device regions. These regions may include ultra-thin ion implanted Source and drain regions in a Submicron complementary metal-oxide-Semiconductor field-effect transistor circuit (CMOS FET), among others. However, material and process related temperature limita tions prohibit the integration or incorporation of a wide range of possible device Structures in the fabrication process. Applications Such as high temperature treatment of embed ded high Voltage, high current, or high power microelec tronic devices often require complete thermal isolation of proceSS modules. An example of Such a System is an embedded processor that is responsible for driving motorS. The System might include drivers for driving the motors, and a plurality of high density logic circuits for controlling the operation of the motor. Both the drivers and the logic circuits typically have different thermal capacities and, therefore, complicated processes are required to embed the drivers and the logic circuits in a Single System.

The incorporation of devices into mainstream processing also presents thermal challenges for integration of the tech nologies. Device examples include micro-electromechanical systems(MEMS), micromachines and microsystem. Various thin film Structures for the devices may also require thermal treatment to Stabilize the mechanical properties for use. However, microelectronic process typically requires lower temperature throughout its processing. The relatively high thermal energy generated in the thermal treatment of the MEMS tends to impact the CMOS processing of the system. Similarly, embedding elements, like radio-frequency com ponents into high density CMOS, require different thermal treatments and, thus, require complicated processes to embed them together.

Furthermore, many device packaging applications require protection or packaging, often prior to final encapsulation or before being Singulated, in order for the devices to function. Pressure Sensors, accelerometers, optoelectronic device assemblies, and Some microelectronics technologies require packaging or assembly that utilize temperatures above 300-400 C. that could damage microelectronic circuitry.

SUMMARY OF THE INVENTION

In one embodiment, the invention provides an area Selective induction heating process. The process includes providing a Substrate which has an area or a region to be heated, patterning the area of the Substrate to be heated with a thin film, applying the thin film to the Selected area or the Selected region, and inductively heating the Selected area through the thin film.

In another embodiment, the invention provides an appa ratus to regionally heat a Substrate via a thin film. The apparatus can include a thin film depositor configured to

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2 deposit the thin film to the Substrate. The apparatus can also include a Substrate chamber in which the Substrate with the thin film is positioned, and an impedance coupler. The impedance coupler is positioned near or within the chamber. When energized, the coupler generates a flux, which induces a current in the thin film thereby heating the device or the Structure and the Substrate.

In yet another embodiment, the invention provides a method to enhance a thermal growth rate or dopant diffusion rate for localized regions of a Substrate. For example, a thermal-driven growth rate of an oxide or nitride from a Substrate (e.g. SiO growth from Si) can be modulated in a reactor chamber. The thermal driven proceSS can also be applied to the diffusion of dopants into a thin film in devices.

In another embodiment, the invention provides a method to incorporate dopant into localized films. The process can include applying a thin film to a System having Substrate, inductively heating the System, and exposing the System to a dopant through a predeposition process or through ion implantation. The exposure of the Substrate to dopant enhances the diffusion and activation of dopants in regions where localized inductive heating has elevated the local temperatures in a device or a structure in the System that is covered with the thin films.

In yet another embodiment, the invention provides a method of locally annealing a plurality of thin films while the thin films are growing or depositing, or after the thin films have grown or have been deposited. For example, thin films that are in the process of being deposited or grown by physical vapor deposition (“PVD”) techniques such as elec tron beam evaporation, or processed by Screen-printing can be locally annealed. Thermal treatment during the deposi tion or growth modulates many material properties. In Some embodiments, these properties include mechanical StreSS, StreSS gradients, optical transmission, electrical conduction, and the like.

Other features and advantages of the invention will become apparent by consideration of the detailed description and accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view of a system. FIG. 2 is a sectional view of the system shown in FIG. 1

with an electrically conductive film. FIG. 3 is a sectional view of the system shown in FIG. 2

placed near an inductive coil. FIG. 4 is a table listing the inductive heating properties of

Selected microSystem materials and Some common ferro magnetics.

FIG. 5 is an isometric view of a Second System containing a heating element.

DETAILED DESCRIPTION

Before any embodiments of the invention are explained in detail, it is to be understood that the invention is not limited in its application to the details of construction and the arrangement of components Set forth in the following description or illustrated in the following drawings. The invention is capable of other embodiments and of being practiced or of being carried out in various ways. Also, it is to be understood that the phraseology and terminology used herein is for the purpose of description and should not be regarded as limiting. The use of “including,” “comprising.” or “having” and variations thereofherein is meant to encom pass the items listed thereafter and equivalents thereof as

US 6,878,909 B2 3

well as additional items. Unless limited otherwise, the terms “connected,” “coupled,” and “mounted” and variations thereof herein are used broadly and encompass direct and indirect connections, couplings, and mountings. In addition, the terms “connected” and “coupled” and variations thereof are not restricted to physical or mechanical connections or couplings.

The invention relates to methods of and apparatus for performing regional heating of a Substrate by induction heating. Induction heating can be utilized in industrial processes to modify the mechanical properties of materials. AS an alternative to ambient heating, induction heating allows for localized temperature control of a specific region of a material, device, or Substrate. Thus, not only does induction heating potentially conserve energy but it also allows protection of temperature-Sensitive components. For these and other reasons, induction heating has Several poten tial applications in microelectronic and microSystem fabri cation.

For example, inductive coupling to conductive films allows for the localized heating of Selected areas. This potentially prevents Significant heat energy from reaching the Substrate and, thus, allows for Substantially increased flexibility in microelectronic and microSystem design.

The invention pertains to fabricating thin film Structures and devices on a Substrate, and to enclosing a product, Such as an integrated microSystem, in a package. Package examples include monolithic packaging wafer Scale pack aging. In one embodiment, the product is fabricated on a flat Silicon Substrate. However, other Substrate materials can also be used. For example, a Substrate can be a semicon ductor Such as germanium or gallium arsenide, Semimetals Such as bismuth and molybdenum, metals and metal alloys Such as copper and Stainless Steel, insulatorS Such as Silicon dioxide and aluminum oxide, organic polymerS Such as Teflon, and inorganic polymerS Such as Silioxane. The inven tion also concerns any and all Substrate profiles including, but not limited to, flat, curved, cylindrical, and Spherical.

Induction heating is applicable to a variety of device classifications including, but not limited to, microelectronic devices, micro-electromechanical devices, and packaging and wafer bonding structures. FIG. 1 shows a sectional view of a system 100, such as a wafer, including a substrate 102, a plurality of devices 105 and 110, and a plurality of structures 115 and 120. A diffusion barrier 122 is deposited onto devices 105 and 110 as a passivation layer for the substrate 102. The first device 105 depicts an electronic device that does not require induction heating, the Second device 110 depicts an electronic device that requires induc tion heating, the first mechanical Structure 115 depicts a mechanical Structure that requires heat treatment, and the Second Structure 120 depicts a mechanical device intended for packaging or wafer bonding.

FIG. 2 shows a sectional view of the system 100 shown in FIG. 1 with an electrically conductive film 150. The film 150 covers only the areas of the system 100 to be heated. In one embodiment, the film 150 is patterned through photo lithography. However, patterning may also be achieved by other methods depending on the film application and the deposition technique chosen. In Some embodiments, a Suit able barrier film material 124 including, but not limited to, silicon dioxide or silicon nitride isolates the film 150 from the structural and device layers 115, and 120.

In Some applications, the System 100 can have more than one layer of conductive film. That is, the thickness of the film 150 can vary. Additionally, multiple, different film

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4 materials can be deposited on or applied to the system 100. Varying the thickness or differing the material of the film 150 allows for different temperature increments when energy is induced in the film 150.

In one embodiment, the deposition technique is Sputter ing. However, other techniques Suitable for depositing the film 150 on or applying the film 150 to the system 100 are available. Other film application or depositing techniques include, but not limited to, thermal evaporation, liquid phase chemical technique, gas phase chemical process, glow dis charge process, electronic beam (“EB) evaporation method, ion beam assisted deposition, chemical vapor deposition (“CVD”), plasma enhanced chemical vapor deposition (“PECVD), pulsed laser ablation (“PLD"), chemical solu tion deposition, cathodic arc deposition, and a combination of different techniques or processes. In Some embodiments, electroplating is used even though it may result in relatively thick film application or deposition. In one embodiment, the thickness ranges from a half micron up to ten microns thick. However, depending on the application, localized inductive heating still works with other thicknesses such as 50, 100, 200, 500, or higher number of microns.

Referring now to FIG. 3, the system 100 is placed near an inductive coil 170, whose Structure, orientation, and distance from the wafer 100 are arranged so as to achieve a desired magnetic coupling effect (represented by 160). The System 100 and the coil 170 are then positioned in a substrate chamber 174 to control the induction environment. The magnitude, polarity, and overall behavior of the electric field induced in the material or materials through which the magnetic field passes define the magnetic coupling effect. In one embodiment, the system 100 is positioned such that the coil 170 extends above and below by approximately equal amounts So as to be exposed to a magnetic field which is fairly uniform and unidirectional. Specifically, the Substrate 100 is positioned adjacent the coil 170 such that the nearest loops of the coil 170 are located at a distance of 0.25 cm from the top and bottom surfaces of the substrate 100. However, other configurations and distances are possible depending on the coil 170 and the substrate. A power source applies a time-varying electric field at a frequency and power setting to the inductive coil 170. This results in a current being generated within the film 150. The magnitude of the current is a product of the electric field Strength and the material conductivity, O. A magnetic field of the same frequency is obtained according to Ampere's law, which is given by

D (1) WXH = 1 + --

t

where H denotes the magnetic field vector, J is the current passing through the coil 170, and D is the electric displace ment current that arises due to the Stretching of electron clouds in the external medium and is proportional to the electric field strength by the electric permittivity of the medium, e. Placing the charged inductive coil 170 near the wafer 100 induces an electric field of the same initial frequency in the conductive film 150 according to Faraday's law, which is given by

(2)

where E denotes the secondary electric field vector and B is the magnetic flux. The magnetic flux, B, is proportional to

US 6,878,909 B2 S

the magnetic field strength by the magnetic permeability, u, of the film 150. If the secondary material, such as the film 150, is an electric conductor, then the induced electric field gives rise to eddy currents throughout the region of magnetic field overlap. The result is the heating of the device 110, and the structures 150 and 120 through their IR power loss. Equation (2) indicates that the direction of the alternating currents oppose that of the conduction current in the coil 170, J. Heating is also obtained as a result of hysteresis, which occurs as a result of a nonzero time required for the material to magnetize along a given direction. Hysteresis losses are typically leSS prevalent than eddy current losses and increase with frequency. AS for the conductive material used for the film 150, most

Substances that conduct an electric current are capable of being inductively heated. AS indicated by Faraday's law, however, certain materials interact with magnetic fields more effectively than others. The magnetic permeability of a material is largely a function of its unpaired electrons. When electrons accumulate in the Valence band of an atom or molecule, it is energetically favorable for them to assume States with the same Spin direction until all Such States are filled, at which point they begin to fill States of the opposite Spin direction, forming Spin-up and Spin-down pairs. If one or more unpaired electrons remain, the material has an overall Spin magnetic moment that is polarizable along any direction by applying a magnetic field. The magnitude of this moment determines the permeability of a material and its relative usefulneSS in inductive heating applications. Substances classified as diamagnetic have no unpaired elec trons and thus are only weakly polarizable, leSS So than free Space. Paramagnetic materials have at least one unpaired electron per atom or molecule and thus a magnetic field results in a moderate degree of alignment. Perhaps the most Versatile materials are the ferromagnetics, which can be polarized to varying degrees by adjusting the Strength of the applied field and can often be made to polarize very Strongly. Ferromagnetic materials typically hold their alignment for a long but finite amount of time after the field has been removed, and typically consist of the elements iron, nickel, and cobalt. Substances from any of these three classifica tions can be inductively heated, and combinations of mate rials from one or more groups can be used to achieve different degrees of heat generation. In one embodiment, a Single film of ferromagnetic material including, but not limited to, a permalloy or other iron-containing ferromag netic alloy is heated.

The electrical conductivity and magnetic permeability of a Secondary material are also important in that they deter mine the frequency at which it can best be inductively heated as dictated by the electromagnetic skin effect. The eddy current density decreases from that induced at the Outer edge of the material according to

(3)

where J is the current density at a distance r from the Surface, Jo is the current density at the Surface, and ö is the skin depth. The Skin depth, Ö, for a good electrical conductor is given approximately by

1 (4)

where O is the electrical conductivity, it is the magnetic permeability, and f is the chosen frequency for modulating the skin depth with respect to the dimensions along which

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6 the eddy currents propagate in order to achieve efficient inductive heating. Furthermore, assuming that the devices 115, 120 on the Substrate 102 face out of the coil 170 Such that the eddy currents propagates tangentially along a coil plane, the power dissipated, P, in a cylindrical-shaped object with radius a and thickness t is determined by the following piecewise expression:

P = artist. a < 1.5 (5) 2

still a > 1.5

where Ho is assumed to be the uniform magnetic field measured in the free interior of the coil 170. Equations (4) and (5) show that inductive heating increases with frequency according to one of two Schemes. The first Scheme occurs at low-frequencies where the power varies with f. The second Scheme occurs at higher frequencies where it levels off to follow f'. The process is optimized when the frequency is chosen Such that the afö ratio is approximately four, with further increases in frequency producing relatively little benefit. The proceSS can therefore be configured Such that the targeted material or materials are in an optimal State while the non-targeted material or materials are not.

FIG. 4 gives a comparison of the inductive heating properties of Some common ferromagnetics as well as Several important materials in the fields of microelectronics and Microsystems in a table 400 using Equations (4) and (5). The Spatial values chosen to represent the Semiconducting materials were those of a Standard four-inch Substrate, where a=50 mm and t=0.5 mm. The values used for the metals correspond to the Size of an inductively heated thin film patterned to cover a typical inertial Sensing Structure, a-0.5 mm and t=1 lim. The normalized power dissipation values show that the ferromagnetics are capable of converting magnetic energy to thermal energy far more efficiently than any of the microSystem materials. In general, the dimensions of the microsystem metals will be considerably smaller than the values used in this comparison, further decreasing their ability to absorb magnetic energy, and the ferromagnetics will exhibit additional heating due to hysteresis.

Depending on the nature of the heated object and the conditions under which it is heated, induction heating involves the heat transfer modes of conduction, convection, and radiation to varying degrees. In conduction, heat energy moves within the device 110 and the structures 115 and 120 from a region of high temperature to a region of low temperature. The rate at which the energy moves depends on a temperature gradient and is given by Fourier's law, written S

where q is the conductive heat flux, w is the spacing thermal conductivity, and T is the temperature. A large temperature gradient can arise through the material croSS Section due to the skin effect as described, and thus a large thermal conductivity is desirable if the entire material is to be heated with a high degree of uniformity. The convective and radiative heat transfer modes both refer to energy dissipated at the Surface of the device, and are a function of the difference between the Surface temperature and the ambient temperature. Convection is the proceSS by which heat energy escapes from an object to its Surroundings and is described by Newton's law as

US 6,878,909 B2 7

where q is the convective heat flux, C. is the Surface heat transfer coefficient, T is the Surface temperature, and TA is the ambient temperature. This is typically an undesirable effect as it causes energy to be lost to the Surroundings rather than applied to heating the material. AS Suggested by New ton's law, the rate of convective heat loSS can be reduced by increasing the ambient temperature or by using an ambient gas that reduces the Surface heat transfer coefficient. In one embodiment, the heating of the film occurs under vacuum So as to reduce the number of ambient molecules present to absorb heat energy.

In another potentially undesirable effect, radiative energy loSS occurs when the temperature difference at the Surface causes energy to escape in the form of electromagnetic waves. This is expressed by the Stefan-Boltzmann law as

where q is the radiative heat flux, k is the Stefan Boltzmann constant, e is the Surface emissivity, Ts is the Surface temperature, and TA is the ambient temperature. In one embodiment, the surface of the substrate 100 is polished prior to heating. This reduces the emissivity and, thus, reduces the energy loSS by radiation.

The heat transfer process in a device can be modeled according to the Fourier equation

T (9) Cy- + W. ya, + v 4cond O

where C is the Specific heat of the material, Y is the mass density, T is the temperature distribution, q is the con ductive heat flux, and Q is the heat generation within the material. The Solutions to the temperature distribution and the heat generation can be obtained by applying initial and boundary conditions. A common initial condition assumes that the initial temperature distribution is a constant equal to the ambient temperature. A boundary condition can be obtained using the conservation of energy principle at the Surface of the device. One possible representation can be written as

'an + 4 cony + 4 ad + 9 = 0 (10)

where w is the thermal conductivity of the material, T is the temperature distribution, n is a direction normal to the Surface, q is the convective heat flux, q, is the radiative heat flux, and Qs Summarizes any additional Surface losses Such as those incurred if the material is quenched. However, additional boundary conditions can be found based on geometrical Symmetries. Using computerized numerical methods, Solutions can be obtained for different materials of varying geometries, In microSystem applications, the model can require further refinement to account for phenomena typically disregarded on larger Scales.

Restating the process, a time-varying current is passed through the inductive coil 170 at an appropriate frequency and power Setting, as described above, for a necessary time duration. The magnetic flux produced by the coil 170 induces a current in the film 150, resulting in the generation of heat energy due to resistive and hysteresis losses as detailed earlier. The process of placing the system 100 near the inductive coil 170 can be repeated to achieve different application specific characteristics. Upon completion of the induction heating, the film 150 can be either removed or allowed to remain as part of the overall Structure.

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8 Many devices, Such as certain gas-composition Sensors,

gas preconcentrators, gas separation columns for chromatography, precision Voltage or current reference circuitry, thermopneumatic valve structures, and many others, require heat-generation capability during normal operation. The heat generation is often accomplished using current-generated dissipation by attaching wires to the devices.

FIG. 5 shows an isometric view of a second system 200 including a Second Substrate 202, a heating element 205, an electronic device 215, and a mechanical component 220. The second system 200 is further placed near a set of induction coils 270 positioned in a substrate chamber 274 to achieve a desired magnetic coupling effect represent by 260. This arrangement essentially eliminates the need for external leads and facilitates implementation in locations where physical connections are undesirable or difficult to obtain. The inductive coil 270 near the heating element 205 causes the element 205 to radiate thermal energy. Depending on the application, the element 205 can be located either on the Surface of the device 200 or embedded under one or more layers. One method for inductive heating a specific region on

Substrate will now be discussed. The acts discussed below can vary for other embodiments. To inductively heat thin films 150 deposited or applied and patterned on a silicon wafer or to locally heat Selected regions of an integrated microSystem device on a Substrate 102, materials are first preferably prepared. For example, the substrate 102 or the wafer is first prepared with a thin thermal oxide layer. The thin thermal oxide layer is generally used for Structural support and substrate anchoring during the process. These optional layers of low-pressure chemical vapor deposition (“LPCVD”) oxide have different thickness and are first deposited at a pre-Selected temperature.

Depending on the design, devices 110 and structures 115, 120 are positioned on the Substrate 102, or inside the substrate 102. Examples of devices and structures include Single- and double-anchored cantilever beams, folded beams, Guckel rings, Vernier Strain gauges, Sensors, gas pre concentrators, gas Separation columns for chromatography, precision Voltage or current reference circuitry, thermopneumatic valve structures and the like. Before the thin film 150 is deposited or applied, the devices 110 or structures 115, 120 with pre-selected thickness are first patterned. Specifically, the devices 110 and structure 115, 120 are patterned in a caustic or an alkaline solution Such as potassium hydroxide using an oxide hardmask. Alternatively, other device 110 or structure 115, 120 pat terning techniques Such as Sputter etching, reactive ion etching, ion beam etching, deep reactive ion etching, or other plasma or dry processing techniques may be used. The substrate 102 is then covered with a sputter-deposited oxide 124 with another pre-selected thickness to prevent them from coming into contact with the thin film 150.

Thereafter, an inductive thin film 150 is chosen. To choose an inductive thin film 150, the permeability and its corre sponding Curie temperature, among other things, are con sidered. For example, cobalt can be used as an inductive thin film 150 because cobalt has a maximum permeability of approximately 250 times that of typical microSystem mate rials and its Curie temperature indicates efficient heating up to 1115 C., thereby allowing it to provide adequate thermal energy for grain regrowth in polysilicon. The thin film 150 is typically a ferromagnetic material that consists of, but not limited to, one or more of the elements Such as iron, nickel, or cobalt.

US 6,878,909 B2

In order to prevent the formation of diffused oxides on the Substrate 102 due to the thin film 150, Such as cobalt silicides, a diffusion barrier 124 (FIG. 2) or a plasma enhanced chemical vapor deposition (“PECVD”) oxide film is deposited over the entire substrate 102 or wafer. Thereafter, the chosen film 150 with the pre-selected thick neSS is evaporated or Sputter-deposited onto a Side of the Substrate 102 using techniqueS Such as Shadow masking or sputtering with a thin film depositor 178 (FIG. 3). In the previous example, a 100 nm-thick cobalt film can be evapo rated onto one side of the wafer using the Shadow mask technique. Optional positioning of magnets near the Sub strate 102 to align the cobalt domains can be performed.

Heat reducers 182 around the targeted devices 110 or structures 115, 120 are then optionally and regionally pro vided to the substrate 102. Heat reducer examples include heat-Sink, insulating layer, and thermal barrier layer. The Substrate 102 is covered with the films 150 such that the heat generated in the targeted areas remains concentrate due to the thermal conductivity of the substrate 102. The substrate 102, with the films 150, all then inductively heated in a substrate chamber 174 (e.g., a vacuum chamber). The Sub strate chamber 174 provides a low pressure ambient with minimal energy loSS due to convection, among other things, thus Stabilizing the annealing process and increasing the energy efficiency of the System. In operation, the Substrate chamber 174 contains a controlled ambient gas. The ambient gas can be inert gas like nitrogen or argon for annealing. Other ambient gases include oxygen, forming gas (a mixture of nitrogen and hydrogen), and ammonia, or others. Depend ing on the deposition technique chosen, reactive gases can also be used. For example, the class of hydride gases such as Silane, disilane, dichlorosilane, trichlorosilane, chlorosi lane. The Substrate chamber 174 can also be a vacuum chamber, such as a Norton NRC-3117 vacuum system, equipped with a mechanical vacuum pump and a vacuum diffusion pump. The mechanical pump, Such as a Sargeant Welch model 1397 pump, is capable of a pressure of approximately 5x10" Torr. The vacuum diffusion pump, such as a Norton type 0162 oil diffusion pump, is capable of an ultimate pressure of approximately 5x10, Torr. The Vacuum chamber can include a stainleSS Steel baseplate with a plurality of feedthrough adapters that are configured to introduce electrical, fluidic, proceSS gas, or mechanical manipulation mechanisms into the vacuum chamber.

Several coil configurations 170 can be used to apply the inductive heat. Example coil configurations include a Sole noidal coil or a spinal coil. The coils 170 receive a varying current that fluxes at a frequency. An example frequency is 5 MHz. The Solenoidal coil is generally chosen to subject the Substrate 102 to a strong and relatively uniform magnetic field 160 with a dominant component in the z-direction. The substrate 102 is then positioned in the coils 170 such that the induced eddy currents are in the r-p plane, generally elimi nating the dependence of the required frequency on the film thickness.

The annealing proceSS is conducted at pressures below approximately 0.2 Torr, or any pressure that minimizes heat convection by the gas from the substrate 102. In one embodiment, high purity gas, Such as nitrogen or argon, is continuously Supplied into the chamber 174 using mass flow control, Such as a Unit series 1200 mass flow controller. The annealing process then begins with controllably energizing the coil 170 by passing current from a current-voltage Source 186 through the coil 170. Depending on the film 150, the size of the film 150, the volume of the film 150, the substrate 102, the size of the Substrate 102, and the volume of the

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10 Substrate 102 among other things Selected, the energizing current can be short pulse, medium pulse, long pulse, short continuous or long continuous. The current is then applied to the coil 170 for a pre-determined duration of time. Generally, Short pulses leading to a one-Second annealing process is Sufficient. However, other duration can also be substituted. The energized coil 170 then results in a magnetic flux 160 at the coil 170 thereby inducing a current in the thin film 150. The induced currents then generate heat energy in the substrate 102 due to resistive and hysteresis losses. The process of placing the substrate 102 with the thin film 150 in the vacuum chamber to be near the coil 170 can be repeated to achieve different application Specific character istics. Optionally, the thin film 150 is then removed from the Substrate 102 in an acidic Solution Such as Sulfuric peroxide Solution.

In yet another embodiment, a substrate 102, such as p-type Silicon wafers, is placed in a furnace with oxygen (O) or water vapor (HO) ambient that oxidizes the Sub strate 102. This results in a thin layer of thermal silicon dioxide (SiO2) to be grown on the substrate 102. Thereafter, Structural anchors are put in place. For example, a patterned layer of thermal oxide that anchors the Structures or devices can be deposited on the substrate 102.

For example, a hexa-methyl-disilane (“HDMS) or an adhesion primer and a layer of photoresist are spun on the Substrate 102. The Spinning can be performed on a spin station such as a Laurell Model WS-400-6NPP/LITE spin ning station. In the embodiment, a Shipley S1813 photore sist is used. The Substrate 102 is then softbaked at a preset temperature for a specific amount of time. For example, for a p-type Silicon wafer, a Cole Parmer Dataplate digital hot plate softbakes the wafer at 90° C. for one minute. The photoresist is Subsequently patterned using a mask Such as the EV620 mask aligner, exposing the photoresist to ultra violet (“UV) light. The UV light causes the exposed photoresist long polymer chains to break down into short chain polymers. Next, the photoresist is developed in a developer solution such as Shipley MF319. The developer dissolves away the broken down photoresist while leaving the unexposed photoresist intact. The areas where no pho toresist is left is then etched using a buffered acid, Such as a 5:1 buffered hydrofluoric (“BHF) acid. A device 110 or structure 115 such as a polysilicon is then

deposited to the Substrate 102 at a predetermined tempera ture. For example, 2 microns of chemical vapor deposition (“CVD) polysilicon is deposited on the substrate 102 using Thermco TMX furnace at 625 C. Thereafter, oxide is again deposited or Sputtered on the Structure using a Perkin-Elmer 2400-8J RF sputtering system, for example. Similar to the oxide deposition procedure discussed, both HMDS and photoresist are spun on the substrate 102. The spun substrate 102 is then Softbaked, masked, developed and etched. The polysilicon Structure is finally etched in the areas where no oxide is present using another caustic (base) Solution Such as a 10:1 potassium hydroxide (KOH). Alternatively, other etching techniques may be used, Such as Sputter etching, reactive ion etching, deep reactive ion etching, ion beam etching, plasma etching, and other plasma or dry processing techniques.

After the device 110 or the structure 115 has been depos ited on or in the substrate 102, a thin film depositor 178 (FIG. 3) deposits a barrier material 124, such as an oxide layer, that Separates the polysilicon device 110 or structure 115, 120 from the thin film 150. For example, a Perkin Elmer 2400-8J RF sputtering system can deposit a 0.25 micron layer of sputtered SiO2 on the substrate 102. In some embodiment, the oxide layer is not patterned.

US 6,878,909 B2 11

After the Separating oxide layer has been deposited, a thin film 150 to be inductively heated is deposited or applied to the Substrate 102. A ferromagnetic material, Such as Cobalt, can be used as the thin film. The process of applying the thin film 150 is similar to the deposition of oxide to the substrate 102. Both HMDS and photoresist are first spun on the Substrate 102 with the device 110 or structure 115 anchored. The Substrate 102 is again Softbaked, photoresist masked, and developed. Thereafter, the thin film 150 is applied, deposited or sputtered on the substrate 102. Subsequently, masked areas of the thin film 150 above the photoresist can be lifted using a Solvent Solution, Such as acetone, with a Branson 3210 ultrasonic agitator leaving the thin film 150 on the substrate 102 only in the patterned regions.

The Substrate 102 with the device 110 and the structure 115, 120 is then positioned in a substrate chamber 174, 274 and heated with a Lepel 7.5 kW system. The substrate 102 is typically mounted on thermally and electrically insulating contacts horizontally over the inductive coil 170 inside the Substrate chamber 174. The mount can be a dielectric, Such as fused quartz or Silica, configured to incorporate a minimal contact to the substrate 102. Current is thereafter applied to the coil 170, which is positioned near (for example, Sur rounds or is adjacent to) the thin film. Once the current starts to energize the coil 170, the coil 170 generates an electro magnetic field having an electromagnetic flux as described earlier. The flux induces an eddy current in the thin film 150. Due to the resistive nature of the thin film 150, heat is generated in the thin film 150. Once the heat reaches a certain temperature, the Substrate 102 is accordingly heated. As a result, the device 110 or the structure 115, 120 is thermally annealed or is bonded on or to the substrate 102.

In still another embodiment, the inductive heating of thin films on a substrate 102 involves the post-CMOS integrated processing of MEMS elements on the same wafer or Sub strate 102. A high density microelectronic device 105, a high density CMOS process for example, is first incorporated into a Substrate 102. In some embodiment, the Substrate 102 is a complete CMOS substrate.

Thereafter, appropriate electrical, mechanical, or optical passivations can be made to the Substrate 102. For example, the substrate 102 can be passivated by a deposition tech nique Such as Sputtering or plasma-enhanced chemical vapor deposition (“PECVD”). Local interconnect for the post CMOS device 110, 115, or 120 can be formed on the passivation layer or layers. For example, a Spacer layer of Sacrificial material is deposited and patterned for a Sacrificial MEMS process. A MEMS structural layer 115, 120 can then be formed on top of the Spacer. The Spacer layer can be made from a low temperature doped Silicon dioxide glass like phosphosilicate glass ("PSG”) or borophosphosilicate glass (“BPSG”).

Once the low temperature MEMS structural layer has been deposited onto the Spacer, additional doping of Suitable thickness to improve the electrical performance of the material is required in Some embodiments. For example, in a lateral accelerometer Structure, the layer thickness ranges from 3 um to 30 um. The structural layer is then patterned and etched to form the device geometry appropriate for the design. The structural layer 115, 120 can also be passivated for electrical and dopant isolation from any Subsequent materials. A Suitable electrical and diffusion barrier 124 Such as a low temperature Silicon nitride will passivate the Structural layer. An inductive coupling material 150 is thereafter deposited

and patterned to form localized regions where the inductive coupling is maximized. In one embodiment, the thin film

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12 150 thickness ranges from 0.3 um to 5 lum. In some other embodiments, the thin film 150 is incorporated in the Substrate 102. Heat reducers 182 are used in areas that are designed to remain cool relative to the MEMS structural material 115, 120. Additionally, the thin-film 150 is not patterned in the areas that are designed to remain cool during the annealing process. The Substrate 102, with the devices 110 and the structures

115, 120 covered with thin films 150, is subsequently placed in or near an inductive coil 170 within a chamber 174, 274. In one embodiment, the chamber 174, 274 is a vacuum chamber. Once current is applied through the coil 170, the coil 170 induces magnetic coupling denoted by 160. The coupling further generates an eddy current in the thin film 150, which in turn generates heat in the substrate 102.

After a localized temperature is reached to affect the change in material properties desired for the MEMS material 115, 120, the Substrate 102 is removed from the coil 170. In Some embodiment, the inductive film 150 is removed from the substrate 102. Material property changes induced in the thin film 150 may include an increase in electrical conduc tivity due to enhanced diffusion of dopants into the film 150 and a reduction in the mechanical StreSS and StreSS gradients in the structural film 115. Furthermore, the passivation between 150 and 115 and 120 can also be removed. At this point, the structures 115 and 120 can be released using a typical Surface micromachining Sacrificial etch process, resulting in the completion of the annealing process.

Various features and advantages of the invention are Set forth in the following claims. What is claimed is: 1. A method of forming a system having a plurality of

micro-devices or micro-structures on a Substrate, the method comprising:

applying a first thin film to the System, the applying act including applying the first thin film to a first micro System;

locally applying a thin ferromagnetic film to the first microSystem;

controllably energizing a coil positioned near the thin ferromagnetic film, the energizing act resulting in a magnetic flux, and

inducing a current in the thin ferromagnetic film with the magnetic flux to cause the thin ferromagnetic film to radiate heat, thereby locally heating the first thin film of the microSystem to change a property of the first thin film.

2. The method of claim 1, further comprising positioning the Substrate in a vacuum chamber.

3. The method of claim 1, wherein locally applying the thin ferromagnetic film to the first microsystem further comprises depositing the thin ferromagnetic film on the first microSystem.

4. The method of claim 1, wherein locally applying the thin ferromagnetic film to the first microsystem further comprises depositing the thin ferromagnetic film in the first microSystem.

5. The method of claim 1, further comprising positioning a heat reducer on the System near the thin ferromagnetic film.

6. The method of claim 1, further comprising applying a diffusion barrier between the first thin film and the thin ferromagnetic film.

7. The method of claim 6, wherein the thin ferromagnetic film is locally applied to the diffusion barrier.

8. The method of claim 1, further comprising positioning the System near the coils.

US 6,878,909 B2 13

9. The method of claim 1, wherein energizing the coil further comprises pulsing a current through the coil.

10. The method of claim 9, wherein the pulsed current is applied for a predetermined duration.

11. The method of claim 10, wherein the predetermined duration is approximately one Second.

12. The method of claim 1, further comprising removing the thin ferromagnetic film in a liquid chemical after induc ing the current.

13. The method of claim 12, wherein the liquid chemical comprises an acidic Solution.

14. The method of claim 1, further comprising removing the thin ferromagnetic film in a gaseous process after inducing the current.

15. The method of claim 14, wherein the gaseous process comprises a plasma process.

16. The method of claim 1, further comprising removing the thin ferromagnetic film in a dry process after inducing the current.

17. The method of claim 1, wherein energizing the coil comprises controlling the frequency of a current provided to the coil.

18. The method of claim 1, further comprising patterning the thin ferromagnetic film corresponding to a region of the System.

19. The method of claim 1, further comprising removing the thin ferromagnetic film after inducing the current.

20. The method of claim 1, wherein the thin ferromagnetic film has a thickness less than 100 microns.

21. The method of claim 1, wherein the ferromagnetic thin film has a thickness less than 50 microns.

22. The method of claim 1, wherein the thin ferromagnetic film has a thickneSS less than 10 microns.

23. The method of claim 1, wherein the thin ferromagnetic film has a thickness between 0.5 and 10 microns.

24. The method of claim 1, wherein the microsystem is Selected from the group consisting of a micro-device and micro-structure.

25. The method of claim 1, wherein the heating of the thin ferromagnetic film is further Supported by magnetic hyster esis heating.

26. A method of forming a System having a plurality of micro-devices or micro-structures on a Substrate, the method comprising:

applying a first thin film to the System, the applying act including applying the first thin film to a first micro System;

locally applying a thin ferromagnetic film to the first microSystem; and

generating heat in the thin ferromagnetic film thereby locally heating the first thin film to change a property of the first thin film but not have the first thin film combine with the thin ferromagnetic film, wherein generating the heat includes controllably energizing a coil positioned near the thin ferromagnetic film thereby inducing a current in the thin ferromagnetic film.

27. The method of claim 26, further comprising position ing the System in a vacuum chamber.

28. The method of claim 27, wherein locally applying the thin ferromagnetic film to the first microsystem further comprises depositing the thin ferromagnetic film on the first microSystem.

29. The method of claim 27, wherein locally applying the thin ferromagnetic film to the first microsystem further comprises depositing the thin ferromagnetic film in the first microSystem.

30. The method of claim 26, wherein locally applying the thin ferromagnetic film comprises patterning the thin ferro magnetic film.

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14 31. The method of claim 30, wherein the thin ferromag

netic film is locally applied to the diffusion barrier. 32. The method of claim 26, further comprising position

ing a heat reducer on the System near the thin ferromagnetic film.

33. The method of claim 26, further comprising applying a diffusion barrier between the first thin film and the thin ferromagnetic film.

34. The method of claim 26, further comprising position ing the System near the coils.

35. The method of claim 26, wherein energizing the coil further comprises pulsing a current through the coil.

36. The method of claim 35, wherein the pulsed current is applied for a predetermined duration.


38. The method of claim 26, further comprising removing the thin ferromagnetic film in a liquid chemical after gen erating heat in the thin ferromagnetic film.


40. The method of claim 26, further comprising removing the thin ferromagnetic film in a gaseous process after generating heat in the thin ferromagnetic film.


42. The method of claim 26, further comprising removing the thin ferromagnetic film in a dry process after generating heat in the thin ferromagnetic film.


44. The method of claim 26, further comprising removing the thin ferromagnetic film after generating heat in this ferromagnetic film.

45. The method of claim 26, wherein the thin ferromag netic film has a thickness between 0.5 and 10 microns.

46. The method of claim 26, wherein the heating of the thin ferromagnetic film is further Supported by magnetic hysteresis heating.

47. A method of performing regional heating of a micro device or micro-structure of a System having a Substrate, the method comprising:

patterning a Selected region of the System, the Selected region comprising a microSystem having a first thin film;

applying a thin ferromagnetic film to the Selected region; passing a current through an inductive coil, thereby pro

ducing a flux near the inductive coil, and controllably inducing a current in the thin ferromagnetic

film with the flux to cause the thin ferromagnetic film to radiate heat, thereby heating the Selected region of the System including heating the first thin film to change a property of the first thin film.


49. The method of claim 47, further comprising position ing a heat reducer on the Substrate near the thin ferromag netic film.

50. The method of claim 47, wherein applying the thin ferromagnetic film to the Selected region further comprises depositing the thin ferromagnetic film on the Selected region.

51. The method of claim 47, wherein applying the thin ferromagnetic film to the Selected region further comprises depositing the thin ferromagnetic film in the Selected region.

52. The method of claim 47, further comprising deposit ing a diffusion barrier to the Selected region prior to applying the thin ferromagnetic film.

US 6,878,909 B2 15


54. The method of claim 47, wherein passing the current further comprises pulsing the current through the coil.

55. The method of claim 54, wherein the pulse current is applied for a predetermined duration.




59. The method of claim 47, further comprising removing the thin ferromagnetic film in a gaseous process after inducing the current.






65. A method of performing regional heating of a micro device or micro-structure of a System having a Substrate, the method comprising:

applying a thin ferromagnetic film to the System, the System comprising a microSystem having a first thin film;

removing a region of the thin ferromagnetic film from the System;

passing a current through an inductive coil thereby pro ducing a flux at the inductive coil; and

controllably inducing a current in the thin ferromagnetic film with the flux to cause the thin ferromagnetic film to radiate heat, thereby heating the microSystem includ ing heating the first thin film to change a property of the first thin film.


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16 67. The method of claim 65, wherein applying the thin

ferromagnetic film to the System further comprises depos iting the thin ferromagnetic film on the System.

68. The method of claim 65, wherein applying the thin ferromagnetic film to the System further comprises depos iting the thin ferromagnetic film in the System.

69. The method of claim 65, further comprising position ing a heat reducer on the System near the thin ferromagnetic film.

70. The method of claim 65, further comprising applying a diffusion barrier to the System prior to applying the thin ferromagnetic film.


72. The method of claim 65, wherein passing the current further comprises pulsing a current through the coil.

73. The method of claim 71, wherein the current is applied for a predetermined duration.




77. The method of claim 65 further comprising removing the thin ferromagnetic film in a gaseous process after inducing the current.







United States Patent (10) Patent No.: US 6,878,909 B2 … · (12) United States Patent Bergstrom et...

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