COMPETITIVE COST: 3 Nationwide Locations • In-House Machine Shop • Short Lead Times

QUALITY & EXPERTISE: ISO-9001 Certified • Decades of Expertise • 99% Customer Satisfaction

EASE OF DOING BUSINESS: Significant Inventory of Ready-To-Ship Products • Detailed Weekly Customer Status Reports • Flexible Pricing

SERVICE • PARTS • NEW & REFURBISHED SYSTEMS

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Developed Abatement Line• Edwards and Ecosys Abatement System Remanufacturing• On-Site Service for Customer-Owned POU Scrubbers

Moved to New Facility in Clackamas, Oregon• 30,000 Square Foot Dry Pump Rebuild Center of Excellence• Corporate Headquarters

Company Founded in Wilsonville, Oregon • Filled Third Party Primary Pump Service Gap in NW• Offered Customers Local Alternative to OEM “Service”

2002 20062005TRILLIUM TIMELINE

Highlights ofour History

Complete Range of SubFab Equipment & Services

Semiconductor Applications

Univac Products Enable Vacuum Metallurgy

Industrial Applications

Trillium is your single source for expert service, exchange, parts, new and refurbished systems.

With 3 nationwide locations, an in-house machine shop, and ready-to-ship inventory, customers loveour short lead times and competitive costs. Plus, our ISO-9001 certified quality system and decades of expertise allow us to deliver top-notch products and services every time. Clients find us easy to dobusiness with due to our sophisticated back office systems, customized weekly status reports, flexible pricing options, and our popular equipment buy-back program.

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Acquired Temcon Industries• Added Cryopump and Compressor Rebuild Capability• Regional Presence in Texas

Expanded TCU Capabilities• Acquired Air Products & Edwards Chiller Businesses• Build-Out of Legacy Support Portfolio• Added Third Party TCU Repair Capability

Acquired United Vacuum• Added Industrial Vacuum Capability • Included New Pump Offering • Machined Parts Capability • East Coast Service Center

Renovated East Coast Facility• 30,000 Square Feet of Manufacturing Space• World Class Machining Center• Vacuum Pump Service Hub• Global Parts Distribution

2007 2009 2011 2013

Over 100 Systems Always in Stock

Ready-To-Ship Inventory

Expert Final Assembly

Precision Manufacturing

Trillium offers high-quality industrial pump service, for a wide range of makes andmodels, from our three nationwide service facilities. Each rebuild is correctly disassembled usingproper tooling to prevent damage, cleaned and inspected, then expertly rebuilt and tested to OEM specs.

We Service and Sell the Following Equipment:Stokes Microvac: 146 • 148 • 149 • 212 • 412 Stokes Blowers: 306 • 310 • 607 • 615 • 622Leybold: Trivac A/B • E/DK • RUVAC • Sogevac Edwards: RV • E1M & E2M • EH • QMB • GV Also Serviced & Sold: Aerzen • Alcatel • Busch • Kinney • Pfeiffer • Roots • Varian • WelchWith over 150 rebuilt pumps in stock, Trillium is the go-to source for your pumping system needs.

Industrial Service & Refurbished Pumps

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IN-HOUSE MACHINE SHOP

Univac 1700-22

Pumping Systems

Univac 600

Blowers

Univac 200

Rotary Piston Pumps

Trillium’s line of Univac Rotary Piston Pumps, Blowers and Pumping Packages are proudly manufactured in our world-class global manufacturing centers, including our state-of-the-art New Jersey machining center. Our Univac product line is a 100% drop-in replacement for the legendary Stokes Microvac series of pumps. Univac can be expertly configured in standard or customized packages for your specific application. Our extensive new stock on hand means we can quickly respond to your short-notice requirements and our US-based support through our three national repair centers ensures the highest levels of customer satisfaction.

Trillium’s Vacuum Engineering expertise sets us apart from your typical pump rebuilder. Where else can you find a state-of-the-art machining center, expert repair facility, and new/refurbished pump manufacturing operation, all under the roof of a world-class facility? Experience our meticulous quality during your next repair, replacement or expansion.

UNIVAC PUMPS

New Industrial Pumping Systems

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Range of Lubricants Available

Oil

In Stock & Ready to Ship

Consumables

Made in Our Machining Center

Hard Parts

Along with our new/refurbished pumps and quality service, Trillium offers a wide range of spare parts for industrial pumping systems. Our line of Univac hard parts support both Stokes and Univac Piston pumps and blowers for end users, third-party repair centers and distributors. In addition, Trillium provides consumable parts including rebuild kits, filters, seals and bearings. We also supply a wide range of vacuum oils and can help you identify the best grade of oil for your application. Put our expertise to work for you, and keep your systems running at their optimal levels. Trillium is your one-stop resource for all your industrial pumping needs.

Robust Engineering & Manufacturing Capability

• Fully Staffed Engineering Department

• Computerized Measuring Machine (CMM)

• Solidworks/CAD/CAM Software

• Over 50 Years of Machinist Expertise

UNIVAC PARTS

Aftermarket Parts & Consumables

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DRY PUMPS — Edwards: DP, QDP, QMB, QDP, iH, iGx, iPX, EPX • Ebara: UERR & A Alcatel: ADP & ADS • Busch • Anest Iwata • Varian

CHILLERS — Affinity-Lydall • AMAT • Bay Voltex • Edwards • FTS Kinetics Julabo • LAM • Lauda • M&W • Neslab • Noah • TekTemp

TRILLIUM SERVICES & SELLS

Chillers & Heat Exchangers

TCU Service

Including Compressor Rebuilds

Cryo Pump Service

Advanced Rebuild Capability

Dry Pump Service

Let Trillium handle all of your SubFab service needs including dry pumps, cryos andcompressors, chillers and on-site service including abatement system maintenance.

Trillium’s Service Capabilities Offer the Following Benefits:• Repeatable, high-quality service due to decades of expertise and ISO 9001 Registered Quality System

• In-house machining capability resulting in lower parts cost and better support for legacy products

• Exceptional customer service with weekly order status reports and 99% customer satisfaction

Ask About Trillium’s On-Site Service Program:• Expert on-site service capability, including abatement system maintenance

• Robust maintenance data management system for visibility, historical analysis and periodic reporting

• On-site equipment rebuilds available for geographically separated customers

Semiconductor Service Offerings

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Abatement Systems

Temperature Control Systems

Pumping Systems

Expertly Specified• Correct for Application• Proper Configuration• Optimized Performance

Convenient & Complete• One-Stop Shopping• Right the First Time

Cost-Effective• Leverage Your Spend• Fully Reconditioned Units – Like New!• Standardize Existing Equipment vs. New

Refurbished Semiconductor Equipment

CRYOGENIC PUMPS — CTI/Helix: Cryo-Torr, OnBoard, Compressors, Adsorbers

ABATEMENT SYSTEMS — Edwards: ATLAS, TPU, TCS, Helios, Kronis, GRC, PCS ATMI/Delatech: CDO • ATMI/Ecosys: Guardian & Vector

Your best source for spares, tool/chamber additions and major facility expansions:

OVER 250 MODELS, INCLUDING:

We offer a wide range of products and superior used equipment sourcing services:• Complete dry pumping systems, featuring standard or custom foreline installation kits with valves, bellows, gauges and traps• OEM standard or unique tool interfacing for pumps, chillers and abatement systems• A complete line of new and refurbished chillers, plus expert abatement system recommendations backed up by a wide variety of refurbished systems• Professional project management and on-site start up support for full turnkey service

Contact Trillium Today • Visit Us: www.trilliumus.com • Call Us: 800.453.1340

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3TrilliumLocations1 Portland, OR

2 Austin, TX

3 Metro NY/NJ

3 NATIONWIDE LOCATIONS TO SERVE YOU

• Service • Exchange • Parts• New & Refurbished Systems