The Saguaro from MGI, USA
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The Saguaro from MGI, USA The Sonora Series MGI, USA Automated Batch Wafer Handling 1203 West Geneva Drive Tempe, Arizona 1203 West Geneva Drive Tempe, Arizona USA USA Tel: +1 480 967 8011 Tel: +1 480 967 8011 [email protected]
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The Sonora Series MGI, USA Automated Batch Wafer Handling. The Saguaro from MGI, USA. 1203 West Geneva Drive Tempe, Arizona USA Tel: +1 480 967 8011 [email protected]. SONORA SERIES SOLAR CELL. - PowerPoint PPT Presentation
Transcript of The Saguaro from MGI, USA
The Saguaro from MGI, USA
The Sonora Series
MGI, USAAutomated Batch Wafer Handling
1203 West Geneva Drive Tempe, Arizona USA1203 West Geneva Drive Tempe, Arizona USATel: +1 480 967 8011Tel: +1 480 967 8011
SONORA SERIES SOLAR CELL SONORA SERIES SOLAR CELL 3 Stage Back-to-Back Same Slot or Back-to-Back Proximity Transfer
4 Plastic Cassettes (4 X 50) into a 100 Slot Quartz Carrier (0.1875”-4.76mm Pitch).
3 Stage High-Density3 Stage High-Density
Single Slot Low Density or Single Slot High Density
25, 50, 100, 200, 250, 300, 350, OR 400 Solar cell capacity
Conventional and Contiguous 125 mm, 156 mm, 125 & 156 mm
Sonora Vacuum SeriesSonora Vacuum Series
Key System Features
Typical WPH
Two plastic cassettes into a 100-slot process carrier ≧3000 WAFER PER HOUR
Four plastic cassettes into a 200-slot process carrier ≧3600 WAFER PER HOUR
Versatile system accommodates a wide range of wafer thickness and wafer sizes.
Wafers: 125 mm X 125 mm or 156 mm X 156 mm (rectangular or pseudosquare).
Easy to change platforms to accommodate different cassettes.
Options include:Safety Light CurtainMulti colored light tower with audible alarmSerial CommunicationsParallel Communications PortsNetworking capabilitiesUPS – uninterruptible power supply
Warranty = 1 Year
Facility RequirementsFacility RequirementsDimensions:
3-Stage - Four Plastic Cassettes, One 200-slot Process Carrier
66.25” (W) X 35” (D) X 98” (H)
168.2 cm (W) X 89 cm (D) X 249 cm (H)
Weight:
275 lbs, 125 kg
System Power:
USA
110Vac ±10%, 50/60Hz, 4 amps, single phase
Europe / Asia
220-240Vac ±10%, 50/60Hz, 2 amps, single phase
Compressed Air - 85 - 100 PSI, 586 - 689 Kpa
Temperature - 5º C (41º F) to 40º C (140º F)
Humidity - 10% to 90% non-condensing
Classification - Class 10 clean room≧
Automated batch wafer handling systems use the most current effective method for moving Solar Cell wafers from transport or wet process cassettes to process Quartz / Silicon Carbide carriers. This system is designed to provide high throughput yet maintaining high yields. The Sonora SVAC systems are configured to batch transfer 25, 50 or 100 wafers at a time. This system can accommodate 125 mm X 125 mm and 156 mm X 156 mm wafers with little or no tooling change.
