The Environment Activities in the Japanese Semiconductor ...

Green IT International Symposium 2008 1

The Environment Activities

in the Japanese Semiconductor Industry

Chairman of the Semiconductor Board of JEITA

Masashi Muromachi

May 2008

Tokyo, Japan

Outline of the Establishment Activities

of Green Fab in Japan(1/2)

1.Greenhouse Gas Reduction

①CO2 Emission Reduction– Improvement of the energy efficiency in factory＊Cooperation with 4 Electronic and Electrical related

Associations.

– Promoting SEMI-S23 Activity (the energy savings

standardization of the semiconductor manufacture

equipments).

②PFC Emission Reduction– Installation of abatement system into the existing equipments

＊Government supports this installation of abatement system. – Reduction of PFC consumption by making the optimum

process condition


2. Environmental Pollutant Reduction– Survey and compliance of the domestic and oversea

regulations (RoHS, REACH, Chemical Substance Law, etc.) and policy

3. Promotion of the Efficient Use of Resources– Promotion of the waste recycling in cooperation with the

dealer

・・・Sludge, Waste Plastic, Waste Solvent, Waste Acid, etc.

4. Introducing the advanced case of the concrete

activities in Japan1) Reduction of Steam Load in Oita Factory of Toshiba

2) Implementation of large-scale energy savings measures

at Sony Semiconductor Kyushu Kagoshima Plant

3) Publication and Promotion of SEMI-S23

4) Plant of HF Production from recovered Fluorine Compound


Outline of the Establishment Activities

of Green Fab in Japan(2/2)

3

1. CO2 Emission Reduction

［Voluntary Target］

35% reduction in 2010 to 1990, based on the unit of real output

＊Cooperation with 4 Electronic and Electrical related Associations

2. PFC Emission Reduction

［Voluntary Target］

10% reduction in 2010 to 1995

3. Efficient Use of Resources

［Waste Recycling Rate］

10% in 1990 → 95% at present → Aming at Zero Emission


Effect Target of the Establishment

of Green Fab in Japan

4

Reduction of Steam Load in Oita Factory of Toshiba(FY06 Agency for Natural Resources and Energy Chairman’s Award: Energy Saving Grand Prize)

CR air

supply

AHU 加湿空気

UPW

UPW dropping system

The

air

<Airwasher>

The air

Humidified air

Water supply nozzle

New system of air humidification

Oblique

Honeycomb

Mfg. tools

15℃～25℃

Boiler

Cooling

tower

<Cooling water

line>

<UPW line>

Cooling water tank Filtered watertank

10℃～20℃

24.0℃

31.0℃31.0℃

30.0℃

33.0℃

Reduction amount of CO2 326t/y

Newly installed

UPW

system

ＣＲ

Exhausted

heat

Improved UPW heating system

Heat e

xch

an

ger

Hea

ting

Co

olin

g

Existing air humidification system

Steam

Humidifier

AHU

The

air

Boiler

Steam Humidifier

SteamMfg. tools Boiler

Cooling

tower

<Cooling water

line>

<UPW line>

Cooling water tankFiltered water

tank

31.0℃

30.0℃

33.0℃

Consumption of steam

UPW

system

ＣＲ

Exhausted

heat

Existing UPW heating system

Waste heat emitted in the air

Collected waste heat

CR air

supply

Utilization of fuels for steamed jet mist

Industrial water

Reduction amount of CO2 1,545t/y

Naturally evaporated UPW humidifies the air. This system

works without fuels

Adjusting water

temp. at 26℃ by

steam heat

Adjusting water

temp. at 26℃ by

steam heat

Heating

Reduction

amount of

steam

10℃～20℃

Green IT International Symposium 20085

CASE１

5(Offer : Toshiba Corp.)

Green IT International Symposium 2008

Implementation of large-scale energy saving measures at Sony

Semiconductor Kyushu Kagoshima Plant - where 30 years passed since its operation launch -

(FY05 Agency for Natural Resources and Energy Chairman’s Award: Energy Saving Grand Prize)

O-AHU

AHU

5℃

9℃

Cooling and Heating System Air-conditioning System

1. Adoption of high-efficiency equipment (Sony-customized)

inverter turbo chiller, pump, motor

2. Dual cold water distribution systems:

5℃⇒ 5℃ + 9℃

3. Introduction of the integrated controller:

Optimize the COP of cooling and heating

system

Reduction of cold water transport power

Points of Implementation & Operation

Adapt the 45 degree elbow pipesinstead of the traditional 90degree elbow pipes.

Clean room

Inverterturbochiller

Cooling

tower

Cooling

tower

Cooling

towerCooling

tower




Introduce high-efficiency equipment and optimize the entire system

[Old System]

[New System]

Reduction of energy

24,000 t-CO2/year (17%)

Open Air

Clean roomCooling

tower

Cooling

tower

O-AHU

Turbo

chiller

5℃

Turbo

chiller

AHU

hea

t st

ora

ge

tan

k

Effect by implementation

Open Air

6

CASE２

(Offer : Sony Corp.)

• What is SEMI-S23?

「a guide of consumption of energy, utilities and

materials used by semiconductor manufacturing

equipments」

・・・Exhaust, Vacuum, Cooling Water, UPW, Heat load, N2, etc.

• 90% of energy consumption in factory →Equipments

＊Standardization of energy consumption

→ Controlling the energy of equipment

• Starting on the initiative of Japan

＊Standard made by JEITA, SEMI and other related

associations

＊Study of spec. begun by the equipment makers,

including ones in Europe and the U.S.

Publication and Promotion of SEMI-S23


CASE3

7

Rotary kiln

(200℃ or less)

ＰＰＰＰ

ＨＦ

Absorption tower

Ca

SO

4

5%

-O

leu

m

Recovered CaF2

Ca

F2 HF

HF

5％ -Oleum

Measurement tank

by-product

gypsum

Measurement tank

Fixed quantity supply machine

Metering pump

Mixture and reactive machine

FeederHF sol

Hot wind

ロータリーキルン（2mφ ｘ12m）

無水フッ酸発生設備

石膏処理設備

HF生産能力＝1,500トン／年2007年4月より稼働

CaF2＋H2SO4→2HF＋CaSO4

NEDO補助金事業で実用化開発（H17年度産業技術実用化開発補助事業）


CASE4

[ Pilot Plant of HF Production ]

Plant of HF Production from recovered Fluorine Compound

（MORITA CHEMICAL INDUSTRIES CO., LTD.）

8

15th Annual Conference 2008 ISESH Date : in June 2008

• 22nd (Evening) : Welcome reception / Registration

• 23rd to 25th : General & Technical sessions

• 26th (Morning) : Technical Tour

Place

• Hotel Royton Sapporo (Hokkaido, Japan)

Topics

• PFC Emission Reduction

• Energy Conservation

• Chemical Management

• PFOS

• Waste & Water Management & Minimization

• LCA & Green IT

• Environment & Risk Management

• Legislation

• ESH Nano-Technology

• Others



・Achievement of the energy savings target by Green Fab

＊CO2 Emission Reduction:▲35%(1990 → 2010)

・Cooperation with 4 Associations

＊PFC Emission Reduction:▲10%(1995 → 2010)

・Three contributions to energy savings,

including Green Fab

＊Improvement of energy efficiency in our factories

＊Lowering the electrical power of our products

＊Assisting energy savings of end products and

social systems

・Availability to the performance evolution of

end products and social systems.

・Growth of the semiconductor industry

for the healthy growth of our Green Society.

Today’s Message

10


END

Thank you for your attention

11(Source : WSC)

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