Terrence E. Zavecz Weir Temporal Response New TEA Systems Software Presentation from new Weir...
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Transcript of Terrence E. Zavecz Weir Temporal Response New TEA Systems Software Presentation from new Weir...
http://www.TEAsystems.com
Terrence E. Zavecz [email protected]
Weir Temporal ResponseNew TEA Systems Software
Presentation from new Weir Temporal Analysis software
http://www.TEAsystems.com - 2Yield Enhancement thru ModelingTEA Systems
Overview
Weir TR Weir Temporal Response
New Analysis Sections
Data Import Plotting Temperature value vs time at each sensor site Range controls The Range plot
Temperature range vs High/low values Phase analysis
Examination of constant vs rise/fall portions of the cycle Phase graphics
By sensor, temperature and phase. Contour Mapping
Of Temperature, rise times and Energy
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Data import and sensor response
• Time-selection reduced analysis range
• Activation temperature is lower-limit of energy calculation
• Phase Threshold is used in the Phase Analysis to set sensitivity to thermal-rise slope change.
• Mouse-over curve shows time/ temperature.
• When a sensor curve is passed, a red square is generated.
• Red-square is replicated on each sensor’s thermal curve.
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Analysis restriction
Time has been restr icted to 2,000 < time < 2405 seconds
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Interactive graphics
Red-box on curve marked by red-spot on “temp-variation vs time” wafer plot (right)
Simply hover mouse over top curve to move spot
Notice “High” central range of wafer with low upper left & lower right
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Variation from Wafer Mean Temperature
Response uniformity at each probePerfect uniformity is a horizontal line across the center
of the circle.
Time
Variation from Mean Degrees
Time 2560 sec
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Phase Analysis – Primary Graph
Press “Phase Tab” Phase graph shows:
Upper/Lower “red” temperature range at each point of process. (right ordinate )
Range in temperature at each time segment (left ordinate of graph with black squares)
Calculated Phase transitions with a yellow box at each phase time.
Statistics are excerpts from the “RiseTimesPhase” spreadsheet.
Temperature range of all sensors
Max/min range measured Phase
transition point
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Range Plot
Statistics show four thresholds which are plotted as yellow-filled squares.
Range of data across wafer @ time is plotted by blue circles
Max Temp
Min Temp
Phase changeRange
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“RiseTimesPhase” spreadsheet
Details each process phase (upper chart) Lower chart shows the range of values for the phase.
Thresholds - Acc: 0.1% Temperature: 380
AveragePhase Period Type TimeStart TimeEnd TimeDelta TempStart TempEnd TempDelta TempMean Energy (deg*sec) Ramp (deg/sec)
1 Rise 2005.00 2046.25 41.25 380.16 381.61 1.45 381.18 15700.00 0.062 Constant 2061.25 2248.75 187.50 381.45 379.71 -1.74 380.30 71300.00 -0.013 Rise 2263.75 2359.38 95.63 382.90 393.15 10.25 390.16 37100.00 0.154 Constant 2369.17 2399.17 30.00 391.89 393.72 1.83 393.22 11800.00 0.03
Range Range Range Range Range RangePhase TimeStart TimeDelta TempStart TempDelta Ramp(deg/sec)EnergyMax EnergyMin
1 0.00 25.00 13.38 0.87 0.14 19400.00 9380.002 25.00 200.00 13.58 2.28 0.04 82800.00 7520.003 210.00 115.00 13.88 14.38 0.37 74300.00 30800.004 95.00 60.00 23.16 11.49 0.35 31500.00 7760.00
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Reference variation across end of cycle
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Sensor Graphs Three libraries of graphics are
created with the Phase Analysis.
Sensor Library From “SensorResponse”
spreadsheet Details response of each
sensor for the analysis Rise Times Library
From “RiseTimes” spreadsheet
Details specifics about the range of time and temperature for each phase and phase-change.
Radial Library From “RiseTimes”
spreadsheet Details process response as
a function of the sensor’s radius on the substrate (wafer).
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Time-cumeEnergy graph Shows the thermal energy
injected into the substrate E = (time * (Temperature-To) To = threshold temperature
One curve for each sensor To should be set the the
Arrhenius threshold for the reaction.
NOTE: Any graph can be right-mouse
clicked to edit the colors and display.
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Temperature by sensor
Range of temperature experienced by each sensor
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Temperature variation from Phase mean
Variance in temperature for each sensor From the mean temperature of the phase
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Cumulative Energy
Integrated energy at each sensor and the phase in which it occurred
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Temperature Phase Error over time
Phase error over time for each sensor
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Rise-time slope over time
Slope (deg/sec) as a funciton of time for each sensor
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Slope vs Temperature
Rise/Fall time slope vs Temperature
Final temperature for each probe.
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Locations of designated sensors on substrate
Last tab in library
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Terrence E. Zavecz [email protected]
Rise/Fall -Time Graphs
Process Rise/Fall statistics
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Cumulative energy
Cumulative energy for each phase and sensor Threshold was set to 380 deg.
So temperatures below 380 deg yield no additional energy. Note TC16 and TC2 who contribute very little.
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Averge temperature for each phase
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temperature Rise/fall for each phase
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Time spent at each phase
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Temperature at the start of the phase
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Temperature at the end of the phase
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Exact time of each phase transition start
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Exact time of each phase transition end
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Maximum slope experienced by the probe
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Slope mean and Minimum for the probe
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Cumulative energy by Radial Position
The Phase 3 fitted curve was added by right clicking on the graph and using the “Trend” tab
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Various other graphs
2nd order curves fitted to each phase
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Uniformity Plots
Selected 4 times for display: 18 00 sec (3 45 de g) 22 95 sec (3 79 de g) 24 00 sec (4 00 de g) 25 60 sec (4 00 de g)
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Full screen setup
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Individual displays
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Plots with gridlines for transitions
displays
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Another thermal matrix
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Animation and control of thermal swings
1. Select the time-slices for plotting.
2. Select the method of display.3. Press “Create maps” to
display contour plots.4. After display, then the maps
can be viewed individually.5. Select either “One plot per
screen” to view video of thermal display.
6. Animation control manages video presentation.
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Terrence E. Zavecz [email protected]
Weir Temporal Response for Full Analysis Sequence
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Thermal response ranges
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Range across the wafer
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Average times for each phase
Phase Period Type TimeStart TimeEnd TimeDelta TempStart TempEnd TempDelta Energy (deg*sec) Ramp (deg/sec)1 Constant 10.0 1063.1 1053.1 319.8 279.5 -40.3 2.740E+05 -0.04032 Constant 1078.1 1223.4 145.3 280.0 282.0 2.0 4.090E+04 0.01563 Rise 1238.4 1396.9 158.4 285.3 340.3 55.0 5.120E+04 0.35244 Constant 1411.9 1905.0 493.1 340.7 341.7 1.1 1.680E+05 0.00275 Rise 1920.0 2053.4 133.4 344.5 381.6 37.1 4.960E+04 0.28606 Constant 2068.4 2275.0 206.6 381.3 379.5 -1.8 7.850E+04 -0.00957 Rise 2290.0 2380.3 90.3 383.3 395.1 11.9 3.540E+04 0.15758 Constant 2395.3 2560.0 164.7 395.1 394.5 -0.7 6.500E+04 -0.0036
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Statistical ranges of each phase
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Matrix Display
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Rise Times
Rise times plotted at 8 times over critical final rise
Notice initial rise on left side of wafer at 2295 seconds with a slope range from 0.217 to 0.256 dec/sec
rise
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Plotting Energy, Rise Times and Cumulative Energy
Select data type with drop-down control
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Threshold Analysis data
Data from the “RiseTimesPhase” worksheet for 16 sensors Transition points are marked on the thermal curve as black squares with a yellow center (previous slide)
Temperature variation