TEM-Sci Mat

7212019 TEM-Sci Mat

httpslidepdfcomreaderfulltem-sci-mat 166

Transmission Electron Microscopy -TEM-

Scanning Electron Microscopy ndash SEM -

The first electron microscope was built 1932 by the German physicist Ernst Ruska who

was awarded the Nobel Prize in 1986 for its inventionHe knew that electrons possess a wave aspect so he believed he could treat them as light

waves Ruska was aware that magnetic fields affect electron trajectories possibly focusing

them as optical lenses do to light After confirming these principles he set out to design the

electron microscope which he knew would be much more powerful than an ordinaryoptical microscope since electron waves were shorter than ordinary light waves Electrons

would therefore allow for greater magnification and to visualize much smaller structures

The first practical electron microscope was built by in 1938 and had 10 nm resolution

Although modern electron microscopes can magnify an object 2 million times they are still

based upon Ruskas prototype

The electron microscope is now an integral part of many laboratories Researchers use it to

examine biological materials (such as microorganisms and cells) a variety of large

molecules medical biopsy samples metals and crystalline structures and the

characteristics of surfaces

7212019 TEM-Sci Mat


Aim of the lecture

Electron Microscopy is a very large and specialistfield

Just a few information on

Electron Microscopy

bullWhat is it possible to dobullHow do instruments work

7212019 TEM-Sci Mat


HISTORY OF THE TRANSMISSION ELECTRON MICROSCOPE

(TEM)

bull1897 J J Thompson Discovers the electron

bull1924 Louis de Broglie identifies the wavelength for electrons as λ=hmv

History of TEM

bull1926 H Busch Magnetic or electric fields act as lenses for electronsbull1929 E Ruska PhD thesis on magnetic lenses

bull1931 Knoll amp Ruska 1st electron microscope (EM) built

bull1931 Davisson amp Calbrick Properties of electrostatic lenses

bull1934 Driest amp Muller Surpass resolution of the Light Microscope

bull1938 von Borries amp Ruska First practical EM (Siemens) - 10 nm resolution

bull1940 RCA Commercial EM with 24 nm resolution

bull 2000 new developments cryomicroscopes primary energies up to 1 MeV

7212019 TEM-Sci Mat


Scheme of TEM

000251

Resolution

(nm)

Wavelength

(nm)

Electrons at 200kV

~02

7212019 TEM-Sci Mat


TEM lens system

7212019 TEM-Sci Mat


Application of magneticLenses TransmissionElectron Microscope(Ruska and Knoll 1931)1945 - 1nm resolution

7212019 TEM-Sci Mat


vm

h

0

=λ

2

02

1

vmeV =2

1

2

0

02

12

+

=

cm

eV eV m

h

λ

minus=

2

2

0 1c

vmm

Basis of the transmission electron microscopy

Attention

relativistic

electrons

Accelerating voltage

(kV)

Nonrelativistic λλλλ

(nm)

Relativistic λλλλ

(nm)

Velocity

(times108 ms)

100 000386 000370 1644

200 000273 000251 2086

400 000193 000164 2484

1000 000122 000087 2823

7212019 TEM-Sci Mat


β

λ 610=thr

000251~550

Electrons at 200kVGreen light

Wavelength (nm)

Resolution

β= semi-collection angle of magnifying lens

λ= electron wavelength

4

1

4

3

670 sC r λ = Best attained resolution ~007 nm

Nature (2006)

e reso u on o e ransm ss on e ec ron

microscope is strongly reduced by lens aberration

(mainly spherical aberration C s )

7212019 TEM-Sci Mat


Emitters

tun sten Field emitters single oriented

hexaboride

etched to a fine tip

7212019 TEM-Sci Mat


Thermoionic emitters

Heating current

Emitter

Wehnelt

A virtual probe of size d can beassumed to be present at the

first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π

Brightnessdensity per unit solid angle

E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat


Schottky and Field emission guns

+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro

Emission occurs by tunnel effect

E=electric field

Φ=work function

micro=Fermi level

bullHigh brilliancebullLittle cross over bullLittle integrated current

7212019 TEM-Sci Mat


CoherenceCoherence a prerequisite for interference is a superposition of wavesystems whose phase difference remains constant in time Twobeams are coherent if when combined they produce an interference

pattern

Two beams of light from self luminous sources are incoherentIn practice an emitting source has finite extent and each point of the

system of Fresnel fringes at the edge The superposition of these fringesystems is fairly good for the first maxima and minima but farther awayfrom the edge shadow the overlap of the fringe patterns becomessufficiently random to make the fringes disappear

The smaller is the source the larger is coherence

Using a beam with more than one single wave vector k (polychromatic beam)

reduces the coherence

7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η

lens with focal length f but with a rotation θ

V acceleration voltage of the electronsη charge to mass ratio of the electron

7212019 TEM-Sci Mat


Magnetic lenses bell shaped field(((( ))))2

0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart

partpartpartpartminusminusminusminus====2

Newtonrsquos law

3)

2ϕ ampampamp mr F r m r +=

( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp

2ϕ ϕ ampamp mr r eB z +minus=

= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22

2ϕ ampfrom 2) with C=0 for per trajectories

z Bme

2====ϕ ϕϕ ϕ amp

Br is small for paraxial trajectories eq 3) gives vz=constwhile the coordinate r oscillates with frequency ω=radic(1+k2)

r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2

)1( ++++minusminusminusminus====

from 1)

7212019 TEM-Sci Mat


Aberrations

Spherical aberration3α δ s s C =

Defocus

α δ f f =

Scherzer in a lens system with

Chromatic aberration

∆+

∆=

I

I

E

E C C C 2δ

radial symmetry the spherical

aberration can never be completelycorrected

7212019 TEM-Sci Mat


Astigmatism

different gradients of the fielddifferent focalization in the two directions

It can be corrected

Other aberrations exist likethreefold astigmatismComabut can be corrected or are negligible

7212019 TEM-Sci Mat


Deflection coils

At least two series of coilsare necessary to decouplethe shift of the beam from

its tilt

Position remains in p

while different tilts arepossible

Position is shiftedwithout changing theincidence angles

7212019 TEM-Sci Mat


Revelators

Scintillator emits photons when hit by high-energy electrons The emitted photons are

collected by a lightguide and transported to aphotomultiplier for detection

hos hor screen the electron excites hos hors that

emit the characteristic green light

CCD conversion of charge into tension

Initially a small capacity is charged with respect a referencelevel The load is eventually discharged Each load

corresponds to a pixel The discharge current is proportionalto the number of electrons contained in the package

7212019 TEM-Sci Mat


Trajectories of 10KeV electrons in matter

GaAs bulk

httpwwwgelusherbrookecacasinodownload2html

Energy released in the matrix

7212019 TEM-Sci Mat


Trajectories of 100KeV electron in a thinspecimen

GaAs thin film

7212019 TEM-Sci Mat


Interaction electronic beam ndash sample electron diffraction

backscattering

scattering

Electrons can be focused by electromagnetic lenses

The diffracted beams can be recombined to form an image

7212019 TEM-Sci Mat


Electron diffraction - 1

Diffraction occurs when the Ewaldrsquos sphere cuts a point of the reciprocal lattice

λ θ =sin2d Braggrsquos Law

7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =

Recorded spots correspond mainly to one plane in reciprocal space

7212019 TEM-Sci Mat


Scattering

Fast electrons are scattered by the protons in

the nuclei as well as by the electrons of the

atoms

X-rays are scattered only by the electrons of

the atoms

Diffracted intensity is concentrated in the forward direction

Coherence is lost with growing scattering angle

7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm

Comparison between high energy electron diffraction

and X-ray diffraction

X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens

The magneticpre-field of the

objective lens can

Objective is the most important lens in a TEM it has a very high field (up to 2 T)

The Specimen is completely immersed in its field so that pre-field and post field canbe distinguished

The post field isused to create

image or diffraction

obtain a parallelillumination on thespecimen

beams

7212019 TEM-Sci Mat


Diffraction mode

Different directions correspond todifferent points in the back focal

plane

f

7212019 TEM-Sci Mat


Imaging mode

Different point correspond to differentpoints

All diffraction from the same point inthe sample converge to the same

image in the image plane

7212019 TEM-Sci Mat


Contrast enhancement by single diffraction mode

f

Bright field Dark field

Objectiveaperture

7212019 TEM-Sci Mat


Darkbright field images

Dark field Bright field

05 05

Using 200 Using 022

7212019 TEM-Sci Mat


Diffraction contrast

Suppose only two beams are on

7212019 TEM-Sci Mat


Imaging

Lattice Fringe Image High Resolution Image

Phase contrastAmplitude contrast

Bright Field Image Dark Field Image

Perfect imaging would require the interference of all difffraction

channels Contrast may however be more important

7212019 TEM-Sci Mat


Amplitude contrast - 1

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Phase contrast in electron microscopy

Fringes indicate two Dim periodicity

7212019 TEM-Sci Mat



t φ What happens if we consider all beamsimpinging on the same point Interference

~

t Φ

~

Φ

FFT

2

2

sumsumsumsumΨΨΨΨ==== BEAMS

g i φ φφ φ

g a vector of the reciprocal lattice

g ΨΨΨΨ s the component beam scattered by a vector g

But notice that g ΨΨΨΨ is the Fourier component of the exit wavefunction1

2====ΨΨΨΨsumsumsumsum

BEAMS

g

Indeed each electron has a certain probability to go in the transmitted or diffractedbeam For an amorphous material all Fourier components are possible but in a crystalonly beams with the lattice periodicity are allowed these are the diffracted beams

NOTE the diffraction pattern is just the Fourier transform of the exit wave

7212019 TEM-Sci Mat


Effect of the sample potential V

Phase shift

Amplitude variation

θ θθ θ φ φφ φ i

t e====

t e

micro micromicro micro minusminusminusminus====

V ie V i

t σ φ σ +asympasymp 1

Example of exit wave function (simulation)

Real part Modulus phase

O ti l Ph C t t i

7212019 TEM-Sci Mat


(useful for biological specimen which absorb little

radiation but have different diffraction index withrespect to surrounding medium thus inducing a

phase shift)

Optical Phase Contrast microscope

Image for regular brightfield

objectives Notice the air bubbles

at three locations some cells arevisible at the left side

Same image with phase contrast objectives

White dots inside each cell are the nuclei


7212019 TEM-Sci Mat


To build an ideal phase microscope we must dephase (by π2) alldiffracted beams while leaving the transmitted unchanged

Phase adjustment device


The device is ~150 983221 wide and 30 983221 thick Theunscattered electron beam passes through a drift

tube A and is phase-shifted by the electrostatic

potential on tubesupport B Scattered electrons

passing through space D are protected from thevoltage by grounded tube C

An alternative use of the electron microscope is to concentrate the electron

7212019 TEM-Sci Mat


beam onto a small area and scan it over the sample Initially it was developedto gain local chemical information Actually structural information can be

gained too since the beam spot can be as small as 13 Aring

STEM

Diffraction mode

While scanning the beam over the differentpart of the sample we integrate overdifferent diffraction patterns If thetransmitted beam is included the method is

called STEM-BF otherwise STEM-DFThe dark field image corresponds

to less coherent electrons and

allows therefore for a more

accurate reconstruction

7212019 TEM-Sci Mat


STEM probeIt depends on

aperture Cs defocus

2

2)()(2max

)0( int minusminus=∆minus

K

r r k ik i

probe k d eer r P probe

r

r

rrrr rrr χ

=

It is the sum of the waves at different angles each with its own phase factor

If there is no aberration the larger is the convergence the smaller is the probe

The presence of aberrations limits the maximum value of the convergence angle up to 14 mrad

The different wavevectors contributing to the incoming wave

blur up the diffraction pattern causing superposition of the spots

Interference effects are unwanted and smallest at the largest angles

7212019 TEM-Sci Mat


7212019 TEM-Sci Mat


Chemical analysis energy dispersive spectrometry

SEM TEM

The electron beam can be focused to obtain a spot less than 500 nm

7212019 TEM-Sci Mat


EELSUsed to collect spectra and imagesUsable in both

scanning and temmode

Each edge is characteristic for each material

The fine structures of the edge reveal the characteristics of the localenvironment of the species If the relevant inelastic event corresponds

to a localized interatomic transition the information is local too

7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat


TomographyBy observing atdifferent angle itit is possible toreconstruct the

3D image

7212019 TEM-Sci Mat


Drawback of TEM necessity of sample preparation

Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS

bull An additional class of these instruments is the electron cryomicroscope

which includes a specimen stage capable of maintaining the specimen atliquid nitrogen or liquid helium temperatures This allows imaging specimens prepared in vitreous ice the preferred preparation technique for imagingindividual molecules or macromolecular assemblies

bull

determined by analysing its X-ray spectrum or the energy-loss spectrum ofthe transmitted electrons

bull Modern research TEMs may include aberration correctors to reduce theamount of distortion in the image allowing information on features on thescale of 01 nm to be obtained (resolutions down to 008 nm have beendemonstrated so far) Monochromators may also be used which reduce theenergy spread of the incident electron beam to less than 015 eV

Other Electron Microscopes

7212019 TEM-Sci Mat


TEM transmissionelectron microscope

SEM scanning electronmicroscope


transmission electronmicroscope

7212019 TEM-Sci Mat


SEM

The signal arises from secondary electronsejected by the sample and captured by the fieldof the detector

s equ va en o e rs par o e u

there is are important differencesa) The sample is outside the objective lensb) The signal recorded corresponds to reflected

or to secondary electrons

c) No necessity for difficult sample preparationd) Max resolution 2 nm

The distance of the sample iscalled working distance WD

WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat


Range vs accelerating voltage

+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g

( ) 7510520 beam E R ρ = Range of electrons in a material

7212019 TEM-Sci Mat



Higher voltage -gt smaller probeBut larger generation pear

Higher voltage -gt more backscattering

Low energy-gt surface effects

Low energy (for bulk) -gt lower charging

High energy (for thin sample) -gt less charging

Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures

Larger aperture means in the case of SEM worse resolution(larger probe) but higher current

St th f C d L

7212019 TEM-Sci Mat


Strength of Condenser Lens

The effect is similar to that of changing the aperture

Effect of the working distance

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat


La divergenza del fascio provoca unallargamento del suo diametro sopra esotto il punto di fuoco ottimale In prima

approssimazione a una distanza D2 dalpunto di fuoco il diametro del fascioaumenta di ∆r asympαD2

Ersquo possibile intervenire sulla profonditagrave dicampo aumentando la distanza di lavoro ediminuendo il diametro dellrsquoapertura finale

7212019 TEM-Sci Mat


Profonditagrave di campo

7212019 TEM-Sci Mat


Minore ersquo lrsquoapertura della lente obiettivo e maggiore ersquo ladistanza di lavoro WD maggiore ersquo la profonditagrave di fuoco

SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons

A large number of electrons of lowenergy lt30-50eV produced by the

passage of the primary beamelectrons

narrow area of radius λSE (fewnm) = the SE creation meanfree path

The Everhart-Thornley detectorsare suited to detect these electronby means of a gate with a positive

bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η

Backscattering coefficient=fraction of the incidentbeam making backscattering

Characterised by a quite large energy

7212019 TEM-Sci Mat


Imaging with BS and SE

Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector

b reci rocit it is almostequivalent to light most

of time intuitiveinterpretation

7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat


BSDE Backscattering electron diffraction

7212019 TEM-Sci Mat


Aim of the lecture

Electron Microscopy is a very large and specialistfield

Just a few information on

Electron Microscopy

bullWhat is it possible to dobullHow do instruments work

7212019 TEM-Sci Mat



(TEM)



History of TEM








7212019 TEM-Sci Mat


Scheme of TEM

000251

Resolution

(nm)

Wavelength

(nm)

Electrons at 200kV

~02

7212019 TEM-Sci Mat


TEM lens system

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


vm

h

0

=λ

2

02

1

vmeV =2

1

2

0

02

12

+

=

cm

eV eV m

h

λ

minus=

2

2

0 1c

vmm


Attention

relativistic

electrons


(kV)


(nm)


(nm)

Velocity

(times108 ms)

100 000386 000370 1644

200 000273 000251 2086

400 000193 000164 2484

1000 000122 000087 2823

7212019 TEM-Sci Mat


β

λ 610=thr

000251~550


Wavelength (nm)

Resolution



4

1

4

3


Nature (2006)




7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



(TEM)



History of TEM








7212019 TEM-Sci Mat


Scheme of TEM

000251

Resolution

(nm)

Wavelength

(nm)

Electrons at 200kV

~02

7212019 TEM-Sci Mat


TEM lens system

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


vm

h

0

=λ

2

02

1

vmeV =2

1

2

0

02

12

+

=

cm

eV eV m

h

λ

minus=

2

2

0 1c

vmm


Attention

relativistic

electrons


(kV)


(nm)


(nm)

Velocity

(times108 ms)

100 000386 000370 1644

200 000273 000251 2086

400 000193 000164 2484

1000 000122 000087 2823

7212019 TEM-Sci Mat


β

λ 610=thr

000251~550


Wavelength (nm)

Resolution



4

1

4

3


Nature (2006)




7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Scheme of TEM

000251

Resolution

(nm)

Wavelength

(nm)

Electrons at 200kV

~02

7212019 TEM-Sci Mat


TEM lens system

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


vm

h

0

=λ

2

02

1

vmeV =2

1

2

0

02

12

+

=

cm

eV eV m

h

λ

minus=

2

2

0 1c

vmm


Attention

relativistic

electrons


(kV)


(nm)


(nm)

Velocity

(times108 ms)

100 000386 000370 1644

200 000273 000251 2086

400 000193 000164 2484

1000 000122 000087 2823

7212019 TEM-Sci Mat


β

λ 610=thr

000251~550


Wavelength (nm)

Resolution



4

1

4

3


Nature (2006)




7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


TEM lens system

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


vm

h

0

=λ

2

02

1

vmeV =2

1

2

0

02

12

+

=

cm

eV eV m

h

λ

minus=

2

2

0 1c

vmm


Attention

relativistic

electrons


(kV)


(nm)


(nm)

Velocity

(times108 ms)

100 000386 000370 1644

200 000273 000251 2086

400 000193 000164 2484

1000 000122 000087 2823

7212019 TEM-Sci Mat


β

λ 610=thr

000251~550


Wavelength (nm)

Resolution



4

1

4

3


Nature (2006)




7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


vm

h

0

=λ

2

02

1

vmeV =2

1

2

0

02

12

+

=

cm

eV eV m

h

λ

minus=

2

2

0 1c

vmm


Attention

relativistic

electrons


(kV)


(nm)


(nm)

Velocity

(times108 ms)

100 000386 000370 1644

200 000273 000251 2086

400 000193 000164 2484

1000 000122 000087 2823

7212019 TEM-Sci Mat


β

λ 610=thr

000251~550


Wavelength (nm)

Resolution



4

1

4

3


Nature (2006)




7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


vm

h

0

=λ

2

02

1

vmeV =2

1

2

0

02

12

+

=

cm

eV eV m

h

λ

minus=

2

2

0 1c

vmm


Attention

relativistic

electrons


(kV)


(nm)


(nm)

Velocity

(times108 ms)

100 000386 000370 1644

200 000273 000251 2086

400 000193 000164 2484

1000 000122 000087 2823

7212019 TEM-Sci Mat


β

λ 610=thr

000251~550


Wavelength (nm)

Resolution



4

1

4

3


Nature (2006)




7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


β

λ 610=thr

000251~550


Wavelength (nm)

Resolution



4

1

4

3


Nature (2006)




7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Emitters


hexaboride


7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



Heating current

Emitter

Wehnelt


first cross-over

kT c e AT d

i J

Φminus

== 2

2

0

4

π


E

x

Anode

02 eV

Ω= π β 2

0

4

d

ic

4A Area Emitting

2

0d π

=

7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



+

++

Φminus

Φ+Φ=

E e

E J

514x10862

6x1026micro

micro


E=electric field

Φ=work function

micro=Fermi level


7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



pattern






7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Magnetic lenses

( )

int

int

infin+

infinminus

infin+

infinminus

=

=

dx x BV

dx x BV f

)(8

8

1 2

η θ

η



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



0

1 a z

B B z

++++====

z

Br B

z r

partpartpartpart


Newtonrsquos law

3)


( ) ϕ ϕ rF mr

dt

d =amp

2

z F z m =ampamp


= z Br

e

dt

d 2

2ϕ ampr eB r =

1)

2)

C Br e

mr z += 22


z Bme

2====ϕ ϕϕ ϕ amp


r Bm

e B

m

emr B

m

er eBr m z z z z

222

422minus=

+minus=ampamp

ar y =a z x =

0

2202

8 U m

aeBk ==== y

x

k

dx

yd 22

2

2

2


from 1)

7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Aberrations


Defocus

α δ f f =



∆+

∆=

I

I

E

E C C C 2δ



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Astigmatism


It can be corrected


7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Deflection coils


its tilt




7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Revelators








7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



GaAs bulk



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



GaAs thin film

7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



backscattering

scattering



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



λ 1

1 d

L

R=

Ld

λ =


7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Scattering



atoms


the atoms



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Electrons (200 kV)

λ = 251 pm



X-ray (Cu K α)

λ = 154 pm

r E

= 325983223109 m

r E

= 983223 m

7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Objective lens


objective lens can






beams

7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Diffraction mode


plane

f

7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Imaging mode




7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



f


Objectiveaperture

7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




05 05

Using 200 Using 022

7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Imaging






7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




~

t Φ

~

Φ

FFT

2

2


g i φ φφ φ





BEAMS

g



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



Phase shift

Amplitude variation


t e====

t e


V ie V i




O ti l Ph C t t i

7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




phase shift)








7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat










7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat




STEM

Diffraction mode






7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



aperture Cs defocus

2

2)()(2max


K

r r k ik i


r

r

rrrr rrr χ

=







7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SEM TEM


7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat







7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


EELS analysis

7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



3D image

7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



Ion milling

Milling

Hand milling

Powders

7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


TEM DEVELOPMENTS



bull




7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat






7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


SEM







WD

SEM

7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


SEM

7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



+

minus+=

3269541221660

1)(

R

z

R

z

R

z

R z g


7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat








Effect of apertures

7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Effect of apertures


St th f C d L

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Depth of fieldD

D

WD

WD

7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat





7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



SECONDARY l t

7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


SECONDARY electrons





bias

BACKSCATTERING

7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


BACKSCATTERING

Nt E E

E E

E

Z e2

0

0

22

0

24

216

+

+=

πε η



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



Sh d ff t

7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


Shadow effect

detector



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat


channeling BSE

7212019 TEM-Sci Mat



7212019 TEM-Sci Mat



TEM-Sci Mat

Documents

Transcript of TEM-Sci Mat