System Specifications - SVES Inc.svesinc.com/images/mainimages/SpecSheetsPDF/TEGAL-6550...MRAM...

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System Specifications TEGAL 6550 Etcher System

894-B Faulstich San Jose, CA 95112 408.956.9268

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TEGAL 6550 Etcher System

· Manufacured Date: 2003

· Model Number 6550

· Serial Number: 104660

Category: ETCHER

Manufacturer: TEGAL

Model: 6550

TEGAL 6550 Etcher System

Configuration: RIE system, 8", this has only been used in a demo lab at the OEM Configured to support MRAM development

Platform: Rinse / strip, through-the-wall, signal tower, CE Marked PDM: Standard AC Supply: 400V, 3 Phase, 50 Hz, 5 Wire (Can be easily configured for USA operation)

System includes: (Qty 2) Patented Spectra Plasma Process Modules Standard Ceramic Electrostatic Clamp (200mm) High Temp. Electrostatic Clamp (200mm) (Qty 2) Integrated Diode Array Optical Analyzers (Qty 2) Recirculating Temperature Control Units Vacuum Cassette Elevator Loadlock Core Vacuum Transport Module w/ Robot Wafer Aligner Module ICP Strip Process Module Spin-Rinse/Dry Process Module Atmospheric Transport Module w/ Robot Remote RF Generator Cabinet Remote Power Distribution Module Integrated Human Interface and Control System Remote LCD Interface Module Cleanroom Signal Tower (3 Color Standard)

Transport Shape: Round Standard: SEMI Size: 8"

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System Specifications - SVES Inc.svesinc.com/images/mainimages/SpecSheetsPDF/TEGAL-6550...MRAM...

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