Supply and installation of manually operable Sputtering ...
Transcript of Supply and installation of manually operable Sputtering ...
भारत सरकार/ GOVERNMENT OF INDIA
अंतररक्ष विभाग/ DEPARTMENT OF SPACE
भारतीय अंतररक्ष विज्ञान एिं प्रौद्योवगकी संस्थान/INDIAN INSTITUTE OF SPACE SCIENCE & TECHNOLOGY
क्रय एि ंभंडार विभाग / PURCHASE & STORES DEPARTMENT
िवियमिा पी ..ओ , वतरुिनंतपुरम 695 547/ VALIAMALA P.O, THIRUVANANTHAPURAM 695 547,
केरि, भारत/ KERALA, INDIA Ph No.:0471-2568451/615 Tele Fax:0471-2568406/ E-mail : [email protected]
वनविदा आमंत्रण / INVITATION TO TENDER
Date : 06.03.2020 Tender Due on : 23.04.2020 at 14.00 Hrs Tender opening on: 24.04.2020 at 10.30 Hrs
Dear Sirs,
Sealed tenders are invited from accredited manufacturers / suppliers / agents for the supply,
installation & demonstration of the following equipment:
Sl. No.
Tender No.
Item Description Qty/ Nos.
Cost of Tender
(Rs.) 1.
2019007662 SPUTTERING UNIT
Supply and installation of manually operable Sputtering Unit
with following specification :
VACUUM CHAMBER
Arrangement for Mounting Planar Magnetron
Sputtering Cathodes in a ‘SPUTTER UP/DOWN’
configuration
All SS304 or better construction with
Complete DC/RF compatible structure
Electro-polished from inside
Glass window for plasma viewing 1no.(Approx.
150mm Dia suitable to view fully inside the chamber).
Helium leak tested for leak rates better than 1x10-
9Torr lit/sec.
Provision of following ports:
- Gas Inlet Port (1no).
- Air Inlet Port (1no).
- Ports for Rough and High Vacuum Pumping
(1no).
- Port for Vacuum Gauges (2nos).
- Central port for Ion source (1no).
- Suitable port for fixing Magnetron and future
further addition number of dummy port also
required (1 no)
All Stainless Steel Inner Removable shields 1set
01
No.
500+GST @12% (560/-)
VACUUM CHARACTERISTICS
Ultimate Vacuum [In Clean and Dry System
in120min]:Atmosphere to 5x10-7
mbar or better
Pump DownTime:30minutes for Atm.to<5x10-5
mbar
during routine Sputtering
Process pressure [During Sputtering]:1x10-3
mbar
[typical] VACUUM PUMPING SYSTEM
Rotary Pump Oil free dry pump
Turbomolecular Pump
M/s. Pfeiffer
Or Edward or Equivalent
make Turbo Molecular
pump having compatible
pumping speed. To
achieve vacuum better
than 3 ×10 -6
mbar within
60 minutes of chamber
pumpdown
VACUUM LINES & VALVES
RoughingValve
ElectropneumaticallyOpe
rated
Micro-
switchforOPEN/CLOSEi
ndicationandFeedback
RoughingValveinterlocke
dwithChamberPressure
Backing Valve
Electro-pneumatically
Operated
Micro-switch for
OPEN/CLOSE indication
and Feedback
High Vacuum Valve
SS Gate type
Valve(which can be
suitable for Throtteling
while sputtering process)
Electro-pneumatically
Operated Micro switch
for OPEN/CLOSE
indication and Feedback
Interlocked with chamber
Vent Valve
Chamber Vent Valve
Straight Through/Right
Angle Valve
Electro-pneumatically
Operated
Micro-switch for open
indication and Feedback
Bronze Filter at Inlet to
avoid Dust in rush
VACUUM MEASURING GAUGES (PFEIFFER or
Equivalent)
Must be corrosion resistant, with high accuracy over the specified
range
Digital High Pressure Pirani gauge
Cold Cathode Gauge
Gauge Controller with digital display with set point control
VACUUM PLUMBINGLINES
All SS Hoses and ISO Standard Fitting. Electrically inter-
lockable valves to avoid accidental opening by operators.
GASFLOW MANIFOLD
a) Mass Flow Controllers(Make: ALICAT/ BRONKHORST/
AALBORG or EQUIVALENT)
Argon– 200sccm [max] (1no.)
Oxygen–100 sccm [max] (1no.)
b) Control Electronics with set point control and digital
display of Flow rate in sccm
c) Gas Inlet Valve (Isolation) -1no.
Electro pneumatically Operated
Micro-switch for OPEN indication and interlock
d) Gas Mixing Chamber and all SS Tubing with Swagelock
compatible fitting
e)Additional 2 or 3 Feed through required for other gases
POWER SUPPLY
RF power supply
RF Generator with
AutoMatching Network
RF Power:300Watts
(BARTHEL, Germany or
Seren, USA or
equivalent) Power supply
to Magnetron cables
should be original from
power supply
manufactures.
Pulsed DC power supply
Power: 1.5 kW or higher
0-500mA or better
Direct Digital indication
of Cathode Voltage and
Plasma
Operation in Pulsed DC
Mode
Pulse Frequency:1-
30KHz or better
,DutyCycle:20%-90%or
better
Active Arc Suppression
Circuitry.
Power supply to
Magnetron cables should
be original from power
supply manufactures
MAGNETRON CATHODE ASSEMBLY
3"Magnetron cathodes assembly in Sputter Up/Down
configuration (2nos.)
Confocalmountinggeometry(placement)toconcentricallyfaces
ubstrateholder
RF/DC/Pulsed DC compatible
Integrated gas inlet assembly to provide uniform erosion
High Target utilization
All Stainless-Steel Integrated Shutter Assembly [Electro-
pneumatic/motor based]
Micro-switch arrangement for Target identification for Power
Supply
Water Flow Switch Interlock for each Magnetron.
TARGET, SUBSTRATE, SHUTTER & WORK HOLDER
Source target (To be quoted as
optional item)
Au, Cr, Pt, Pd, Ti, Ni,
ZnO, WO3, TiO2,In2O3
Sputter system should be
able sputter the
aforementioned materials
Source Shutter
Electrically
pneumatically source
shutter with rotary shaft
seal to cover the
deposition source
Co-sputtering required (1
RF and 1 DC at the same
time)
Rotary Work Holder
Should accommodate
substrate up to 50mm or
more
Provision to hold
multiple numbers of
smaller substrates of
irregular shapes.
Type of rotation
Rotary drive mechanism
for the substrate holder
with variable speed of
approximately 0-20 rpm
Substrate heating system
High Vacuum
Compatible Heater
Thyristorized Heater
Power Controller
PID Controller with
Digital Display of
substrate temperature
from 25-600C[1C] or
higher
FILM THICKNESS MONITOR
Requirements
1 No of Thickness
monitor (in-situ) with
water cooled front load
sensor, oscillator and
cables
CONTROL ELECTRONICS
Complete based Automation with the following Facilities:
System Mimic with Status Indication of Each
Subsystem
Recipe programming, Storage and Recall Facility
Operation in the following Modes:
AUTO Mode with Recipe Programming
COMMISSIONING MODE [Manual Mode with
safety Interlocks]
HOUSING CABINET
Requirements
Suitable Chamber
Support Frame
All interlocks for safety
operation
overload
protection
interlock
failure
Preventer.
FABRICATION PROCEDURE AND QUALITY CONTROL
MEASURES
Requirements
All the SS
components and sub-
assemblies should be
electro polished
All the components,
sub-assemblies and
final unit are leak
tested using MSLD to
an individual leak rate
of 1 x 10-9
mbar. ltrs /
sec. approximately
Necessary arrangements
for Glow discharge
cleaning of
substratebefore thermal
evaporation. It should
have Power Supply
with Arc Suppression
Facility and vacuum
interlockwith Digital
panel meter
WATER CHILLER
Requirements
Water chiller unit of
capacity of approx. 0.5
TR (Reputed make)
AIR COMPRESSOR
Requirements
Air compressor
(Noiseless) of suitable
storage tank with
pressure regulator and
fittings.
SAFETY AND INTERLOCKS
Requirements
Necessary safety devices
and interlocks should be
provided for the entire
unit for operator’s safety.
OTHER REQUIREMENTS
Warranty
Minimum three (03)
years comprehensive
warranty of the
Instrument from date of
satisfactory installation
and commissioning. In
case any part or whole of
the instrument is found
defective during the
warranty period or more,
then the same must be
replaced/ repaired free of
cost. Necessary
certificate in this regard
should be furnished by
the selected
firm/company/vendor. In
case of malfunction of the
equipment, the supplier
should provide onsite
services throughout the
warranty period or more.
Training
Training should be
provided to the User on
operation, maintenance
and safe handling of the
machine along with
trouble shooting features
during installation
Installation
Installation and
demonstration of the
equipment should be
done free of cost by the
vendor within 3 weeks
after receipt of the item at
IIST.
Performance
Certificate
Vendor has to submit
performance letter or
Purchase Order proof
from the client for having
supplied atleast 2 such 3”
Magnetron
Optional Item
1. 3 years AMC
after warranty
2. Switching
between Manual
to Automatic
requirements
3. Needle valve in
case of manual
control of
Argon/other
gases as an
option
4. Crystal for
thickness
monitors
5. Vendor has to
quote respective
consumables for
smooth
performance of
the evaporation.
Commercial terms and Conditions Tender No. 201900766201 dated 06.03.2020
1. SPECIAL INSTRUCTIONS TO TENDERERS
1.1 The bidder is required to submit quotation for the entire scope in a sealed cover super scribing the Tender
No. 201900766201 Due on 23.04.2020 and submit immediately but not later than the due date mentioned against
each tender. If the tender is received after the due date and time, the same shall be summarily rejected.
1.2 The cost of tender Rs. 560/- shall be submitted along with Technical & Commercial bid by Demand Draft
drawn in favour of the Sr. Accounts Officer, IIST and payable at State Bank of India, Valiamala
Trivandrum-695 547. In case the Demand Draft is not enclosed with the quotation, the bid shall be
summarily rejected.
1.3 Payment: Our normal payment term shall be E-Transfer against Sight Draft or 80% Letter of Credit against
dispatch documents and balance 20% within 30 days after receipt, installation and acceptance of the item for
imports and within 30 days after supply/installation and acceptance for indigenous respectively.
1.4 The installation, commissioning & demonstration of equipment to be done at our campus, Valiamala,
Thiruvananthapuram-695 547. All pre-requisites such as foundation drawing, grouting and any
consumables needed for carrying out the installation, if applicable, shall be separately mentioned in the
technical bid.
1.5 Delivery terms shall be Ex-works/F.O.B/F.C.A for imports & F.O.R, Valiamala for indigenous.
1.6 For import cargoes, the purchase order shall be drawn directly to the foreign supplier through agents in India. We
have our own freight forwarder and customs clearance at Trivandrum shall be done by us.
1.7 All duties and taxes, if applicable shall be quoted separately.
1.8 Accreditation documents such as current income tax/sales tax clearance certificate, clientele list with previous
experience in the similar lines of supply must be provided with documentary evidence), Performance Certificate,
authorization for import, after sales support in India etc. shall be explained in detail with proof.
1.9 Earnest Money Deposit (EMD):- Interest free EMD to ensure the earnestness of the vendor in the participation of
the procurement process to the tune of Rs. 1,50,000/- ( Rupees One lakh and Fifty Thousand only) by Demand
Draft drawn in favour of the Sr. Accounts Officer, IIST, Valiamala, Trivandrum may be enclosed with Technical &
Commercial bid sealed cover. The EMD will be refunded to the unsuccessful tenderers within 30 days after
placement of Purchase Order. EMD will be forfeited in case the vendor withdrawn from the quotation. The tender
not accompanied with EMD shall be treated as invalid tender and summarily rejected. For direct offers from NSIC,
MSMEs, etc. EMD is not applicable.
1.10 Security Deposit:- Interest free Security Deposit @ 10% of the basic value of Purchase Order shall be payable by
successful vendor for satisfactory execution of the Purchase Order.
1.11 Performance Bank Guarantee: 10% of basic order value shall be submitted by the Vendor for Warranty obligation
(36+2 Months).
1.12 These items are required for our research purpose, we are eligible for integrated Tax (rate) vide Govt. of India,
ministry of Finance (Department of revenue) Notification No. 47/2017 dtd 14.11.2017 (Inter-State Supplies),
45/2017 dtd 14.11.2017 (Intra-State Supplies) hence, we should pay 5% GST/IGST only against production of a
certificate to the supplier from the Head of the Institution certifying that said goods are required for research
purpose only. Hence please quote accordingly.
1.13 Customs Duty : We have been exempted from payment of Customs Duty vide Notification No. 51/96 dated
23.07.1996 and amended by Notification No. 93/96 dated 11.12.1996 and 24/2007 dated 01.03.2007.
1.14 Liquidated Damages: The period of completion indicated shall be the essence of the contract. In the event of
delayed date of delivery & Installation, the liquidated damages @ 0.5% per week or part thereof subject to a
maximum of 10% of the contract value shall be recovered. The delivery date / Completion date to be mentioned in
PO is for delivery, customs clearance, inland transportation, installation and commissioning. That means the
commissioning should be completed before the delivery date / Completion date.
1.15 Force Majeure: During the continuance of the contract, should a part or whole of the items covered by this
contract be delayed in delivery due to reasons of force majeure condition which shall include lockouts, strikes,
riots, civil commotions, fire, flood, windstorm, explosion, labour disturbance, act of any Govt. or any agency,
juditional action, sabotage act of civil disobedience, act of public enemy, technical failure, accidents, acts of God
and war, stoppage of deliveries by Govt. etc, each party undertakes to advise the other as soon as it becomes a
way of the circumstance of such force majeure, so that action under the provisions of this contract can be
mutually reviewed and agreed upon between contractor and IIST. If the force majeure condition extended over a
period of six months, both the parties of the contract shall mutually discussed and arrived at an agreement for the
continuation/ termination of the contract forthwith.
1.16 Arbitration: Dispute if any shall be settled mutually, failing which, it will be referred to a one-man arbitrator
appointed by Director, IIST in accordance with the Arbitration and Conciliation Act, 1996 and any
alteration/modifications thereof, whose decision shall be final and binding on both the parties
1.17 IIST reserves the right to either accept/reject any tender/s without assigning any reason/s whatsoever.
2. Terms & Conditions of Tender Form No. DOS PM:20, Form No. DOS PM:22 & Form No. DOS PM:23 as per attachment.
Sd/-
(M.B Subash Chandran) Dy. Registrar –Gr I
For and on behalf of Director, IIST