SU-8 surface-micromachining process utilizing PMGI as a sacrificial material
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Transcript of SU-8 surface-micromachining process utilizing PMGI as a sacrificial material
SU-8 surface-micromachining process utilizing PMGI as a sacrificial material
2007 IEEE MEMSG. Foulds , R. W. JohnstoneM. Parameswaran
學號 :9635517
姓名 :陳立仁
Outline
Introduction Fabrication process Result Conclusion
Introduction
A novel process uses PMGI as sacrificial layer and lift-off resist for SU-8. The whole process can be completed in a single day .
Fabrication process
Fabrication process (cont.)
Fabrication process (cont.)
Fabrication process (cont.)
Result
Result (cont.)
Result (cont.)
“Automated assembly of hingeless 90° out-of-plane microstructures,”
S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran
Result (cont.)
“Automated assembly of hingeless 90° out-of-plane microstructures,”
S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran
Conclusion
An ideal process for proof of concept prototyping .
The height and thickness of the structure can be changed easily to fit different applications .