Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR1

Václav Vrba

Institute of Physics AS CR, Prague

Status of pre-production at TESLA

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR2

.Last week TESLA finished second part of pre- production with:

133-tile wafers and

13 2-tile wafers

Significant improvement of yield

Process flow practically the same all the time, significant changes on production line – the most pronounced one was change of manual/semiautomatic aligner for the automatic one.

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR3

New alignerHandling spots

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR4

Basic characteristics

Ufd 80 V

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR5

Basic characteristics (cont)

Iox @ 50 V 100 pA

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR6

Basic characteristics (cont)

3-Tiles - New delivery

Good Tiles - Old delivery

Significant improvement of leakage current !

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR7

Basic characteristics (cont)

Batch Waferp-spray-

new formula

p-spray - old

formula-/cm 2̂ -/cm 2̂

ATL-30 7 2.55E+12 2.06E+12ATL-31 7 3.12E+12 2.63E+12ATL-33 8 3.13E+12 2.45E+12ATL-34 4 3.22E+12 2.92E+12

Diode with Guard ring

P-spray doses

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR8

DeliveryAccording contract:

11 3-tile wafers

2 2-tile wafers

1 2-tile wafer (Prague, replacement of nonconform.)

1 2-tile wafer (NM, broken)

Additionally available:

2 3-tile wafers

9 2-tile wafers

Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR9

Conclusions

• TESLA finished second part of the pre-production with significant improvement of the yield and the quality of sensors