Standard Stages for Motion Control Applications

Standard Stages for Motion Control Applications

www.nanomotion.com

FB Stage Catalog

Nanomotion designs and manufactures advanced motion systems, sub-systems modules and piezo motor/drive components.

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets.

These compact stage configurations are provided in both standard atmospheric configurations as well as vacuum versions that can support clean operation to ISO Class 3 cleanliness. The modular design allows for easy mounting of axes, to each other, along with the use of standard angle brackets for Z mounting. All axes utilize precision crossed roller bearings with anti‐migration and optical encoders for precision positioning requirements.

For applications not suitable to standard stage configurations, please feel free to contact Nanomotion’s team of application engineers to learn about our custom stage capabilities.

PRODUCT FEATURES

Precision standard stages for atmosphere and vacuum

Linear stages for with travel up to 200mm travel

Rotary stages for continuous motion

Z‐Wedge stage for pure vertical motion

Goniometric stages for tip/tilt about a common pivot

Customized Solutions

Give OEMs Unlimited

Possibilities.

• 1 •

FBS050/020/050 Linear Stage

Mechanical Design Characteristics

Performance SpecificationsMODEL FBS050020 FBS050050

Travel Range (mm) 20mm 50mm

Encoder Resolution Standard 100nm

Optional 10nm

Bi-directional Repeatability Standard 1µm

Optional 100nm

Absolute Accuracy Standard 5µm 10µm

(Error mapping available) Optional 2.5µm 7µm

Minimum Incremental AC Mode 100nm

Move Convergence UHR Mode 5nm

DC Mode <1nm

Maximum Velocity 200mm/sec 200mm/sec

Straightness & Flatness ±4µm ±4µm

Pitch & Yaw ±40µrad ±40µrad

Load Capacity - Horizontal 1.8kg 1.8kg

Load Capacity - Vertical 0.4kg 0.3kg

Dynamic Stall Force 16N 16N

Motor Stiffness 1.7N/µ 1.7N/µ

Holding Force without Power 14N

MODEL FBS050020 FBS050050

Stage Plate Material Aluminum — Black Anodized

Motor HR4 Piezo, ultrasonic standing wave

Bearing Type Precision crossed rollers with anti-migration device

Encoder Linear optical encoder with gold tape scale

Cable Lengths (m) 3m

MTBF (hours) 30,000

Stage Mass (g) 405g 550g

Carriage Moving Mass (g) 158g 230g

RoSH Compliant

Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

MECHANICAL DRAWINGS FBS0500020 12

.59

TO C

ENTE

RO

F M

ASS

51.40TO CENTEROF MASS

29.

50

1

40

55

50 107

20 40

5 x M4x0.7 - 6H 8

27.6

TO C

ENTE

RO

F M

ASS

20

ENCODER CABLE MOTOR CABLE

46.1

7.5

4

0

40 CABLE HOLDER

GROUND

75

57.50 55 ±10 mm TRAVEL

D

D

4x

4.4

4x 8

4x 4.5 SECTION D-DMOUNTING HOLES

• 2 •

European View Dimensions are Metric

Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/

MECHANICAL DRAWINGS FBS0500050

29.

5

5.4

52.7TO CENTER

OF MASS

12TO

CEN

TER

OF

MA

SS GROUND

107

50

40

40

20

40

OF

MA

SS

5xM4x0.7 8

80

20

MOTOR CABLE

ENCODER CABLE

40

40 46.1

20

CABLE HOLDER

TO C

ENTE

R

130

80 ±25 mm TRAVEL

82.50

B

B

4x

4.4

4x 8

4x 4.5 SECTION B-B

MOUNTING HOLES

• 3 •



• 4 •

FBS075/040/060/100 Linear Stage

MECHANICAL DESIGN CHARACTERISTICS

PERFORMANCE SPECIFICATIONS

MODEL FBS075040 FBS075060 FBS075100

Travel Range (mm) 40mm 60mm 100mm


Optional 10nm


Optional 100nm

Absolute Accuracy Standard 6µm 8µm 10µm

(Error mapping available) Optional 3µm 4µm 5µm



DC Mode <1nm

Maximum Velocity 200mm/sec 250mm/sec 250mm/sec

Straightness & Flatness ±4µm ±5µm ±5µm

Pitch & Yaw ±40µrad ±60µrad ±60µrad

Load Capacity - Horizontal 3.0kg 3.0kg 3.0kg

Load Capacity - Vertical 0.8kg 0.65kg 0.65kg

Dynamic Stall Force 32N

Motor Stiffness 3N/µm


MODEL FBS075040 FBS075060 FBS075100






MTBF (hours) 30,000

Stage Mass (g) 727g 918g 1062g

Carriage Moving Mass (g) 284g 447g 445g

RoSH Compliant


55

40

39.

9

5xM5x0.8 6

80

40

4xM4x0.7 6

20

MOTOR CABLE

ENCODER CABLE CABLE HOLDER

32

62.8 TO CENTER

OF MASS

16.6

TO

CEN

TER

OF

MA

SS 5

GROUND

0.01

0.01

55

55

120

12.

5

51

10 CABLE HOLDER 120

80 ±20 mm TRAVEL 82.50

A

A

4x

5.8

4x 5.6 SECTION A-A

MOUNTING HOLRS

• 5 •




32

5


14.8

TO

CEN

TER

OF

MA

SS0.01

0.01

105

5

5

120 55

75 55 40 4 x M4x0.7 6

5 x M5x0.8 6

40 55

37.5

52.

4

120

80 ±20 mm TRAVEL 82.50

A

A

4x

5.8

4x 10 4x 5.6

SECTION A-AMOUNTING HOLRS

• 6 •




32

15.3

TO C

ENTE

RO

F M

ASSTO CENTER

OF MASS 5

GROUND

CABLE HOLDER

0.01

0.01

55

40

55

64.9

TO

CEN

TER

OF

MA

SS

4x M4x0.7 65x M5x0.8 6

4x M5x0.8 6 37.5

75

110

40

MOTOR CABLE

55

110

10

130

55 10

120

CABLE HOLDER

230

132.5

130 ±50 mm TRAVEL

B

B

8x

5.8

8x 10 8x 5.6

SECTION B-BMOUNTING HOLES

• 7 •




• 8 •

FBS100100 Linear Stage


Performance SpecificationsMODEL FBS100100

Travel Range (mm) 100mm


Optional 10nm


Optional 100nm

Absolute Accuracy Standard 10µm

(Error mapping available) Optional 7µm



DC Mode <1nm

Maximum Velocity 250mm/sec

Straightness & Flatness ±4µmm

Pitch & Yaw ±50µrad

Load Capacity - Horizontal 2.7kg

Load Capacity - Vertical 0.4kg

Dynamic Stall Force 32N

Motor Stiffness 3N/µ


MODEL FBS100100






MTBF (hours) 30,000

Stage Mass (g) 1811g

Carriage Moving Mass (g) 710g

RoSH Compliant


120

8

0 5

5

80 55

82.2

TO C

ENTE

RO

F M

ASS

22.

5

100

27.5

27.

5

17x M5x0.8 - 6H 6

MOTOR CABLE

CABLE HOLDER

18.1

TO C

ENTE

RO

F M

ASS

60.5TO CENTEROF MASS 5

GROUND

0.01

0.01

20

80

20

22.

5

80

164

.5

10

145

CABLE HOLDER 265

167.5 165 ±50 mm TRAVEL

A

A

8x

5.8

8x 10 8x 5.5

SECTION A-AMOUNTING HOLES

• 9 •




• 10 •

FBS150/150/200 Linear Stage


Performance SpecificationsMODEL FBS150150 FBS150200

Travel Range (mm) 150mm 200mm


Optional 10nm


Optional 100nm

Absolute Accuracy Standard 12µm 15µm

(Error mapping available) Optional 7µm 8µm



DC Mode <1nm

Maximum Velocity 200mm/sec 200mm/sec

Straightness & Flatness ±5µm ±5µm

Pitch & Yaw ±50µrad ±50µrad

Load Capacity - Horizontal 1.8kg 1.47kg

Load Capacity - Vertical NA NA

Dynamic Stall Force 30N 30N

Motor Stiffness 3N/µm 3N/µm


MODEL FBS150150 FBS150200






MTBF (hours) 30,000



RoSH Compliant


22.5

TO

C

ENTE

R O

F M

ASS

102.3 TO CENTEROF MASS

50

GROUND 0.01

0.01

12.5 2 x 25

125

27.

5 125

1

50

55 80 125 175

12.

5

8 x 4.20 7

9 x 5 0.50

102.3 TO CENTEROF MASS

MOTOR HOLDER

CABLE HOLDERS

CABLE HOLDERS

203.8 205 ±75 mm TRAVEL

360

A

A

8x

6.1

8x 11 8x 6.6 SECTION A-A

MOUNTING HOLES

• 11 •




9x M5x0.8 6 1

25


150

5x 5 0.50

12.

5 55 80 125 225

27.

5

MOTOR CABLE

CABLE HOLDER


50

27.3

TO C

ENTE

RO

F M

ASS

GROUND

0.01

0.01

50 125 50

125

15

CABLE HOLDER

455

257.5 255 ±100 mm TRAVEL

A

A

8x 11

8x

5.3

8x 6.6 SECTION A-AMOUNTING HOLES

• 12 •




• 13 •

FRS060-360 Rotary Stage


Performance SpecificationsMODEL FRS060360

Travel Range (mm) n x 360

Encoder Resolution Standard 5 arc sec.

Optional 0.5 arc sec.

Bi-directional Repeatability Standard 50 arc sec.

Optional 5 arc sec.

Accuracy Standard (arc sec.) 10 arc sec.

Optional (arc sec.) 5 arc sec.

Maximum Velocity 8.3 rad/sec

Flatness ±5µm

Load Inertia Capacity 0.0035kg.m2

Load Capacity - Moment 2kg

Dynamic Stall Force 0.96Nm

Stage Stiffness 0.0032 Nm/µrad

Holding Force without Power 0.86Nm

MODEL FRS060-360


Motor 2 x HR2 Piezo, ultrasonic standing wave

Bearing Type Precision crossed roller rotary bearing

Encoder Linear optical encoder with metal ring


MTBF (hours) 30,000

Stage Mass (g) 581g

Moving Mass (g) 268g

Moving Inertia 0.102 gr-m2

RoSH Compliant


14.7

TO

CEN

TER

OF

MA

SS

34.

6

0.01

0.01

55

55

95

146.4

3.9

TO C

ENTE

R O

F M

ASS

0.3 TO CENTER OF MASS

27.5

27.

5

A

A

6 x M3 - 6H 6MOUNTING SURFACE

54.50

12 THRU ALL

48

MOTOR CABLEMOTOR CABLE

ENCODER CABLE

MOUNTING HOLES4x 3.5

MO

UNTIN

G H

OLE

S4x

5.5

MO

UNTIN

G H

OLE

S4x

10

SECTION A-A

• 14 •

MECHANICAL DRAWINGS FRS060-360



• 15 •

FZS0850100 Z Wedge Stage


Performance SpecificationsMODEL FZS085010

Travel Range (mm) 10mm


Bi-directional Repeatability Standard 0.1µm

Accuracy Standard 3µm



(encoder & control dependant) DC Mode <1nm

Maximum Velocity (vertical) 50mm/sec

Straightness & Flatness ±2µm

Pitch & Yaw ±30µrad

Load Capacity 5kg

Dynamic Stall Force (N) 160N

Motor Stiffness (N/µ) 57N/µm


MODEL FZS085010






MTBF (hours) 30,000

Stage Mass (g) 1300g

Carriage Moving Mass (g) 310g

RoSH Compliant


152.5

24.

6

83.9

GROUNDENCODER CABLE

0.01

122

4 X M5x0.8 - 6H 10

4 x 5.50 THRU 10 5.40

MOUNTING HOLES

110

55

55 40

40

58

4 x M4x0.7 - 6H 8

M4x0.7 - 6H 8

128

.8

85

63.

58

79

5 XCABLE MOUNTING

0.01

56.

3 ±5

8

MOTOR CABLE 1.

10

0

128.80 1.3

63.

7 5

3.7

1.3

UPPER POSITION

LOWER POSITION

• 16 •

MECHANICAL DRAWINGS FZS0850100



• 17 •

FGS100/125/160 Goniometer Stage


Performance SpecificationsMODEL FGS100125 FGS100160

Travel Range (deg) ±10˚ ±10˚

Encoder Resolution Standard 0.171 arc sec. 0.134 arc sec.

Optional 0.0171 arc sec 0.0134 arc sec

Bi-directional Repeatability Standard 2 arc sec.

Optional 0.2 arc sec.

Minimum Incremental AC Mode 0.165 arc sec. 0.128 arc sec.

Move Convergence UHR Mode 0.0082 arc sec. 0.0064 arc sec.

DC Mode 0.000165 arc sec. 0.000129 arc sec.

Maximum Velocity (deg/sec) 100 deg/sec 85 deg/sec

Load Capacity (kg) 3kg 3kg

Inertial Capacity (kg.m2) 0.0512kg.m2 0.083kg.m2

Dynamic Stall Force 2040Nm 2600Nm

Motor Stiffness 0.045N* m/µrad 0.074N* m/µrad

Holding Force without Power 1836Nm 2340Nm

MODEL FGS100125 FGS100160






MTBF (hours) 30,000



RoSH Compliant


18.3

TO C

ENTE

RO

F M

ASS


125

35

GROUND

0.01

0.01

55

55

50.1

TO C

ENTE

RO

F M

ASS

100

6.5

22.

5

80

4 x 3.30 10.10ENCODER CABLE

MOTOR CABLE

55

55

83.4 5

5

22.

5

7.9

A

A

44.

9

4X 4.4(MOUNTING HOLES)

4X 8

(MO

UN

TIN

G H

OLE

S)

4X 4

.5(M

OU

NTI

NG

HO

LES)

SECTION A-A

• 18 •

MECHANICAL DRAWINGS FGS100125European View Dimensions are Metric

44.

9

10° 10°

R125

136

.80

TRAVEL 10 DEG


• 19 •

MECHANICAL DRAWINGS FGS100160 European View Dimensions are Metric

18.3

TO C

ENTE

RO

F M

ASS


125

35

GROUND

0.01

0.01

55

55

50.1

TO C

ENTE

RO

F M

ASS

100

6.5

22.

5

80

4 x 3.30 10.10ENCODER CABLE

MOTOR CABLE

55

55

83.4 5

5

22.

5

7.9

A

A

44.

9

4X 4.4(MOUNTING HOLES)

4X 8

(MO

UN

TIN

G H

OLE

S)

4X 4

.5(M

OU

NTI

NG

HO

LES)

SECTION A-A

R160

10° 10°

171

.50

TRAVEL 10 DEG


• 20 •

FB Series Wiring Configuration

Motor Wiring: 9 Pin D-type Female Connector

Encoder Wiring: 15 Pin D-type Male Connector

PIN FUNCTION DESCRIPTION

1 GND System Ground

2 N.C. With AB1A Driver — Phase

3 Motor - Up White Wire — High Voltage Input

4 Motor - Common Black Wire — High Voltage input for AB1A

GND for AB5, AB2, AB4, XCD Controller/Driver

5 Motor-Down Red Wire — High Voltage input

6 Motor Connected Short Pin 6 to Pin 1 — Enables Driver

Safety Input Open on Pin 6 — Disables Driver

7 GND System Ground — Connected to Connector Hood

8 N.C. Not Connected

9 N.C. Not Connected

PIN FUNCTION DESCRIPTION

7,9 5v Power

2,9 0v Power

14 A+ Incremental Signals

6 A- Incremental Signals

13 B+ Incremental Signals

5 B- Incremental Signals

12 Z+/Q- Reference Mark/Index

4 Z-/Q+ Reference Mark/Index

15 Shield Inner Shield

Case Shield Outer Shield

1,3 N.C. Not Connected

10,11 N.C. Not Connected

Product Features

Product Description

Technical SectionFB Series

The FB Series of alignment stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing linear, rotary and vertical motion.

The FB Series of stages provide single and multi-axis motion performance for a wide range of applications in optical alignment, semiconductor, biomedical, and the analytical instrumentation markets. These compact stages are provided in both atmosphere and

vacuum configurations and can support clean room operation to Class 10.

The FB Series is a modular design that allows for easy mounting for multi-axis applications. All FB Series stages are designed with precision optical encoders and precision crossed roller bearings, with the linear axes having an anti-migration device.

• Linear stages for 20mm to

200mm travel.

• Rotary Stage for continues motion

• Z-Wedge stage for 10mm travel

• Nanomotion’s direct drive piezo

motor with zero backlash and

no hysteresis.

• Integrated 100nm (0.1μm)

optical encoder.

• 21 •

Motion AccuracyFB Series

STRAIGHTNESS

A linear axis has six degrees of freedom that can create potential errors in motion. There are 3 degrees of linear errors, considering the linear displacement (travel), Straightness of motion, & Flatness of motion. There are 3 degrees of angular error, which consist of Pitch, Yaw, and Roll.

1. The movement in the direction of translation, which is the actual motion displacement. This accuracy is governed by the precision of the feedback device and the ability of the motor/servo system to control the displacement of motion.

2. Straightness & Flatness are linear errors related to deviations in motion in a vertical plane or left/right plane.

3. Pitch & Yaw are angular errors that result in inclination (pitch) or twisting (yaw) of the moving surface, about the direction of travel.

4. Roll is an angular error that results in the tilting of the moving surface, off to the side, of the direction of motion.

Nanomotion’s FB Linear Series uses precision crossed roller bearings, yielding high stiffness, low friction and minimizing the linear and angular errors. The mounting surfaces for the bearings are precision machined aluminum, designed to reflect the bearing accuracy.

This illustration depicts the various elements that contribute to error. A given axis has linear er-rors, in the form of straightness & flatness and angular errors in the form of pitch, yaw & roll.

• 22 •

Vacuum & Ultra High Vacuum Compatibility & CleanlinessFB Series

Nanomotion’s infrastructure includes:

• Cleaning and baking equipment • Vacuum chambers for testing

• Residual Gas Analysis Equipment • Particle counting

• Cleanroom for assembly and testing

Nanomotion supports all vacuum/UHV applications with well established infrastructure for RGA analysis and performance testing in vacuum. Our cleanroom supports the assembly and testing of ultra-clean stages.

Nanomotion’s motors and stages are available in vacuum and UHV compatible configurations, leveraging extensive research on materials, adhesives, and lubricants, providing high performance motion control. Motion systems

are specifically designed and manufactured to meet the most stringent performance along with vacuum compatibility and cleanliness.

Nanomotion Motors & Stages are available in: -V version for high vacuum (10-7 Torr) -U version for Ultra High Vacuum (10-10 Torr)

Linear, rotary, tilt, and Z-wedge stages are configure specifically for vacuum / UHV

environments, assembled and tested in a cleanroom, then packaged in dry air or nitrogen. Single and multi-axis assemblies are available to meet the most demanding motion requirements.

• 23 •

Move and Settle Motion Profiles & BrakingFB SeriesThe ability to step and settle to a stable position is essential to many motion applications. Nanomotion’s piezo stages have:

• zero backlash • zero hysteresis • no internal motor inertia • faster response than traditional

motor technology

The ability to accelerate an axis with Nanomotion’s piezo motor technology is greatly enhanced as the inertia only comes from the moving load. Aside from an ultrasonic standing wave, there are no moving parts internal to the motor. The ability to stop (brake) and hold position with stability is also enhanced by the inherent friction of the ceramic tip working on a ceramic drive surface. These characteristics allow for optimum move and settle, along with the ultimate in position stability.

The ability to make more than 20 moves in 1 second, averaging 50msec, for move and settle, is demonstrated over 25 million cycles.

The motion profile below reflects the position and velocity profile, reaching position stability

at the end of the move command, settling to +/- 1 encoder count. The drift (position stability) is measured at <5nm per minute.

The motion profile reflects the position and velocity profile, reaching position stability at the end of the move command, settling to +/- 1 encoder count. The drift (position stability) is measured at <5nm per minute.

• 24 •

Position Repeatability and Accuracy In The Direction of MotionFB Series

The graph above represents a test, simulating 5 years of operation service, moving 90°, 180°, 270°, 360° and back to home.

Accuracy in our normal servo mode (AC) is to 1µRad

Accuracy in our high resolution mode (DC) is to 0.1µRad

Position repeatability is to +/- 1 µRad

• 25 •

Position Repeatability and Accuracy In The Direction of MotionFB SeriesThere are many design and component factors that impact the ability to achieve position repeatability and accuracy.

All Nanomotion motion systems are closed loop with a position sensor. The position sensors vary in the available resolution and the absolute accuracy. In addition to the position sensors, design considerations that impact the systems stiffness, materials (thermal expansion) and bearing selection are all key factors in determining the precision of motion.

Nanomotion has extensive experience is system configurations ranging from 0.5nm resolution to 1µm resolution. Ultimately the position resolution will be a key factor in determining the position repeatability, as most systems will be repeatable to < 5 encoder counts. Actual errors in the position sensor can be factored out based on measurements with a laser interferometer or auto collimator, yielding standard accuracy in the sub-micron level and achievable accuracy in nanometer level.

Nanomotion utilizes metrology tools such as laser interferometry and auto collimators to validate all aspects of motion performance.

The long travel stage to the right and the graph below reflect an absolute position accuracy of 12 microns over 306mm. The position repeatability is 2 microns with a 0.1µm resolution encoder.

Increasing the encoder resolution can improve position repeatability.

Laser error mapping can improve position accuracy by adding correction points.

• 26 •

Application Data Sheet

Please use this as a guideline to the stage selection process

Name: ____________________________________________________________________________________

Company: __________________________________________________________________________________

Phone: ______________________________________ Email: ____________________________________ Application Description Describe the application in text ____________________________________________________________________________________________________ ____________________________________________________________________________________________________ ____________________________________________________________________________________________________

Operating Environment Min/Max Operating Temperature ____________________________________________________________________ – [C/F] Min/Max Storage Temperature __________________________________ –______________________________ [C/F] Pressure/Vacuum________________________________________________________________________________ [Torr] Magnetic: n Yes n No Cleanliness Class: ____________________________________________________________________________________ Other Environmental Considerations: ___________________________________________________________________ ____________________________________________________________________________________________________ ____________________________________________________________________________________________________ ____________________________________________________________________________________________________

Multi Axis Configurations Choose configuration and define which axis is top of each other. X ______________________________________________ R ______________________________________________ XR ______________________________________________ XY ______________________________________________ XZ ______________________________________________ Example: Z mounted onto X with ZR ______________________________________________ XYZ ______________________________________________ XYR ______________________________________________ XYZ ______________________________________________ XYZR ____________________________________________ R1R2 ____________________________________________ Other ____________________________________________ Number of Interpolated axes ________________________

Sketch If Required To Explain

• 27 •

Application Data Sheet

Please use this as a guideline to the stage selection process

Positioning Requirements

Repeatable The error returning to the same position __________________________________________________________ [nm/µ]

Absolute Accuracy The error from position zero to a target point. __________________________________________________ [µm]

Typical Step Size _________________________________________________________________________ [nm/µm/mm]

Smallest Incremental Step ____________________________________________________________________ [nm/µm]

Encoder Resolution Nanomotion to define encoder resolution. ________________________________________________ [nm/µm] Motion Requirements– Maximum Travel per axis:

X ______________________ Y ____________________ Z ______________________ [mm]

R1 ____________________ R2 ________________ [Degrees or Continuous] Define: Constant Velocity (speed uniformity at what velocity and over what distance)

____________________________________________________________________________________________________

Move and Settle (move distance and time)

____________________________________________________________________________________________________ Load Requirements Payload Mass____________________________________________________________________________________ [Kg] Thrust Force ______________________________________________________________________________________ [N] Payload directly mounted to the stage surface n Yes n No Distance from the stage surface to the CoG of the payload __________________________________________ [mm]

Please sketch on Axes Configuration chart for multi-axes configuration Rotary Application, define moment of inertia ______________________________________________________ [kg.m2] Electrical Main Power:n 12Vn 24V n 48V n Battery ____________________ n Other ______________________________ Controller Nanomotion: ________________________________________________________________________________________ Other Brand: ________________________________________________________________________________________ Controller Interface– Define specific requirements in communication protocol, packaging or interfacing with other devices: ____________________________________________________________________________________________________ ____________________________________________________________________________________________________

Motor Amplifier– Nanomotion to determine driver: ________________________________________________________

w w w. n a n o m o t i o n . c o m• 28 •

• 29 •

How To Order

FB S 050 020 -100 04 FBS050020-10004

FB = Linear FG = Goniometer

FZ = Z Wedge

S = Standard V = Vacuum

100 = 100nm Encoder 010 = 10nm Encoder

04 = HR4 Motor 08 = HR8 Motor

050 = 50mm Wide 075 = 75mm Wide

100 = 100mm Wide 150 = 150mm Wide

020 = 20mm Travel 040 = 40mm Travel 050 = 50mm Travel 060 = 60mm Travel 100 = 100mm Travel 150 = 150mm Travel 200 = 200mm Travel

FR S 060 360 -500 04 FRS060360-50004

FR = Rotary


500 = 5.0 arc sec Encoder 050 = 0.5 arc sec Encoder

04 = (2) HR2 Motors

100 = 100nm Encoder

04 = HR4 Motor

060 = 60mm Dia Mounting 360 = 360˚ Travel

FG S 100 125 100 04 FGS100125-10004

FG = Goniometer

125 = Pivot Radius 160 = Pivot Radius


100 = 100mm Long Top

FZ S 085 010 -010 08 FZS085010-01008

FZ = Z Wedge


010 = 10nm Encoder

08 = HR8 Motor

085 = 85mm Wide 010 = 10mm Travel

w w w. n a n o m o t i o n . c o m

Nanomotion Ltd. Worldwide Headquarters

Mordot HaCarmel Industrial Park

Yokneam 20692 Israel

t: +972 73 2498000

f: +972 73 2498099

e: [email protected]

Nanomotion Inc. U.S. Headquarters

1 Comac Loop, Suite 14B2

Ronkonkoma, New York 11779

t: (800) 821-6266

t: (631) 585-3000

f: (631) 585-1947

e: [email protected]

www.nanomotion.com

©Copyright 2020 Nanomotion Inc. All rights reserved. Specifications are subject to change without notice. All trademarked names are the property of their respective owners.

Standard Stages for Motion Control Applications

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