Sputtering apparatus

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PATENTS GRANTED In the Metal Finishing Field Printed copies of patents are furnished by the Patent and Trademark Office for $3.00 each. Address orders to: Commissioner of Patents and Trademarks, Washington, DC. 20231. Method for Preparing Galvanized Steel Strip Having Minimal Uncoated Defects U.S. Patent 5,433,796. July 18, 1996 M. lsobe et al., assignors to Kawasaki Steel Corp., Hyogo, Japan A method for preparing a galvanized steel strip having a carbon concentration of at least 0.1% by weight averaged over a surface layer of 30 pm in thickness, said thickness approximately equal to a grain size of the strip, the method comprising continuously heating and annealing in a reducing atmosphere; subjecting the an- nealed steel strip to a carburizing treatment simultaneous with cooling after the anneal- ing step, wherein the carburizing treatment is conducted by use of a carburizing gas with a 2 to 20% concentration in a reducing gas: and subsequently admitting the carbur- ized steel strip, without contact with the ambient air, into a molten zinc bath to coat the strip with zinc thereby producing a galvanized steel strip having minimal un- coated areas. Apparatus for Electrolytically Coating Small Parts U.S. Patent 5433,834. July 18, 1995 H. Be/z et al., assignors to Ewald Dorken AG, Herdecke, Germany An apparatus for electrolytically coating electrically conductive small parts, com- prising a conveyor tube rotatable about a generally horizontal axis; screw conveyor means along an interior of the tube for advancing the small parts; a dipping basin for containing a bath of electrically con- ductive liquid coating agent at one axial end of the tube; electrical contacts formed on the interior of the tube for making elec- trical connection with the parts; and means for connecting respective terminals of a direct current electrical power source whereby the parts are coated. Sputtering Apparatus U.S. Patent 5433,835. July 18, 199.5 R.E. Demaray et al., assignors to Applied Materials Inc., Santa Clara, Calif. A sputtering device and target with cover to hold cooling fluid. Coated Stainless Steel Sheet U.S. Patent 5,433,839. July i8, 1995 P. Amelot and J-C. Bavay, assignors to Ugine S.A., Puteaux, France A process for the manufacture of a coated stainless steel sheet useful in the manufacture of roofs of buildings, com- prising providing a stainless steel sheet containing more than 16% by weight of chromium; pickling the steel sheet chemi- cally or electrolytically by immersion in a bath comprising an inorganic acid; rinsing the steel sheet; activating the steel sheet chemically or electrolytically by immer- sion in a bath comprising phenolsulfonic acid, said bath having a pH lower than a depassivation of pH of the stainless sheet; and depositing electrolytially on at least one face of the stainless sheet a coating layer of pure tin by means of an electrolytic deposition bath comprising stannous tin and phenolsulfonic acid. Acid Copper Plating Bath U.S. Patent 5,433,840. July 78, 1995 W Dahms et al, assignors to Afofech Deutschland GmbH, Berlin An aqueous acid bath for the galvanic deposition of bright, smooth copper coats comprising a polyalkylene glycol ether; a copper salt; an acid; and optionally, chlo- ride ions. Method for Treating Heavy Metal U.S. Patent 5,433,864. July 18, 1995 M-W Yun et al, assignors to Korea Atomic Energy Research Institute, Daejeon-Si, Republic of Korea A method for treating a heavy metal containing wastewater through utilization of acorns, comprising drying the acorns at room temperature and under sun beams; extracting acomic acid from the dried acorns by using distilled water; filtering the extracted acomic acid until the color dis- appears: maintaining a heavy metal con- taining wastewater at a pH in the range of 8 to 11.5 by adding a base selected from the group consisting of NH,OH, Ca(OH),, and NaOH; adding the filtered acomic acid into the heavy metal containing wastewater; adding calcium ions alone or with other divalent cations at a combined level of 50 ppm or more; agitating the solution of heavy metal containing wastewater and acomic acid; and allowing the heavy met- als to be precipitated from the solution, or filtering the solution. Painting Apparatus U.S. Patent 5,434,604. July 18, 1995 AL Clear-y and P.L. Duffield, assignors to Vutek Inc., Meredith, N. H. A spray painting system with automatic color calibration. Anodizing Rack Cover U.S. Patent 5,435,457. Ju/y 25, 1995 N.A. Tiner and D.M. Kavanaugh, assignors to Microprocess Laboratory Inc. and Ano d’art Inc., both of Huntington Beach, Calif. An apparatus for anodizing, comprising a body having a central axis comprised of plastic netting having an interior surface at least partially defining a space sized and shaped such that a rack loaded with objects to be anodized can be substantially con- tained within the space; a base positioned below the space for catching objects, which fall from a rack positioned within the space; a rack for supporting objects to be anodized: a spacing member; and a plural- ity of connectors secured to the spacing member, thereby preventing the body from contacting the objects to be anodized and causing defects during anodization. Method of Making an Abrasive Article U.S. Patent 5,435,816. July 25, 1995 KM Spurgeon et al, assignors to 3M Co., St. Paul, Minn. A method for preparing a shaped, han- dleable structure suitable for making a coated abrasive article comprising provid- ing a mixture comprising abrasive parti- cles, a binder precursor, and optionally, a photoinitiator; providing a backing having a front surface; positioning the backing with respect to a radiation energy transmis- sive production tool having a contacting surface so that the front surface of the backing faces the contacting surface of the production tool to define a mixture receiv- ing space between the contacting surface of the production tool and the front surface of the backing; transmitting radiation energy METAL FINISHING ?? APRIL 1996 95

Transcript of Sputtering apparatus

Page 1: Sputtering apparatus

PATENTS GRANTED In the Metal Finishing Field Printed copies of patents are furnished by the Patent and Trademark Office for $3.00 each. Address orders to: Commissioner of Patents and Trademarks, Washington, DC. 20231.

Method for Preparing Galvanized Steel Strip Having Minimal Uncoated Defects U.S. Patent 5,433,796. July 18, 1996 M. lsobe et al., assignors to Kawasaki Steel Corp., Hyogo, Japan

A method for preparing a galvanized steel strip having a carbon concentration of at least 0.1% by weight averaged over a surface layer of 30 pm in thickness, said thickness approximately equal to a grain size of the strip, the method comprising continuously heating and annealing in a reducing atmosphere; subjecting the an- nealed steel strip to a carburizing treatment simultaneous with cooling after the anneal- ing step, wherein the carburizing treatment is conducted by use of a carburizing gas with a 2 to 20% concentration in a reducing gas: and subsequently admitting the carbur- ized steel strip, without contact with the ambient air, into a molten zinc bath to coat the strip with zinc thereby producing a galvanized steel strip having minimal un- coated areas.

Apparatus for Electrolytically Coating Small Parts U.S. Patent 5433,834. July 18, 1995 H. Be/z et al., assignors to Ewald Dorken AG, Herdecke, Germany

An apparatus for electrolytically coating electrically conductive small parts, com- prising a conveyor tube rotatable about a generally horizontal axis; screw conveyor means along an interior of the tube for advancing the small parts; a dipping basin for containing a bath of electrically con- ductive liquid coating agent at one axial end of the tube; electrical contacts formed on the interior of the tube for making elec- trical connection with the parts; and means for connecting respective terminals of a direct current electrical power source whereby the parts are coated.

Sputtering Apparatus U.S. Patent 5433,835. July 18, 199.5 R.E. Demaray et al., assignors to Applied Materials Inc., Santa Clara, Calif.

A sputtering device and target with cover to hold cooling fluid.

Coated Stainless Steel Sheet U.S. Patent 5,433,839. July i8, 1995 P. Amelot and J-C. Bavay, assignors to Ugine S.A., Puteaux, France

A process for the manufacture of a coated stainless steel sheet useful in the manufacture of roofs of buildings, com- prising providing a stainless steel sheet containing more than 16% by weight of chromium; pickling the steel sheet chemi- cally or electrolytically by immersion in a bath comprising an inorganic acid; rinsing the steel sheet; activating the steel sheet chemically or electrolytically by immer- sion in a bath comprising phenolsulfonic acid, said bath having a pH lower than a depassivation of pH of the stainless sheet; and depositing electrolytially on at least one face of the stainless sheet a coating layer of pure tin by means of an electrolytic deposition bath comprising stannous tin and phenolsulfonic acid.

Acid Copper Plating Bath U.S. Patent 5,433,840. July 78, 1995 W Dahms et al, assignors to Afofech Deutschland GmbH, Berlin

An aqueous acid bath for the galvanic deposition of bright, smooth copper coats comprising a polyalkylene glycol ether; a copper salt; an acid; and optionally, chlo- ride ions.

Method for Treating Heavy Metal U.S. Patent 5,433,864. July 18, 1995 M-W Yun et al, assignors to Korea Atomic Energy Research Institute, Daejeon-Si, Republic of Korea

A method for treating a heavy metal containing wastewater through utilization of acorns, comprising drying the acorns at room temperature and under sun beams; extracting acomic acid from the dried acorns by using distilled water; filtering the extracted acomic acid until the color dis- appears: maintaining a heavy metal con- taining wastewater at a pH in the range of 8 to 11.5 by adding a base selected from the group consisting of NH,OH, Ca(OH),, and NaOH; adding the filtered acomic acid into the heavy metal containing wastewater; adding calcium ions alone or with other divalent cations at a combined level of 50

ppm or more; agitating the solution of heavy metal containing wastewater and acomic acid; and allowing the heavy met- als to be precipitated from the solution, or filtering the solution.

Painting Apparatus U.S. Patent 5,434,604. July 18, 1995 AL Clear-y and P.L. Duffield, assignors to Vutek Inc., Meredith, N. H.

A spray painting system with automatic color calibration.

Anodizing Rack Cover U.S. Patent 5,435,457. Ju/y 25, 1995 N.A. Tiner and D.M. Kavanaugh, assignors to Microprocess Laboratory Inc. and Ano d’art Inc., both of Huntington Beach, Calif.

An apparatus for anodizing, comprising a body having a central axis comprised of plastic netting having an interior surface at least partially defining a space sized and shaped such that a rack loaded with objects to be anodized can be substantially con- tained within the space; a base positioned below the space for catching objects, which fall from a rack positioned within the space; a rack for supporting objects to be anodized: a spacing member; and a plural- ity of connectors secured to the spacing member, thereby preventing the body from contacting the objects to be anodized and causing defects during anodization.

Method of Making an Abrasive Article U.S. Patent 5,435,816. July 25, 1995 KM Spurgeon et al, assignors to 3M Co., St. Paul, Minn.

A method for preparing a shaped, han- dleable structure suitable for making a coated abrasive article comprising provid- ing a mixture comprising abrasive parti- cles, a binder precursor, and optionally, a photoinitiator; providing a backing having a front surface; positioning the backing with respect to a radiation energy transmis- sive production tool having a contacting surface so that the front surface of the backing faces the contacting surface of the production tool to define a mixture receiv- ing space between the contacting surface of the production tool and the front surface of the backing; transmitting radiation energy

METAL FINISHING ?? APRIL 1996 95