SPADnet a Digital Silicon PhotoMultiplier for Positron...

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CEA | 10 AVRIL 2012 | PAGE 1 CEA | 10 AVRIL 2012 L. Maingault 1 , E. Gros d’Aillon *, 1 ,L. André 1 , L. Verger 1 , E. Charbon 2 , C. Bruschini 3 , C. Veerappan 2 , D. Stoppa 4 , N. Massari 4 , M. Perenzoni 4 , L. H. C. Braga 4 , L. Gasparini 4 , R. K. Henderson 5 , R. Walker 5 , S. East 6 , L. Grant 6 , B. Jatekos 7 , E. Lorincz 7 , F. Ujhelyi 7 , P. Major 8 , Z. Papp 8 , and G. Nemeth 8 1- CEA-Leti, MINATEC Campus,Recherche Technologique, F 38054 Grenoble, France 2- Delft University of Technology, Delft, The Netherlands 3- EPFL, Lausanne, Switzerland 4- Smart Optical Sensors and Interfaces (SOI) Group, Fondazione Bruno Kessler (FBK), Trento, Italy 5-CMOS Sensors and Systems (CSS) Group, School of Engineering, The University of Edinburgh, Edinburgh, United Kingdom. 6-Imaging Division, STMicroelectronics, Edinburgh, United Kingdom 7- Budapest University of Technology and Economics, Department of Atomic Physics, Budapest, HU 8- Mediso Orvosi Berendezes Fejleszto es Szerviz Kft. (Mediso Ltd.),HU Eric Gros d’Aillon, CEA-LETI [email protected] www.spadnet.eu SPADnet a Digital Silicon PhotoMultiplier for Positron Emission Tomography: presentation and characterization

Transcript of SPADnet a Digital Silicon PhotoMultiplier for Positron...

Page 1: SPADnet a Digital Silicon PhotoMultiplier for Positron ...ndip.in2p3.fr/ndip14/AGENDA/AGENDA-by-DAY/... · SPADnet Pixel Architecture 0.57×0.61mm pixel 2 x 2 mini-SiPMs (Braga et

CEA | 10 AVRIL 2012

| PAGE 1

CEA | 10 AVRIL 2012

L. Maingault 1, E. Gros d’Aillon*, 1 ,L. André1, L. Verger 1, E. Charbon2, C. Bruschini3,

C. Veerappan2, D. Stoppa4, N. Massari4, M. Perenzoni4, L. H. C. Braga4, L.

Gasparini4, R. K. Henderson5, R. Walker5, S. East6, L. Grant6, B. Jatekos7, E.

Lorincz7, F. Ujhelyi7, P. Major8, Z. Papp8, and G. Nemeth8

1- CEA-Leti, MINATEC Campus,Recherche Technologique, F 38054 Grenoble, France

2- Delft University of Technology, Delft, The Netherlands

3- EPFL, Lausanne, Switzerland

4- Smart Optical Sensors and Interfaces (SOI) Group, Fondazione Bruno Kessler (FBK), Trento, Italy

5-CMOS Sensors and Systems (CSS) Group, School of Engineering, The University of Edinburgh, Edinburgh,

United Kingdom.

6-Imaging Division, STMicroelectronics, Edinburgh, United Kingdom

7- Budapest University of Technology and Economics, Department of Atomic Physics, Budapest, HU

8- Mediso Orvosi Berendezes Fejleszto es Szerviz Kft. (Mediso Ltd.),HU

Eric Gros d’Aillon, CEA-LETI

[email protected]

www.spadnet.eu

SPADnet a Digital Silicon PhotoMultiplier for

Positron Emission Tomography: presentation and characterization

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| PAGE 2

Positron Emission Tomography

Functional imaging of radio-isotope which emit a positron.

Positron and electron annihilate. Two 511keV gamma photons are emitted in coincidence at 180°.

Mainly used for oncology.

Scintillator

Single gamma photon detector

Source : wikipedia

NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

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| PAGE 3 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

The SPADnet Concept

Photonic Component, comprising:

Scintillator (LYSO)

Sensor (SiPM)

Network (Gbps)

Scalable, modular System

COMMUNICATION

DETECTOR

NETWORK

SCINTILLATOR

FOCUS OF THIS TALK

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| PAGE 4 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

The sensor

Page 5: SPADnet a Digital Silicon PhotoMultiplier for Positron ...ndip.in2p3.fr/ndip14/AGENDA/AGENDA-by-DAY/... · SPADnet Pixel Architecture 0.57×0.61mm pixel 2 x 2 mini-SiPMs (Braga et

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| PAGE 5 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Sensor Requirements for PET

We want to build of large format, compact, MRI compatible sensor capable of TOF-PET

We need to measure for each gamma-ray: Position Of Interaction

Energy

Time of arrival

Proposed solution: a fast sensor sensitive to a few photons in CMOS technology Small pixels Improve spatial resolution

Embedded Time to Digital Converters Time stamp more than one visible photon

Real-time energy output Provide scintillation decay time information

Through-Silicon-Via based packaging Extensible to large format

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| PAGE 6 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Silicon Photomultiplier (SiPM)

SiPM : array of Single-Photon Avalanche Diodes (SPADs)

Each SPAD is a photodiode operating in Geiger mode The number of fired SPADs is proportional to the number of incident photons

Particularity of CMOS based SiPM Digitization of the photon

Advanced functions could be embedded

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| PAGE 7 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

SPADnet Pixel Architecture

0.57×0.61mm pixel

2 x 2 mini-SiPMs (Braga et al., NSS2011)

720 SPADs (Walker et al., NSS 2012)

1 active TDC

43% array fill factor

For more details, see Braga et al., ISSCC 2013 and Walker et al. IISW 2013

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| PAGE 8 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Discriminating gamma event

The chip is an array of 8x16 pixels

Fast readout of the counted photons

Integration is triggered by comparing the photon flux to a threshold

8

100 Msamples/s

8x16 PIXEL ARRAY

16 bit

| PAGE 8

Threshold

time

Nb

of

ph

oto

ns

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Implemented Device

SPADnet1 chip : 16x8 pixels, ~600µm pitch. 720 SPADs per pixel. 92k SPADs

Round SPADs,

64% fill factor

19µm pitch

Through Silicon Via

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| PAGE 10 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Characterization

1 – SPADs Dark Count Rate Dead Time Photon Detection Probability 2 – Sensor Gamma spectra Coincidence Timing Resolution

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| PAGE 11 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Dark Count Rate

Selecting one SPAD per pixel at a time

At 23 °C and 1.5V excess bias : median DCR = 330 Hz

Noisy SPADs could be disabled

Limited by tunneling Limited by thermally assisted Shockley-Read-Hall

DCR double every 15°C

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| PAGE 12 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

SPAD Dead Time

Count with respect to the photon flux

Deadtime : 50ns. Paralysable behaviour

𝐶𝑜𝑢𝑛𝑡𝑠 = 𝑁𝑝ℎ𝑒−𝑁𝑝ℎ𝜏

𝜏=50ns

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| PAGE 13 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Photon Detection Probability

Selecting one SPAD per pixel at a time

Peak SPAD PDP 32% at 450 nm at 20 °C and 1.5V excess bias (incl. afterpulse)

PDP of each SPAD (at 450nm) PDP histogram (at 450nm)

With respect to wavelength

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| PAGE 14 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Gamma measurements

Single 3.5x3.5x20 mm3 LYSO crystal (clinical) on 9.8x4.6mm² active area

Teflon wrapped. Optical grease coupled.

Room temperature. No stabilization. 1.5 V excess bias

Scintillator

(3.5x3.5x20mm3)

Sensor

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| PAGE 15 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Picture of a Gamma Event

16 pixels - 9.8mm

8 p

ixe

ls -

4.6

mm

One 511 keV event

Threshold

100 Msamples/s photon flux

Triggering Integration (150ns)

DCR

Gamma

Accumulation show the 3.5x3.5x20 LYSO needle

Triggering mechanism gives robustness with respect to DCR

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| PAGE 16 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Gamma Spectra 20°C 1.5V excess bias

80% SPAD enabled

Energy resolution

@ 511 keV

~ 11,5% FWHM

59.5 keV 122 keV

511 keV

LYSO Background

356 keV

LYSO Background

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| PAGE 17 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Coincidence Resolution Time 20°C 1.5V excess bias

80% SPAD enabled

Time (ps)

Occ

urr

en

ces

Single 3.5x3.5x20 mm3 LYSO crystal (clinical) on 9.8x4.6mm² active area

128 TDCs per chips enable multi-timestamp processing

Best CRT in this experiment : 530 ps FWHM

288 ps obtained by Braga et al. using smaller LYSO crystals (IEEE Nucl. Sci. Symp. Conf. Rec 2013).

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| PAGE 18 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Gamma measurements

Non-collimated punctual Na source

1 MBq, 10cm

LYSO matrix with 35x35 pixels and 1.3mm pitch, and optical separator, 13 mm thick (preclinical) on 9.8x4.6mm² active area. Optical grease coupled. GORE® Diffuse Reflector. No alignment with pixels.

Room temperature. No stabilization. 1.5V excess bias

The sensor is here

Page 19: SPADnet a Digital Silicon PhotoMultiplier for Positron ...ndip.in2p3.fr/ndip14/AGENDA/AGENDA-by-DAY/... · SPADnet Pixel Architecture 0.57×0.61mm pixel 2 x 2 mini-SiPMs (Braga et

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| PAGE 19 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Small needle matrix

16 pixels

8 p

ixe

ls

Post processing : Filtering noise (5 count) + centroïd

One 511 keV event Gamma accumulation

LYSO needles are clearly resolved

(overflow at edges)

Energy resolution @ 511 keV

~ 13 % FWHM

511 keV

1275 keV

Spectrum for one single needle

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| PAGE 20 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Conclusion and future steps

SPADnet is a 4 sides tileable Gamma sensor in CMOS technology

8 x 16 pixels, 0.6 mm pitch, 92k SPAD

TDCs and event discriminator embedded.

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| PAGE 21 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Conclusion and future steps

SPADnet is a 4 sides tileable Gamma sensor in CMOS technology

8 x 16 pixels, 0.6 mm pitch, 92k SPAD

TDCs and event discriminator embedded.

Future steps :

Optical Concentrators to recovers SPADs fill factor loss

Page 22: SPADnet a Digital Silicon PhotoMultiplier for Positron ...ndip.in2p3.fr/ndip14/AGENDA/AGENDA-by-DAY/... · SPADnet Pixel Architecture 0.57×0.61mm pixel 2 x 2 mini-SiPMs (Braga et

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| PAGE 22 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Conclusion and future steps

SPADnet is a 4 sides tileable Gamma sensor in CMOS technology

8 x 16 pixels, 0.6 mm pitch, 92k SPAD

TDCs and event discriminator embedded.

Future steps :

Optical Concentrators to recovers SPADs fill factor loss

Tile the chips to build a larger area

Page 23: SPADnet a Digital Silicon PhotoMultiplier for Positron ...ndip.in2p3.fr/ndip14/AGENDA/AGENDA-by-DAY/... · SPADnet Pixel Architecture 0.57×0.61mm pixel 2 x 2 mini-SiPMs (Braga et

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| PAGE 23 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Conclusion and future steps

SPADnet is a 4 sides tileable Gamma sensor in CMOS technology

8 x 16 pixels, 0.6 mm pitch, 92k SPAD

TDCs and event discriminator embedded.

Future steps :

Optical Concentrators to recovers SPADs fill factor loss

Tile the chips to build a larger area

Integrate into a PET ring

Page 24: SPADnet a Digital Silicon PhotoMultiplier for Positron ...ndip.in2p3.fr/ndip14/AGENDA/AGENDA-by-DAY/... · SPADnet Pixel Architecture 0.57×0.61mm pixel 2 x 2 mini-SiPMs (Braga et

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| PAGE 24 NDIP 2014, Tours, July 4 2014 - E. Gros d’Aillon

Conclusion and future steps

SPADnet is a 4 sides tileable Gamma sensor in CMOS technology

8 x 16 pixels, 0.6 mm pitch, 92k SPAD

TDCs and event discriminator embedded.

Future steps :

Optical Concentrators to recovers SPADs fill factor loss

Tile the chips to build a larger area

Integrate into a PET ring

Second version of the SPADnet chip. 9.8 x 9.8 mm2, higher fill factor

Page 25: SPADnet a Digital Silicon PhotoMultiplier for Positron ...ndip.in2p3.fr/ndip14/AGENDA/AGENDA-by-DAY/... · SPADnet Pixel Architecture 0.57×0.61mm pixel 2 x 2 mini-SiPMs (Braga et

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| PAGE 25 IMADIF Perspectives G. Montémont 17/09/2012 | 25

Thanks for your attention