SOP FOR PVD ENDURA TOOL

Check list before starting the tool from facility : CDA Pressure Chiller temp. for child water Heat Exchanger operation (water level, alarm) Exhaust Fan Should be ON Purge cylinder for system

PVD ENDURA Tool start-up procedure :

1. ON main Breaker 2. EMO CKTS ON 3. MACH CKTS ON (On main controller) 4. Log in system User Name : -------------- Password :-----------------

EMO

BUFFER/TRANFER/AL2O3/TiN PVD CHAMBER 1. Turn ON system pump. (wait till fore line pressure go up to below 100 m Torr.) 2. Pump down all chamber ONE BY ONE by opening thru roughing valve.

3. Pump down chamber A (PASS DOWN) by giving chamber pump down command from chamber service screen.

SYSTEM PUMP

Fore line Pressure

Roughing Valve

4. Pump down chamber B (COOL DOWN) by giving chamber pump down command from chamber service screen.

5. Select all chambers CRYO pump for FULL REGENS : (BUFFER/TRANSFER/CHAMBER 1 (AL)/CHAMBER D (TiN)) 6. It will take ~3 hours to complete regen.

GATE VALVE

7. Once regen completed CRYO will show -65 and -12 kelvin temp. (In Idle state it will be 275 and 275 kelvin) 8. Put all CRYO ONLINE. 9. Pump down all chamber with CRYO by opening GATE VALVE. (Wait till chamber pressure goes down up to *.**E-8 Torr.) 10. Put all chamber ONLINE for process.

Set TEMP.hear.

PVD ENDURA Tool SHUT-DOWN Procedure : 1. Turn ON Roughing pump (If Required). 2. Put ALL chamber OFFLINE. 3. Turn OFF IG . (all Chamber) 4. Shut off GATE VALVE (all Chamber) 5. Put ALL CRYO pump OFFLINE. 6. Turn OFF TC gauge. (all Chamber) 7. Shut Off all CRYO pump. 8. Put both load lock OFFLINE. 9. Turn Off roughing pump. 10. Turn off Power circuit on main controller. 11. Turn off main breaker.