SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by...

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SOLID STATE PHYSICS MNT-510 PIEZOELECTRICS

Transcript of SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by...

Page 1: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

SOLID STATE PHYSICS MNT-510

PIEZOELECTRICS

Page 2: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric Effect

Piezoelectric Material will generate electric potential when subjected to some kind of mechanical stress.

Page 3: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

The direct Effect : Generator

•  Compression Effect: Decrease in volume and it has a voltage with the same polarity as the material

•  Tension Effect: Increase in volume and it has a voltage with opposite polarity as the material

F

F

Page 4: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Inverse Piezoelectric Effect

If the piezoelectric material is exposed to an electric field (voltage) it consequently lengthens or shortens proportional to the voltage.

Page 5: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

The Inverse Piezoelectric Effect

•  If the applied voltage has the same polarity then the material expands.

•  If the applied voltage has the opposite polarity then the material contracts.

Page 6: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

The History of Piezo

•  The name Piezo originates from the Greek word piezein, which means to squeeze or press.

•  The piezoelectric effect was first proven in 1880 by the brothers Pierre and Jacques Curie.

Page 7: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Developing theories…

•  Pierre and Jacques Curie predicted and demonstrated the piezoelectric effect using tinfoil, glue, wire, magnets, and a jeweler’s saw.

•  They showed that crystals of tourmaline, quartz, topaz, cane sugar, and Rochelle salt generate electrical polarization from mechanical stress.

•  The converse effect was mathematically derived by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later experimentally confirmed by the Curies.

Page 8: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric effect •  The linear relationship between stress Xik

applied to a piezoelectric material and resulting charge density Di is known as the direct piezoelectric effect and may be written as

• where dijk (C N−1) is a third-rank tensor of piezoelectric coefficients.

Di = dijkX jk

Page 9: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric effect •  Another interesting property of piezoelectric material

is they change their dimensions (contract or expand) when an electric field is applied to them.

•  The converse piezoelectric effect describes the strain that is developed in a piezoelectric material due to the applied electric field:

•  where t denotes the transposed matrix. •  The units of the converse piezoelectric coefficient are

(m V−1). €

xij = dkij Ek = dijkt Ek

Page 10: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric effect •  The piezoelectric coefficients, d for the direct

and converse piezoelectric effects are thermodynamically identical, i.e. ddirect = dconverse.

• Note that the sign of the piezoelectric charge Di and strain xij depends on the direction of the mechanical and electric fields, respectively.

•  The piezoelectric coefficient d can be either positive or negative.

Page 11: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric effect •  It is common to call a piezoelectric coefficient

measured in the direction of applied field the longitudinal coefficient, and that measured in the direction perpendicular to the field the transverse coefficient.

•  Other piezoelectric coefficients are known as shear coefficients.

•  Because the strain and stress are symmetrical tensors, the piezoelectric coefficient tensor is symmetrical with respect to the same indices, dijk = dikj .

Page 12: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectricity • The microscopic origin of the piezoelectric effect

is the displacement of ionic charges within a crystal structure.

•  In the absence of external strain, the charge distribution is symmetric and the net electric dipole moment is zero.

• However when an external stress is applied, the charges are displaced and the charge distribution is no longer symetric and a net polarization is created.

Page 13: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectricity •  In some cases a crystal posses a unique polar

axis even in the unstrained condition. •  This can result in a change of the electric charge

due to a uniform change of temperature. •  This is called the pyroelectric effect. • The direct piezoelectric effect is the basis for

force, pressure, vibration and acceleration sensors and

• The converse effect for actuator and displacement devices.

Page 14: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric and subgroup •  The elements of symmetry that are utilized by

crystallographers to define symmetry about a point in space, for example, the central point of unit cel, are ▫  a point (center) of symmetry, ▫  axes of rotation, ▫  mirror planes, and ▫  combinations of these.

• Utilizing these symmetry elements, all crystals can be divided into 32 different classes or point groups.

Page 15: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric and subgroup •  These 32 point groups are subdivisions of 7 basic crystal

systems: ▫  triclinic, ▫  monoclinic, ▫  orthorhombic, ▫  tetragonal, ▫  rhombohedral (trigonal), ▫  hexagonal, and ▫  cubic.

•  Of the 32 point groups, 21 classes do not possess a center of symmetry (a necessary condition for piezoelectricity to exist) and 20 of these are piezoelectric.

•  One class, although lacking a center of symmetry, is not piezoelectric because of other combined symmetry elements.

Page 16: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric and subgroup

32 Symmetry Point Groups

21 PG: Noncentrosymmetric 11 PG: Centrosymmetric

20 PG: Piezoelectric (Polarized under stress)

10 PG: Pyroelectric (Spontaneously polarized)

Subgroup Ferroelectric (Spontaneously Polarized, Revesible Polarization)

Page 17: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

How are piezoelectric ceramics made?

•  A traditional piezoelectric ceramic is perovskite crystal, each consisting of a small, tetravalent metal ion, usually titanium or zirconium, in a lattice of larger, divalent metal ions, usually lead or barium, and O2- ions.

•  Under conditions that confer tetragonal or rhombohedral symmetry on the crystals, each crystal has a dipole moment.

Page 18: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Polarization of piezoelectric •  Above a critical temperature, the Curie point, each

perovskite crystal exhibits a simple cubic symmetry with no dipole moment.

•  At temperatures below the Curie point, however, each crystal has tetragonal or rhombohedral symmetry and a dipole moment.

•  Adjoining dipoles form regions of local alignment called domains.

•  The alignment gives a net dipole moment to the domain, and thus a net polarization.

•  The direction of polarization among neighboring domains is random, however, so the ceramic element has no overall polarization.

Page 19: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

•  The domains in a ceramic element are aligned by exposing the element to a strong, direct current electric field, usually at a temperature slightly below the Curie point.

•  Through this polarizing (poling) treatment, domains most nearly aligned with the electric field expand at the expense of domains that are not aligned with the field, and the element lengthens in the direction of the field.

•  When the electric field is removed most of the dipoles are locked into a configuration of near alignment.

•  The element now has a permanent polarization, the remanent polarization, and is permanently elongated.

Polarization of piezoelectric

Page 20: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Electric dipoles in Weiss domains; (1) unpoled ferroelectric ceramic, (2) during and (3) after poling (piezoelectric ceramic)

Page 21: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectricity

Page 22: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Domain Wall Movement

Page 23: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezo Materials •  Some examples of practical piezo materials

are barium titanate, lithium niobate, polyvinyledene difluoride (PVDF), and lead zirconate titanate (PZT).

•  There are several different formulations of the PZT compound, each with different electromechanical properties.

Page 24: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

What can piezoelectric ceramics do?

•  Mechanical compression or tension on a poled piezoelectric ceramic element changes the dipole moment, creating a voltage.

•  Compression along the direction of polarization, or tension perpendicular to the direction of polarization, generates voltage of the same polarity as the poling voltage.

Generator and motor actions of a piezoelectric element

Page 25: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric ceramics- applications •  The principle is adapted to piezoelectric motors,

sound or ultrasound generating devices, and many other products.

• Generator action is used in fuel-igniting devices, solid state batteries, and other products;

• Motor action is adapted to piezoelectric motors, sound or ultrasound generating devices, and many other products.

Page 26: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Definition of Piezoelectric Coefficients and Directions

•  Orthogonal system describing the properties of a poled piezoelectric ceramic.

•  Axis 3 is the poling direction.

•  Because of the anisotropic nature of Piezo ceramics, effects are dependent on direction.

Page 27: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Definition of Piezoelectric Coefficients and Directions

•  To identify directions the axes, termed 1, 2, and 3, are introduced (analogous to X, Y, Z of the classical right hand orthogonal axial set).

•  The axes 4, 5 and 6 identify rotations (shear).

Page 28: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

•  The direction of polarization (3 axis) is established during the poling process by a strong electrical field applied between two electrodes.

•  For actuator applications the piezo properties along the poling axis are most essential (largest deflection).

•  The piezoelectric coefficients described here are not independent constants.

•  They vary with temperature, pressure, electric field, form factor, mechanical and electrical boundary conditions etc.

•  The coefficients only describe material properties under small signal conditions.

Page 29: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric materials are characterized by several coefficients: Examples are: •  dij: Strain coefficients [m/V]: strain developed (m/m) per electric

field applied (V/m) or (due to the sensor / actuator properties of Piezo material). Charge output coefficients [C/N]: charge density developed (C/m²) per given stress (N/m²).

•  gij: Voltage coefficients or field output coefficients [Vm/N]: open circuit electric field developed (V/m) per applied mechanical stress (N/m²) or (due to the sensor / actuator properties of Piezo material) strain developed (m/m) per applied charge density (C/m²).

•  kij: Coupling coefficients [no Dimensions]. The coefficients are energy ratios describing the conversion from mechanical to electrical energy or vice versa. k² is the ratio of energy stored (mechanical or electrical) to energy (mechanical or electrical) applied.

Page 30: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

• Other important parameters are the Young's modulus (describing the elastic properties of the material) and the dielectric constant (describing the capacitance of the material).

•  To link electrical and mechanical quantities double subscripts (i.e. dij) are introduced.

•  The first subscript gives the direction of the excitation,

•  the second describes the direction of the system response.

Page 31: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

•  There are two practical coupling modes exist; the −31 mode and the −33 mode.

•  In the −31 mode, a force is applied in the direction perpendicular to the poling direction, an example of which is a bending beam that is poled on its top and bottom surfaces.

•  d31 applies if the electric field is along the polarization axis (direction 3), but the strain is in the 1 axis (orthogonal to the polarization axis).

Page 32: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

•  In the −33 mode, a force is applied in the same direction as the poling direction, such as the compression of a piezoelectric block that is poled on its top and bottom surfaces.

•  d33 applies when the electric field is along the polarization axis (direction 3) and the strain (deflection) is along the same axis.

• Conventionally, the −31 mode has been the most commonly used coupling mode: however, the −31 mode yields a lower coupling coefficient, k, than the −33 mode.

Page 33: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Illustration of −33 mode and −31 mode operation for piezoelectric materials. (Figure from Roundy et al 2003, © 2003, Elsevier.)

Page 34: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

•  It was found that in a small force, low vibration level environment, the −31 configuration cantilever proved most efficient, but in a high force environment, such as a heavy manufacturing facility or in large operating machinery, a stack configuration would be more durable and generate useful energy.

•  Also found that the resonant frequency of a system operating in the −31 mode is much lower, making the system more likely to be driven at resonance in a natural environment, thus providing more power.

Page 35: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Schematic of the cross section of an active fiber composite (AFC) actuator. (Figure from Wilkie et al 2000.)

Page 36: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

•  In addition the superscripts "S, T, E, D" are introduced.

•  They describe an electrical or mechanical boundary condition.

Definition: S = strain = constant (mechanically clamped) T = stress = constant (not clamped) E = field = constant (short circuit) D = electrical displacement = constant (open circuit)

Page 37: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

•  Flexible piezoelectric materials are attractive for power harvesting applications because of their ability to withstand large amounts of strain.

•  Larger strains provide more mechanical energy available for conversion into electrical energy.

• A second method of increasing the amount of energy harvested from a piezoelectric is to utilize a more efficient coupling mode.

Page 38: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Sonic and Ultrasonic Applications

•  Sonar with Ultrasonic time-domain reflectometers

•  Materials testing to detect flaws inside cast metals and stone objects as well as measure elasticity or viscosity in gases and liquids

•  Compact sensitive microphones and guitar pickups.

•  Loudspeakers

Page 39: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Pressure Applications •  Transient pressure measurement to

study explosives, internal combustion engines (knock sensors), and any other vibrations, accelerations, or impacts.

•  Piezoelectric microbalances are used as very sensitive chemical and biological sensors.

•  Transducers are used in electronic drum pads to detect the impact of the drummer's sticks.

•  Energy Harvesting from impact on the ground

•  Atomic force and scanning tunneling microscopes.

•  Electric igniters and cigarette lighters

Page 40: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Consumer Electronics Applications

•  Quartz crystals resonators as frequency stabilizers for oscillators in all computers.

•  Phonograph pick-ups •  Accelerometers: In a

piezoelectric accelerometer a mass is attached to a spring that is attached to a piezoelectric crystal. When subjected to vibration the mass compresses and stretches the piezo electric crystal. (iPhone)

Page 41: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Motor Applications •  Piezoelectric elements can be used

in laser mirror alignment, where their ability to move a large mass (the mirror mount) over microscopic distances is exploited. By electronically vibrating the mirror it gives the light reflected off it a Doppler shift to fine tune the laser's frequency.

•  The piezo motor is viewed as a high-precision replacement for the stepper motor.

•  Traveling-wave motors used for auto-focus in cameras.

Page 42: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Piezoelectric Polymers •  the presence of permanent molecular dipoles;

•  the ability to orient or align the molecular dipoles;

•  the ability to sustain this dipole alignment once it is achieved; and

•  the ability of the material to undergo large strains when mechanically stressed.

Page 43: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Ref. http://www.cs.odu.edu/~mln/ltrs-pdfs/icase-2001-43.pdf

Page 44: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Important Properties of PVDF Property Units Reported Value

Melting C 174

Glass Transition C ~ -30

Density g/ cm3 1.8

Heat Capacity Joule/(g K) 1.9

Tensile Strength psi 78000

Serving Temperature Long Term

C 140

Dielectric Constant (60 Hz)

- 9

Dielectric Strength KV/mm 160

Volume Resistivity Ohm/cm 1 x 1014

Refractive Index 1.42

Page 45: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

PVDF Sensors

•  PVDF is piezoelectric and the voltage induced by bending PVDF films can be measured. The surface of the PVDF is coated with metal to allow electrical measurements.

•  PVDF is pyroelectric and readily absorbs thermal radiation in the range 1000-1200 cm-1. The voltage induced by exposing metalized PVDF films to thermal radiation can be measured.

•  By virtue of its piezoelectric properties PVDF possibly could be fabricated into a surface acoustic wave based sensing system.

Page 46: SOLID STATE PHYSICS MNT-510 - etu.edu.trnsankir.etu.edu.tr/nsankir/MNT_510_files/MNT510-8.pdf · by Gabriel Lippman in 1881 using fundamental thermodynamic principles and was later

Commercially available metal coated piezoelectric PVDF sensor elements